Substrate storage device
Patent Information
- Application Number
- CN202522605324.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2025-09-05
- Filing Date
- 2025-12-09
- Publication Date
- 2026-10-23
- Estimated Expiration
- 2035-12-09
AI Technical Summary
但上述设计可能会让晶圆更容易由盒体跳脱或脱离
[0017]本实用新型的功效在于,该限位块移动至该挡止位置时,其局部伸置于该容置区内并压制放置于该容置区内的基板,因此可以有效防止放置于该容置区内的基板脱离或滑出的情形。借助于上述结构设计,在将该上盖盖合于该承载盒上时,其会推动该限位块由该释放位置移动至该挡止位置以压制该基板,产生自动内扣的效果,在打开该上盖时,该限位块仍停留于该挡止位置,避免该上盖打开后,该基板因为倾斜或疏失而脱离该容置区。
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Figure CN224882629U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of accommodating devices, and in particular to a substrate storage and transportation device for transporting precision substrates such as wafers. Background Technology
[0002] Wafers are fragile and highly precise components, thus facing many challenges and problems during manufacturing, testing, packaging, and shipping. For example, excessive vibration or poor securing during transportation can cause wafers to slide and rub against each other within the container, resulting in scratches. In addition, wafers are extremely thin and fragile; even slight impacts or improper force can cause breakage or edge damage.
[0003] Furthermore, existing wafer housings, in order to reduce overall thickness, typically reduce the height of the surrounding retaining walls used to hold the wafer. However, this design may make it easier for the wafer to jump out or detach from the housing. Moreover, existing wafer housings lack a structure to prevent wafers from falling out when opened. Therefore, when the wafer housing is open, tilting or human error can easily cause the wafer to fall and break, resulting in loss.
[0004] Therefore, there is still room for improvement in balancing the thickness of the wafer housing with the stability of the wafer. Utility Model Content
[0005] Therefore, the purpose of this invention is to provide a substrate storage and transportation device that can produce a better positioning effect.
[0006] This utility model discloses a substrate storage and transportation device, comprising a carrier box, a top cover pivotally connected to the carrier box, and a plurality of limiting blocks disposed within the carrier box. The carrier box includes an outer frame, a receiving area surrounded by the outer frame, and a plurality of mounting areas disposed on the outer frame. The receiving area is used to receive at least one substrate. The top cover includes a cover body that can be opened and closed relative to the carrier box, and a plurality of pushing members disposed on the cover body and corresponding to the mounting areas. The limiting blocks are movable relative to the mounting areas between a release position and a stop position, and when the limiting blocks are in the release position, they do not overlap with the substrate in the receiving area. Specifically, the top cover closes to the carrier box, and the pushing members of the top cover can push the limiting blocks from the release position to the stop position, causing a portion of the limiting block to extend into the receiving area and press against the substrate placed in the receiving area.
[0007] Another technical aspect of this utility model is that each limiting block includes a main body, a limiting part extending laterally from the main body, at least one snap-fit part extending from the main body toward the mounting area, and a pushing part disposed on the main body. The pushing part has a pushing surface for the pusher of the top cover to push against. When each limiting block is in the blocking position, the limiting part extends into the receiving area.
[0008] Another technical means of this utility model is that during the process of the upper cover closing onto the carrier box along the first direction, the pushing member of the upper cover extends into the installation area of the carrier box along the first direction, and the pushing surface of each limiting block is inclined relative to the first direction, so that the limiting block can move from the release position to the stop position along the second direction, wherein the first direction is not parallel to the second direction.
[0009] Another technical aspect of this utility model is that each limiting block further includes at least one guide portion disposed at the end of the limiting portion, the guide portion having a guide slope that slopes from top to bottom toward the receiving area.
[0010] Another technical feature of this invention is that the pushing part also has a gripping surface, on which an anti-slip design is formed.
[0011] Another technical aspect of this utility model is that each of the limiting blocks further includes a positioning post disposed on the bottom surface of the main body, and each of the mounting areas has two positioning grooves spaced apart for limiting the positioning post. When each of the limiting blocks is in the release position and the stop position, the positioning post is limited to different positioning grooves.
[0012] Another technical aspect of this utility model is that there are two latching parts, and the two latching parts are located on opposite sides of the main body. Each mounting area also has two mounting grooves corresponding to the latching parts. The latching parts pass through the corresponding mounting grooves and are positioned in the mounting area.
