A planar slot for surface treatment of a gas diffuser

Abstract

The utility model discloses a kind of plane groove for gas diffuser surface treatment, including shell (1), the shell (1) bottom is equipped with liquid medicine branch pipe (2) and air inlet branch pipe (3), the gas diffuser (4) is horizontally placed into shell (1) inside;Liquid medicine and gas are sprayed using liquid medicine branch pipe (2) and air inlet branch pipe (3), liquid medicine is stirred using gas, guarantee the uniformity of liquid medicine, ensure that liquid medicine distribution is consistent in tank, gas diffuser (4) is horizontally entered into the liquid medicine of shell (1) simultaneously, the bottom surface of gas diffuser (4) contacts water surface at the same time, ensure that reaction time consistency, the consistency of corrosion amount, the entrance below each hole is simultaneously sealed by water, bubble escapes fast in hole, liquid medicine fills completely, ensure the thoroughness of surface residual film peeling, and the liquid medicine demand of plane groove is only 1 / 3-1 / 2 of vertical groove, can greatly reduce liquid medicine procurement cost, save equipment investment and operating cost.

Description

Technical Field

[0001] This utility model belongs to the field of gas diffuser technology. Specifically, this utility model relates to a planar groove for surface treatment of gas diffusers. Background Technology

[0002] In chemical vapor deposition (CVD) equipment, the gas diffuser is a core component, and its performance directly affects the resolution of the end product. As the demand for high-resolution products in the panel display and semiconductor industries increases, the manufacturing process has become more stringent in terms of the uniformity of the gas diffuser's aperture. To meet this requirement, the precision requirements of its surface oxide film treatment process have increased accordingly, and the planar chemical treatment tank plays an important role in this process.

[0003] A patent application (patent number 202121524831.0, published on February 1, 2022) discloses a gas diffuser and a chemical vapor deposition (CVD) apparatus. The gas diffuser includes a first working surface and a second working surface arranged opposite to each other. Multiple through-type gas transmission channels are formed on the gas diffuser. Each gas transmission channel includes a conical groove, a transition hole, and a micropore connected in sequence. The opening end of the conical groove is located on the first working surface of the gas diffuser, and the opening area of ​​the micropore is located on the second working surface. Each gas transmission channel shares a central axis for its conical groove, transition hole, and micropore. When applying CVD, the narrow micropores control the gas flow, ensuring uniform gas flow within a certain gas flow rate and pressure range. The plasma-generated microparticles are much smaller than the diameter of the transition hole, preventing the micropores from being blocked by reactant particles. The conical grooves facilitate plasma generation and stabilize the plasma discharge process. This significantly improves deposition stability and the applicability of the gas diffuser.

[0004] Existing technologies typically employ a vertical immersion treatment tank for reaction, relying on a gas agitator at the bottom of the tank to maintain the uniformity of workpiece surface temperature and chemical concentration, thereby effectively removing residual film. However, due to the large depth of the tank, the effect of gas agitation gradually diminishes as it travels upwards from the bottom, resulting in uneven distribution of chemical concentration within the tank. This makes it difficult to precisely control the uniformity of the reaction, leading to excessive pore enlargement in localized areas of the product, failing to achieve the required pore size uniformity, and ultimately shortening the product's lifespan. Utility Model Content

[0005] The present invention aims to provide a planar groove for surface treatment of gas diffusers to improve the treatment effect.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a planar groove for surface treatment of a gas diffuser, comprising a housing, wherein a liquid branch pipe and an air inlet branch pipe are provided at the bottom of the housing, and the gas diffuser is placed horizontally inside the housing.

[0007] The liquid outlet pipe is evenly provided with multiple upward-facing liquid outlet holes, and the air inlet pipe is evenly provided with multiple upward-facing air jet holes.

