A workpiece holder for PVD vacuum coating

CN224884161UActive Publication Date: 2026-10-23DENAI NANOTECHNOLOGY (GUANGDONG) CO LTD
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Patent Information

Application Number
CN202522522221.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-11-27
Publication Date
2026-10-23
Estimated Expiration
2035-11-27

AI Technical Summary

Technical Problem

[0004]本实用新型的目的是解决以上缺陷,提供一种用于PVD真空镀膜的工件架,解决了现有技术环境温度不稳定,难以满足 PVD 真空镀膜的温度工艺要求;要么没有高效的散热结构,镀膜结束后热量无法快速排出,使得工件冷却周期较长,影响镀膜效率的技术问题

Benefits of technology

[0015]该用于PVD真空镀膜的工件架,通过在基座内腔设置加热元件,能为基座、支撑臂及挂臂提供均匀热源,确保镀膜过程中工件所处环境温度稳定,满足PVD真空镀膜对温度的工艺要求;基座内腔的螺旋形冷却通道,可在镀膜结束后快速带走基座内的热量,实现快速降温,缩短工件冷却周期,进而提高镀膜效率;挂臂底部均匀设置的挂钩组件,能使多个工件悬挂时互不遮挡,保证每个工件表面都能充分接触镀膜材料,有效提升镀膜均匀性;挂钩组件中空心柱与滑臂之间连接的弹簧,可提供持续弹力,推动空心柱始终抵紧下方部件,保障限位结构的稳定性;T形臂通过横槽插入空心盒内腔后扭动角度并卡入方槽,再借助空心柱和弹簧限制位置的装配方式,无需额外工具,操作便捷且能防止T形臂脱落;T形臂底部连接的挂环可适配不同尺寸、形状的工件,确保工件稳定悬挂,避免镀膜时工件晃动导致镀膜层出现瑕疵。

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Abstract

The utility model relates to a workpiece frame for PVD vacuum coating, including base, support arm and hanging arm, support arm assembly is in the upper end both sides of base, hanging arm sets up between two groups of support arms, and the inner chamber of base is provided with heating element, and heating element can provide uniform heat source for base and the support arm, hanging arm of top, ensure that the environment temperature stability where workpiece is located during coating process, satisfy the technological requirement of PVD vacuum coating to temperature, and the inner chamber of base is provided with helical cooling channel. The workpiece frame for PVD vacuum coating, T-shaped arm twists the angle and is clamped into square slot after being inserted into the cavity of hollow box through horizontal groove, and then the assembling mode of position is limited with the aid of hollow column and spring, does not need additional tool, and the operation is convenient and can prevent T-shaped arm from falling off; The hanging ring connected to the bottom of T-shaped arm can adapt to workpieces of different sizes and shapes, ensuring stable suspension of the workpieces and avoiding workpiece shaking during coating to cause defects in the coating layer.
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Description

Technical Field

[0001] This utility model relates to the field of workpiece holders, specifically to a workpiece holder for PVD vacuum coating. Background Technology

[0002] In the PVD vacuum coating process, the workpiece holder is one of the core auxiliary components. It is mainly used to support and fix the workpiece to be coated in a vacuum environment, ensuring that the workpiece maintains a stable position during the coating process. At the same time, it needs to cooperate with the process requirements to realize functions such as temperature control, providing basic support for the smooth progress of the coating process.

[0003] Existing workpiece holders for PVD vacuum coating have several shortcomings. Regarding temperature control, they either lack a structure to provide uniform heat to the base, support arms, and hanging arms, resulting in unstable ambient temperatures for the workpieces and making it difficult to meet the temperature requirements of PVD vacuum coating; or they lack an efficient heat dissipation structure, preventing rapid heat dissipation after coating and leading to longer workpiece cooling cycles, thus affecting coating efficiency. In terms of workpiece suspension and structural assembly, the hooks at the bottom of the hanging arms are often poorly designed, causing multiple workpieces to obstruct each other when suspended, resulting in some workpiece surfaces not fully contacting the coating material and affecting coating uniformity. Utility Model Content

[0004] The purpose of this invention is to address the above-mentioned shortcomings by providing a workpiece holder for PVD vacuum coating. This invention solves the technical problems of existing technologies, such as unstable ambient temperature, difficulty in meeting the temperature process requirements of PVD vacuum coating, and lack of efficient heat dissipation structure, resulting in the inability to quickly dissipate heat after coating and a long workpiece cooling cycle, which affects coating efficiency.

