A bubble isolation device for a corrosion foil reactor cell

CN224884233UActive Publication Date: 2026-10-23HENAN RONGSHENG ELECTRONIC MATERIALS CO LTD
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Patent Information

Application Number
CN202522587376.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-05
Publication Date
2026-10-23
Estimated Expiration
2035-12-05

AI Technical Summary

Technical Problem

[0004]上述装置在对腐蚀箔进行气泡隔离时,其在运行过程中,输送辊之间的距离固定,在腐蚀箔的张力发生变化时,难以进行及时的调节,从而导致局部反应浓度不够均匀,进而造成腐蚀箔表面粗糙度不一致、性能不稳定,且在反应液通过排水管进行循环的过程中,其内部含有的杂质不便于进行清洁,杂质过滤机制,反应过程中产生的杂质会在槽内积累,既可能附着在阻挡网和凸块表面,降低气泡处理效率,还会影响腐蚀反应的均匀性

Benefits of technology

本实用新型通过调节机构中电动推杆驱动连接架带动调节辊沿滑动槽升降,配合第一限位辊、第二限位辊等多组限位辊协同引导腐蚀箔运行路径,以及气泡隔离筛阻挡电极板反应气泡的协同运作,带动了腐蚀箔张力的调整,从而实现了对不同规格腐蚀箔的适配性调节,避免气泡附着导致的局部反应不均,显著提升腐蚀箔表面反应均匀性和产品质量稳定性。

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Abstract

The utility model relates to etching foil production and processing technical field discloses a kind of etching foil reaction tank bubble isolation devices, including reaction tank, the inside fixed connection of reaction tank has electrode plate, the inside fixed connection of electrode plate has bubble isolation screen, the inside of reaction tank is provided with sliding groove, further include: adjusting mechanism, the adjusting mechanism includes the connecting frame slidingly connected in the inside of sliding groove, the utility model drives adjusting roller to lift along sliding groove by electric push rod drive connecting frame in adjusting mechanism, cooperate first limiting roller, second limiting roller and so on multiple sets of limiting roller collaborative guiding etching foil operating path, and the collaborative operation of bubble isolation screen blocking electrode plate reaction bubble, drive the adjustment of etching foil tension, to realize the adaptability adjustment of different specifications etching foil, avoid partial reaction uneven caused by bubble adhesion, significantly improve etching foil surface reaction uniformity and product quality stability.
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Description

Technical Field

[0001] This utility model relates to the field of corrosion foil production and processing technology, and in particular to a bubble isolation device for corrosion foil reaction tank. Background Technology

[0002] As the electronic materials industry continues to demand higher performance from corrosion foils, the problem of bubble interference in the reaction tank is becoming increasingly prominent. During the electrochemical corrosion process, if the hydrogen bubbles generated on the electrode surface are not removed in time, they will cause phenomena such as liquid surface fluctuations and uneven current distribution, resulting in abnormal oxide film pore size distribution, which directly affects the specific surface area and dielectric properties of the corrosion foil.

[0003] The publication number is CN208455100U. This utility model discloses a bubble isolation device for an etching foil reaction tank, including an etching tank. The inlet at the top and the outlet at the bottom of the etching tank are connected by a pipeline located outside the etching tank. A circulation pump is provided in the middle of the pipeline and is connected to a heat exchanger. Two relatively parallel electrodes are provided inside the etching tank. A multi-layer bubble isolation screen is provided between the electrodes. Multiple drive rollers are provided above and below the electrodes. The drive rollers drive the etching foil to move and the etching foil passes between the two electrodes. This utility model has the following advantages: by using a bubble isolation screen, the large number of bubbles generated will not cause violent fluctuations in the surface of the tank liquid, and the temperature of the tank liquid is also uniform and controllable, thus improving the quality of the etching foil.

