Indium phosphide crystal rod firing container and firing device

Abstract

The utility model relates to indium phosphide substrate manufacturing technical field especially relates to a kind of indium phosphide crystal bar firing container and firing device, including forming tube, guide pipe and multiple material pipes, forming tube is vertically arranged, guide pipe is located at the bottom end of forming tube, the pipe hole of guide pipe is connected in the pipe hole of forming tube, multiple material pipes are located above forming tube, and it is arranged around forming tube, the first included angle between the axis of material pipe and horizontal plane has, the first included angle is greater than 0 °, the pipe hole of each material pipe is connected in the pipe hole of forming tube.Summation, multiple vertically arranged or obliquely arranged material pipes are arranged horizontally around forming tube above forming tube, the compact structure compared with traditional long strip tubular structure can greatly shorten the overall height of container, improve the compactness of firing container, so that firing furnace can accommodate more firing container, to improve production efficiency, and make it can be adapted to small and medium-sized firing furnace, to expand application scenarios.

Description

Technical Field

[0001] This utility model relates to the field of indium phosphide substrate manufacturing technology, and in particular to an indium phosphide crystal rod firing container and firing apparatus. Background Technology

[0002] Indium phosphide substrate is a semiconductor substrate with indium phosphide as its core material. It is one of the key basic materials for the manufacture of microelectronic and optoelectronic devices and is widely used in fields such as high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio frequency devices in radio astronomy.

[0003] Currently, indium phosphide substrates require the use of indium phosphide ingots for manufacturing. The commonly used indium phosphide ingot firing containers in the industry are mostly long, tubular structures, with the raw material placed directly inside for firing. To meet the raw material requirements for a single firing, this long, tubular structure needs to be designed to be sufficiently long, resulting in a relatively high overall height of the firing container. This means it occupies a large vertical space within the firing furnace, limiting the number of containers that can be accommodated in the same furnace, reducing the production capacity per firing, and thus affecting production efficiency. Furthermore, some small and medium-sized firing furnaces have limited vertical space, making it impossible to use such tall firing containers, thus limiting the application scenarios for these containers. Utility Model Content

[0004] The purpose of this invention is to provide an indium phosphide crystal rod firing container and firing device to solve the technical problem that commonly used long tubular indium phosphide crystal rod firing containers occupy a large longitudinal space in the firing furnace, which limits the number of containers that can be accommodated in the same firing furnace, reduces the single firing capacity, and thus affects production efficiency. Moreover, they cannot be used in some small and medium-sized firing furnaces with limited longitudinal space.

[0005] To achieve the above objectives, this utility model provides an indium phosphide ingot sintering container, including a forming tube, a guide tube, and multiple material tubes. The forming tube is vertically arranged, the guide tube is located at the bottom end of the forming tube, and the tube hole of the guide tube is connected to the tube hole of the forming tube. The multiple material tubes are located above the forming tube and arranged around the forming tube. The axis of each material tube has a first included angle with the horizontal plane, the first included angle being greater than 0°, and the tube hole of each material tube is connected to the tube hole of the forming tube.

[0006] Optionally, it also includes a connecting pipe, which is horizontally disposed at the top end of the forming pipe, the bottom of the pipe hole of the connecting pipe is connected to the pipe hole of the forming pipe, and the end of the pipe hole of the connecting pipe is connected to each of the material pipes.

[0007] Optionally, it also includes a plurality of transition pipes that correspond one-to-one with the material pipe. The transition pipes are disposed between the connecting pipe and the material pipe, and the two ends of the pipe hole of the transition pipe are respectively connected to the connecting pipe and the material pipe. The transition pipe is an arc-shaped pipe segment.

[0008] Optionally, the number of material pipes is 2, and the transition pipe is a straight pipe.

[0009] Optionally, the angle of the first included angle is 80° to 90°.

[0010] Optionally, the diameter of the orifice of the material tube is larger than the diameter of the orifice of the forming tube.

[0011] Optionally, it also includes a pipe cap, at least one of the material pipes having an inlet hole extending through its bore on its top surface, the pipe cap being fixedly disposed in the inlet hole and sealing the inlet hole.

[0012] Optionally, it also includes a plurality of tube caps that correspond one-to-one with the material tubes, each of the material tubes having a material inlet hole, and the tube caps being provided one-to-one with the material tubes.