[0013] Another technical aspect of this utility model is that there are two buckle parts, and each mounting area also has a mounting groove corresponding to the buckle part. The buckle part passes through the mounting groove and is positioned in the mounting area.
[0014] Another technical aspect of this utility model is that the number of the buckle parts is multiple and the multiple buckle parts are arranged in a ring at intervals. Each mounting area also has a mounting groove corresponding to the buckle part. After the buckle part passes through the mounting groove, it is positioned in the mounting area.
[0015] Another technical aspect of this invention is that each of the mounting areas has a stop portion for limiting the rotation angle of the limiting portion.
[0016] Another technical aspect of this utility model is that there are two limiting blocks, and the two limiting blocks are respectively disposed in the installation areas on opposite sides of the carrier box.
[0017] The advantage of this invention is that when the limiting block moves to the stopping position, it partially extends into the receiving area and presses down on the substrate placed in the receiving area, thus effectively preventing the substrate placed in the receiving area from detaching or sliding out. With the above structural design, when the top cover is closed onto the carrier box, it pushes the limiting block from the release position to the stopping position to press down on the substrate, producing an automatic inward-locking effect. When the top cover is opened, the limiting block remains in the stopping position, preventing the substrate from detaching from the receiving area due to tilting or carelessness after the top cover is opened. Attached Figure Description
[0018] Figure 1 This is a perspective view showing a first preferred embodiment of the substrate storage and transportation device of the present invention;
[0019] Figure 2 This is a partially enlarged cross-sectional view illustrating the shape of the limiting block in the first preferred embodiment, wherein the limiting block is in the release position;
[0020] Figure 3 This is a partially enlarged sectional view illustrating that the limit block is in the stopping position;
[0021] Figure 4 This is a partially enlarged view illustrating the structure of the limiting block and the installation area;
[0022] Figure 5 This is a magnified view illustrating another type of limiting block;
[0023] Figure 6 This is a partially enlarged sectional view illustrating the different types of limit blocks in the release position;
[0024] Figure 7 This is a partially enlarged sectional view illustrating the different types of limit blocks in the stopping position;
[0025] Figures 8(a) to 8(c) This is a flowchart illustrating the installation process of the limit block;
[0026] Figure 9 This is a perspective view showing a second preferred embodiment of the substrate storage and transportation device of the present invention;
[0027] Figure 10 This is a partially enlarged view illustrating the shape of the limiting block in the second preferred embodiment;
[0028] Figure 11 This is a partially enlarged top view illustrating the limiting block in the release position in the second preferred embodiment; and
[0029] Figure 12 This is a partially enlarged top view illustrating the position of the limiting block in the second preferred embodiment. Detailed Implementation
[0030] The features and technical content of this utility model will be clearly presented in the following detailed description of the preferred embodiments with reference to the accompanying drawings. Before the detailed description, it should be noted that similar elements are designated by the same reference numerals. The directional terms used in the following embodiments, such as up, down, left, right, front, back, bottom, and top, are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the present utility model.
[0031] See Figure 1 This is a first preferred embodiment of the substrate storage and transportation device of the present invention, comprising a carrier box 2, a top cover 3 pivotally connected to the carrier box 2, and a plurality of limiting blocks 4 disposed within the carrier box 2. The carrier box 2 includes an outer frame 21, a receiving area 22 surrounded by the outer frame 21, and a plurality of mounting areas 23 disposed on the outer frame 21. The receiving area 22 is used to receive at least one substrate 10. The top cover 3 includes a cover body 31 that can be opened and closed relative to the carrier box 2, and a plurality of pushing members 32 disposed on the cover body 31 and corresponding to the mounting areas 23. The limiting blocks 4 can be in a released position relative to the mounting areas 23. Figure 2 ) and the stopping position ( Figure 3 Move between ( ). For example, Figure 2 As shown, when the limiting block 4 is in the release position, it does not overlap with the substrate 10 within the receiving area 22. The upper cover 3 closes onto the carrier box 2, and the pusher 32 of the upper cover 3 can push the limiting block 4 from the release position to the stop position, causing a portion of the limiting block 4 to extend into the receiving area 22 and press against the substrate 10 placed within the receiving area 22. Figure 3 As shown.