[0008] The liquid medicine branch pipe and the air inlet branch pipe are distributed on both sides of the bottom of the shell. The two sides of the shell are respectively provided with a liquid medicine input pipe and a stirring gas inlet pipe. The liquid medicine branch pipe is set on the liquid medicine input pipe, and the air inlet branch pipe is set on the stirring gas inlet pipe.

[0009] Both the liquid medicine inlet pipe and the stirring gas inlet pipe are L-shaped. The lower half of the liquid medicine inlet pipe and the stirring gas inlet pipe are arranged along the two corners of the housing, and the upper half of the liquid medicine inlet pipe and the stirring gas inlet pipe are arranged along the vertical corners of the two sides of the housing. The ends of the liquid medicine inlet pipe and the stirring gas inlet pipe are located on the outside of the housing.

[0010] The liquid medicine branch pipe and the air intake branch pipe are arranged in multiple sets at the bottom of the shell.

[0011] The liquid medicine input pipe is connected to a pump body for inputting liquid medicine, and the stirring gas inlet pipe is connected to a gas pump for pumping in gas.

[0012] The gas diffuser is equipped with a horizontal groove hanger.

[0013] The technical advantages of this invention are as follows: the liquid medicine and gas are sprayed out by the liquid medicine branch pipe and the air inlet branch pipe, and the gas is used to stir the liquid medicine to ensure the uniformity of the liquid medicine and the consistent distribution of the liquid medicine in the tank. At the same time, the gas diffuser enters the liquid medicine in the shell in a horizontal position, and the bottom surface of the gas diffuser contacts the water surface at the same time to ensure the consistency of reaction time and the consistency of corrosion. The inlet below each hole is sealed by water at the same time, the air bubbles in the hole escape quickly, the liquid medicine is completely filled, and the surface residual film is thoroughly peeled off. Attached Figure Description

[0014] This manual includes the following figures, which illustrate the following: Figure 1 This is a schematic diagram of the structure of a planar groove for surface treatment of a gas diffuser according to the present invention.

[0015] The markings in the diagram are: 1. Shell; 2. Liquid branch pipe; 3. Air inlet branch pipe; 4. Gas diffuser; 5. Liquid outlet; 6. Air jet; 7. Liquid input pipe; 8. Stirring gas inlet pipe; 9. Horizontal tank fixture. Detailed Implementation

[0016] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the utility model concept and technical solution, and to facilitate its implementation.

[0017] Please see Figure 1 A planar tank for surface treatment of a gas diffuser includes a housing 1. The bottom of the housing 1 is provided with a liquid branch pipe 2 and an air inlet branch pipe 3. A gas diffuser 4 is placed horizontally inside the housing 1. Liquid medicine and gas are sprayed out through the liquid branch pipe 2 and the air inlet branch pipe 3. The gas is used to stir the liquid medicine to ensure its uniformity and consistent distribution. At the same time, the gas diffuser 4 enters the liquid medicine in the housing 1 horizontally. The bottom surface of the gas diffuser 4 is in contact with the water surface at the same time to ensure consistent reaction time and consistent corrosion. The inlet below each hole is sealed with water at the same time, the air bubbles in the hole escape quickly, the liquid medicine is completely filled, and the surface residual film is thoroughly peeled off.

[0018] Multiple upward-facing liquid outlet holes 5 are evenly distributed on the liquid branch pipe 2, and multiple upward-facing air jet holes 6 are evenly distributed on the air inlet branch pipe 3. The liquid is sprayed out through the liquid outlet holes 5, and the gas is sprayed out from the air jet holes 6. Through the evenly distributed multiple liquid outlet holes 5 and air jet holes 6, the effect of covering as much area as possible is achieved, so that the liquid can be evenly spread in the tank.

[0019] The liquid medicine branch pipe 2 and the air inlet branch pipe 3 are distributed on both sides of the bottom of the shell 1. The two sides of the shell 1 are respectively provided with a liquid medicine input pipe 7 and a stirring gas inlet pipe 8. The liquid medicine branch pipe 2 is installed on the liquid medicine input pipe 7, and the air inlet branch pipe 3 is installed on the stirring gas inlet pipe 8. The liquid medicine input pipe 7 supplies liquid to the liquid medicine branch pipe 2, and the stirring gas inlet pipe 8 supplies air to the air inlet branch pipe 3.