[0013] Optionally, the horizontal distance between two adjacent feed tubes is 100mm to 130mm.

[0014] This utility model also relates to a firing apparatus, including a firing furnace, a heat insulation layer, a heating wire, and the aforementioned indium phosphide crystal rod firing container. The heat insulation layer is disposed in the firing furnace and forms a firing cavity. The heating wire is wound around the heat insulation layer, and the indium phosphide crystal rod firing container is disposed inside the firing cavity.

[0015] Compared with the prior art, the indium phosphide crystal rod firing container and firing apparatus of this utility model have the following advantages: In this utility model, the indium phosphide crystal rod firing container has a vertically arranged forming tube, which allows the molten raw material to be formed into a vertical crystal rod inside the forming tube. A guide tube at the bottom of the forming tube is used to install daughter crystals, which can guide the crystal rod forming and avoid the failure of forming due to raw material misalignment. Furthermore, multiple vertically or inclined material tubes are arranged horizontally around the forming tube above it. This compact structure can significantly shorten the overall height of the container compared to the traditional long tubular structure, improve the compactness of the firing container, and allow more firing containers to be accommodated in the firing furnace, thereby improving production efficiency. It can also be adapted to small and medium-sized firing furnaces to expand the application scenarios. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the indium phosphide crystal rod firing container of this utility model.

[0017] Figure 2This is a front view of the container for firing indium phosphide crystal rods according to this utility model.

[0018] Figure 3 This is a top view of the container for firing indium phosphide crystal rods according to this utility model.

[0019] Figure 4 for Figure 3 Cross-sectional view of AA (the container for firing indium phosphide crystal rods contains raw materials).

[0020] Figure 5 for Figure 3 Cross-sectional view of AA (Indium phosphide crystal rods are formed inside the firing container).

[0021] Figure 6 This is a cross-sectional view of the indium phosphide crystal rod firing container of this utility model located inside the firing chamber.

[0022] Reference numerals: 1. Firing container; 11. Forming tube; 12. Material tube; 13. Connecting tube; 14. Transition tube; 15. Tube cover; 16. Guide tube; 2. Insulation layer; 3. Heating wire; 4. Firing chamber; 5. Sub-crystal; 6. Raw material; 7. Crystal rod. Detailed Implementation

[0023] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0024] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0026] like Figures 1 to 6As shown, an indium phosphide ingot sintering container 1 of this utility model includes a forming tube 11, a guide tube 16, and a plurality of material tubes 12. The forming tube 11 is vertically arranged, and the guide tube 16 is located at the bottom end of the forming tube 11. The tube hole of the guide tube 16 is connected to the tube hole of the forming tube 11. The plurality of material tubes 12 are arranged above the forming tube 11 and around the forming tube 11. The axis of the material tube 12 has a first included angle with the horizontal plane. The first included angle is greater than 0°, and the tube hole of each material tube 12 is connected to the tube hole of the forming tube 11.

[0027] In the above technical solution, in the indium phosphide crystal rod firing container 1 of this utility model, the forming tube 11 is vertically arranged so that the raw material 6 can be formed into a vertical crystal rod 7 inside the forming tube 11 after melting. The guide tube 16 set at the bottom of the forming tube 11 is used to install the daughter crystal 5. The daughter crystal can guide the crystal rod 7 to form and avoid the raw material 6 from being misaligned and causing the forming failure. Furthermore, multiple vertically or inclined material tubes 12 are arranged horizontally around the forming tube 11 above it. This compact structure can significantly shorten the overall height of the container compared with the traditional long tubular structure, improve the compactness of the firing container 1, and allow more firing containers 1 to be accommodated in the firing furnace to improve production efficiency. It can also be adapted to small and medium-sized firing furnaces to expand the application scenarios.

[0028] Before firing, the daughter crystal 5 is loaded into the guide tube 16, and then the raw material 6 is filled into the forming tube 11 and the material tube 12. After firing, the raw material 6 melts and fills into the forming tube 11, and the formed crystal rod 7 is located in the forming tube 11. Finally, the crystal rod 7 is taken out from the forming tube 11. Alternatively, the lateral splicing seam of the forming tube 11 can be separated and the crystal rod 7 can be taken out. Or the firing container 1 can be destroyed and the crystal rod 7 can be taken out. The method of taking out the crystal rod 7 is the existing technology and will not be described in detail here.