[0032] Therefore, when the limiting block 4 moves to the stopping position, it partially extends into the receiving area 22 and presses down on the substrate 10 placed in the receiving area 22, thus effectively preventing the substrate 10 placed in the receiving area 22 from detaching or sliding out. The technical advantage of this structure is that it enables automatic activation of protection when the lid is closed, combines the closing action with the limiting function, and has a foolproof function, avoiding the risk caused by human negligence in not locking. This design can improve the protection capability of the substrate storage and transportation device when the lid is open, continuously maintain protection, and thus significantly reduce the loss caused by the substrate 10 being accidentally dropped. It is particularly suitable for the neat positioning and efficient and safe handling of thin, high-value substrates 10.
[0033] like Figure 1 As shown, in this embodiment, there are two limiting blocks 4, and the number of mounting areas 23 corresponds to the number of limiting blocks 4. The limiting blocks 4 are respectively disposed in the mounting areas 23 on opposite sides of the carrier box 2. (See reference...) Figure 4 and cooperate Figure 2Each limiting block 4 includes a body portion 41, a limiting portion 42 extending laterally from the body portion 41, at least one latching portion 43 extending from the body portion 41 toward the mounting area 23, and a pushing portion 44 disposed on the body portion 41. When each limiting block 4 is in the stopped position, the limiting portion 42 extends into the receiving area 22, and the latching portion 43 strengthens the stability of the limiting block 4 in the mounting area 23, preventing it from loosening; the limiting portion 42 can locally press the edge area of the substrate 10, avoiding damage to the main body of the substrate 10. In addition, the design of the pushing portion 44 allows the upper cover 3 to smoothly drive the limiting block 4, and makes the manual return operation faster. In one embodiment, the pushing portion 44 also has a pushing surface 441 for the pusher 32 of the upper cover 3 to push against, which not only reduces the resistance required for pushing and makes the operation smoother, but also effectively avoids the situation of jamming or misoperation of the mechanism during operation, thereby effectively preventing the limiting failure caused by mechanism malfunction. The pushing part 44 also has a gripping surface 442 opposite to the pushing surface 441. The gripping surface 442 has an anti-slip design, which significantly improves the stability of finger grip when the operator needs to manually reset the limiting block 4. The mounting area 23 also has a mounting groove 231. When the limiting block 4 is installed, the two L-shaped latches 43 pass through the mounting groove 231 and engage, keeping the limiting block 4 confined within the mounting area 23 and preventing it from detaching. The limiting block 30 achieves a self-guiding effect using its own geometry, allowing it to be precisely positioned along the predetermined axis of the mounting area 23 of the carrier box 2 without the need for additional guiding elements. In one embodiment, please refer to... Figure 3 and Figure 4 When the pusher 32 pushes the limit block 4 to the stop position, the mounting area 23 also has a groove 234 corresponding to the pusher 32 to accommodate the pusher 32 that has reached the stop position.
[0034] In one embodiment, the limiting block 4 further includes at least one guide portion 45 disposed at the end of the limiting portion 42, the guide portion 45 having a guide slope 451 that slopes downwards towards the receiving area 22. The guide slope 451 enhances the automatic positioning capability of the substrate 10 during placement, effectively guiding the substrate 10 to slide into the correct position and preventing displacement or improper placement. At the same time, this smooth guide slope 451 also reduces the risk of the substrate 10 being scratched by its edges during placement or removal, allowing users to quickly and safely complete the placement of the substrate S even if it is not perfectly aligned.
[0035] The following provides an operating method for opening and closing the aforementioned substrate storage and transportation device. The operating method includes a closing step and an opening step. The closing step involves placing the upper cover 3 onto the carrier box 2, causing the pusher 32 of the upper cover 3 to push the limiting block 4 from the release position. Figure 2 Move to the stop position. Figure 3The limiting block 4 extends partially into the receiving area 22 and presses down on the substrate 10 placed in the receiving area 22. When the top cover 3 is opened, the limiting block 4 remains in the blocking position.
