Indium phosphide crystal rod firing container and firing device

Abstract

The utility model relates to indium phosphide substrate manufacturing technical field especially relates to a kind of indium phosphide crystal bar firing vessel and firing device, its indium phosphide crystal bar firing vessel, including main pipe, pipe cover, multiple profiled tubes and the guide tube corresponding to profiled tube one by one, guide tube is located in the bottom end of corresponding profiled tube, the tube hole of guide tube is connected with the tube hole of corresponding profiled tube, multiple profiled tubes are spaced apart and located below main pipe, the tube hole of each profiled tube is connected with the tube hole of main pipe, the first included angle between the axis of profiled tube and horizontal plane has, the first included angle is greater than 0 °, the outside wall of main pipe is equipped with the inlet hole that passes to its tube hole, pipe cover is covered and is arranged in inlet hole, and blocks inlet hole. Above all, staff can make container flow into each profiled tube by means such as continuing to fill excess raw materials or tilting firing vessel after raw materials are loaded into main pipe, so that staff can load raw materials to multiple profiled tubes at a time, and then the production efficiency of crystal bar is improved.

Description

Technical Field

[0001] This utility model relates to the field of indium phosphide substrate manufacturing technology, and in particular to an indium phosphide crystal rod firing container and firing apparatus. Background Technology

[0002] Indium phosphide substrate is a semiconductor substrate with indium phosphide as its core material. It is one of the key basic materials for the manufacture of microelectronic and optoelectronic devices and is widely used in fields such as high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio frequency devices in radio astronomy.

[0003] Currently, indium phosphide substrates require the use of indium phosphide ingots for manufacturing. The commonly used ingot firing containers in the industry are mostly long, tubular structures, where the raw material is placed directly inside for firing. When using this type of container, only one ingot of raw material can be held at a time. The indium phosphide raw material must be individually filled into the forming tube during loading, and the ingots are then removed one by one after firing. Therefore, when using this type of container to produce ingots, the loading process must be done tube by tube, resulting in excessively long production cycles and low production efficiency for a single batch of ingots. Especially in large-scale production scenarios, the production efficiency is insufficient to meet the industry's capacity requirements. Utility Model Content

[0004] The purpose of this invention is to provide an indium phosphide crystal rod firing container and firing device to solve the technical problem that when using conventional firing containers to produce crystal rods, the loading process needs to be operated tube by tube, resulting in an excessively long production cycle and low production efficiency for a single batch of crystal rods. Especially in large-scale production scenarios, the production efficiency is difficult to meet the industry's capacity requirements.

[0005] To achieve the above objectives, this utility model provides an indium phosphide ingot sintering container, including a main pipe, a cap, multiple forming tubes, and guide tubes corresponding to the forming tubes. The guide tubes are located at the bottom end of the corresponding forming tubes, and the tube holes of the guide tubes are connected to the tube holes of the corresponding forming tubes. The multiple forming tubes are spaced apart below the main pipe, and the tube holes of each forming tube are connected to the tube holes of the main pipe. The axis of each forming tube has a first included angle with the horizontal plane, and the first included angle is greater than 0°. The outer side wall of the main pipe is provided with a feed hole that penetrates to its tube hole. The cap is placed over the feed hole and seals the feed hole.

[0006] Optionally, the formed tube includes a first tube segment and a second tube segment arranged sequentially from top to bottom, wherein the inner diameter of the first tube segment is smaller than the inner diameter of the second tube segment.

[0007] Optionally, the main tube is a straight tube, and the formed tubes are spaced apart along the axial direction of the main tube.

[0008] Optionally, the feed hole is located at the end of the main pipe.

[0009] Optionally, the tube may include two tube caps, with the feed holes provided at both ends of the main tube, and the two tube caps respectively located at the two feed holes.

[0010] Optionally, the first included angle is 80° to 90°.

[0011] Optionally, the axis of the main tube has a second included angle between it and the horizontal plane, the second included angle being 0° to 10°.

[0012] Optionally, the diameter of the bore in the main tube is larger than the diameter of the bore in the formed tube.

[0013] Optionally, the horizontal distance between two adjacent forming tubes is 100mm to 130mm.

