Cooling device and reaction furnace

Abstract

The present disclosure relates to the field of photovoltaic or semiconductor technology, in particular to a cooling device and a reaction furnace, which solves the problem of short service life of the sealing ring of the reaction furnace. The reaction furnace comprises a cooling device, a furnace tube, a first flange assembly, an auxiliary heating sleeve and a first sealing ring. The first flange assembly is sealingly connected to one end of the furnace tube close to the furnace tail side, one side of the first flange assembly away from the furnace opening side has a supporting part, and one end of the supporting part away from the furnace tube has a limiting groove. The first end of the auxiliary heating sleeve extends to the chamber of the furnace tube and is detachably connected with the furnace tube, and the second end of the auxiliary heating sleeve is arranged in the supporting part. The first sealing ring is sleeved on the auxiliary heating sleeve and located in the limiting groove, so as to seal the auxiliary heating sleeve and the supporting part. The cooling device is arranged around the supporting part and connected with the first flange assembly. The cooling medium flows through the cooling device to take away the heat around the supporting part, thereby avoiding damage to the first sealing ring and prolonging the service life of the first sealing ring.

Description

Technical Field

[0001] This disclosure relates to the field of photovoltaic or semiconductor technology, and specifically to a cooling device and a reactor. Background Technology

[0002] In traditional Chemical Vapor Deposition (CVD) equipment, the reactor typically uses an auxiliary heating assembly to heat the furnace tubes. This assembly usually consists of an auxiliary heating sleeve and an auxiliary heating element, with the heating element housed within the sleeve. The sleeve is supported at both ends by the furnace inlet and outlet, respectively, and a sealing ring seals the sleeve and its supporting structure. To increase reactor capacity, reactors are becoming increasingly larger, and the length of the auxiliary heating sleeve is also increasing. To improve the mechanical strength of the auxiliary heating sleeve and prevent deformation or even breakage at high temperatures, silicon carbide is commonly used in the industry.

[0003] However, due to the good thermal conductivity of silicon carbide, the temperature around the auxiliary heating sleeve is high during the process, which can easily damage the sealing ring and result in a short service life for the sealing ring. Utility Model Content

[0004] In view of this, the present disclosure provides a cooling device and a reactor, which solves the problem of short service life of the reactor's sealing ring.

[0005] In a first aspect, embodiments of this disclosure provide a cooling device applied to a reactor, the reactor including a furnace tube, a first flange assembly, at least one auxiliary heating sleeve, and at least one first sealing ring. The reactor has a furnace opening side and a furnace tail side. The furnace tube has a chamber. The auxiliary heating sleeve is detachably connected to the furnace tube. The first flange assembly is sealed to one end of the furnace tube near the furnace tail side. The side of the first flange assembly away from the furnace opening side has at least one support portion. The second end of the auxiliary heating sleeve passes through the support portion, and the first sealing ring of the auxiliary heating sleeve... The end of the support portion extends into the chamber, and the end of the support portion away from the furnace tube has a limiting groove. The first sealing ring is fitted onto the second end of the auxiliary heating sleeve and is located in the limiting groove. The cooling device includes a cooling assembly surrounding the support portion and connected to the first flange assembly. The cooling assembly has a medium inlet, a medium outlet, and a cooling chamber communicating with the medium inlet and the medium outlet. The medium inlet allows cooling medium to pass through and enter the cooling chamber, and the medium outlet allows cooling medium to pass through and exit the cooling chamber.

[0006] In some embodiments, the cooling assembly includes: a first cooling element located on one side of the support portion and detachably connected to the first flange assembly; wherein the first cooling element has a first medium inlet, a first medium outlet, and a first cooling chamber communicating with the first medium inlet and the first medium outlet; and a second cooling element disposed opposite to the first cooling element and detachably connected to the first flange assembly; wherein the second cooling element has a second medium inlet, a second medium outlet, and a second cooling chamber communicating with the second medium inlet and the second medium outlet, the second medium inlet communicating with the first medium outlet; wherein the first medium inlet allows the cooling medium to pass through to enter the first cooling chamber, the first medium outlet allows the cooling medium to pass through to exit the first cooling chamber, the second medium inlet allows the cooling medium exiting the first cooling chamber to pass through to enter the second cooling chamber, and the second medium outlet allows the cooling medium to pass through to exit the second cooling chamber.

[0007] In some embodiments, the furnace tube and the support both extend along a first horizontal direction, the first cooling element is located above the support, the second cooling element is located below the support, the first medium inlet and the second medium outlet are arranged adjacent to each other, and the first medium outlet and the second medium inlet are arranged adjacent to each other.