[0036] The closing step involves simultaneously moving the limiting block 4 from the release position to the stop position while the top cover 3 is closing, thus pressing down on the substrate 10 and creating an automatic inward locking effect. This prevents the problem of forgetting to manually engage the limiting block 4. The opening step involves keeping the limiting block 4 in the stop position while the top cover 3 is opening, preventing it from automatically returning to the release position and causing the substrate 10 to tilt and detach from the receiving area 22 after the top cover 3 is opened. The operation also includes a removal step, where the limiting block 4, currently in the stop position, is manually pushed to the release position to remove the substrate 10 placed in the receiving area 22.
[0037] The operating method is described in detail below. To place the substrate into the substrate storage and transport device of this invention, the limiting block 4 must first be moved to the release position. The operator must manually push the pushing part 44 of the limiting block 4. For more details, please refer to... Figure 3 The operator must first open the top cover 3 and manually push the gripping surface 442 of the push part 44 to move the limiting block 4 closer to the edge of the outer frame 21. Figure 2 The release position is shown. When the limiting block 4 is in the release position, it does not overlap with the substrate 10 in the receiving area 22, and the substrate 10 can be placed in the receiving area 22 at this time. During the placement of the substrate 10, since the guide part 45 of each limiting block 4 is provided at the end of the limiting part 42, when the limiting block 4 is in the release position, the guide part 45 will be located in the outer area of the receiving area 22. Since the guide slope 451 on the guide part 45 is inclined from top to bottom towards the receiving area 22, it is convenient to guide the substrate 10 into the receiving area 22.
[0038] Once the substrate 10 is properly placed in the receiving area 22, the closing step can be performed. The closing step involves the upper cover 3 closing while simultaneously pushing the limiting block 4 from the release position to the stop position to press down the substrate 10. More specifically, as... Figure 2 As shown, during the process of the upper cover 3 closing onto the carrier box 2 along the first direction D1, the pushing member 32 of the upper cover 3 extends into the mounting area 23 of the carrier box 2 along the first direction D1. The pushing surface 441 of each limiting block 4 is inclined relative to the first direction D1, so that the limiting block 4 can be released from the release position along the second direction D2. Figure 2 Move to the stop position. Figure 3 ), where the first direction D1 is not parallel to the second direction D2. For example... Figure 3As shown, when each limiting block 4 moves to the stopping position, the limiting part 42 extends into the receiving area 22 and presses down on the substrate 10 placed in the receiving area 22. It should be noted that when the limiting block 4 is in the stopping position, the limiting part 42 presses down on the ineffective area (not exceeding 3mm) around the substrate 10, so it will not cause damage to the substrate 10.
[0039] When removing substrate 10, the opening step is performed first. In this step, the upper cover 3 is opened while the limiting block 4 remains in the stop position. That is, during the opening process, the limiting block 4 remains in the stop position and does not automatically return to the release position. This prevents substrate 10 from tilting and detaching from the receiving area 22 after the upper cover 3 is opened. This operation method incorporates two safety mechanisms (automatic locking + manual unlocking), effectively preventing the traditional operational error of "substrate easily sliding out due to removing the upper cover." By requiring the operator to perform a secondary confirmation (manual unlocking), it ensures that substrate 10 is always in a safe and controlled state before being removed, significantly improving operational safety. After the opening step is completed, the removal step is performed by manually pushing the limiting block 4, which is in the stop position, to the release position, and then removing substrate 10 from the receiving area 22. That is, the operator manually pushes the gripping surface 442 of the push part 44 to move the limiting block 4 closer to the edge of the outer frame 21 and to the release position, so that the limiting block 4 exits the receiving area 22 and does not overlap with the substrate 10 in the receiving area 22. At this time, the substrate 10 can be taken out from the receiving area 22.
[0040] See Figure 2 and Figure 3 In the first preferred embodiment, the limiting block 4 prevents unintentional sliding by means of interference resistance between itself and the mounting area 23 of the carrier box 2. More specifically, the size of the opening of the mounting groove 231 in the mounting area 23 is used to limit the limiting block 4 to only move back and forth, and the limiting block 4 is made of a relatively hard material such as ABS or PC to generate greater friction to avoid unintentional sliding.