[0014] This utility model also relates to a firing apparatus, including a firing furnace, a heat insulation layer, a heating wire, and the aforementioned indium phosphide crystal rod firing container. The heat insulation layer is disposed in the firing furnace and forms a firing cavity. The heating wire is wound around the heat insulation layer, and the indium phosphide crystal rod firing container is disposed inside the firing cavity.

[0015] Compared with the prior art, the indium phosphide crystal rod firing container and firing apparatus of this utility model have the following advantages: In this indium phosphide crystal rod firing container, the raw material melts and can be formed into crystal rods inside the forming tube. A guide tube at the bottom of the forming tube is used to load daughter crystals, which can guide the crystal rod forming and avoid raw material misalignment leading to forming failure. Furthermore, the main tube is provided with a feeding hole, through which the operator can load the raw material into the main tube. In addition, multiple forming tubes are spaced apart below, and the tube holes of each forming tube are connected to the tube holes of the main tube. This allows the operator to load the raw material into the main tube after loading it into the main tube, and to make the container flow into each forming tube by continuing to fill excess raw material or tilting the firing container. This allows the operator to load raw material into multiple forming tubes at once, thereby improving the production efficiency of crystal rods. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the indium phosphide crystal rod firing container of this utility model.

[0017] Figure 2 This is a front view of the container for firing indium phosphide crystal rods according to this utility model.

[0018] Figure 3 This is a bottom view of the container for firing indium phosphide crystal rods according to this utility model.

[0019] Figure 4 for Figure 3 Cross-sectional view of AA (the container for firing indium phosphide crystal rods contains raw materials).

[0020] Figure 5 for Figure 3 Cross-sectional view of AA (Indium phosphide crystal rods are formed inside the firing container).

[0021] Figure 6 This is a cross-sectional view of the indium phosphide crystal rod firing container of this utility model located inside the firing chamber.

[0022] Reference numerals: 1. Firing container; 11. Forming tube; 111. First tube section; 112. Second tube section; 12. Main tube; 121. Feed hole; 13. Tube cover; 14. Guide tube; 2. Insulation layer; 3. Heating wire; 4. Firing chamber; 5. Sub-crystal; 6. Raw material; 7. Crystal rod. Detailed Implementation

[0023] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0024] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0026] like Figures 1 to 6 As shown, an indium phosphide ingot sintering container 1 of this utility model includes a main pipe 12, a pipe cover 13, a plurality of forming tubes 11, and guide tubes 14 corresponding to the forming tubes 11. The guide tubes 14 are disposed at the bottom end of the corresponding forming tubes 11, and the tube holes of the guide tubes 14 are connected to the tube holes of the corresponding forming tubes 11. The plurality of forming tubes 11 are spaced apart below the main pipe 12, and the tube holes of each forming tube 11 are connected to the tube holes of the main pipe 12. The axis of the forming tube 11 has a first included angle with the horizontal plane, and the first included angle is greater than 0°. The outer side wall of the main pipe 12 is provided with a feed hole 121 that penetrates to its tube hole. The pipe cover 13 is disposed on the feed hole 121 and seals the feed hole 121.

[0027] In the above technical solution, in the indium phosphide crystal rod firing container 1 of this utility model, the raw material 6 can be formed into a crystal rod 7 after melting in the forming tube 11. The guide tube 14 set at the bottom of the forming tube 11 is used to install the daughter crystal 5. The daughter crystal 5 can guide the crystal rod 7 to form, avoiding the misalignment of the raw material 6 and the failure of forming. Furthermore, the main tube 12 is provided with a feeding hole 121. The operator can load the raw material 6 into the main tube 12 through the feeding hole 121. Furthermore, multiple forming tubes 11 are spaced apart below, and the tube holes of each forming tube 11 are connected to the tube holes of the main tube 12. After the operator loads the raw material 6 into the main tube 12, the container can be made to flow into each forming tube 11 by continuing to fill the excess raw material 6 or tilting the firing container 1. This allows the operator to fill multiple forming tubes 11 with raw material 6 at one time, thereby improving the production efficiency of the crystal rod 7.