[0008] In some embodiments, the first cooling member has at least one downward-facing first clearance groove, and the second cooling member has at least one upward-facing second clearance groove, the first clearance groove and the second clearance groove are aligned in the vertical direction, and the support portion passes through the first clearance groove and the second clearance groove.

[0009] In some embodiments, the cross-sectional shape of the support portion is annular, the first clearance groove and the second clearance groove are both semi-circular, the sidewall of the first clearance groove contacts the top wall of the support portion, and the sidewall of the second clearance groove contacts the bottom wall of the support portion.

[0010] In some embodiments, the number of auxiliary heating sleeves, support portions, and first sealing rings are all multiple, and the multiple auxiliary heating sleeves, multiple support portions, and multiple first sealing rings are arranged sequentially along a second horizontal direction and are configured in a one-to-one correspondence, wherein the second horizontal direction is perpendicular to the first horizontal direction; the number of first clearance grooves and multiple second clearance grooves are all multiple, and the multiple first clearance grooves and multiple second clearance grooves are arranged sequentially along the second horizontal direction and are configured in a one-to-one correspondence; wherein the multiple support portions pass through their respective corresponding first clearance grooves and second clearance grooves.

[0011] In some embodiments, the first cooling element has a first elongated hole extending vertically at both ends, and the first flange assembly has a first threaded portion; the cooling device further includes: a first locking member having a first abutting portion and a first connecting portion connected to each other, the first connecting portion passing through the first elongated hole and connected to the first threaded portion, and the first abutting portion abutting against both sides of the first elongated hole; and / or, the second cooling element has a second elongated hole extending vertically at both ends, and the first flange assembly has a second threaded portion; the cooling device further includes: a second locking member having a second abutting portion and a second connecting portion connected to each other, the second connecting portion passing through the second elongated hole and connected to the second threaded portion, and the second abutting portion abutting against both sides of the second elongated hole.

[0012] In some embodiments, the first flange assembly includes: a first flange fitted onto the furnace tube, the first flange having a first flange medium inlet, a first flange medium outlet, and a first flange medium channel connecting the first flange medium inlet and the first flange medium outlet; a second flange fitted onto the furnace tube and detachably connected to the side of the first flange away from the furnace opening; a second sealing ring disposed between the first flange and the second flange to seal the second flange to the first flange, wherein the first flange medium channel surrounds the first flange and is close to the second sealing ring; and a tail end cap detachably connected to the furnace tube and sealed to the side of the second flange away from the first flange, wherein the side of the tail end cap away from the second flange has the support portion; wherein the first medium inlet communicates with the first flange medium outlet, the first flange medium inlet allows the cooling medium to pass through to enter the first flange medium channel, and the first flange medium outlet allows the cooling medium to pass through to exit the first flange medium channel and flow to the first medium inlet.

[0013] In some embodiments, the first flange assembly further includes: a third sealing ring disposed between the tail end cap and the second flange to provide a sealing connection between the tail end cap and the second flange; wherein the second flange has a second flange media inlet, a second flange media outlet, and a second flange media channel connecting the second flange media inlet and the second flange media outlet, wherein the second flange media channel surrounds the second flange and is close to the third sealing ring; wherein the second media outlet communicates with the second flange media inlet, the second flange media inlet allows the cooling medium discharged from the second cooling chamber to pass through and enter the second flange media channel, and the second flange media outlet allows the cooling medium to pass through and exit the second flange media channel.

[0014] In a second aspect, embodiments of this disclosure provide a reactor having a furnace opening side and a furnace tail side. The reactor includes: a furnace tube having a chamber; a first flange assembly sealed to one end of the furnace tube near the furnace tail side, wherein the side of the first flange assembly away from the furnace opening side has at least one support portion, wherein the end of the support portion away from the furnace tube has a limiting groove; at least one auxiliary heating sleeve, a first end of the auxiliary heating sleeve extending into the chamber and detachably connected to the furnace tube, and a second end of the auxiliary heating sleeve passing through the support portion; at least one first sealing ring fitted onto the second end of the auxiliary heating sleeve and located in the limiting groove to seal between the second end of the auxiliary heating sleeve and the support portion; and a cooling device as described in the first aspect, disposed around the support portion and connected to the first flange assembly, the cooling device being configured to allow the passage of a cooling medium.

[0015] The cooling device provided in this embodiment includes a cooling assembly disposed around a support portion of a first flange assembly. The cooling assembly has a medium inlet, a medium outlet, and a cooling chamber connecting the medium inlet and the medium outlet. The medium inlet allows cooling medium to pass through and enter the cooling chamber, and the medium outlet allows cooling medium to pass through and exit the cooling chamber. This enables the cooling medium to carry away heat around the support portion, reducing the temperature around the first sealing ring located in the limiting groove of the support portion, preventing damage to the first sealing ring due to high temperature, and extending the service life of the first sealing ring. Attached Figure Description

[0016] Figure 1 The image shown is a cross-sectional view of a reactor provided in an embodiment of this disclosure.