[0005] The purpose of this utility model is achieved through the following means: a workpiece holder for PVD vacuum coating, comprising a base, support arms and hanging arms, wherein the support arms are assembled on both sides of the upper end of the base, the hanging arms are disposed between the two sets of support arms, the inner cavity of the base is provided with a heating element, the heating element can provide a uniform heat source for the base and the support arms and hanging arms above it, ensuring that the ambient temperature of the workpiece is stable during the coating process, meeting the temperature process requirements of PVD vacuum coating, and the inner cavity of the base is provided with a spiral cooling channel;

[0006] The spiral cooling channel can quickly remove the heat from the base after coating, achieving rapid cooling, shortening the workpiece cooling cycle, and improving coating efficiency. The bottom of the hanging arm is uniformly provided with hook components. The even distribution of the hook components ensures that multiple workpieces do not block each other when suspended, ensuring that the surface of each workpiece can fully contact the coating material and improve coating uniformity.

[0007] The hook assembly includes a hollow box, a sliding arm is provided at the top of the inner cavity of the hollow box, a hollow column is slidably connected to the bottom of the sliding arm, and a spring is connected between the hollow column and the sliding arm. The spring can provide continuous elastic force to push the hollow column to always press against the lower component, ensuring the stability of the limiting structure.

[0008] The bottom of the hollow box has a horizontal groove, and a T-shaped arm is slidably connected to the inner cavity of the hollow box. During installation, the T-shaped arm is first inserted into the inner cavity of the hollow box through the horizontal groove, and then the angle of the T-shaped arm is twisted so that the T-shaped arm intersects with the horizontal groove, and then it is locked into the inner cavity of the square groove. Subsequently, the position of the T-shaped arm is restricted by the hollow column and spring, thereby completing the assembly of the hollow box and the T-shaped arm. This method does not require additional tools, is easy to operate, and can prevent the T-shaped arm from falling off. The bottom of the T-shaped arm is connected to a hanging ring, which can be adapted to workpieces of different sizes and shapes to ensure that the workpiece is stably suspended and to avoid the workpiece shaking during coating, which may cause defects in the coating layer.

[0009] Furthermore, a control module is provided on the front of the base, and a control panel is provided on the front of the control module. The control module is connected to the heating element through a circuit. The operator can set the heating parameters through the control panel, and the control module will accurately regulate the working status of the heating element to achieve automated temperature control, reduce human error, and ensure that the coating process parameters are consistent each time.

[0010] Furthermore, the base, support arm, and hanging arm are all provided with an insulating layer on their exterior. The insulating layer can block current conduction, prevent workers from being electrocuted, and prevent external electric fields from interfering with the coating process. The support arm and hanging arm are provided with a nickel-phosphorus alloy on their exterior. The nickel-phosphorus alloy has excellent corrosion resistance and wear resistance, can resist the erosion of corrosive gases in the coating environment, extend the service life of the support arm and hanging arm, and reduce the impact of wear impurities on the coating quality.

[0011] Furthermore, the hollow box has a square groove in its inner cavity, which is slidably connected to the hollow column. The square groove provides a stable sliding trajectory for the hollow column, ensuring that the hollow column accurately abuts against the T-shaped arm under the action of the spring, and at the same time plays an auxiliary positioning role for the T-shaped arm, ensuring stability after assembly.

[0012] Furthermore, wear-resistant pads are provided at the opposite ends of the hollow column and the T-shaped arm. The wear-resistant pads can reduce frictional loss when the two are in contact, extend service life, and increase friction to improve the limiting stability of the T-shaped arm. The upper end of the T-shaped arm is square and is adapted to the horizontal groove. The square design allows the T-shaped arm to fit tightly with the square groove after twisting, preventing rotation; the adaptation to the horizontal groove ensures that the T-shaped arm can be smoothly inserted, simplifying the assembly process.

[0013] Furthermore, the hollow box is bolted to the bottom of the hanging arm, and a rubber sleeve is provided on the outside of the bolt. The bolt connection facilitates the disassembly and replacement of the hollow box, reducing maintenance costs. The rubber sleeve can buffer equipment vibration, prevent bolts from loosening, and avoid friction to generate metal shavings, ensuring a clean coating environment.