[0029] Among them, raw material 6 is a polycrystalline material produced by firing, and its main components are phosphorus and indium.

[0030] Furthermore, it also includes a connecting pipe 13, which is horizontally disposed at the top end of the forming pipe 11. The bottom of the pipe hole of the connecting pipe 13 is connected to the pipe hole of the forming pipe 11, and the end of the pipe hole of the connecting pipe 13 is connected to each of the material pipes 12.

[0031] The horizontally arranged connecting pipe 13 serves as an intermediate transition, enabling the raw materials 6 from multiple material pipes 12 to flow smoothly and synchronously into the forming pipe 11. This avoids local accumulation or uneven composition caused by the raw materials 6 directly impacting the forming pipe 11, ensuring the consistency of the diameter and composition of the crystal rod 7.

[0032] Furthermore, it also includes a plurality of transition pipes 14 corresponding one-to-one with the material pipe 12. The transition pipes 14 are disposed between the connecting pipe 13 and the material pipe 12, and the two ends of the pipe hole of the transition pipe 14 are respectively connected to the connecting pipe 13 and the material pipe 12. The transition pipe 14 is an arc-shaped pipe segment.

[0033] Among them, the transition pipe 14 of the arc-shaped pipe section has no right-angle dead corner, which can prevent the raw material 6 from being stuck at the junction of the connecting pipe 13 and the material pipe 12, reduce the waste of raw material 6 and ensure the purity of the crystal rod 7.

[0034] Furthermore, the number of material pipes 12 is 2, and the transition pipe 14 is a straight pipe.

[0035] Among them, the two feed pipes 12 connected by straight pipes can balance the supply of raw material 6 and the compactness of the structure, so as to avoid the horizontal size of the firing container 1 being too large due to the large number of feed pipes 12.

[0036] Furthermore, the angle of the first included angle is 80° to 90°.

[0037] Among them, the angle of 80° to 90° is close to vertical, and the raw material 6 can flow into the forming tube 11 quickly under the action of gravity, avoiding the problem of slow flow speed and accumulation of raw material 6 caused by the small included angle, thus improving the growth efficiency of crystal rod 7.

[0038] Furthermore, the diameter of the orifice of the material tube 12 is larger than the diameter of the orifice of the forming tube 11.

[0039] The diameter of the feed tube 12 is larger than that of the forming tube 11, which can provide a larger storage space for the raw material 6 and a smoother supply channel, avoiding insufficient supply of raw material 6 due to the feed tube 12 being too thin.

[0040] Furthermore, it also includes a pipe cap 15, at least one of the material pipes 12 has an inlet hole on its top surface that extends through to its pipe hole, and the pipe cap 15 is fixedly disposed in the inlet hole and blocks the inlet hole.

[0041] Preferably, the device also includes a plurality of tube caps 15 corresponding one-to-one with the material tubes 12, each material tube 12 having a material inlet hole, and the tube caps 15 being provided one-to-one with the material tubes 12.

[0042] Each material pipe 12 is equipped with a separate pipe cap 15, which allows the staff to add material and seal it independently through each inlet hole. The amount of raw material 6 added to each material pipe 12 can be flexibly adjusted, and it is convenient for the staff to add raw material 6.

[0043] Furthermore, the horizontal distance between two adjacent feed tubes 12 is 100mm to 130mm.

[0044] The horizontal distance ensures that the material tubes 12 are spaced apart, not too far apart to ensure the compactness of the firing container 1, and not too close together to prevent the material tubes 12 from squeezing or colliding with each other during thermal expansion and contraction at high temperatures, and also makes it convenient for operators to add materials.

[0045] Furthermore, the forming tube 11, the material tube 12, the connecting tube 13 and the horizontal tube are integrated into one piece, and the tube cap 15 is connected to the material tube 12 by sintering or high-temperature welding.

[0046] This embodiment also relates to a firing apparatus, including a firing furnace, a heat insulation layer 2, a heating wire 3, and the aforementioned indium phosphide crystal rod firing container 1. The heat insulation layer 2 is disposed in the firing furnace and forms a firing cavity 4. The heating wire 3 is wound around the heat insulation layer 2, and the indium phosphide crystal rod firing container 1 is disposed in the firing cavity 4.