[0017] Figure 2 As shown Figure 1 The diagram shows a magnified view of a portion of the reactor in region A.

[0018] Figure 3 The diagram shown is a schematic diagram of the structure of a reactor tube removal system provided in an embodiment of this disclosure.

[0019] Figure 4 As shown Figure 3 The diagram shows a magnified view of a portion of the reactor with the furnace tubes removed, located in area B.

[0020] Figure 5 The image shown is a rear view of a reactor provided in an embodiment of this disclosure.

[0021] Figure 6 As shown Figure 5 The diagram shows a magnified view of a portion of the reactor in region C.

[0022] Figure 7 The image shown is a rear view of a first cooling element and a second cooling element provided in an embodiment of this disclosure.

[0023] Figure 8 The figure shown is a cross-sectional view of a first locking member and a first threaded portion provided in an embodiment of the present disclosure.

[0024] Figure 9 The figure shown is a cross-sectional view of the second locking member and the second threaded portion provided in an embodiment of the present disclosure.

[0025] Figure 10 The diagram shown is a structural schematic of a first flange provided in an embodiment of this disclosure.

[0026] Figure 11 The diagram shown is a structural schematic of a second flange provided in an embodiment of this disclosure.

[0027] Figure label:

[0028] 1. Reactor; 101. Furnace opening side; 102. Furnace tail side; 10. Cooling device; 100. Cooling assembly; 1001. Medium inlet; 1002. Medium outlet; 1003. Cooling chamber; 110. First cooling element; 1101. First medium inlet; 1102. First medium outlet; 1103. First cooling chamber; 1104. First clearance groove; 1105. First elongated hole; 120. Second cooling element; 1201. Second medium inlet; 1202. Second medium outlet; 1203. Second cooling chamber; 1204. Second clearance groove; 1205. Second elongated hole; 200. First locking element; 201. First abutment part; 202. First connecting part; 300. Second locking element; 301. Second abutment part; 302. Second connecting part; 400. First connecting pipe; 500. Second connecting pipe Pipeline; 600, Third connecting pipe; 20, Furnace tube; 2001, Chamber; 30, First flange assembly; 3001, Support part; 3011, Limiting groove; 3002, First threaded part; 3003, Second threaded part; 310, First flange; 3101, First flange medium inlet; 3102, First flange medium outlet; 3103, First flange medium channel; 320, Second flange; 3201, Second flange medium inlet; 3202, Second flange medium outlet; 3203, Second flange medium channel; 330, Second sealing ring; 340, Tail end cap; 350, Third sealing ring; 360, Third locking element; 40, Auxiliary heating sleeve; 401, First end of auxiliary heating sleeve; 402, Second end of auxiliary heating sleeve; 50, First sealing ring; 60, Second flange assembly; 70, Support assembly. Detailed Implementation

[0029] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0030] Figure 1 The image shown is a cross-sectional view of a reactor provided in an embodiment of this disclosure. Figure 2 As shown Figure 1 The diagram shows a magnified view of a portion of the reactor in region A. Figure 3 The diagram shown is a schematic diagram of the structure of a reactor tube removal system provided in an embodiment of this disclosure. Figure 4 As shown Figure 3 The diagram shows a magnified view of a portion of the reactor with the furnace tubes removed, located in area B. Figure 5 The image shown is a rear view of a reactor provided in an embodiment of this disclosure. Figure 6 As shown Figure 5 The diagram shows a magnified view of a portion of the reactor in region C. Figures 1 to 6 As shown, the cooling device 10 is applied to the reactor 1, which includes a furnace tube 20, a first flange assembly 30, at least one auxiliary heating sleeve 40, and at least one first sealing ring 50. The reactor 1 has a furnace opening side 101 and a furnace tail side 102. The furnace tube 20 has a chamber 2001, and the auxiliary heating sleeve is detachably connected to the furnace tube 20. The first flange assembly 30 is sealed to one end of the furnace tube 20 near the furnace tail side 102. The side of the first flange assembly 30 away from the furnace opening side 101 has at least one support portion 3001. The second end 402 of the auxiliary heating sleeve passes through the support portion 3001, and the first end 401 of the auxiliary heating sleeve extends into the chamber 2001. The end of the support portion 3001 away from the furnace tube 20 has a limiting groove 3011. The first sealing ring 50 is fitted onto the second end 402 of the auxiliary heating sleeve and is located in the limiting groove 3011, so that the second end 402 of the auxiliary heating sleeve and the support portion 3001 are sealed.