[0020] Both the liquid medicine inlet pipe 7 and the stirring gas inlet pipe 8 are L-shaped. The lower half of the liquid medicine inlet pipe 7 and the stirring gas inlet pipe 8 are arranged along the two corners of the shell 1, and the upper half of the liquid medicine inlet pipe 7 and the stirring gas inlet pipe 8 are arranged along the vertical corners of the two sides of the shell 1. The ends of the liquid medicine inlet pipe 7 and the stirring gas inlet pipe 8 are located on the outside of the shell 1. The liquid medicine inlet pipe 7 and the stirring gas inlet pipe 8 are arranged along the edge corner of the shell 1 to minimize the volume occupied by the liquid medicine inlet pipe 7 and the stirring gas inlet pipe 8 in the shell 1, and also to minimize the impact on the internal liquid medicine, so that the liquid medicine branch pipe 2 can cover the bottom surface of the shell 1 as much as possible.

[0021] Multiple sets of liquid medicine branch pipes 2 and air intake branch pipes 3 are arranged alternately at the bottom of the shell 1; this increases the liquid medicine coverage area, allowing the liquid medicine to be evenly spread inside the shell 1. At the same time, the alternating arrangement of liquid medicine branch pipes 2 and air intake branch pipes 3 allows the gas to better stir the liquid medicine, making the liquid medicine more uniform.

[0022] The liquid medicine input pipe 7 is connected to a pump body for inputting liquid medicine, and the stirring gas inlet pipe 8 is connected to a gas pump for pumping in gas; the liquid medicine and gas are pumped in using the pump body and the gas pump.

[0023] The gas diffuser 4 is equipped with a horizontal groove hanger 9; used to control the raising and lowering of the gas diffuser 4.

[0024] Working principle: Under the action of the pump, the liquid medicine is transported to the bottom of the tank in the housing 1 through the liquid medicine inlet pipe 7 and the liquid medicine branch pipe 2. It is then evenly dispersed throughout the tank through the liquid outlet hole 5 on the liquid medicine branch pipe 2. The gas used for stirring is ejected through the gas outlet pipe, the gas inlet branch pipe 3, and the jet nozzle 6, causing the liquid medicine to tumble up and down, thereby achieving effective stirring. During this process, the gas diffuser 4 is suspended horizontally into the liquid medicine through the horizontal tank hanger 9, with its entire bottom surface simultaneously contacting the liquid surface. The lower inlet of each hole is simultaneously sealed by the liquid medicine, allowing the air inside the hole to be smoothly discharged from the top, making it difficult for gas to remain. This achieves complete filling of the holes with the liquid medicine, ensuring sufficient reaction between the liquid medicine and the residual film inside the holes. This process improves the peeling effect by avoiding the step of shaking the gas diffuser 4 to remove air bubbles, which is necessary in vertical tank operations. This improves operational efficiency. The gas diffuser 4 is placed horizontally in the tank, close to the bottom, so the required liquid level is lower, the gas stirring stroke is shorter, and the stirring effect is better. The liquid is sprayed evenly from the bottom of the tank. Combined with efficient gas stirring, the liquid state of each part of the gas diffuser 4 is basically the same, with no obvious concentration difference. The bottom surface of the gas diffuser 4 is in contact with the liquid surface at the same time, ensuring consistent reaction time and uniform corrosion in different areas. This significantly improves the uniformity of pore size after oxide film peeling, which can be increased to 5%.

