Single crystal furnace with good cooling effect

Abstract

The utility model relates to single crystal furnace technical field discloses a single crystal furnace with good cooling effect, and it includes: furnace body, is provided with heating cavity inside, is provided with heating furnace in heating cavity inner bottom, and heating cavity top end is open end, first cooling body, ring is established in the outer bottom of furnace body, and the first cooling body is limited to have cooling cavity in, and the both sides of cooling cavity are provided with first water inlet end and first water outlet end respectively, second cooling body, is connected in the inner top of heating cavity, and the centre of second cooling body is provided with through slot along the vertical direction, and the through slot is used for straight pulling silicon crystal, and the second cooling body is limited to have cooling flow channel in, and cooling flow channel is distributed in the heating cavity inner side wall periphery, and the both ends of cooling flow channel are provided with second water inlet end and second water outlet end respectively. Can realize the improvement to the cooling effect in the production process of single crystal furnace.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to a single crystal furnace with good cooling effect. Background Technology

[0002] A single crystal furnace is mainly used for producing single crystal silicon. It heats silicon to a molten state through a bottom heating furnace, and then pulls the molten silicon down through a Czochralski method. During the process, it cools and forms crystals, thus forming a silicon crystal column.

[0003] However, since natural cooling is slow, it can easily affect the production efficiency of silicon crystals. Moreover, the single crystal furnace also needs to be cooled down during maintenance and repair. Therefore, a single crystal furnace with good cooling effect is needed. Utility Model Content

[0004] The purpose of this invention is to provide a single crystal furnace with good cooling effect to solve the problems existing in the prior art and to improve the cooling effect during the single crystal furnace production process.

[0005] To achieve the above objectives, this utility model provides the following solution: This utility model provides a single crystal furnace with good cooling effect, comprising: The furnace body has a heating chamber inside, and a heating furnace is installed at the bottom of the heating chamber. The top of the heating chamber is an open end. A first cooling body is arranged around the bottom of the furnace body. The first cooling body defines a cooling cavity, and a first water inlet and a first water outlet are respectively provided on both sides of the cooling cavity. The second cooling body is snapped into the top of the heating chamber. A through slot is formed in the center of the second cooling body along the vertical direction. The through slot is used for Czochralski pulling of silicon crystals. The second cooling body has a cooling channel defined inside. The cooling channel is distributed circumferentially around the inner sidewall of the heating chamber. A second water inlet and a second water outlet are respectively provided at both ends of the cooling channel.

[0006] Preferred options also include: A heat insulation seat is fixed to the inner wall of the heating chamber. A through hole extending to the bottom surface of the heat insulation seat is opened on the top surface in the vertical direction. Several slots are opened on the inner wall of the through hole. A locking block is fixed to the outer wall of the second cooling body. The locking block and the slots are locked in a one-to-one correspondence.

[0007] Preferably, the second cooling body includes a top block and a bottom block arranged sequentially in a vertical direction. The bottom block is embedded in the through hole, the bottom surface of the top block is flush with the top surface of the heat insulation seat, and supports are fixed to opposite sides of the top block, with the supports extending away from the top block.

[0008] Preferably, the cooling channel includes a spiral pipe formed in the bottom block, and a connecting hole extending to the top block is formed in the support. The connecting hole communicates with the spiral pipe. A water inlet connector and a water outlet connector are fixedly connected to the mutually distant sides of the two supports, and the water inlet connector and the water outlet connector communicate with the adjacent connecting hole.

[0009] Preferably, the bottom block has a conical structure, the through hole corresponds to and matches the bottom block, the top block has an annular structure, and the inner diameter of the top block is smaller than the inner diameter of the bottom block.

[0010] Preferably, the first cooling body is a cooling box, which is circumferentially fixed to the bottom of the furnace body, and the outer walls of the cooling box are respectively connected to an inlet pipe and an outlet pipe on opposite sides.

[0011] Preferably, the height of the top surface of the hot melt pool inside the furnace is lower than the height of the top surface of the cooling box in the horizontal direction.