[0031] The cooling device 10 includes a cooling assembly 100, which surrounds the support portion 3001 and is connected to the first flange assembly 30. The cooling assembly 100 has a medium inlet 1001, a medium outlet 1002, and a cooling chamber 1003 connecting the medium inlet 1001 and the medium outlet 1002. The medium inlet 1001 allows cooling medium to pass through and enter the cooling chamber 1003, while the medium outlet 1002 allows cooling medium to pass through and exit the cooling chamber 1003. This allows the cooling medium to remove heat from around the support portion 3001, reducing the temperature around the first sealing ring 50 and preventing damage to the first sealing ring 50 due to high temperatures. This extends the service life of the first sealing ring 50, prolongs the maintenance cycle of the reactor 1, and reduces the maintenance cost of the reactor 1.

[0032] For example, the reactor 1 also includes a second flange assembly 60 and a support assembly 70. The second flange assembly 60 is sealed to one end of the furnace tube 20 near the furnace opening side 101. One end of the support assembly 70 is connected to the second flange assembly 60, and the other end of the support assembly 70 extends into the chamber 2001 and is detachably connected to the first end 401 of the auxiliary heating sleeve.

[0033] For example, the cooling medium may be water, brine, trinitrate solution, or other fluid liquids that have a cooling effect.

[0034] In some embodiments, such as Figure 1 , Figure 2 , Figure 5 and Figure 6 As shown, the cooling assembly 100 includes a first cooling element 110 and a second cooling element 120. The first cooling element 110 is located on one side of the support portion 3001 and is detachably connected to the first flange assembly 30. The first cooling element 110 has a first medium inlet 1101, a first medium outlet 1102, and a first cooling chamber 1103 communicating between the first medium inlet 1101 and the first medium outlet 1102. The second cooling element 120 is disposed opposite to the first cooling element 110 and is detachably connected to the first flange assembly 30. The second cooling element 120 has a second medium inlet 1201, a second medium outlet 1202, and a second cooling chamber 1203 communicating between the second medium inlet 1201 and the second medium outlet 1202. The second medium inlet 1201 communicates with the first medium outlet 1102. The first medium inlet 1101 allows cooling medium to pass through and enter the first cooling chamber 1103, the first medium outlet 1102 allows cooling medium to pass through and exit the first cooling chamber 1103, the second medium inlet 1201 allows cooling medium exiting the first cooling chamber 1103 to pass through and enter the second cooling chamber 1203, and the second medium outlet 1202 allows cooling medium to pass through and exit the second cooling chamber 1203.

[0035] Specifically, the cooling medium enters the first cooling chamber 1103 through the first medium inlet 1101, and enters the second cooling chamber 1203 through the first medium outlet 1102 and the second medium inlet 1201, and is discharged through the second medium outlet 1202.

[0036] By dividing the cooling assembly 100 into two cooling components, a first cooling component 110 and a second cooling component 120, and by making both the first cooling component 110 and the second cooling component 120 detachably connected to the first flange assembly 30, it is convenient to install and remove the cooling assembly 100, as well as to replace and maintain the first cooling component 110 and the second cooling component 120.

[0037] For example, the first medium inlet 1101 forms the medium inlet 1001 of the cooling assembly 100, the second medium outlet 1202 forms the medium outlet 1002 of the cooling assembly 100, and the first cooling chamber 1103 and the second cooling chamber 1203 together form the cooling chamber 1003 of the cooling assembly 100.

[0038] For example, the cooling device 10 further includes a first connecting pipe 400, the first end of the first connecting pipe 400 being connected to the first medium output port 1102, and the second end of the first connecting pipe 400 being connected to the second medium input port 1201, so as to realize the connection between the second medium input port 1201 and the first medium output port 1102.

[0039] In some embodiments, such as Figure 1 , Figure 2 , Figure 5 and Figure 6 As shown, both the furnace tube 20 and the support portion 3001 extend along the first horizontal direction X1. The first cooling element 110 is located above the support portion 3001, and the second cooling element 120 is located below the support portion 3001. The first medium inlet 1101 and the second medium outlet 1202 are arranged adjacent to each other, and the first medium outlet 1102 and the second medium inlet 1201 are arranged adjacent to each other.

