A PVD coating workpiece suspension device

Abstract

The utility model relates to PVD coating technology field especially a kind of PVD coating workpiece suspension device, including the rod member being arranged in the inside of coating cabinet, the periphery of the rod member is slidably connected with several connecting seats, the outer periphery of the connecting seat is provided with several support components for supporting PVD workpiece, the side of the support component is equipped with the adjusting assembly for adjusting the position of PVD workpiece, the adjusting assembly with the support component is fixedly connected through connecting assembly, the utility model is through adjustable connecting seat and support component, realized the flexible configuration between the spacing of bearing support and layout, this act significantly improves the versatility and flexibility of suspension device, so that it can self-adapting workpiece of different sizes, for small parts, can be densely arranged to maximize single loading capacity, improve efficiency, for large workpiece, space layout can be optimized, ensure coating uniformity, while ensuring coating quality, improve equipment utilization and comprehensive production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of PVD coating technology, and in particular to a PVD coated workpiece suspension device. Background Technology

[0002] PVD coating technology, as an advanced surface treatment process, is based on the deposition of target atoms or molecules onto the surface of a workpiece in a vacuum environment to form a high-performance thin film. In this process, the workpiece suspension device is a key tooling that supports the workpiece and enables it to move complexly within the cavity; its performance directly determines the uniformity, density, and final product quality of the thin film.

[0003] Currently, the workpiece suspension devices commonly used in this technology field are mostly constructed by welding a central upright and a multi-layered support frame together. While this rigid, integrated design ensures structural strength, it also brings significant limitations and application drawbacks. First, there is a serious lack of versatility and flexibility. Since the position and spacing of the supports are fixed after welding, the number of workpieces that can be suspended by a single upright, as well as the layout and angle, cannot be adjusted according to actual working conditions. When dealing with large workpieces, the fixed support spacing may cause interference between workpieces or improper distance from the evaporation source, resulting in uneven film thickness. When processing small workpieces, it is impossible to increase the single coating capacity by increasing the suspension density, which severely restricts production efficiency. Second, this structure leads to high fixture costs and low equipment utilization. In production practice, in order to adapt to workpieces of different specifications and shapes, it is necessary to pre-design, manufacture, and stock various specifications of special hangers. This not only increases the direct cost of fixture manufacturing, but also requires frequent opening of the vacuum chamber for overall replacement when switching products, which consumes a lot of time, resulting in a shortened effective operating time of the equipment and an increase in overall operating costs. Utility Model Content

[0004] The purpose of this invention is to address the aforementioned shortcomings in the existing technology by proposing a PVD coated workpiece suspension device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] Design a PVD coated workpiece suspension device, including a rod set inside the coating cabinet, a plurality of connecting seats slidably connected to the circumference of the rod, a plurality of support components for supporting the PVD workpiece set on the outer circumference of the connecting seats, an adjustment component for adjusting the position of the PVD workpiece installed on one side of the support component, and the adjustment component and the support component are fixedly connected by a connecting component.

[0007] Furthermore, the connecting seat is a sleeve that is slidably connected to the outer circumferential surface of the rod. The outer circumferential surface of the sleeve is provided with a threaded hole, and a positioning rod is threadedly connected to the threaded hole. The front end of the positioning rod is rotatably connected to an abutting block that abuts against the rod.

[0008] Furthermore, the support assembly includes a connecting rod, a threaded sleeve is slidably connected to one end of the connecting rod, a groove is formed on the outer circumferential surface of the sleeve, the threaded sleeve is threadedly connected to the groove, a square rod is formed in the groove, and a slot adapted to the square rod is formed at one end of the connecting rod where the threaded sleeve is fitted, and the square rod is slidably connected to the slot.

[0009] Furthermore, a groove is provided at the other end of the connecting rod, and a sliding rod is slidably connected in the groove. Both ends of the sliding rod are embedded with spring plungers, and the connecting rod is provided with a number of holes that are adapted to the spring plungers.

[0010] Furthermore, the adjustment assembly includes an outer tube at one end of the slide rod, an inner tube being internally threaded onto the outer tube, and a bearing plate being fixedly connected to the upper end face of the inner tube.

[0011] Furthermore, the connecting assembly includes a housing fixedly connected to one end of the slide rod, with receiving grooves on both sides of the housing, a cover plate at the upper end of the housing, two spring pieces fixedly connected to the lower side of the cover plate and inserted into the interior of the housing, with claws fixedly connected to both ends of the spring pieces and engaging with the receiving grooves, and the outer tube fixedly connected to the upper end of the cover plate.

