A high-efficiency stable indium tin oxide material sputtering machine

Abstract

The utility model relates to a kind of high-efficiency stable indium tin oxide material sputtering machine, including base, sputtering machine main body and continuous component, continuous component includes the adjusting structure being installed in horizontal shift column interior, the closure plate being installed in horizontal shift column front side, the support plate fixedly welded in the one side of closure plate and the support structure being installed in the top of support plate, through suction cup group adsorption glass substrate, through dismounting column to drive reset plate to move, reset plate extrudes reset spring, reset plate drives limit post to move, the relative position of limit post and limit hole is controlled, and then the relative position of positioning block and positioning groove is controlled, the dismounting between positioning seat and positioning plate is conveniently realized, the suction cup seat is conveniently disassembled as a whole, when sputtering work is carried out to a glass substrate, the glass substrate to be processed is placed on the top of new suction cup seat, after sputtering is completed, suction cup seat is directly replaced, improve work efficiency, and glass substrate does not need to be disassembled with time and effort.

Description

Technical Field

[0001] This utility model relates to the field of sputtering machine technology, and in particular to a high-efficiency and stable indium tin oxide sputtering machine. Background Technology

[0002] Indium tin oxide (ITO) sputtering machine is a specialized coating equipment that uses the principle of magnetron sputtering to deposit ITO target atoms onto the surface of a substrate in a vacuum environment, thereby preparing a transparent conductive thin film.

[0003] A search revealed a low-temperature deposition apparatus for flexible substrate ITO films (publication number CN203487223U). This apparatus comprises a substrate winding mechanism capable of both forward and reverse rotation, an ion source, and an unbalanced intermediate-frequency magnetron sputtering mechanism, each housed within a container. The ion source is located outside the unwinding assembly of the substrate winding mechanism, and the unbalanced intermediate-frequency magnetron sputtering mechanism is located outside the main roller of the substrate winding mechanism. A high-vacuum pump is connected externally to the container, a workpiece conveying mechanism is connected externally to the input end of the substrate winding mechanism, and a heat exchange mechanism is connected externally to one end of the main roller of the substrate winding mechanism. This invention achieves high-quality flexible substrate ITO film deposition at low temperatures, resulting in high-quality products with a wide range of applications.

[0004] The device in the disclosed patent uses an indium tin oxide sputtering machine, but during operation, it requires time-consuming and laborious disassembly and assembly between the glass substrate and the suction cup, which affects the continuity of work, resulting in low work efficiency and low practicality. Utility Model Content

[0005] In response to the technical problems in existing patents, such as the time-consuming and laborious disassembly and assembly of glass substrates and suction cups during the operation of indium tin oxide sputtering machines, which affects the continuity of work, has low efficiency and limited practicality, this utility model provides a high-efficiency and stable indium tin oxide sputtering machine.

[0006] The technical solution adopted in this utility model is: a high-efficiency and stable indium tin oxide sputtering machine, comprising:

[0007] The base has a horizontal sliding column fixedly welded to its top;

[0008] The sputtering machine body is mounted on top of the base;

[0009] A continuous assembly is installed on the front side of the transverse column, and the continuous assembly is used to adjust the position of the glass substrate and to assemble and disassemble it.

[0010] The continuous assembly includes an adjustment structure installed inside the transverse column, a sealing plate installed on the front side of the transverse column, a support plate fixedly welded to one side of the sealing plate, and a support structure installed on the top of the support plate.

[0011] Furthermore, an adjustment groove is provided on the front side of the transverse column, and an adjustment cavity is provided on one side of the adjustment groove. The adjustment structure includes an adjustment motor installed inside the adjustment cavity by bolts, a threaded rod with both ends rotatably installed on the inner side wall of the adjustment groove and fixedly installed on the output shaft of the adjustment motor, a threaded ring threadedly engaged with the threaded rod, a threaded block fixedly welded to one side of the threaded ring, and an auxiliary plate fixedly welded to one side of the threaded block. The closing plate is fixedly welded to one side of the auxiliary plate.

[0012] Furthermore, the supporting structure includes a positioning seat fixedly welded to the top of the supporting plate, a disassembly component installed inside the positioning seat, a positioning plate installed on the top of the positioning seat, and a suction cup seat fixedly welded to the top of the positioning plate.

[0013] Furthermore, the top of the positioning seat is provided with a positioning groove, and a reset groove is provided on one side of the positioning groove. The disassembly and assembly components include a reset plate fused to the inner wall of the reset groove by a reset spring, a limiting post and a disassembly and assembly post fixedly welded to one side of the reset plate, and a positioning block fixedly welded to the bottom of the positioning plate.