[0040] By positioning the first cooling element 110 above the support portion 3001 and the second cooling element 120 below the support portion 3001, the cooling medium enters the first cooling chamber 1103 from the higher-positioned first medium inlet 1101. After the first cooling chamber 1103 is filled with cooling medium, it flows from the higher-positioned first medium outlet 1102 to the lower-positioned second medium inlet 1201 and enters the second cooling chamber 1203. After the second cooling chamber 1203 is filled with cooling medium, it is discharged from the lower-positioned second medium outlet 1202. This high-low positioning of the first cooling element 110 and the second cooling element 120 not only facilitates the flow of cooling medium but also ensures that the cooling chamber is filled with cooling medium, thereby removing more heat from the area around the support portion 3001 and improving the cooling effect on the support portion 3001, the second end 402 of the auxiliary heating sleeve, and the first sealing ring 50.

[0041] In addition, the first medium output port 1102 and the second medium input port 1201 are arranged adjacent to each other, which facilitates the connection between the second medium input port 1201 and the first medium output port 1102 using a shorter first connecting pipe 400.

[0042] In some embodiments, such as Figure 2 and Figure 7 As shown, the first cooling element 110 has at least one downward-facing first clearance groove 1104, and the second cooling element 120 has at least one upward-facing second clearance groove 1204. The first clearance groove 1104 and the second clearance groove 1204 are aligned in the vertical direction. The support portion 3001 passes through the first clearance groove 1104 and the second clearance groove 1204, thereby ensuring that the first cooling element 110 and the second cooling element 120 are as close as possible to the support portion 3001. This allows the cooling medium to flow as close as possible to the support portion 3001 as possible when passing through the first cooling chamber 1103 and the second cooling chamber 1203, further improving the cooling effect on the support portion 3001, the second end 402 of the auxiliary heating sleeve, and the first sealing ring 50.

[0043] For example, the shape of the first clearance groove 1104 can be rectangular, trapezoidal, other polygonal, or irregular. For example, the shape of the second clearance groove 1204 can be rectangular, trapezoidal, other polygonal, or irregular.

[0044] In some embodiments, such as Figure 2 and Figure 7As shown, the cross-sectional shape of the support portion 3001 is annular, and the shapes of the first clearance groove 1104 and the second clearance groove 1204 are both semi-circular. The side wall of the first clearance groove 1104 contacts the top wall of the support portion 3001, and the side wall of the second clearance groove 1204 contacts the bottom wall of the support portion 3001. This allows the cooling medium to flow closer to the support portion 3001 when passing through the first cooling chamber 1103 and the second cooling chamber 1203, thereby further improving the cooling effect on the support portion 3001, the second end 402 of the auxiliary heating sleeve, and the first sealing ring 50.

[0045] In some embodiments, such as Figure 2 , Figure 3 and Figure 7 As shown, there are multiple auxiliary heating sleeves 40, multiple support parts 3001, and multiple first sealing rings 50. These multiple auxiliary heating sleeves 40, multiple support parts 3001, and multiple first sealing rings 50 are arranged sequentially along the second horizontal direction X2, and are configured in a one-to-one correspondence. The second horizontal direction X2 is perpendicular to the first horizontal direction X1. There are also multiple first clearance grooves 1104 and multiple second clearance grooves 1204. These multiple first clearance grooves 1104 and multiple second clearance grooves 1204 are arranged sequentially along the second horizontal direction X2, and are configured in a one-to-one correspondence. Multiple support parts 3001 pass through their respective first clearance grooves 1104 and second clearance grooves 1204.

[0046] Multiple auxiliary heating sleeves 40 support multiple auxiliary heating elements to provide auxiliary heating for the furnace tube 20, thereby improving heating efficiency. Furthermore, a first cooling element 110 and a second cooling element 120 surround multiple support portions 3001. When the cooling medium flows through the first cooling element 110 and the second cooling element 120, it can cool the multiple support portions 3001, the multiple auxiliary heating sleeves 40, and the multiple first sealing rings 50, simplifying the structure of the cooling device 10 as much as possible and saving costs.

[0047] The number of auxiliary heating sleeve 40, support part 3001, and first sealing ring 50 can be set according to production needs, and the number of first clearance groove 1104 and second clearance groove 1204 is adapted to the number of support parts 3001. For example, the number of auxiliary heating sleeve 40, support part 3001, first sealing ring 50, first clearance groove 1104, and second clearance groove 1204 can be three, four, or even more.

[0048] In some embodiments, such as Figures 6 to 8As shown, the first cooling element 110 has first elongated holes 1105 extending vertically at both ends, the first flange assembly 30 has a first threaded portion 3002, and the cooling device 10 further includes a first locking element 200. The first locking element 200 has a first abutting portion 201 and a first connecting portion 202 connected to each other. The first connecting portion 202 passes through the first elongated hole 1105 and connects to the first threaded portion 3002. The first abutting portion 201 abuts against both sides of the first elongated hole 1105.