[0012] The PVD coated workpiece suspension device proposed in this utility model has the following advantages: This utility model achieves flexible configuration of the spacing and layout of the bearing brackets through adjustable connecting seats and support components. This significantly improves the versatility and flexibility of the suspension device, enabling it to adapt to workpieces of different sizes. For small parts, they can be densely arranged to maximize the single loading capacity and improve efficiency. For large workpieces, the spatial layout can be optimized to ensure coating uniformity. Ultimately, while ensuring coating quality, it greatly improves equipment utilization and overall production efficiency. Attached Figure Description

[0013] Figure 1 This is a perspective view of the present utility model;

[0014] Figure 2 For the present utility model Figure 1 A schematic diagram of the area structure;

[0015] Figure 3 This is a cross-sectional schematic diagram of the support component structure of this utility model;

[0016] Figure 4 This is a cross-sectional view of the internal structure of the connector of this utility model;

[0017] Figure 5 This is a cross-sectional view of the connecting component structure of this utility model.

[0018] In the diagram: 1. Rod; 2. Connecting seat; 21. Sleeve; 22. Threaded hole; 23. Positioning rod; 24. Abutting block; 3. Support assembly; 31. Connecting rod; 32. Threaded sleeve; 33. Groove; 34. Square rod; 35. Slot; 36. Slide groove; 37. Slide rod; 38. Spring plunger; 4. Adjusting assembly; 41. Outer tube fitting; 42. Inner tube fitting; 43. Bearing plate; 5. Connecting assembly; 51. Outer shell; 52. Receiving groove; 53. Cover plate; 54. Spring piece; 55. Claw. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0020] Reference Figure 1-5 A PVD coated workpiece suspension device includes a rod 1 installed inside a coating cabinet. Several connecting seats 2 are slidably connected to the circumferential surface of the rod 1. Several support components 3 for supporting the PVD workpiece are provided on the outer circumferential surface of the connecting seats 2. An adjustment component 4 for adjusting the position of the PVD workpiece is installed on one side of the support component 3. The adjustment component 4 and the support component 3 are fixedly connected by a connecting component 5. During use, the rod 1 can be fixed to the coating machine by bolts or other fixing structures and rotated by a rotating mechanism inside the coating machine.

[0021] It should be noted that the connecting seat 2 is a sleeve 21 that is slidably connected to the outer peripheral surface of the rod 1. The outer peripheral surface of the sleeve 21 is provided with a threaded hole 22. A positioning rod 23 is threadedly connected to the threaded hole 22. The front end of the positioning rod 23 is rotatably connected to an abutting block 24 that abuts against the rod 1.

[0022] In this embodiment, the outer circumferential surface of the rod 1 is provided with a pattern, preferably a knurled pattern. Then, the sleeve 21 is fitted onto the rod 1 for position adjustment. After the position adjustment is completed, the positioning rod 23 is rotated to move the contact block 24. When the contact block 24 contacts the rod 1, it is fixed by friction. Since the contact block 24 and the positioning rod 23 are rotatably connected, when the contact block 24 contacts the rod 1, it will not affect the continued rotation of the positioning rod 23.

[0023] In this embodiment, the support component 3 includes a connecting rod 31, a threaded sleeve 32 is slidably connected to one end of the connecting rod 31, a groove 33 is formed on the outer circumferential surface of the sleeve 31, the threaded sleeve 32 is threadedly connected to the groove 33, a square rod 34 is formed in the groove 33, and a slot 35 adapted to the square rod 34 is formed at the end of the connecting rod 31 where the threaded sleeve 32 is fitted, and the square rod 34 is slidably connected to the slot 35.

[0024] The connecting rod 31 has a groove 36 at one end, and a sliding rod 37 is slidably connected in the groove 36. Both ends of the sliding rod 37 are embedded with spring plungers 38, and the connecting rod 31 has several holes that are adapted to the spring plungers 38.

[0025] The square rod 34 is slidably connected to the slot 35 to ensure that the connecting rod 31 will not rotate during the connection process. Then, by rotating the threaded sleeve 32, the threaded sleeve 32 is threadedly connected to the groove, and the connecting rod 31 is fixedly connected to the connecting seat 2. After that, the extension length of the slide rod 37 can be adjusted by the spring plunger 38.

