Planet carrier turntable

Abstract

The utility model relates to the technical field of storage, disclose planet carrier turntable, including base, base and rotation structure, base and base relative interval setting, rotation structure sets up between base and base, and rotation structure includes fixed part and rotator, fixed part sets up on base, rotator rotation setting is in fixed part, and is connected with base to rotate and connects base and base, wherein, the installation portion is opened to base, and the installation portion is suitable for installing planet carrier, the utility model can avoid the situation that the hand and planet carrier directly contact, and cause cross -contamination, simultaneously, can also improve the stability when planet carrier rotates, be favorable to improve the stability and security when planet carrier rotates, avoid causing economic loss.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a planetary carrier turntable. Background Technology

[0002] Evaporation deposition machine principle: The planetary carrier containing the wafer is installed on the top of the evaporation deposition machine cavity. Under vacuum conditions, a certain heating method is used to melt and evaporate the evaporation coating material, and the evaporation atoms or molecules are deposited on the substrate surface, which is the process of vapor condensation, nucleation, nucleus growth, and formation of continuous film.

[0003] Currently, wafer loading and unloading operations mainly rely on rotating planetary carriers. This involves mounting the planetary carrier on a base and rotating it manually. However, this method of rotation involves human contact, and since the planetary carrier contains metal, there is a risk of cross-contamination. Furthermore, this rotation method causes the planetary carrier to swing up and down during loading and unloading, which not only affects operational efficiency but also increases the risk of wafers falling off or being thrown away, resulting in significant economic losses. Utility Model Content

[0004] This invention provides a planetary carrier turntable to solve the problems of cross-contamination risk, low efficiency, and poor stability in the current planetary carrier rotation method.

[0005] In a first aspect, this utility model provides a planetary carrier turntable, comprising: A base and a base, wherein the base and the base are arranged at a distance from each other; A rotating structure is disposed between the base and the pedestal. The rotating structure includes a fixing member and a rotating member. The fixing member is disposed on the base, and the rotating member is rotatably disposed on the fixing member and connected to the pedestal to rotatably connect the pedestal and the base. The base has a mounting section, which is suitable for mounting a planetary carrier.

[0006] Beneficial effects: The rotating structure between the base and the pedestal allows the pedestal to rotate relative to the base, enabling the planetary carrier placed on the pedestal to rotate synchronously with it. This prevents human hands from coming into contact with the planetary carrier, thus avoiding cross-contamination. Furthermore, since the planetary carrier is specifically placed within the mounting section on the pedestal, the pedestal can limit and provide comprehensive support for the planetary carrier, preventing it from falling off or wobbling during rotation. This improves the stability and safety of the planetary carrier during rotation, avoiding economic losses.

[0007] In one optional embodiment, both the fixing member and the rotating member are hollow annular structures, the through hole on the fixing member is configured as a rotating part, and the rotating member is rotatably disposed in the rotating part to rotatably connect the fixing member and the rotating member.

[0008] Beneficial effects: By setting both the fixing component and the rotating component to be hollow annular structures, the through hole on the fixing component is configured as a rotating part, and the rotating component is rotatably set in the rotating part, so that the fixing component and the rotating component can be rotatably connected, thereby rotatably connecting the base and the pedestal.

[0009] In one alternative embodiment, when the rotating member is installed inside the rotating part, the outer wall surface of the rotating member abuts against the inner wall surface of the fixing member.

[0010] Beneficial effects: By installing the rotating component inside the rotating part, the outer wall surface of the rotating component abuts against the inner wall surface of the fixed component. Thus, when the rotating component rotates relative to the fixed component inside the rotating part, the outer wall surface of the rotating component and the inner wall surface of the fixed component can contact each other, thereby improving the stability of the rotating component's rotation within the rotating part, and further improving the stability of the base's rotation relative to the base.

[0011] In one optional embodiment, a sliding portion is provided on the outer wall surface of the rotating component, and a sliding engagement portion is provided on the inner wall surface of the fixing component. When the rotating component is installed in the rotating portion, the sliding portion is slidably disposed in the sliding engagement portion.

[0012] Beneficial effects: By providing a sliding part on the outer wall of the rotating part and a sliding mating part on the inner wall of the fixed part, the sliding part and the sliding mating part in this embodiment are a sliding block and a sliding mating groove, respectively. When the rotating part is installed in the rotating part, the sliding part can be slidably disposed in the sliding mating part. Thus, when the rotating part rotates relative to the fixed part, the sliding part can slide in the sliding mating part, thereby further improving the rotational stability of the rotating part. In addition, the sliding part disposed in the sliding mating part can also improve the connection strength between the rotating part and the fixed part.