[0049] The position of the first cooling component 110 in the vertical direction is adjusted by using the first elongated hole 1105, so that the side wall of the first clearance groove 1104 contacts the top wall of the support part 3001, and the first locking component 200 is used to lock the first cooling component 110 to the first flange assembly 30, so that the position of the first cooling component 110 remains unchanged. The adjustment method is simple and reliable.

[0050] For example, the first locking element 200 may be a screw, bolt, etc.

[0051] In some embodiments, such as Figure 6 , Figure 7 and Figure 9 As shown, the second cooling element 120 has second elongated holes 1205 extending vertically at both ends, the first flange assembly 30 has a second threaded portion 3003, and the cooling device 10 further includes a second locking element 300. The second locking element 300 has a second abutting portion 301 and a second connecting portion 302 connected to each other. The second connecting portion 302 passes through the second elongated hole 1205 and connects to the second threaded portion 3003. The second abutting portion 301 abuts against both sides of the second elongated hole 1205.

[0052] The second cooling component 120 is adjusted in the vertical direction using the second elongated hole 1205, so that the side wall of the second clearance groove 1204 contacts the bottom wall of the support part 3001, and the second locking component 300 is used to lock the second cooling component 120 to the first flange assembly 30, so that the position of the second cooling component 120 remains unchanged. The adjustment method is simple and reliable.

[0053] For example, the second locking element 300 may be a screw, bolt, etc.

[0054] In some embodiments, such as Figures 2 to 5 as well as Figure 10As shown, the first flange assembly 30 includes a first flange 310, a second flange 320, a second sealing ring 330, and a tail cap 340. The first flange 310 is fitted onto the furnace tube 20 and has a first flange medium inlet 3101, a first flange medium outlet 3102, and a first flange medium channel 3103 connecting the first flange medium inlet 3101 and the first flange medium outlet 3102. The second flange 320 is fitted onto the furnace tube 20 and is detachably connected to the side of the first flange 310 away from the furnace opening 101. The second sealing ring 330 is disposed between the first flange 310 and the second flange 320 to provide a sealing connection between the second flange 320 and the first flange 310. The first flange medium channel 3103 surrounds the first flange 310 and is located close to the second sealing ring 330. The tail end cap 340 is detachably connected to the furnace tube 20 and is sealed to the side of the second flange 320 away from the first flange 310. The side of the tail end cap 340 away from the second flange 320 has a support portion 3001. The first medium inlet 1101 communicates with the first flange medium outlet 3102. The first flange medium inlet 3101 allows cooling medium to pass through to enter the first flange medium channel 3103, and the first flange medium outlet 3102 allows cooling medium to pass through to exit the first flange medium channel 3103 and flow to the first medium inlet 1101.

[0055] Specifically, the cooling medium enters the first flange medium channel 3103 from the first flange medium inlet 3101 and flows to the first medium inlet 1101 via the first flange medium outlet 3102.

[0056] The cooling medium enters the first flange medium channel 3103 through the first flange medium inlet 3101, flows around the first flange 310 once, and is discharged through the first flange medium outlet 3102, thereby cooling the second sealing ring 330 and preventing the second sealing ring 330 from overheating and being damaged.

[0057] In addition, the first medium inlet 1101 is connected to the first flange medium outlet 3102, so that the cooling medium flows from the first flange medium outlet 3102 to the first medium inlet 1101, so as to provide cooling medium for the cooling assembly 100. There is no need to equip the cooling assembly 100 with a separate medium supply device, which simplifies the structure of the reactor 1 and saves costs.

[0058] For example, the cooling device 10 further includes a second connecting pipe 500, the first end of which is connected to the first flange medium outlet 3102, and the second end of which is connected to the first medium inlet 1101, so as to realize the connection between the first medium inlet 1101 and the first flange medium outlet 3102.

[0059] In some embodiments, such as Figures 2 to 5 as well as Figure 11 As shown, the first flange assembly 30 further includes a third sealing ring 350, which is disposed between the tail end cover 340 and the second flange 320 to provide a sealing connection between the tail end cover 340 and the second flange 320. The second flange 320 has a second flange media inlet 3201, a second flange media outlet 3202, and a second flange media channel 3203 connecting the second flange media inlet 3201 and the second flange media outlet 3202. The second flange media channel 3203 surrounds the second flange 320 and is located near the third sealing ring 350. The second media outlet 3202 communicates with the second flange media inlet 3201. The second flange media inlet 3201 allows cooling medium discharged from the second cooling chamber 1203 to pass through and enter the second flange media channel 3203, while the second flange media outlet 3202 allows cooling medium to pass through and exit the second flange media channel 3203.

[0060] Specifically, the cooling medium flows from the second medium outlet 1202 to the second flange medium inlet 3201, and after flowing through the second flange medium channel 3203, it is discharged from the second flange medium outlet 3202.