[0004] When the above-mentioned device isolates bubbles from the corrosion foil, the distance between the conveying rollers is fixed during operation. When the tension of the corrosion foil changes, it is difficult to adjust in time, resulting in uneven local reaction concentration. This leads to inconsistent surface roughness and unstable performance of the corrosion foil. Furthermore, as the reaction liquid circulates through the drain pipe, the impurities contained within it are not easy to clean. Due to the impurity filtration mechanism, the impurities generated during the reaction will accumulate in the tank, which may adhere to the surface of the blocking mesh and protrusions, reducing the bubble treatment efficiency and affecting the uniformity of the corrosion reaction. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a bubble isolation device for corrosion foil reaction tank.

[0006] This utility model is achieved using the following technical solution: a bubble isolation device for a corrosion foil reaction tank, comprising a reaction tank, an electrode plate fixedly connected inside the reaction tank, a bubble isolation screen fixedly connected inside the electrode plate, and a sliding groove formed inside the reaction tank, and further comprising: An adjusting mechanism, the adjusting mechanism including a connecting frame slidably connected inside a sliding groove, and an adjusting roller rotatably connected inside the connecting frame; The circulation mechanism includes a first transmission pipe fixedly connected inside the reaction tank, an installation sleeve fixedly connected to the top of the first transmission pipe, and a filter screen disposed inside the installation sleeve.

[0007] As a further improvement to the above solution, a mounting frame is fixedly connected to the top of the reaction tank, an electric push rod is fixedly connected to the top of the mounting frame, a connecting frame is fixedly connected to the bottom of the electric push rod, and a first limiting roller is rotatably connected inside the mounting frame.

[0008] Through the above technical solution, the fixed connection between the electric push rod and the connecting frame enables precise power transmission, driving the adjusting roller to rise and fall stably along the sliding groove. At the same time, the first limit roller provides initial guiding support for the etching foil, thus constructing the core power and guiding system of the adjusting mechanism, laying the foundation for subsequent coordinated guidance by multiple sets of limit rollers and adjustment of the etching foil tension.

[0009] As a further improvement to the above scheme, a second limiting roller is rotatably connected inside the reaction tank, and a third limiting roller is rotatably connected inside the reaction tank.

[0010] Through the above technical solution, the second and third limiting rollers work together with the first limiting roller to form a multi-dimensional guiding network, which precisely constrains the running trajectory of the etched foil, prevents it from deviating or wrinkling during movement, and ensures that the adjustment roller can evenly affect the tension of the etched foil.

[0011] As a further improvement to the above scheme, a fourth limiting roller is rotatably connected inside the reaction tank, a support plate is fixedly connected to the top of the reaction tank, a fifth limiting roller is rotatably connected inside the support plate, and an etching foil is provided on the outside of the fifth limiting roller.

[0012] Through the above technical solution, the supplementary guidance of the fourth and fifth limiting rollers, and the stable fixation of the fifth limiting roller by the support plate, the full-path guidance of the corrosion foil from the inside to the outside of the reaction tank is improved, so that the corrosion foil can move smoothly after the tension is adjusted, and avoid the risk of increased bubble adhesion due to path fluctuation.

[0013] As a further improvement to the above solution, a second transmission pipe is fixedly connected to the top of the mounting sleeve, a fixing plate is fixedly connected to the left side of the reaction tank, a circulation pump is fixedly connected to the front of the fixing plate, and the circulation pump is fixedly connected to the outside of the second transmission pipe.

[0014] Through the above technical solution, the connection between the circulating pump, the second transmission pipe, the mounting sleeve, and the first transmission pipe forms a closed circulation channel, driving the reaction liquid to flow continuously and in a directional manner, forming the core power and transmission system for the circulation of the reaction liquid, effectively avoiding the static accumulation of impurities in the reaction liquid, creating continuous flow conditions for the filter screen to filter impurities, and ensuring the basic cleanliness of the reaction environment in the reaction tank.

[0015] As a further improvement to the above solution, the mounting sleeve has a slot inside, a fixing frame is inserted into the mounting sleeve, the filter screen is fixedly connected inside the fixing frame, an insert block is slidably connected inside the fixing frame, and a pull block is fixedly connected to the outside of the insert block.