[0014] Furthermore, the positioning block cooperates with the positioning groove, and a limiting hole is formed on the positioning block, which cooperates with the limiting post.

[0015] Furthermore, a suction cup assembly is installed on the top of the suction cup base.

[0016] The beneficial effects of this utility model are:

[0017] The glass substrate is held in place by a suction cup assembly. The disassembly and assembly column moves the reset plate, which in turn compresses the reset spring. This reset plate then moves the limiting column, controlling the relative position of the limiting column and the limiting hole. This, in turn, controls the relative position of the positioning block and the positioning groove. This facilitates the disassembly and assembly of the positioning seat and the positioning plate, as well as the overall disassembly and assembly of the suction cup seat. When sputtering a glass substrate, the substrate to be processed can be placed on top of a new suction cup seat. After sputtering, the suction cup seat can be directly replaced, improving work efficiency and eliminating the need for time-consuming and laborious disassembly and assembly of the glass substrate. This ensures continuous work and is highly practical. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0019] Figure 2 This is a three-dimensional structural diagram of the continuous component in this utility model;

[0020] Figure 3 This is a three-dimensional structural diagram of the disassembled support structure in this utility model;

[0021] Figure 4 This is a three-dimensional structural diagram of the disassembly and assembly parts and the positioning plate in this utility model.

[0022] The diagram is marked as follows:

[0023] 1. Base; 2. Horizontal sliding column;

[0024] 3. Sputtering machine body;

[0025] 4. Continuous assembly; 401. Adjustment structure; 4011. Adjustment motor; 4012. Threaded rod; 4013. Threaded ring; 4014. Threaded block; 4015. Auxiliary plate; 402. Sealing plate; 403. Support plate; 404. Support structure; 4041. Positioning seat; 4042. Assembly / disassembly parts; 4043. Positioning plate; 4044. Suction cup seat;

[0026] 5. Positioning groove; 6. Reset spring; 7. Reset plate; 8. Limiting post; 9. Assembly / disassembly post; 10. Positioning block; 11. Limiting hole; 12. Suction cup assembly. Detailed Implementation

[0027] In the description of this utility model, it should be noted that the terms "front", "up", "down", "left", "right", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] The following is in conjunction with the appendix Figure 1-4 The present invention will be further described below.

[0030] To address the problems existing in the background art, this application proposes the following technical solution:

[0031] A high-efficiency and stable indium tin oxide sputtering machine includes: a base 1, a sputtering machine body 3, and a continuous assembly 4;

[0032] A transverse column 2 is fixedly welded to the top of the base 1;

[0033] The main body 3 of the sputtering machine is mounted on top of the base 1.

[0034] like Figure 1-4 As shown, the continuous assembly 4 is installed on the front side of the transverse column 2. The continuous assembly 4 is used to adjust the position of the glass substrate and to assemble and disassemble it.

[0035] The continuous component 4 includes an adjustment structure 401 installed inside the transverse column 2, a closing plate 402 installed on the front side of the transverse column 2, a support plate 403 fixedly welded to one side of the closing plate 402, and a support structure 404 installed on the top of the support plate 403. An adjustment groove is provided on the front side of the transverse column 2, and an adjustment cavity is provided on one side of the adjustment groove. The adjustment structure 401 includes an adjustment motor 4011 installed inside the adjustment cavity by bolts, a threaded rod 4012 with both ends rotatably installed on the inner side wall of the adjustment groove and fixedly installed on the output shaft of the adjustment motor 4011, a threaded ring 4013 threadedly engaged with the threaded rod 4012, a threaded block 4014 fixedly welded to one side of the threaded ring 4013, and an auxiliary plate 4015 fixedly welded to one side of the threaded block 4014. The closing plate 402 is fixedly welded to one side of the auxiliary plate 4015.

[0036] Furthermore, the support structure 404 includes a positioning seat 4041 fixedly welded to the top of the support plate 403, a disassembly component 4042 installed inside the positioning seat 4041, a positioning plate 4043 installed on the top of the positioning seat 4041, and a suction cup seat 4044 fixedly welded to the top of the positioning plate 4043.

[0037] Furthermore, the top of the positioning seat 4041 is provided with a positioning groove 5, and a reset groove is provided on one side of the positioning groove 5. The disassembly and assembly component 4042 includes a reset plate 7 fused to the inner wall of the reset groove by a reset spring 6, a limiting post 8 and a disassembly and assembly post 9 fixedly welded to one side of the reset plate 7, and a positioning block 10 fixedly welded to the bottom of the positioning plate 4043.