[0028] Before firing, the daughter crystal 5 is loaded into the guide tube 14, and then the raw material 6 is filled into the forming tube 11 and then into the main tube 12. After firing, the raw material 6 melts and fills into the forming tube 11, and the formed crystal rod 7 is located in the forming tube 11. Finally, the crystal rod 7 is taken out from the forming tube 11. Furthermore, the lateral splicing seam of the firing container 1 can be separated and the crystal rod 7 can be taken out. Alternatively, the firing container 1 can be destroyed and the crystal rod 7 can be taken out. The method of taking out the crystal rod 7 is existing technology and will not be described in detail here.

[0029] Among them, raw material 6 is a polycrystalline material produced by firing, and its main components are phosphorus and indium.

[0030] The first included angle is greater than 0° to ensure that the forming tube 11 is not set horizontally, and to ensure that the raw material 6 flows into the forming tube 11 after melting.

[0031] Furthermore, the forming tube 11, main tube 12, and guide tube 14 are integrated. After the workers complete the filling of the raw material 6, they install the tube cap 13 at the feed hole 121 and connect it to the main tube 12 by sintering or high-temperature welding.

[0032] Furthermore, the formed tube 11 includes a first tube segment 111 and a second tube segment 112 arranged sequentially from top to bottom, wherein the inner diameter of the first tube segment 111 is smaller than the inner diameter of the second tube segment 112.

[0033] The crystal rod 7 is mainly formed in the second tube section 112. The first tube section 111 is a thinner part used to store a portion of the raw material 6. After the raw material 6 is melted, it flows into the second tube section 112. After the crystal rod 7 is taken out, the diameter change position of the crystal rod 7 is cut off (the crystal formed in the first tube section 111 and the second tube section 112 is cut apart) to obtain the crystal rod 7 of the required shape and specifications.

[0034] Furthermore, the main pipe 12 is a straight pipe, and each of the formed pipes 11 is spaced apart along the axial direction of the main pipe 12.

[0035] The main pipe 12 has a straight pipe structure, which reduces the number of dead corners inside, making it easier to clean and reuse, and ensuring the uniformity of the internal heat field.

[0036] Furthermore, the feed hole 121 is located at the end of the main pipe 12.

[0037] When the worker loads the raw material 6 into the feed hole 121, the first raw material 6 will slide to the other end of the main pipe 12 and into the forming tube 11, so that the worker can load more raw material 6 at once, instead of tilting the firing container 1 after loading a small amount of raw material 6, so that the raw material 6 located in the main pipe 12 blocking the feed hole 121 can move to other positions.

[0038] Furthermore, it includes two pipe caps 13, and both ends of the main pipe 12 are provided with the feed holes 121, with the two pipe caps 13 respectively located at the two feed holes 121.

[0039] The two feed holes 121 and the two pipe caps 13 allow workers to load the raw material 6 from both sides, so as to avoid the difficulty of filling a certain amount of raw material 6 in some places when filling the long main pipe 12.

[0040] Furthermore, the first included angle is 80° to 90°.

[0041] The angle of the first included angle makes the forming tube 11 approximately vertical, which conforms to the natural trend of indium phosphide crystal growing along the axial direction, reduces the deviation of the crystal growth direction, and the vertically set forming tube 11 facilitates the upward discharge of bubbles and impurities, reduces the internal defect rate of the crystal rod 7, and improves the yield.

[0042] Furthermore, the axis of the main tube 12 has a second included angle with the horizontal plane, the second included angle being 0° to 10°.

[0043] The second included angle makes the main pipe 12 approximately horizontal. This angle ensures that the main pipe 12 extends a long distance in the horizontal direction to accommodate more forming tubes 11 (there needs to be a certain horizontal distance between the forming tubes 11). It also ensures that the raw material 6 located in the main pipe 12 can flow smoothly into the forming tubes 11 under the action of gravity.

[0044] Furthermore, the diameter of the bore in the main pipe 12 is larger than the diameter of the bore in the formed pipe 11.

[0045] The larger diameter main pipe 12 can accommodate more molten raw material 6, prolonging the supply time of raw material 6 during the firing process. Furthermore, when the workers are filling the raw material 6, the probability of the raw material 6 getting stuck in the main pipe 12 is relatively small, making it easier for the workers to fill the raw material 6.

[0046] Furthermore, the horizontal distance between two adjacent forming tubes 11 is 100mm to 130mm.

[0047] The horizontal distance ensures that the material tubes are spaced apart to maintain the compactness of the firing container 1, while also preventing them from being squeezed or collided with each other during thermal expansion and contraction at high temperatures. This also facilitates material feeding by the operator.