[0016] Through the above technical solution, the fixing frame provides a stable mounting carrier for the filter screen, realizing precise docking between the filter screen and the circulation channel, ensuring that impurities are efficiently intercepted when the reaction liquid flows through. At the same time, the sliding connection between the pull block and the insertion block provides a convenient operation structure for the fixing frame to be disassembled and assembled, so that the cleaning and replacement of the filter screen does not require complicated tools, laying a structural foundation for subsequent rapid maintenance and improving the ease of operation of the equipment.

[0017] As a further improvement to the above solution, the insert block is inserted into the inside of the slot, the pull block is slidably connected to the inside of the fixing frame, and a return spring is fixedly connected to the right side of the insert block, the return spring being fixedly connected between the insert block and the mounting sleeve.

[0018] Through the above technical solution, the insertion and engagement of the plug and slot achieves a stable lock between the fixing frame and the mounting sleeve, preventing the filter screen from loosening and shifting under the impact of the circulating reaction liquid, and ensuring a continuous and stable filtration effect; the elastic reset action of the reset spring allows the plug to automatically engage or disengage from the slot, enabling tool-free quick disassembly and assembly of the fixing frame, greatly reducing the time cost of cleaning and replacing the filter screen, ensuring a continuous clean circulation of the reaction liquid, and improving the continuous operation efficiency and maintenance convenience of the device.

[0019] Compared with the prior art, the beneficial effects of this utility model are as follows: This invention uses an electric push rod in the adjustment mechanism to drive the connecting frame, which in turn drives the adjusting roller to move up and down along the sliding groove. This, along with multiple sets of limiting rollers such as the first and second limiting rollers, guides the running path of the etching foil. The coordinated operation of the bubble isolation screen to block the reaction bubbles of the electrode plate also drives the adjustment of the tension of the etching foil. This achieves adaptability adjustment for etching foils of different specifications, avoids uneven local reaction caused by bubble adhesion, and significantly improves the uniformity of the surface reaction of the etching foil and the stability of product quality.

[0020] This invention utilizes a circulating pump in a circulation mechanism to drive the reaction liquid through a first transmission pipe, an mounting sleeve, and a second transmission pipe to form a closed loop. Combined with a filter screen to remove impurities, and the linkage between the pull block, the insertion block, and the return spring to enable quick assembly and disassembly of the fixing frame, this invention achieves the dual effects of continuous clean circulation of the reaction liquid and convenient maintenance of the filter screen. This ensures the cleanliness of the reaction environment within the reaction tank, prevents impurities from affecting the corrosion effect, and significantly reduces the time cost of cleaning and replacing the filter screen, thereby improving the continuous operation efficiency and maintenance convenience of the device. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a cross-sectional view of the overall structure of this utility model; Figure 3 This is a cross-sectional view of the adjustment mechanism of this utility model; Figure 4 This is a schematic diagram of the circulating mechanism structure of this utility model; Figure 5 This is a schematic diagram of the fixing frame part of this utility model; Explanation of key symbols: 1. Reaction tank; 2. Adjustment mechanism; 3. Circulation mechanism; 11. Electrode plate; 12. Bubble isolation screen; 13. Sliding groove; 201. Mounting frame; 202. Electric push rod; 203. Connecting frame; 204. Adjusting roller; 205. First limiting roller; 206. Second limiting roller; 207. Third limiting roller; 208. Fourth limiting roller; 209. Support plate; 2010. Fifth limiting roller; 301. First transmission pipe; 302. Mounting sleeve; 303. Second transmission pipe; 304. Fixing plate; 305. Circulation pump; 306. Slot; 307. Fixing frame; 308. Filter screen; 309. Insert block; 3010. Return spring; 3011. Pull block. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0023] Example: Please combine Figure 1-5 This embodiment of a bubble isolation device for a corrosion foil reaction tank includes a reaction tank 1, an electrode plate 11 fixedly connected inside the reaction tank 1, a bubble isolation screen 12 fixedly connected inside the electrode plate 11, and a sliding groove 13 formed inside the reaction tank 1. It also includes: Adjustment mechanism 2 includes a connecting frame 203 that is slidably connected inside the sliding groove 13, and an adjustment roller 204 is rotatably connected inside the connecting frame 203; The circulation mechanism 3 includes a first transmission pipe 301 fixedly connected inside the reaction tank 1. The top of the first transmission pipe 301 is fixedly connected to an installation sleeve 302, and a filter screen 308 is provided inside the installation sleeve 302.