[0025] Compared to the vertically positioned gas diffuser 4, whose porous structure makes it prone to leaving chemical residue during tank transitions, requiring manual tilting and emptying, which is not only labor-intensive but also risks contaminating subsequent tanks, the planar gas diffuser 4 utilizes gravity to allow the chemical residue to flow automatically from the diffuser holes, significantly reducing the risk of cross-contamination between tanks. It also minimizes chemical residue on the diffuser 4 surface, facilitating subsequent cleaning processes. Furthermore, when the vertically positioned gas diffuser 4 enters the water, the lower opening of the hole contacts the water surface first. Air can easily get trapped inside the holes, forming an "air trap," leading to residual bubbles and incomplete filling of the liquid. This requires manual shaking of the gas diffuser 4 to release the air. In a planar tank, when the diffuser enters parallel to the water surface, the bottom surface can simultaneously contact the water surface. Air inside the holes can escape quickly through the unobstructed path at the top, and the liquid can completely fill the holes without the need for additional shaking. This simplifies the process and improves operational efficiency. Furthermore, the liquid requirement for a planar tank is only 1 / 3 to 1 / 2 that of a vertical tank, which can significantly reduce liquid procurement costs and save on equipment investment and operating costs.

[0026] The technical effects of this utility model are as follows: the medicine liquid branch pipe 2 and the air inlet branch pipe 3 spray out medicine liquid and gas, and use gas to stir the medicine liquid to ensure the uniformity of the medicine liquid and ensure that the medicine liquid distribution in the tank is consistent. At the same time, the gas diffuser 4 enters the medicine liquid in the shell 1 in a horizontal position. The bottom surface of the gas diffuser 4 contacts the water surface at the same time to ensure the consistency of reaction time and the consistency of corrosion amount. The inlet below each hole is sealed by water at the same time, the air bubbles in the hole escape quickly, the medicine liquid is completely filled, and the surface residual film is thoroughly peeled off.

[0027] The present invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution of the present invention; or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. A planar groove for surface treatment of a gas diffuser, characterized in that: Includes a housing (1), the bottom of which is provided with a liquid branch pipe (2) and an air inlet branch pipe (3), and the gas diffuser (4) is placed horizontally inside the housing (1).

2. A planar groove for surface treatment of a gas diffuser according to claim 1, characterized in that: The liquid branch pipe (2) is provided with multiple upward-facing liquid outlet holes (5), and the air inlet branch pipe (3) is provided with multiple upward-facing air jet holes (6).

3. A planar groove for surface treatment of a gas diffuser according to claim 1 or 2, characterized in that: The liquid medicine branch pipe (2) and the air inlet branch pipe (3) are distributed on both sides of the bottom of the shell (1). The two sides of the shell (1) are respectively provided with a liquid medicine input pipe (7) and a stirring gas inlet pipe (8). The liquid medicine branch pipe (2) is set on the liquid medicine input pipe (7), and the air inlet branch pipe (3) is set on the stirring gas inlet pipe (8).

4. A planar groove for surface treatment of a gas diffuser according to claim 3, characterized in that: Both the liquid medicine inlet pipe (7) and the stirring gas inlet pipe (8) are L-shaped. The lower half of the liquid medicine inlet pipe (7) and the stirring gas inlet pipe (8) are arranged along the two corners of the housing (1), and the upper half of the liquid medicine inlet pipe (7) and the stirring gas inlet pipe (8) are arranged along the vertical corners of the two sides of the housing (1). The ends of the liquid medicine inlet pipe (7) and the stirring gas inlet pipe (8) are located on the outside of the housing (1).

5. A planar groove for surface treatment of a gas diffuser according to claim 3, characterized in that: The liquid medicine branch pipe (2) and the air intake branch pipe (3) are arranged in multiple sets at the bottom of the housing (1).

6. A planar groove for surface treatment of a gas diffuser according to claim 4, characterized in that: The liquid medicine input pipe (7) is connected to a pump body for inputting liquid medicine, and the stirring gas inlet pipe (8) is connected to a gas pump for pumping in gas.

7. A planar groove for surface treatment of a gas diffuser according to claim 1, characterized in that: The gas diffuser (4) is equipped with a horizontal groove hanger (9).

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