[0013] In one optional embodiment, a first receiving portion is provided on the outer wall surface of the rotating component, and a second receiving portion is provided on the inner wall surface of the fixing component. When the rotating component is installed in the rotating portion, the first receiving portion and the second receiving portion are connected. It also includes a number of rolling elements, all of which are spaced apart between the first receiving portion and the second receiving portion, and the peripheral wall surface of any of the rolling elements abuts against the inner wall surface of the cavity of the receiving portion.

[0014] Beneficial effects: By using a number of rolling elements, which are balls in this embodiment, between the rotating component and the fixed component, a first receiving portion is provided on the outer wall of the rotating component, and a second receiving portion is provided on the inner wall of the fixed component. In this embodiment, the first receiving portion and the second receiving portion are respectively a first receiving groove and a second receiving groove. All the rolling elements are spaced apart between the first receiving portion and the second receiving portion, and the peripheral wall of each rolling element abuts against the inner wall of the receiving portion. In this way, when the rotating component rotates relative to the rotating component, all the rolling elements can roll in the first receiving groove and the second receiving groove, thereby reducing the friction between the rotating component and the fixed component and enabling the rotating component to rotate more smoothly.

[0015] In an alternative embodiment, a fastening structure is further included, the fastening structure comprising a plurality of first fasteners, any one of the first fasteners being adapted to pass through the base and the rotating member to connect the base and the rotating member.

[0016] Beneficial effects: By setting a fastening structure between the base and the rotating structure, the fastening structure specifically includes several first fasteners, which are first screws in this embodiment. Each first fastener can penetrate the base and the rotating component, thereby connecting the base and the rotating component together. As a result, when the rotating component rotates, the base can rotate synchronously with the rotating component.

[0017] In one optional embodiment, the base is provided with a plurality of first connecting portions, and the rotating component is provided with a plurality of second connecting portions corresponding one-to-one with the first connecting portions. The first fastener is adapted to pass through the first connecting portions and the second connecting portions in sequence.

[0018] Beneficial effects: Through a plurality of first connecting parts opened on the base and a plurality of second connecting parts opened on the rotating part, the first connecting parts and the second connecting parts in this embodiment are respectively the first connecting hole and the second connecting hole. The second connecting parts on the rotating part and the first connecting parts on the base are arranged in a one-to-one correspondence, so that the first fastener can pass through the first connecting parts and the second connecting parts in sequence, thereby enabling the first fastener to connect the rotating part and the base together.

[0019] In one alternative embodiment, the fastening structure further includes a plurality of second fasteners, any one of which is adapted to pass through the base and the fastener to connect the base and the fastener.

[0020] Beneficial effects: The fastening structure also includes several second fasteners, which are second screws in this embodiment. Each second fastener can penetrate the base and the fixing member, thereby connecting the base and the fixing member together. The fixing member can then be fixed by the base, preventing the fixing member from rotating synchronously with the rotating member due to the friction between it and the rotating member.

[0021] In one optional embodiment, the base is provided with a plurality of third connecting portions, and the fastener is provided with a plurality of fourth connecting portions corresponding one-to-one with the third connecting portions. The second fastener is adapted to pass through the third connecting portions and the fourth connecting portions in sequence.

[0022] Beneficial effects: Through a plurality of third connecting portions provided on the base and a plurality of fourth connecting portions provided on the fastener, the third connecting portions and the fourth connecting portions in this embodiment are respectively the third connecting hole and the fourth connecting hole. The fourth connecting portions on the fastener and the third connecting portions on the base are provided in a one-to-one correspondence, so that the second fastener can pass through the third connecting portions and the fourth connecting portions in sequence, thereby enabling the second fastener to connect the base and the fastener together.

[0023] In one alternative embodiment, the size of the base is larger than the size of the pedestal; the thickness of the rotating component is greater than the thickness of the fixing component.

[0024] Beneficial effects: By setting the size of the base to be larger than that of the base, when the base and the base are connected by a rotating structure, the outer edge of the base can extend beyond the outer edge of the base, thus making it easier for the operator to rotate the base; by setting the thickness of the rotating part to be greater than that of the fixed part, when the base is rotated, the fixed part near the top surface of the base will not interfere with the rotation of the base. Attached Figure Description

[0025] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a front view of a planetary carrier turntable according to an embodiment of the present utility model; Figure 2 This is a schematic diagram of the structure of a base for a planetary carrier turntable according to an embodiment of the present utility model; Figure 3 This is a schematic diagram of the rotating structure of a planetary carrier turntable according to an embodiment of the present utility model; Figure 4 This is a schematic diagram of the structure of the base of a planetary carrier turntable according to an embodiment of the present utility model.