[0026] Furthermore, the adjusting assembly 4 includes an outer tube 41 disposed at one end of the slide rod 37, an inner tube 42 internally threadedly connected to the outer tube 41, and a bearing plate 43 fixedly connected to the upper end face of the inner tube 42. By rotating the inner tube 42, the extension height of the inner tube can be adjusted, thereby changing the position of the bearing plate 43.

[0027] Based on the above embodiments, the connecting assembly 5 includes a housing 51 fixedly connected to one end of the slide rod 37. The housing 51 has receiving grooves 52 on both sides. A cover plate 53 is provided at the upper end of the housing 51. Two spring pieces 54 that are inserted into the inside of the housing 51 are fixedly connected to the lower side of the cover plate 53. The two ends of the spring pieces 54 are fixedly connected to the claws 55 that engage with the receiving grooves 52. The outer tube 41 is fixedly connected to the upper end of the cover plate 53 and is fixedly fixed to the cover plate 53 by engaging with the receiving grooves 52 through the claws 55. When it is necessary to replace the adjusting assembly 4, it is only necessary to press down the claws 55 to bend the spring pieces 54, and the claws 55 are taken out from the receiving grooves 52. Then the adjusting assembly 4 can be removed.

[0028] Working method: During operation, the connecting seat 2 on the rod 1 is adjusted according to the specific coating requirements. After the connecting seat 2 is adjusted, an appropriate number of support components 3 are installed on the connecting seat 2. Then, the adjustment component 4 is connected to the support component 3 through the connecting component 5. The coated part can then be placed on the carrier plate 43 for coating.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A PVD coated workpiece suspension device, comprising a rod (1) disposed inside a coating cabinet, characterized in that: A plurality of connecting seats (2) are slidably connected on the circumferential surface of the rod (1). A plurality of support components (3) for supporting the PVD workpiece are provided on the outer circumferential surface of the connecting seat (2). An adjustment component (4) for adjusting the position of the PVD workpiece is installed on one side of the support component (3). The adjustment component (4) and the support component (3) are fixedly connected by a connecting component (5).

2. The PVD-coated workpiece suspension device according to claim 1, characterized in that: The connecting seat (2) is a sleeve (21) that is slidably connected to the outer circumferential surface of the rod (1). The outer circumferential surface of the sleeve (21) is provided with a threaded hole (22). A positioning rod (23) is threadedly connected to the threaded hole (22). The front end of the positioning rod (23) is rotatably connected to an abutting block (24) that abuts against the rod (1).

3. The PVD-coated workpiece suspension device according to claim 2, characterized in that: The support assembly (3) includes a connecting rod (31), a threaded sleeve (32) is slidably connected to one end of the connecting rod (31), a groove (33) is provided on the outer circumferential surface of the sleeve (21), the threaded sleeve (32) is threadedly connected to the groove (33), a square rod (34) is formed in the groove (33), and a slot (35) adapted to the square rod (34) is provided at one end of the connecting rod (31) where the threaded sleeve (32) is fitted, and the square rod (34) is slidably connected to the slot (35).

4. The PVD-coated workpiece suspension device according to claim 3, characterized in that: The other end of the connecting rod (31) is provided with a sliding groove (36), and a sliding rod (37) is slidably connected in the sliding groove (36). Both ends of the sliding rod (37) are embedded with spring plungers (38), and the connecting rod (31) is provided with a number of holes that are adapted to the spring plungers (38).

5. A PVD-coated workpiece suspension device according to claim 4, characterized in that: The adjustment assembly (4) includes an outer tube (41) disposed at one end of the slide rod (37), an inner tube (42) is internally threaded to the outer tube (41), and a bearing plate (43) is fixedly connected to the upper end face of the inner tube (42).

6. The PVD-coated workpiece suspension device according to claim 5, characterized in that: The connecting assembly (5) includes a housing (51) fixedly connected to one end of the slide rod (37). The housing (51) has receiving grooves (52) on both sides. The upper end of the housing (51) is provided with a cover plate (53). The lower side of the cover plate (53) is fixedly connected to two spring pieces (54) that are inserted into the inside of the housing (51). The two ends of the spring pieces (54) are fixedly connected to claws (55) that engage with the receiving grooves (52). The outer tube (41) is fixedly connected to the upper end of the cover plate (53).

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