[0012] The present invention discloses the following technical effects: This invention utilizes a first cooling body installed outside the furnace body, combined with a second cooling body installed inside the furnace body, to jointly cool the furnace body. The cooling chamber inside the first cooling body controls water supply and drainage through a first water inlet and a first water outlet. The first cooling body cools the exterior of the furnace body, facilitating rapid temperature reduction during furnace maintenance. During the Czochralski (CZ) process of silicon crystal pulling, the cooling channels inside the second cooling body are distributed circumferentially around the inner wall of the heating chamber, achieving uniform and efficient cooling of the CZ silicon crystal, facilitating rapid crystallization and improving production efficiency. Furthermore, by attaching the second cooling body to the top of the heating chamber, and with the second water inlet and the second water outlet working in conjunction with circulating cooling water, the stability of the second cooling body can be improved, ensuring the cooling effect. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a diagram showing the positional relationship between the furnace body and the cooling box in this utility model; Figure 2 This is a diagram showing the positional relationship between the heating furnace and the second cooling body in this utility model; Figure 3 This is a diagram showing the positional relationship between the through hole and the hot melt pool in this utility model. Figure 4This diagram shows the connection between the bottom block and the heat insulation seat in this utility model. The components are as follows: 1. Furnace body; 2. Heating furnace; 3. Insulation base; 301. Through hole; 302. Slot; 4. Block; 5. Second cooling body; 501. Top block; 502. Bottom block; 503. Support; 504. Spiral pipe; 505. Connecting hole; 6. Water inlet connector; 7. Water outlet connector; 8. Cooling box; 9. Water inlet pipe; 10. Water outlet pipe; 11. Hot melt pool. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0017] Reference Figures 1-4 This utility model provides a single crystal furnace with good cooling effect, comprising: Furnace body 1, with a heating chamber inside, heating furnace 2 is installed at the bottom of the heating chamber, and the top of the heating chamber is an open end; The first cooling body is arranged around the bottom of the furnace body 1. The first cooling body has a cooling chamber defined inside, and a first water inlet and a first water outlet are respectively provided on both sides of the cooling chamber. The second cooling body 5 is snapped into the top of the heating chamber. A through groove is opened in the center of the second cooling body 5 along the vertical direction. The through groove is used for Czochralski pulling of silicon crystals. A cooling channel is defined inside the second cooling body 5. The cooling channel is distributed circumferentially around the inner side wall of the heating chamber. A second water inlet and a second water outlet are respectively provided at both ends of the cooling channel.

[0018] This invention utilizes a first cooling body installed outside the furnace body 1, combined with a second cooling body 5 installed inside the furnace body 1, to jointly cool the furnace body 1. The cooling chamber inside the first cooling body controls water supply and drainage through a first water inlet and a first water outlet. The first cooling body cools the exterior of the furnace body 1, facilitating rapid temperature reduction during furnace body 1 maintenance. During the Czochralski process of silicon crystal pulling, the cooling channels opened inside the second cooling body 5 are distributed circumferentially around the inner wall of the heating chamber, achieving uniform and efficient cooling of the Czochralski silicon crystal, facilitating rapid silicon crystal crystallization and improving production efficiency. In addition, by attaching the second cooling body 5 to the top of the heating chamber, and with the second water inlet and the second water outlet working in conjunction with circulating cooling water, the stability of the second cooling body 5 can be improved, ensuring the cooling effect.

[0019] Furthermore, it also includes: The heat insulation seat 3 is fixed to the inner wall of the heating chamber. The top surface of the heat insulation seat 3 has a through hole 301 extending to its bottom surface in the vertical direction. The inner wall of the through hole 301 has several slots 302. The outer wall of the second cooling body 5 is fixed with a locking block 4, which is locked in one-to-one with the slots 302.