[0027] Explanation of reference numerals in the attached figures: 1-Base; 2-Staple; 21-Mounting part; 22-First connecting part; 3-Rotating structure; 31-Fixing component; 311-Fourth connecting part; 32-Rotating component; 41-First fastener; 42-Second fastener; 5-Planet carrier. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] The following is combined Figures 1 to 4 The following describes embodiments of the present invention.

[0030] According to an embodiment of the present invention, in one aspect, a planetary carrier 5 turntable is provided, such as... Figures 1 to 4 As shown, it includes a base 1, a base 2, and a rotating structure 3. The base 1 and the base 2 are arranged at intervals relative to each other. The rotating structure 3 is arranged between the base 1 and the base 2. The rotating structure 3 includes a fixing member 31 and a rotating member 32. The fixing member 31 is arranged on the base 1, and the rotating member 32 is rotatably arranged on the fixing member 31 and connected to the base 2 to rotatably connect the base 2 and the base 1. The base 2 has a mounting part 21, which is suitable for mounting the planetary carrier 5.

[0031] The planetary carrier 5 turntable with the above structure uses a rotating structure 3 set between the base 1 and the base 2. The base 2 and the base 2 are set at intervals to allow the rotating structure 3 to be set between the base 1 and the base 2. The rotating structure 3 specifically includes a fixing member 31 and a rotating member 32. In this embodiment, the fixing member 31 and the rotating member 32 are a fixing ring and a rotating ring, respectively. The fixing member 31 is set on the base 1, and the rotating member 32 is rotatably set on the fixing member 31 and connected to the base 2, so that the rotating structure 3 can rotatably connect the base 1 and the base 2.

[0032] Specifically, the base 2 has a mounting part 21, which is a mounting groove in this embodiment. The planet carrier 5 can be installed in the mounting part 21. When it is necessary to rotate the planet carrier 5, the planet carrier 5 can be rotated by rotating the base 2. This allows the person to rotate the planet carrier 5 without having to contact the planet carrier 5, but only need to contact the base 2. At the same time, the planet carrier 5 is limited on the base 2 by the mounting part 21, so that the planet carrier 5 will not fall off when rotating, which helps to improve the stability and safety of the planet carrier 5 during rotation.

[0033] In addition, when the planet carrier 5 is placed on the base 2, the base 2 can provide full support for the planet carrier 5, so that the planet carrier 5 will not wobble when rotating, which will further improve the stability of the planet carrier 5 during rotation and prevent the wafers on the planet carrier 5 from falling off or being thrown away.

[0034] In summary, by using the rotating structure 3 between the base 1 and the base 2, the base 2 can rotate relative to the base 1, allowing the planetary carrier 5 placed on the base 2 to rotate synchronously with the base 2. This prevents human hands from coming into contact with the planetary carrier 5, thus avoiding cross-contamination. Furthermore, since the planetary carrier 5 is specifically placed within the mounting portion 21 on the base 2, the base 2 can limit the planetary carrier 5 and provide comprehensive support for it. This prevents the planetary carrier 5 from falling off or shaking during rotation, thereby improving the stability and safety of the planetary carrier 5 during rotation and avoiding economic losses.

[0035] In one embodiment, such as Figure 3 As shown, both the fixing member 31 and the rotating member 32 are hollow annular structures. The through hole on the fixing member 31 is configured as a rotating part, and the rotating member 32 is rotatably disposed in the rotating part to rotatably connect the fixing member 31 and the rotating member 32.

[0036] The planetary carrier 5 turntable with the above structure is provided with a hollow annular structure for both the fixing member 31 and the rotating member 32. The through hole on the fixing member 31 is configured as a rotating part, and the rotating member 32 is rotatably disposed in the rotating part, so that the fixing member 31 and the rotating member 32 can be rotatably connected, thereby rotatably connecting the base 1 and the base 2.

[0037] In one embodiment, such as Figure 3 As shown, when the rotating member 32 is installed inside the rotating part, the outer wall surface of the rotating member 32 abuts against the inner wall surface of the fixing member 31.

[0038] The planetary carrier 5 turntable with the above structure, by having the rotating member 32 installed in the rotating part, make the outer wall surface of the rotating member 32 abut against the inner wall surface of the fixing member 31. In this way, when the rotating member 32 rotates relative to the fixing member 31 in the rotating part, the outer wall surface of the rotating member 32 and the inner wall surface of the fixing member 31 can contact each other, thereby improving the stability of the rotating member 32 in the rotating part, and further improving the stability of the base 2 relative to the base 1.