[0038] Furthermore, the positioning block 10 cooperates with the positioning groove 5, and a limiting hole 11 is provided on the positioning block 10, which cooperates with the limiting post 8.

[0039] Furthermore, the suction cup base 4044 is equipped with a suction cup assembly 12 on its top.

[0040] Working principle: During use, the motor 4011 drives the threaded rod 4012 to rotate, the threaded rod 4012 drives the threaded ring 4013 to move, the threaded ring 4013 drives the threaded block 4014 to move, the threaded block 4014 drives the closing plate 402 to move through the auxiliary plate 4015, the closing plate 402 drives the support plate 403 to move, thereby controlling the support structure 404 to enter and exit the sputtering machine body 3;

[0041] The glass substrate is held in place by the suction cup assembly 12. The reset plate 7 is moved by the disassembly and assembly column 9. The reset plate 7 compresses the reset spring 6, which in turn moves the limiting column 8. The relative position of the limiting column 8 and the limiting hole 11 is controlled, thereby controlling the relative position of the positioning block 10 and the positioning groove 5. This facilitates the disassembly and assembly of the positioning seat 4041 and the positioning plate 4043, and the overall disassembly and assembly of the suction cup seat 4044. When sputtering a glass substrate, the substrate to be processed can be placed on top of the new suction cup seat 4044. After sputtering, the suction cup seat 4044 can be directly replaced, improving work efficiency and eliminating the need for time-consuming and laborious disassembly and assembly of the glass substrate. This ensures continuous work and is highly practical.

[0042] All standard parts used in this utility model can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0043] Although embodiments of the present invention have been shown and described, the scope of the present invention will be defined by the appended claims and their equivalents for those skilled in the art.

Claims

1. A high-efficiency and stable indium tin oxide sputtering machine, characterized in that, include: The base (1) has a transverse column (2) fixedly welded to the top of the base (1); The sputtering machine body (3) is mounted on the top of the base (1); A continuous assembly (4) is installed on the front side of the transverse column (2). The continuous assembly (4) is used to adjust the position of the glass substrate and to assemble and disassemble it. The continuous assembly (4) includes an adjustment structure (401) installed inside the transverse column (2), a sealing plate (402) installed on the front side of the transverse column (2), a support plate (403) fixedly welded to one side of the sealing plate (402), and a support structure (404) installed on the top of the support plate (403).

2. The high-efficiency and stable indium tin oxide sputtering machine according to claim 1, characterized in that, The front side of the transverse column (2) is provided with an adjustment groove, and the side of the adjustment groove is provided with an adjustment cavity. The adjustment structure (401) includes an adjustment motor (4011) installed inside the adjustment cavity by bolts, a threaded rod (4012) with both ends rotatably installed on the inner side wall of the adjustment groove and fixedly installed on the output shaft of the adjustment motor (4011), a threaded ring (4013) threadedly engaged on the threaded rod (4012), a threaded block (4014) fixedly welded to one side of the threaded ring (4013), and an auxiliary plate (4015) fixedly welded to one side of the threaded block (4014). The closing plate (402) is fixedly welded to one side of the auxiliary plate (4015).

3. The high-efficiency and stable indium tin oxide sputtering machine according to claim 1, characterized in that, The supporting structure (404) includes a positioning seat (4041) fixedly welded to the top of the supporting plate (403), a disassembly component (4042) installed inside the positioning seat (4041), a positioning plate (4043) installed on the top of the positioning seat (4041), and a suction cup seat (4044) fixedly welded to the top of the positioning plate (4043).

4. The high-efficiency and stable indium tin oxide sputtering machine according to claim 3, characterized in that, The top of the positioning seat (4041) is provided with a positioning groove (5), and a reset groove is provided on one side of the positioning groove (5). The disassembly and assembly component (4042) includes a reset plate (7) fused to the inner wall of the reset groove by a reset spring (6), a limiting post (8) and a disassembly and assembly post (9) fixedly welded to one side of the reset plate (7), and a positioning block (10) fixedly welded to the bottom of the positioning plate (4043).

5. The high-efficiency and stable indium tin oxide sputtering machine according to claim 4, characterized in that, The positioning block (10) cooperates with the positioning groove (5), and a limiting hole (11) is provided on the positioning block (10), which cooperates with the limiting post (8).

6. The high-efficiency and stable indium tin oxide sputtering machine according to claim 3, characterized in that, The suction cup base (4044) is equipped with a suction cup assembly (12) on its top.

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