[0024] A mounting bracket 201 is fixedly connected to the top of the reaction tank 1. An electric push rod 202 is fixedly connected to the top of the mounting bracket 201. A connecting bracket 203 is fixedly connected to the bottom of the electric push rod 202. A first limiting roller 205 is rotatably connected inside the mounting bracket 201.

[0025] The reaction tank 1 is rotatably connected to a second limiting roller 206, and the reaction tank 1 is rotatably connected to a third limiting roller 207.

[0026] The reaction tank 1 is rotatably connected to a fourth limiting roller 208, and the top of the reaction tank 1 is fixedly connected to a support plate 209. The support plate 209 is rotatably connected to a fifth limiting roller 2010, and the fifth limiting roller 2010 is provided with an etching foil 2011 on its exterior.

[0027] If the etched foil 2011 becomes loose or tight during operation and adjustment is required, the electric push rod 202 can be activated to drive the connecting frame 203 at its bottom to slide inside the sliding groove 13, thereby driving the adjusting roller 204 connected inside to move, and thus adjusting the tension of the etched foil 2011.

[0028] The top of the mounting sleeve 302 is fixedly connected to the second transmission pipe 303, the left side of the reaction tank 1 is fixedly connected to the fixing plate 304, the front of the fixing plate 304 is fixedly connected to the circulation pump 305, and the circulation pump 305 is fixedly connected to the outside of the second transmission pipe 303.

[0029] The mounting sleeve 302 has a slot 306 inside, and a fixing bracket 307 is inserted into the mounting sleeve 302. The filter screen 308 is fixedly connected inside the fixing bracket 307. An insert block 309 is slidably connected inside the fixing bracket 307, and a pull block 3011 is fixedly connected to the outside of the insert block 309.

[0030] Insertion block 309 is inserted into the inside of slot 306, and pull block 3011 is slidably connected to the inside of fixing bracket 307. A return spring 3010 is fixedly connected to the right side of insertion block 309, and the return spring 3010 is fixedly connected between insertion block 309 and mounting sleeve 302.

[0031] The circulating pump 305 forms a closed loop with the mounting sleeve 302 and the first transmission pipe 301 through the second transmission pipe 303, driving the reaction liquid in the reaction tank 1 to flow continuously: the reaction liquid enters the mounting sleeve 302 through the first transmission pipe 301, and the filter screen 308 in the fixed frame 307 filters out the impurities or debris generated by the reaction. The filtered clean reaction liquid then flows back to the reaction tank 1 through the second transmission pipe 303.

[0032] The implementation principle of the bubble isolation device for the corrosion foil reaction tank in this application embodiment is as follows: Before use, such as Figure 2 The etching foil 2011 is first wound from above the first limiting roller 205 to the bottom of the adjusting roller 204, and then from the bottom of the adjusting roller 204 back to above the second limiting roller 206. At this time, the etching foil 2011 passes through the bubble isolation screen 12 and is wound to the bottom of the third limiting roller 207. Finally, it is wound from the bottom of the fourth limiting roller 208 to above the fifth limiting roller 2010, thus determining the path of the etching foil 2011. During the operation of the etching foil reaction tank 1, hydrogen bubbles generated by the electrode plate 11 pass through the bubble isolation screen 12. Physical barriers are used to eliminate air bubbles. If the corrosion foil 2011 is loose or tight during operation and adjustment is required, the electric push rod 202 can be activated to drive the connecting frame 203 at its bottom to slide inside the sliding groove 13, thereby driving the adjusting roller 204 connected inside to move, thereby adjusting the tension of the corrosion foil 2011. By adjusting the wrap angle and pressing force of the adjusting roller 204 on the corrosion foil 2011, the conditions for air bubble adhesion can be effectively destroyed, causing the air bubbles to quickly detach from the foil surface and be captured by the isolation screen. During use, the circulation pump 305 can be started. The circulation pump 305 forms a closed loop with the mounting sleeve 302 and the first transmission pipe 301 through the second transmission pipe 303, driving the reaction liquid in the reaction tank 1 to flow continuously. The reaction liquid enters the mounting sleeve 302 through the first transmission pipe 301, and the filter screen 308 in the fixing frame 307 filters out impurities or debris generated by the reaction. The filtered clean reaction liquid then flows back to the reaction tank 1 through the second transmission pipe 303 to ensure the cleanliness of the reaction environment. When it is necessary to clean or replace the filter screen 308, pulling the pull block 3011 can drive the insert Block 309 compresses the return spring 3010 and disengages from the slot 306. At this point, the fixing bracket 307 can be directly pulled out for maintenance. During installation, after pulling the pull block 3011, the fixing bracket 307 is inserted into the mounting sleeve 302. At this point, the pull block 3011 can be released, and the insertion block 309 is pushed back into the slot 306 by the elastic force of the return spring 3010, achieving quick locking. This combination of circulating filtration and convenient disassembly and assembly maintains the purity of the reaction liquid to ensure the corrosion effect, while significantly reducing the time cost of equipment maintenance and improving the continuous operation efficiency of the device.