[0061] The cooling medium flows from the second medium outlet 1202 to the second flange medium inlet 3201 to provide cooling medium to the second flange 320. This eliminates the need for a separate medium supply device for the second flange 320, simplifying the structure of the reactor 1 and saving costs.

[0062] In addition, the cooling medium enters the second flange medium channel 3203 through the second flange medium inlet 3201, flows around the second flange 320 once, and is discharged through the second flange medium outlet 3202, thereby cooling the third sealing ring 350 and preventing the third sealing ring 350 from overheating and being damaged.

[0063] For example, the cooling device 10 further includes a third connecting pipe 600, the first end of which is connected to the second medium output port 1202, and the second end of which is connected to the second flange medium input port 3201, so as to realize the connection between the second medium output port 1202 and the second flange medium input port 3201.

[0064] For example, such as Figure 1 and Figure 2As shown, the opening of the limiting groove 3011 faces the side away from the furnace tube 20. The first flange assembly 30 also includes a third locking member 360. The third locking member 360 is detachably connected to the end of the support portion 3001 away from the furnace tube 20 to close the opening of the limiting groove 3011. The first sealing ring 50 is limited between the third locking member 360 and the limiting groove 3011.

[0065] like Figures 1 to 3 As shown, the reactor 1 has a furnace opening side 101 and a furnace tail side 102. The reactor 1 includes the cooling device 10, furnace tube 20, first flange assembly 30, at least one auxiliary heating sleeve 40, and at least one first sealing ring 50 mentioned in the above embodiments. The furnace tube 20 has a chamber 2001. The first flange assembly 30 is sealed to one end of the furnace tube 20 near the furnace tail side 102, and the side of the first flange assembly 30 away from the furnace opening side 101 has at least one support portion 3001. The end of the support portion 3001 away from the furnace tube 20 has a limiting groove 3011. The first end 401 of the auxiliary heating sleeve extends into the chamber 2001 and is detachably connected to the furnace tube 20. The second end 402 of the auxiliary heating sleeve passes through the support portion 3001. The first sealing ring 50 is fitted onto the second end 402 of the auxiliary heating sleeve and is located in the limiting groove 3011 to seal between the second end 402 of the auxiliary heating sleeve and the support portion 3001. The cooling device 10 is arranged around the support portion 3001 and connected to the first flange assembly 30. The cooling device 10 is configured to allow the cooling medium to pass through, so that the cooling medium carries away the heat around the support portion 3001 when it flows through the cooling device 10.

[0066] Since the reactor 1 includes a cooling device 10, all the technical features and effects of the cooling device 10 are not described here.

[0067] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0068] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0069] It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0070] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0071] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0072] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A cooling device, characterized in that, The invention relates to a reactor, comprising a furnace tube, a first flange assembly, at least one auxiliary heating sleeve, and at least one first sealing ring. The reactor has a furnace opening side and a furnace tail side. The furnace tube has a chamber. The auxiliary heating sleeve is detachably connected to the furnace tube. The first flange assembly is sealed to one end of the furnace tube near the furnace tail side. The side of the first flange assembly away from the furnace opening side has at least one support portion. The second end of the auxiliary heating sleeve passes through the support portion, and the first end of the auxiliary heating sleeve extends into the chamber. The end of the support portion away from the furnace tube has a limiting groove. The first sealing ring is fitted onto the second end of the auxiliary heating sleeve and is located in the limiting groove. The cooling device includes: A cooling assembly is disposed around the support portion and connected to the first flange assembly; The cooling assembly has a medium inlet, a medium outlet, and a cooling chamber connecting the medium inlet and the medium outlet. The medium inlet allows cooling medium to pass through and enter the cooling chamber, and the medium outlet allows cooling medium to pass through and exit the cooling chamber.

2. The cooling device according to claim 1, characterized in that, The cooling assembly includes: A first cooling element is located on one side of the support portion and is detachably connected to the first flange assembly; wherein the first cooling element has a first medium inlet, a first medium outlet, and a first cooling chamber communicating with the first medium inlet and the first medium outlet; The second cooling component is disposed opposite to the first cooling component and is detachably connected to the first flange assembly; wherein the second cooling component has a second medium inlet, a second medium outlet, and a second cooling chamber communicating with the second medium inlet and the second medium outlet, and the second medium inlet is communicating with the first medium outlet; Wherein, the first medium inlet allows the cooling medium to pass through to enter the first cooling chamber, the first medium outlet allows the cooling medium to pass through to exit the first cooling chamber, the second medium inlet allows the cooling medium exiting the first cooling chamber to pass through to enter the second cooling chamber, and the second medium outlet allows the cooling medium to pass through to exit the second cooling chamber.