[0047] The combination of the heat insulation layer 2 and the heating wire 3 can maintain the temperature stability inside the firing chamber 4, so as to ensure the uniformity of composition, purity and appearance quality of the crystal rod 7. Furthermore, the indium phosphide crystal rod firing container 1 can be fixed in the firing chamber 4 by a bracket or suspended in the firing chamber 4. These are existing technologies and will not be described in detail here.

[0048] In summary, this utility model provides an indium phosphide crystal rod sintering container 1 and a sintering apparatus, the technical effects of which are as follows: In the indium phosphide crystal rod firing container 1 of this utility model, the forming tube 11 is vertically arranged so that the raw material 6 can be formed into a vertical crystal rod 7 inside the forming tube 11 after melting. The guide tube 16 set at the bottom of the forming tube 11 is used to install the daughter crystal 5. The daughter crystal can guide the crystal rod 7 to form and avoid the raw material 6 from being misaligned and causing the forming failure. Furthermore, multiple vertically or inclined material tubes 12 are arranged horizontally around the forming tube 11 above it. This compact structure can significantly shorten the overall height of the container compared with the traditional long tubular structure, improve the compactness of the firing container 1, and allow more firing containers 1 to be accommodated in the firing furnace to improve production efficiency. It can also be adapted to small and medium-sized firing furnaces to expand the application scenarios.

[0049] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A container for sintering indium phosphide crystal rods (1), characterized in that, The device includes a forming tube (11), a guide tube (16), and multiple material tubes (12). The forming tube (11) is vertically arranged, and the guide tube (16) is located at the bottom end of the forming tube (11). The tube hole of the guide tube (16) is connected to the tube hole of the forming tube (11). The multiple material tubes (12) are located above the forming tube (11) and are arranged around the forming tube (11). The axis of the material tube (12) has a first included angle with the horizontal plane. The first included angle is greater than 0°. The tube hole of each material tube (12) is connected to the tube hole of the forming tube (11).

2. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, It also includes a connecting pipe (13), which is horizontally disposed at the top of the forming pipe (11). The bottom of the pipe hole of the connecting pipe (13) is connected to the pipe hole of the forming pipe (11), and the end of the pipe hole of the connecting pipe (13) is connected to each of the material pipes (12).

3. The indium phosphide crystal rod sintering container (1) according to claim 2, characterized in that, It also includes multiple transition pipes (14) that correspond one-to-one with the material pipe (12). The transition pipes (14) are disposed between the connecting pipe (13) and the material pipe (12) and correspond one-to-one with the material pipe (12). The two ends of the pipe hole of the transition pipe (14) are respectively connected to the connecting pipe (13) and the material pipe (12). The transition pipe (14) is an arc-shaped pipe segment.

4. The indium phosphide crystal rod sintering container (1) according to claim 3, characterized in that, The number of material pipes (12) is 2, and the transition pipe (14) is a straight pipe.

5. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The angle of the first included angle is 80° to 90°.

6. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The diameter of the bore of the material tube (12) is larger than the diameter of the bore of the forming tube (11).

7. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, It also includes a pipe cap (15), at least one of the material pipes (12) has an inlet hole through to its pipe hole on its top surface, and the pipe cap (15) is fixedly disposed on the inlet hole and blocks the inlet hole.

8. The indium phosphide crystal rod sintering container (1) according to claim 7, characterized in that, It also includes multiple pipe caps (15) that correspond one-to-one with the material pipes (12), each of the material pipes (12) is provided with a material inlet hole, and the pipe caps (15) are provided one-to-one with the material pipes (12).

9. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The horizontal distance between two adjacent feed tubes (12) is 100mm to 130mm.

10. A firing apparatus, characterized in that, The invention includes a firing furnace, a heat insulation layer (2), a heating wire (3), and an indium phosphide crystal rod firing container (1) according to any one of claims 1 to 9. The heat insulation layer (2) is disposed in the firing furnace and forms a firing cavity (4). The heating wire (3) is wound around the heat insulation layer (2). The indium phosphide crystal rod firing container (1) is disposed in the firing cavity (4).

Images