[0033] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A bubble isolation device for a corrosion foil reaction tank, comprising a reaction tank (1), wherein an electrode plate (11) is fixedly connected inside the reaction tank (1), a bubble isolation screen (12) is fixedly connected inside the electrode plate (11), and a sliding groove (13) is provided inside the reaction tank (1), characterized in that, Also includes: Adjustment mechanism (2), the adjustment mechanism (2) includes a connecting frame (203) slidably connected inside the sliding groove (13), and an adjustment roller (204) is rotatably connected inside the connecting frame (203); The circulation mechanism (3) includes a first transmission pipe (301) fixedly connected inside the reaction tank (1), and an installation sleeve (302) fixedly connected to the top of the first transmission pipe (301). A filter screen (308) is provided inside the installation sleeve (302).

2. The bubble isolation device for a corrosion foil reaction tank as described in claim 1, characterized in that: The top of the reaction tank (1) is fixedly connected to a mounting frame (201), the top of the mounting frame (201) is fixedly connected to an electric push rod (202), the connecting frame (203) is fixedly connected to the bottom of the electric push rod (202), and the first limiting roller (205) is rotatably connected inside the mounting frame (201).

3. The bubble isolation device for the corrosion foil reaction tank as described in claim 2, characterized in that: The reaction tank (1) is rotatably connected to a second limiting roller (206), and the reaction tank (1) is rotatably connected to a third limiting roller (207).

4. The bubble isolation device for a corrosion foil reaction tank as described in claim 3, characterized in that: The reaction tank (1) is rotatably connected to a fourth limiting roller (208), and the top of the reaction tank (1) is fixedly connected to a support plate (209). The support plate (209) is rotatably connected to a fifth limiting roller (2010), and an etching foil (2011) is provided on the outside of the fifth limiting roller (2010).

5. The bubble isolation device for a corrosion foil reaction tank as described in claim 1, characterized in that: The top of the mounting sleeve (302) is fixedly connected to a second transmission pipe (303), the left side of the reaction tank (1) is fixedly connected to a fixing plate (304), the front of the fixing plate (304) is fixedly connected to a circulation pump (305), and the circulation pump (305) is fixedly connected to the outside of the second transmission pipe (303).

6. The bubble isolation device for the corrosion foil reaction tank as described in claim 5, characterized in that: The mounting sleeve (302) has a slot (306) inside, a fixing frame (307) is inserted into the mounting sleeve (302), the filter screen (308) is fixedly connected inside the fixing frame (307), an insert (309) is slidably connected inside the fixing frame (307), and a pull block (3011) is fixedly connected to the outside of the insert (309).

7. The bubble isolation device for a corrosion foil reaction tank as described in claim 6, characterized in that: The insert (309) is inserted into the slot (306), the pull block (3011) is slidably connected to the inside of the fixing frame (307), and a return spring (3010) is fixedly connected to the right side of the insert (309). The return spring (3010) is fixedly connected between the insert (309) and the mounting sleeve (302).

Citation Information

Patent Citations

  • Etched foil reaction bubble isolating device

    CN208455100U