[0039] In one embodiment, such as Figure 3 As shown, a sliding part is provided on the outer wall surface of the rotating part 32, and a sliding fit part is provided on the inner wall surface of the fixing part 31. When the rotating part 32 is installed in the rotating part, the sliding part is slidably disposed in the sliding fit part.

[0040] The planetary carrier 5 turntable with the above-described structure has a sliding part provided on the outer wall of the rotating member 32 and a sliding mating part provided on the inner wall of the fixed member 31. In this embodiment, the sliding part and the sliding mating part are a sliding block and a sliding mating groove, respectively. When the rotating member 32 is installed in the rotating member, the sliding part can be slidably disposed in the sliding mating part. Thus, when the rotating member 32 rotates relative to the fixed member 31, the sliding part can slide in the sliding mating part, thereby further improving the rotational stability of the rotating member 32. In addition, the sliding part provided in the sliding mating part can also improve the connection strength between the rotating member 32 and the fixed member 31.

[0041] In one embodiment, such as Figure 3 As shown, a first receiving portion is provided on the outer wall surface of the rotating member 32, and a second receiving portion is provided on the inner wall surface of the fixing member 31. When the rotating member 32 is installed in the rotating portion, the first receiving portion and the second receiving portion are connected. It also includes a plurality of rolling members, all of which are spaced apart between the first receiving portion and the second receiving portion, and the peripheral wall surface of any rolling member abuts against the inner wall surface of the cavity of the receiving portion.

[0042] The planetary carrier 5 turntable with the above-described structure uses several rolling elements, which are balls in this embodiment, arranged between the rotating member 32 and the fixed member 31. The outer wall of the rotating member 32 has a first receiving portion, and the inner wall of the fixed member 31 has a second receiving portion. In this embodiment, the first receiving portion and the second receiving portion are respectively a first receiving groove and a second receiving groove. All the rolling elements are spaced apart between the first receiving portion and the second receiving portion, and the peripheral wall of each rolling element abuts against the inner wall of the receiving portion. In this way, when the rotating member 32 rotates relative to the rotating member, all the rolling elements can roll in the first receiving groove and the second receiving groove to reduce the friction between the rotating member 32 and the fixed member 31, so that the rotating member 32 can rotate more smoothly.

[0043] In one embodiment, such as Figure 3 and Figure 4 As shown, it also includes a fastening structure, which includes a plurality of first fasteners 41, any one of which is adapted to pass through the base 2 and the rotating member 32 to connect the base 2 and the rotating member 32.

[0044] The planetary carrier 5 turntable with the above structure is fastened by a fastening structure between the base 2 and the rotating structure 3. The fastening structure specifically includes a number of first fasteners 41. In this embodiment, the first fastener 41 is a first screw. Each first fastener 41 can penetrate the base 2 and the rotating member 32, thereby connecting the base 2 and the rotating member 32 together. Thus, when the rotating member 32 rotates, the base 2 can rotate synchronously with the rotating member 32.

[0045] In one embodiment, such as Figure 2 and Figure 3 As shown, the base 2 has a plurality of first connecting parts 22, and the rotating part 32 has a plurality of second connecting parts that correspond one-to-one with the first connecting parts 22. The first fastener 41 is adapted to pass through the first connecting parts 22 and the second connecting parts in sequence.

[0046] The planetary carrier 5 turntable with the above structure has several first connecting parts 22 on the base 2 and several second connecting parts on the rotating member 32. In this embodiment, the first connecting parts 22 and the second connecting parts are respectively the first connecting hole and the second connecting hole. The second connecting parts on the rotating member 32 and the first connecting parts 22 on the base 2 are arranged in a one-to-one correspondence, so that the first fastener 41 can pass through the first connecting parts 22 and the second connecting parts in sequence, thereby enabling the first fastener 41 to connect the rotating member 32 and the base 2 together.

[0047] In one embodiment, such as Figure 3 As shown, the fastening structure also includes a plurality of second fasteners 42, any one of which is adapted to pass through the base 1 and the fastener 31 to connect the base 1 and the fastener 31.

[0048] The planetary carrier 5 turntable with the above-described structure also includes several second fasteners 42 through the fastening structure. In this embodiment, the second fasteners 42 are second screws. Each second fastener 42 can penetrate the base 1 and the fixing member 31, thereby connecting the base 1 and the fixing member 31 together. In this way, the fixing member 31 can be fixed by the base 1, preventing the fixing member 31 from rotating synchronously with the rotating member 32 due to the friction between it and the rotating member 32.