[0014] The beneficial effects of this utility model are:

[0015] This workpiece holder for PVD vacuum coating utilizes a heating element within the base cavity to provide a uniform heat source to the base, support arm, and hanging arm, ensuring a stable ambient temperature for the workpiece during the coating process and meeting the temperature requirements of PVD vacuum coating. The spiral cooling channel within the base cavity rapidly removes heat from the base after coating, achieving rapid cooling, shortening the workpiece cooling cycle, and thus improving coating efficiency. The evenly spaced hook assemblies at the bottom of the hanging arm ensure that multiple workpieces are suspended without obstruction, guaranteeing full contact between the coating layer and the workpiece surface. The film material effectively improves the uniformity of coating; the spring connecting the hollow column and the sliding arm in the hook assembly provides continuous elasticity, pushing the hollow column to always press against the lower component, ensuring the stability of the limiting structure; the T-arm is inserted into the hollow box cavity through the horizontal groove, then twists its angle and locks into the square groove, and the assembly method of limiting the position with the hollow column and spring does not require additional tools, making operation convenient and preventing the T-arm from falling off; the hanging ring connected to the bottom of the T-arm can adapt to workpieces of different sizes and shapes, ensuring that the workpiece is stably suspended and avoiding workpiece shaking during coating, which may cause defects in the coating layer. Attached Figure Description

[0016] Figure 1 This is a front view of a workpiece holder for PVD vacuum coating according to the present invention.

[0017] Figure 2 This is a schematic planar view of a workpiece holder for PVD vacuum coating according to the present invention;

[0018] Figure 3 This is an external schematic diagram of a workpiece holder hook assembly for PVD vacuum coating according to the present invention.

[0019] Figure 4 This is a partial cross-sectional view of a workpiece holder hook assembly for PVD vacuum coating according to the present invention.

[0020] In the diagram, 1 is the base; 11 is the control module; 2 is the heating element; 3 is the support arm; 4 is the hanging arm; 5 is the hook assembly; 51 is the hollow box; 52 is the square groove; 53 is the sliding arm; 54 is the hollow column; 55 is the spring; 56 is the horizontal groove; 57 is the T-shaped arm; and 58 is the hanging ring. Detailed Implementation

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0022] In this embodiment, refer to Figure 1 and Figure 2 The specific implementation of the workpiece holder for PVD vacuum coating includes a base 1, support arms 3 and hanging arms 4. The support arms 3 are assembled on both sides of the upper end of the base 1, and the hanging arms 4 are arranged between the two sets of support arms 3. The inner cavity of the base 1 is provided with a heating element 2, which can provide a uniform heat source for the base 1 and the support arms 3 and hanging arms 4 above it, ensuring that the ambient temperature of the workpiece is stable during the coating process and meeting the temperature process requirements of PVD vacuum coating. The inner cavity of the base 1 is provided with a spiral cooling channel.

[0023] Reference Figure 3 and Figure 4 The spiral cooling channel can quickly remove the heat from the base 1 after the coating is completed, achieve rapid cooling, shorten the workpiece cooling cycle, and improve the coating efficiency. The bottom of the hanging arm 4 is uniformly provided with hook components 5. The even distribution of hook components 5 can ensure that multiple workpieces do not block each other when suspended, ensuring that the surface of each workpiece can fully contact the coating material and improve the coating uniformity.

[0024] The hook assembly 5 includes a hollow box 51. A sliding arm 53 is provided at the top of the inner cavity of the hollow box 51. A hollow column 54 is slidably connected to the bottom of the sliding arm 53. A spring 55 is connected between the hollow column 54 and the sliding arm 53. The spring 55 can provide continuous elastic force to push the hollow column 54 to always press against the lower component, ensuring the stability of the limiting structure.

[0025] The bottom of the hollow box 51 has a horizontal groove 56. The inner cavity of the hollow box 51 is slidably connected to a T-shaped arm 57. During installation, the T-shaped arm 57 is first inserted into the inner cavity of the hollow box 51 through the horizontal groove 56. Then, the angle of the T-shaped arm 57 is twisted so that the T-shaped arm 57 intersects with the horizontal groove 56 and then gets into the inner cavity of the square groove 52. Subsequently, the position of the T-shaped arm 57 is restricted by the hollow column 54 and the spring 55, thereby completing the assembly of the hollow box 51 and the T-shaped arm 57. This method does not require additional tools, is easy to operate, and can prevent the T-shaped arm 57 from falling off. The bottom of the T-shaped arm 57 is connected to a hanging ring 58. The hanging ring 58 can be adapted to workpieces of different sizes and shapes to ensure that the workpiece is stably suspended and to avoid the workpiece shaking during coating, which may cause defects in the coating layer.