3. The cooling device according to claim 2, characterized in that, Both the furnace tube and the support extend along a first horizontal direction. The first cooling element is located above the support, and the second cooling element is located below the support. The first medium inlet and the second medium outlet are arranged adjacent to each other.

4. The cooling device according to claim 3, characterized in that, The first cooling member has at least one downward-facing first clearance groove, and the second cooling member has at least one upward-facing second clearance groove. The first clearance groove and the second clearance groove are aligned in the vertical direction, and the support portion passes through the first clearance groove and the second clearance groove.

5. The cooling device according to claim 4, characterized in that, The cross-sectional shape of the support is annular, and the first clearance groove and the second clearance groove are both semi-circular. The side wall of the first clearance groove contacts the top wall of the support, and the side wall of the second clearance groove contacts the bottom wall of the support.

6. The cooling device according to claim 5, characterized in that, The auxiliary heating sleeve, the support portion, and the first sealing ring are all in multiple quantities. The multiple auxiliary heating sleeves, the multiple support portions, and the multiple first sealing rings are arranged sequentially along the second horizontal direction and are arranged in a one-to-one correspondence. The second horizontal direction is perpendicular to the first horizontal direction. The number of the first clearance slot and the second clearance slot are both multiple, and the multiple first clearance slots and multiple second clearance slots are arranged sequentially along the second horizontal direction and are set in a one-to-one correspondence; wherein, the multiple support parts pass through their respective first clearance slots and second clearance slots.

7. The cooling device according to claim 6, characterized in that, The first cooling element has a first elongated hole extending vertically at both ends, and the first flange assembly has a first threaded portion; the cooling device further includes: a first locking element, the first locking element having a first abutting portion and a first connecting portion connected to each other, the first connecting portion passing through the first elongated hole and connected to the first threaded portion, and the first abutting portion abutting against both sides of the first elongated hole; And / or, The second cooling element has two ends with a second elongated hole extending in a vertical direction, and the first flange assembly has a second threaded portion; the cooling device further includes: a second locking element, the second locking element having a second abutting portion and a second connecting portion connected to each other, the second connecting portion passing through the second elongated hole and connected to the second threaded portion, and the second abutting portion abutting against both sides of the second elongated hole.

8. The cooling device according to any one of claims 2 to 7, characterized in that, The first flange assembly includes: A first flange is fitted onto the furnace tube. The first flange has a first flange medium inlet, a first flange medium outlet, and a first flange medium channel connecting the first flange medium inlet and the first flange medium outlet. The second flange is fitted onto the furnace tube and is detachably connected to the side of the first flange away from the furnace opening. A second sealing ring is disposed between the first flange and the second flange to make the second flange and the first flange seal together. The medium passage of the first flange is disposed around the first flange and close to the second sealing ring. The tail end cap is detachably connected to the furnace tube and is sealed to the side of the second flange away from the first flange, wherein the side of the tail end cap away from the second flange has the support portion. The first medium inlet is connected to the first flange medium outlet. The first flange medium inlet allows the cooling medium to pass through and enter the first flange medium channel, and the first flange medium outlet allows the cooling medium to pass through and exit the first flange medium channel and flow to the first medium inlet.

9. The cooling device according to claim 8, characterized in that, The first flange assembly also includes: A third sealing ring is disposed between the tail end cover and the second flange to make the tail end cover and the second flange seal together. The second flange has a second flange medium inlet, a second flange medium outlet, and a second flange medium channel connecting the second flange medium inlet and the second flange medium outlet. The second flange medium channel is arranged around the second flange and close to the third sealing ring. The second medium outlet is connected to the second flange medium inlet. The second flange medium inlet allows the cooling medium discharged from the second cooling chamber to pass through and enter the second flange medium channel, and the second flange medium outlet allows the cooling medium to pass through and exit the second flange medium channel.

10. A reactor, characterized in that, The reactor has a furnace opening side and a furnace tail side, and the reactor includes: Furnace tubes, which have chambers; A first flange assembly is sealed to one end of the furnace tube near the furnace tail side, and the side of the first flange assembly away from the furnace opening side has at least one support portion, wherein the end of the support portion away from the furnace tube has a limiting groove. At least one auxiliary heating sleeve, the first end of which extends into the chamber and is detachably connected to the furnace tube, and the second end of which passes through the support portion; At least one first sealing ring is fitted onto the second end of the auxiliary heating sleeve and located in the limiting groove to seal the second end of the auxiliary heating sleeve with the support portion; The cooling device as claimed in any one of claims 1 to 9, disposed around the support and connected to the first flange assembly, is configured to allow the passage of a cooling medium.

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