[0048] This embodiment also relates to a firing apparatus, including a firing furnace, a heat insulation layer 2, a heating wire 3, and the aforementioned indium phosphide crystal rod firing container 1. The heat insulation layer 2 is disposed in the firing furnace and forms a firing cavity 4. The heating wire 3 is wound around the heat insulation layer 2, and the indium phosphide crystal rod firing container 1 is disposed in the firing cavity 4.

[0049] The combination of the heat insulation layer 2 and the heating wire 3 can maintain the temperature stability inside the firing chamber 4, so as to ensure the uniformity of composition, purity and appearance quality of the crystal rod 7. Furthermore, the indium phosphide crystal rod firing container 1 can be fixed in the firing chamber 4 by a bracket or suspended in the firing chamber 4. These are existing technologies and will not be described in detail here.

[0050] In summary, this utility model provides an indium phosphide crystal rod sintering container 1 and a sintering apparatus, the technical effects of which are as follows: In the indium phosphide crystal rod firing container 1 of this utility model, the raw material 6 can be formed into a crystal rod 7 after melting in the forming tube 11. The guide tube 14 set at the bottom of the forming tube 11 is used to install the daughter crystal 5. The daughter crystal 5 can guide the crystal rod 7 to form, avoiding the misalignment of the raw material 6 and the failure of forming. Furthermore, the main tube 12 is provided with a feeding hole 121. The operator can load the raw material 6 into the main tube 12 through the feeding hole 121. Furthermore, multiple forming tubes 11 are spaced apart below, and the tube holes of each forming tube 11 are connected to the tube holes of the main tube 12. After the operator loads the raw material 6 into the main tube 12, the container can be made to flow into each forming tube 11 by continuing to fill the excess raw material 6 or tilting the firing container 1. This allows the operator to fill multiple forming tubes 11 with raw material 6 at one time, thereby improving the production efficiency of the crystal rod 7.

[0051] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A container for sintering indium phosphide crystal rods (1), characterized in that, The system includes a main tube (12), a tube cap (13), multiple forming tubes (11), and guide tubes (14) corresponding to each forming tube (11). The guide tubes (14) are located at the bottom end of the corresponding forming tubes (11), and the tube holes of the guide tubes (14) are connected to the tube holes of the corresponding forming tubes (11). The multiple forming tubes (11) are spaced apart below the main tube (12), and the tube holes of each forming tube (11) are connected to the tube holes of the main tube (12). The axis of the forming tube (11) has a first included angle with the horizontal plane, and the first included angle is greater than 0°. The outer wall of the main tube (12) is provided with an inlet hole (121) that penetrates to its tube hole. The tube cap (13) is placed on the inlet hole (121) and seals the inlet hole (121).

2. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The formed tube (11) includes a first tube segment (111) and a second tube segment (112) arranged sequentially from top to bottom. The inner diameter of the first tube segment (111) is smaller than the inner diameter of the second tube segment (112).

3. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The main tube (12) is a straight tube, and each of the formed tubes (11) is spaced apart along the axial direction of the main tube (12).

4. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The feed hole (121) is located at the end of the main tube (12).

5. The indium phosphide crystal rod sintering container (1) according to claim 4, characterized in that, It includes two pipe caps (13), and both ends of the main pipe (12) are provided with the feed holes (121). The two pipe caps (13) are respectively provided at the two feed holes (121).

6. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The first included angle is 80° to 90°.

7. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The main tube (12) has a second included angle between its axis and the horizontal plane, the second included angle being 0° to 10°.

8. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The diameter of the bore of the main tube (12) is larger than the diameter of the bore of the formed tube (11).

9. The indium phosphide crystal rod sintering container (1) according to claim 1, characterized in that, The horizontal distance between two adjacent forming tubes (11) is 100mm to 130mm.

10. A firing apparatus, characterized in that, The invention includes a firing furnace, a heat insulation layer (2), a heating wire (3), and an indium phosphide crystal rod firing container (1) according to any one of claims 1 to 9. The heat insulation layer (2) is disposed in the firing furnace and forms a firing cavity (4). The heating wire (3) is wound around the heat insulation layer (2). The indium phosphide crystal rod firing container (1) is disposed in the firing cavity (4).

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