[0049] In one embodiment, such as Figure 3 and Figure 4As shown, the base 1 has several third connecting parts, and the fastener 31 has several fourth connecting parts 311 that correspond one-to-one with the third connecting parts. The second fastener 42 is adapted to pass through the third connecting parts and the fourth connecting parts 311 in sequence.

[0050] The planetary carrier 5 turntable with the above structure has several third connecting parts on the base 1 and several fourth connecting parts 311 on the fixing member 31. In this embodiment, the third connecting parts and the fourth connecting parts 311 are respectively the third connecting hole and the fourth connecting hole. The fourth connecting parts 311 on the fixing member 31 and the third connecting parts on the base 1 are arranged in a one-to-one correspondence, so that the second fastener 42 can pass through the third connecting parts and the fourth connecting parts 311 in sequence, thereby enabling the second fastener 42 to connect the base 1 and the fixing member 31 together.

[0051] In one embodiment, such as Figure 1 As shown, the size of the base 2 is larger than the size of the base 1; the thickness of the rotating part 32 is greater than the thickness of the fixing part 31.

[0052] The planetary carrier 5 turntable with the above structure has a base 2 that is larger than the base 1. When the base 2 and the base 1 are connected by the rotating structure 3, the outer edge of the base 2 can extend beyond the outer edge of the base 1, which makes it easier for the operator to rotate the base 2. The thickness of the rotating component 32 is greater than the thickness of the fixing component 31, so that when the base 2 is rotated, the fixing component 31 near the top surface of the base 2 will not interfere with the rotation of the base 2.

[0053] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A planetary carrier turntable, characterized in that, include: A base (1) and a base (2) are provided at a distance from each other. A rotating structure (3) is disposed between the base (1) and the base (2). The rotating structure (3) includes a fixing member (31) and a rotating member (32). The fixing member (31) is disposed on the base (1), and the rotating member (32) is rotatably disposed on the fixing member (31) and connected to the base (2) to rotatably connect the base (2) and the base (1). The base (2) is provided with an installation part (21), and the installation part (21) is suitable for installing the planet carrier (5).

2. The planetary carrier turntable according to claim 1, characterized in that, Both the fixing member (31) and the rotating member (32) are hollow annular structures. The through hole on the fixing member (31) is configured as a rotating part. The rotating member (32) is rotatably disposed in the rotating part to rotatably connect the fixing member (31) and the rotating member (32).

3. The planetary carrier turntable according to claim 2, characterized in that, When the rotating member (32) is installed in the rotating part, the outer wall surface of the rotating member (32) abuts against the inner wall surface of the fixing member (31).

4. The planetary carrier turntable according to claim 3, characterized in that, The outer wall of the rotating part (32) is provided with a sliding part, and the inner wall of the fixing part (31) is provided with a sliding fit part. When the rotating part (32) is installed in the rotating part, the sliding part is slidably disposed in the sliding fit part.

5. The planetary carrier turntable according to claim 3, characterized in that, The outer wall of the rotating component (32) is provided with a first receiving portion, and the inner wall of the fixing component (31) is provided with a second receiving portion. When the rotating component (32) is installed in the rotating portion, the first receiving portion and the second receiving portion are connected. It also includes a number of rolling elements, all of which are spaced apart between the first receiving portion and the second receiving portion, and the peripheral wall surface of any of the rolling elements abuts against the inner wall surface of the cavity of the receiving portion.

6. The planetary carrier turntable according to any one of claims 1-5, characterized in that, It also includes a fastening structure comprising a plurality of first fasteners (41), any one of which is adapted to pass through the base (2) and the rotating member (32) to connect the base (2) and the rotating member (32).

7. The planetary carrier turntable according to claim 6, characterized in that, The base (2) has a plurality of first connecting parts (22), and the rotating part (32) has a plurality of second connecting parts that correspond one-to-one with the first connecting parts (22). The first fastener (41) is adapted to pass through the first connecting parts (22) and the second connecting parts in sequence.

8. The planetary carrier turntable according to claim 7, characterized in that, The fastening structure further includes a plurality of second fasteners (42), any one of which is adapted to pass through the base (1) and the fastener (31) to connect the base (1) and the fastener (31).

9. The planetary carrier turntable according to claim 8, characterized in that, The base (1) is provided with a plurality of third connecting parts, and the fastener (31) is provided with a plurality of fourth connecting parts (311) that correspond one-to-one with the third connecting parts. The second fastener (42) is adapted to pass through the third connecting parts and the fourth connecting parts (311) in sequence.

10. The planetary carrier turntable according to claim 2, characterized in that, The size of the base (2) is larger than the size of the base (1); the thickness of the rotating part (32) is greater than the thickness of the fixing part (31).

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