[0041] See Figure 5 and Figure 6 This is another implementation of limit block 4, such as... Figure 6 As shown, in this embodiment, each limiting block 4 further includes a positioning post 46 disposed on the bottom surface of the main body 41, and each mounting area 23 has two spaced positioning grooves 232 for limiting the positioning post 46. With the above design, each limiting block 4 is in the release position (…). Figure 6 ) and the stopping position ( Figure 7When the positioning post 46 is in position, it is confined within different positioning grooves 232. In this embodiment, the limiting block 4 is made of a material with good elasticity, such as PE or TPE, so that the positioning post 46 retains a slight compressive elasticity, which is beneficial to the smooth movement between different positioning grooves 232. This design further ensures the positioning effect of the limiting block 4 when it moves to the release position or the stop position.
[0042] Additionally, referring to Figure 8(a), in this embodiment, each limiting block 4 has two latching parts 43, and each mounting area 23 also has two mounting slots 231 corresponding to the latching parts 43. When the limiting block 4 is to be assembled onto the carrier box 2, as shown in Figure 8(b), the limiting block 4 is pressed down, and then, as shown in Figure 8(c), the latching parts 43 pass through the corresponding mounting slots 231 and are positioned within the mounting area 23. During the process of passing through the corresponding mounting slots 231, the latching parts 43 are restricted by the structure of the mounting area 23 and will first retract inward and then spring back, as shown by the arrow in Figure 8(b), to engage within the mounting slots 231. A gap G of approximately 1 mm is reserved between the latching parts 43 and the main body 41 to allow the latching parts 43 room to move, facilitating the installation process.
[0043] See Figure 9 and Figure 10 This is a second preferred embodiment of the substrate storage and transportation device of the present invention. The similarities to the first preferred embodiment will not be repeated here, but the difference lies in that: in this preferred embodiment, the limiting block 4 is of a rotating type and includes a body portion 41, a limiting portion 42 extending laterally from the body portion 41, at least one latching portion 43 extending from the body portion 41 toward the mounting area 23, and a pushing portion 44 disposed on the body portion 41. The pushing portion 44 has a pushing surface 441 for the pusher 32 of the upper cover 3 to push against. The latching portions 43 are multiple and arranged in a ring at intervals. Each mounting area 23 also has a mounting groove 231 corresponding to the latching portion 43, and the latching portion 43 passes through the mounting groove 231 and is positioned within the mounting area 23. Each mounting area 23 also has a stop portion 233 for limiting the rotation angle of the limiting portion 42.
[0044] This preferred embodiment can also perform the aforementioned closing, opening, and removal steps, so that the limiting block 4 can be in the release position relative to the mounting area 23. Figure 11 ) and the stopping position ( Figure 12 The upper cover 3 moves between the upper cover and the carrier box 2. During the closing process, as the upper cover 3 closes onto the carrier box 2, the pusher 32 of the upper cover 3 has an inclined surface 321 corresponding to the pushing surface 441, causing the pushing surface 441 to rotate along the inclined surface 321. This rotates the limiting block 4, causing the limiting part 42 of the limiting block 4 to extend into the receiving area 22 and press against the substrate 10 placed in the receiving area 22. Figure 12As shown. The opening step involves opening the top cover 3 while the limiting block 4 remains in the stop position. After the opening step is completed, the removal step is performed by manually pushing the limiting part 42 of the limiting block 4 until the limiting part 42 touches the stop part 233, allowing the limiting block 4 to exit the receiving area 22 without overlapping with the substrate 10 within the receiving area 22, thus moving it to the release position. Figure 11 As shown. In addition to achieving the same effects as the first preferred embodiment, the second preferred embodiment also features quick assembly, a more compact size, and offers another style to choose from.
[0045] In summary, the substrate storage and transportation device of this utility model, when the limiting block 4 moves to the blocking position, partially extends into the receiving area 22 and presses down the substrate 10 placed in the receiving area 22, thus effectively preventing the substrate 10 placed in the receiving area 22 from detaching or sliding out. During operation, the closing step pushes the limiting block 4 from the release position to the blocking position to press down the substrate 10, producing an automatic inward locking effect. During the opening step, the limiting block 4 remains in the blocking position, preventing the substrate 10 from detaching from the receiving area 22 due to tilting or carelessness after the top cover 3 is opened.
[0046] The above description is merely a preferred embodiment of the present utility model and should not be construed as limiting the scope of the present utility model. Any simple equivalent changes and modifications made in accordance with the scope of the claims and description of the present utility model shall still fall within the scope of the present utility model patent.