[0026] A control module 11 is provided on the front of the base 1, and a control panel is provided on the front of the control module 11. The control module 11 is connected to the heating element 2 through a circuit. The operator can set the heating parameters through the control panel, and the control module 11 will accurately regulate the working state of the heating element 2 to realize automatic temperature control, reduce human error, and ensure that the coating process parameters are consistent each time.

[0027] The base 1, support arm 3, and hanging arm 4 are all equipped with an insulating layer on the outside. The insulating layer can block current conduction, prevent workers from being electrocuted, and prevent external electric fields from interfering with the coating process. The support arm 3 and hanging arm 4 are equipped with a nickel-phosphorus alloy. The nickel-phosphorus alloy has excellent corrosion resistance and wear resistance, can resist the erosion of corrosive gases in the coating environment, extend the service life of the support arm 3 and hanging arm 4, and reduce the impact of wear impurities on the coating quality.

[0028] The hollow box 51 has a square groove 52 in its inner cavity. The square groove 52 is slidably connected to the hollow column 54. The square groove 52 provides a stable sliding trajectory for the hollow column 54, ensuring that the hollow column 54 is accurately pressed against the T-shaped arm 57 under the action of the spring 55. At the same time, it plays an auxiliary positioning role for the T-shaped arm 57, ensuring the stability after assembly.

[0029] Wear-resistant pads are provided at the opposite ends of the hollow column 54 and the T-shaped arm 57. The wear-resistant pads can reduce friction loss when the two are in contact, extend service life, and increase friction to improve the limiting stability of the T-shaped arm 57. The upper end of the T-shaped arm 57 is square and is adapted to the transverse groove 56. The square design allows the T-shaped arm 57 to fit tightly with the square groove 52 after twisting, preventing rotation; the adaptation to the transverse groove 56 ensures that the T-shaped arm 57 can be smoothly inserted, simplifying the assembly process.

[0030] Hollow box 51 is bolted to the bottom of hanging arm 4, and the bolt is fitted with a rubber sleeve. The bolt connection facilitates the disassembly and replacement of hollow box 51, reducing maintenance costs. The rubber sleeve can buffer equipment vibration, prevent bolt loosening, and avoid friction to generate metal shavings, ensuring a clean coating environment.

[0031] First, insert the T-shaped arm 57 into the inner cavity of the hollow box 51 through the transverse groove 56. Then, twist the angle of the T-shaped arm 57 so that the T-shaped arms 57 intersect with each other and then fit into the inner cavity of the square groove 52. Then, the position of the T-shaped arm 57 is restricted by the hollow column 54 and the spring 55, thereby completing the installation of the hollow box 51.

[0032] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A workpiece holder for PVD vacuum coating, comprising a base, support arms, and hanging arms, wherein the support arms are assembled on both sides of the upper end of the base, and the hanging arms are disposed between two sets of support arms, characterized in that: The base has a heating element in its inner cavity and a spiral cooling channel in its inner cavity. Hook assemblies are evenly arranged at the bottom of the hanging arm. The hook assembly includes a hollow box, a sliding arm is provided at the top of the inner cavity of the hollow box, a hollow column is slidably connected to the bottom of the sliding arm, a spring is connected between the hollow column and the sliding arm, a horizontal groove is provided at the bottom of the hollow box, a T-shaped arm is slidably connected to the inner cavity of the hollow box, and a hanging ring is connected to the bottom of the T-shaped arm.

2. The workpiece holder for PVD vacuum coating according to claim 1, characterized in that: A control module is provided on the front of the base, and a control panel is provided on the front of the control module. The control module is connected to the heating element via a circuit.

3. The workpiece holder for PVD vacuum coating according to claim 1, characterized in that: The base, support arm, and hanging arm are all provided with an insulating layer on the outside, and the support arm and hanging arm are provided with a nickel-phosphorus alloy on the outside.

4. The workpiece holder for PVD vacuum coating according to claim 1, characterized in that: The hollow box has a square groove in its inner cavity, and the square groove is slidably connected to the hollow column.

5. The workpiece holder for PVD vacuum coating according to claim 1, characterized in that: Wear-resistant pads are provided at the opposite ends of the hollow column and the T-shaped arm. The upper end of the T-shaped arm is square and is adapted to the transverse groove.

6. The workpiece holder for PVD vacuum coating according to claim 1, characterized in that: The hollow box is bolted to the bottom of the hanging arm, and the bolt is fitted with a rubber sleeve.