[0020] By opening a through hole 301 in the middle of the heat insulation seat 3, the heat insulation seat 3 forms a circumferential covering along the inner sidewall of the heating chamber, which not only prevents heat from escaping but also retains heat in the furnace body 1, which facilitates the maintenance of the molten state of the silicon crystal. The heating furnace 2 set at the bottom of the furnace body 1 is used to heat the hot melt pool 11. In addition, a through hole 301 is opened on the heat insulation seat 3, and a slot 302 is opened in the through hole 301. The second cooling body 5 is snapped into the slot 302 by the snap block 4.

[0021] Specifically, the heat insulation seat 3 can be made of common refractory bricks, ceramic fibers, etc.

[0022] Understandably, in this technical solution, the locking block 4 is a cuboid structure. When the locking block 4 is engaged with the slot 302, it can prevent the second cooling body 5 from rotating. When the second cooling body 5 needs to be replaced or repaired, the second cooling body 5 can be lifted vertically, which will allow the locking block 4 to slide into the slot 302, making it convenient to disassemble the second cooling body 5.

[0023] Furthermore, the second cooling body 5 includes a top block 501 and a bottom block 502 arranged sequentially in a vertical direction. The bottom block 502 is embedded in the through hole 301. The bottom surface of the top block 501 is flush with the top surface of the heat insulation seat 3. Supports 503 are fixedly connected to the opposite sides of the top block 501, and the supports 503 extend in a direction away from the top block 501.

[0024] In this technical solution, the bottom block 502 is embedded in the through hole 301 to ensure the snap-fit ​​fixation between the second cooling body 5 and the heat insulation seat 3. At the same time, the top block 501 extends out of the furnace body 1 and is fixed to the support 503 in a direction away from each other, forming a structural protrusion, which makes it convenient to use hoisting equipment to lift the second cooling body 5 in the vertical direction and facilitates disassembly.

[0025] Furthermore, the cooling channel includes a spiral pipe 504 formed in the bottom block 502, and a connecting hole 505 extending to the top block 501 is formed in the support 503. The connecting hole 505 is connected to the spiral pipe 504. The water inlet connector 6 and the water outlet connector 7 are respectively fixed to the opposite sides of the two supports 503. The water inlet connector 6 and the water outlet connector 7 are connected to the adjacent connecting hole 505.

[0026] Specifically, cooling water is introduced into the connecting hole 505 through the water inlet connector 6, and the connecting hole 505 is directly connected to the spiral pipe 504, thereby forming a cooling range that covers the inner side wall of the through groove in the bottom block 502. With the production of Czochralski silicon crystals, the silicon crystals can be effectively cooled quickly.

[0027] Furthermore, the bottom block 502 has a conical structure, the through hole 301 corresponds to and matches the bottom block 502, the top block 501 has an annular structure, and the inner diameter of the top block 501 is smaller than the inner diameter of the bottom block 502.

[0028] By utilizing the conical structure of the bottom block 502, the bottom thickness of the heat insulation seat 3 is greater than that of the top. Correspondingly, it can effectively block the heat loss of the heating furnace 2 in the vertical direction. Similarly, the inner ring side of the top block 501 is smaller than the inner ring side of the bottom block 502, so that the diameter of the through slot gradually decreases in the vertical direction, which can also reduce the heat loss from the through slot and ensure the molten state of the silicon crystal.

[0029] Furthermore, the first cooling body is a cooling box 8, which is fixedly connected to the bottom of the furnace body 1 in a ring. The outer walls of the cooling box 8 are respectively connected to an inlet pipe 9 and an outlet pipe 10 on opposite sides.

[0030] The cooling water in the cooling box 8 is circulated through the inlet pipe 9 and the outlet pipe 10. When the furnace body 1 needs maintenance, the cooling box 8 is controlled to cool the furnace body 1 from the outside to speed up the cooling process.

[0031] In this technical solution, the inlet pipe 9, the outlet pipe 10, the inlet connector 6, and the outlet connector 7 are all connected to pipes and pumps to provide power for the cooling water in the inlet and outlet directions. This is a conventional technical method and will not be described in detail.