[0047] [List of Labels in the Attached Image]
[0048] 10 substrate
[0049] 2 Carrier Box
[0050] 21 Outer Frame
[0051] 22. Storage Area
[0052] 23 Installation Area
[0053] 231 Mounting Slot
[0054] 232 Positioning Ditch
[0055] 233 Stop section
[0056] 234 Groove
[0057] 3. Top Cover
[0058] 31. Cover
[0059] 32 Pushing components
[0060] 4 limit blocks
[0061] 41 Body part
[0062] 42 Limiting section
[0063] 43. Buckle section
[0064] 44 Pushing section
[0065] 441 Pushing surface
[0066] 442 Grip surface
[0067] 443 Anti-slip design
[0068] 45 Guiding Section
[0069] 451 Guide ramp
[0070] 46 Positioning Posts
[0071] D1 First Direction
[0072] D2 Second Direction
[0073] G gap.
Claims
1. A substrate storage and transportation device, characterized in that, Include: A carrier box includes an outer frame, a receiving area surrounded by the outer frame, and a plurality of mounting areas disposed on the outer frame, wherein the receiving area is used to receive at least one substrate; The top cover includes a cover body that can be opened and closed relative to the carrier box, and a plurality of push members disposed on the cover body and corresponding to the mounting area; and Multiple limiting blocks are respectively disposed in the mounting area of the carrier box and can move between a release position and a stop position relative to the mounting area. When the limiting block is in the release position, it does not overlap with the substrate in the receiving area. The upper cover is fitted onto the carrier box, and the pusher of the upper cover can push the limiting block from the release position to the stop position, so that a portion of the limiting block extends into the receiving area and presses the substrate placed in the receiving area.
2. The substrate storage and transportation device according to claim 1, characterized in that, Each of the limiting blocks includes a body portion, a limiting portion extending laterally from the body portion, at least one snap-fit portion extending from the body portion toward the mounting area, and a pushing portion disposed on the body portion. The pushing portion has a pushing surface for the pusher of the top cover to push against. When each of the limiting blocks is in the blocking position, the limiting portion extends into the receiving area.
3. The substrate storage and transportation device according to claim 2, characterized in that, As the top cover closes onto the carrier box along the first direction, the pushing member of the top cover extends into the mounting area of the carrier box along the first direction, and the pushing surface of each limiting block is inclined relative to the first direction, so that the limiting block moves from the release position to the blocking position along the second direction, wherein the first direction is not parallel to the second direction.
4. The substrate storage and transportation device according to claim 2, characterized in that, Each of the limiting blocks further includes at least one guide portion disposed at the end of the limiting portion, the guide portion having a guide slope that slopes downward toward the receiving area.
5. The substrate storage and transportation device according to claim 2, characterized in that, The pushing part also has a gripping surface, on which an anti-slip design is formed.
6. The substrate storage and transportation device according to any one of claims 2 to 5, characterized in that, Each of the limiting blocks further includes a positioning post disposed on the bottom surface of the main body. Each of the mounting areas has two positioning grooves spaced apart for limiting the positioning post. When each of the limiting blocks is in the release position and the stop position, the positioning post is limited to different positioning grooves.
7. The substrate storage and transportation device according to claim 6, characterized in that, The number of the latching parts is two, and the two latching parts are located on opposite sides of the main body. Each mounting area also has two mounting slots corresponding to the latching parts. The latching parts pass through the corresponding mounting slots and are positioned in the mounting area.
8. The substrate storage and transportation device according to any one of claims 2 to 5, wherein, The number of the latching parts is two, and each of the mounting areas has a mounting groove corresponding to the latching part. The latching part passes through the mounting groove and is positioned in the mounting area.
9. The substrate storage and transportation device according to claim 2, characterized in that, The number of the latching parts is multiple and the multiple latching parts are arranged in a ring at intervals. Each of the mounting areas has a mounting groove corresponding to the latching part. After passing through the mounting groove, the latching part is positioned in the mounting area.
10. The substrate storage and transportation device according to claim 9, characterized in that, Each of the mounting areas also has a stop for limiting the rotation angle of the limiting portion.
11. The substrate storage and transportation device according to claim 1, characterized in that, The number of limiting blocks is two, and the two limiting blocks are respectively disposed in the installation areas on opposite sides of the carrier box.