[0032] Furthermore, the height of the top surface of the hot melt pool 11 inside the furnace body 1 is lower than the height of the top surface of the cooling box 8 in the horizontal direction.

[0033] Specifically, the height of the top surface of the cooling box 8 is controlled to exceed the height of the top surface of the hot melt pool 11, so that the cooling box 8 can effectively cover the hot melt pool 11, thereby improving the cooling effect.

[0034] This utility model provides a working principle for a single crystal furnace with good cooling effect: The hot melt pool 11 is heated by the heating furnace 2 to form molten silicon. The silicon is then pulled and lifted directly from the hot melt pool 11 by the silicon column. When the silicon passes through the bottom block 502, cooling water is circulated through the spiral pipe 504 to create a cooling effect that allows the silicon to crystallize rapidly. When the furnace body 1 needs to be replaced or maintained, cooling water is introduced into the cooling box 8 to cool the outside of the furnace body 1 and improve the production efficiency of silicon crystals.

[0035] In addition, the bottom block 502 is snapped into the heat insulation seat 3 to improve the stability of the bottom block 502 when cooling the silicon crystal. The top block 501 is fixed to the top of the bottom block 502, which can reduce the diameter of the through slot, reduce heat loss, and provide a connection position for the support 503, so that the support 503 can extend out of the through slot. The bottom block 502 and the heat insulation seat 3 can be disassembled by lifting the top block 501 with external hoisting equipment, which facilitates the periodic replacement of the second cooling body 5 and ensures the cooling effect of the silicon crystal.

[0036] In the description of this utility model, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0037] The embodiments described above are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various modifications and improvements made to the technical solutions of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. A single crystal furnace with good cooling effect, characterized in that, include: The furnace body (1) has a heating chamber inside, and a heating furnace (2) is installed at the bottom of the heating chamber. The top of the heating chamber is an open end. The first cooling body is arranged around the bottom of the furnace body (1). The first cooling body defines a cooling cavity, and the cooling cavity is provided with a first water inlet and a first water outlet on both sides. The second cooling body (5) is snapped into the top of the heating chamber. The center of the second cooling body (5) is provided with a through groove in the vertical direction. The through groove is used for Czochralski pulling of silicon crystals. The second cooling body (5) is defined with a cooling channel. The cooling channel is distributed circumferentially around the inner sidewall of the heating chamber. The two ends of the cooling channel are respectively provided with a second water inlet and a second water outlet.

2. The single crystal furnace with good cooling effect according to claim 1, characterized in that, Also includes: A heat insulation seat (3) is fixed to the inner wall of the heating chamber. The top surface of the heat insulation seat (3) is provided with a through hole (301) extending to its bottom surface in the vertical direction. A number of slots (302) are provided on the inner wall of the through hole (301). A locking block (4) is fixed to the outer wall of the second cooling body (5). The locking block (4) and the slots (302) are locked in a one-to-one correspondence.

3. The single crystal furnace with good cooling effect according to claim 2, characterized in that: The second cooling body (5) includes a top block (501) and a bottom block (502) arranged in sequence along the vertical direction. The bottom block (502) is embedded in the through hole (301). The bottom surface of the top block (501) is flush with the top surface of the heat insulation seat (3). Supports (503) are fixed to the opposite sides of the top block (501) respectively. The supports (503) extend in a direction away from the top block (501).

4. The single crystal furnace with good cooling effect according to claim 3, characterized in that: The cooling channel includes a spiral pipe (504) formed in the bottom block (502), and a connecting hole (505) extending to the top block (501) is formed in the support (503). The connecting hole (505) is connected to the spiral pipe (504). A water inlet connector (6) and a water outlet connector (7) are fixedly connected to the opposite sides of the two supports (503). The water inlet connector (6) and the water outlet connector (7) are connected to the adjacent connecting hole (505).

5. The single crystal furnace with good cooling effect according to claim 3, characterized in that: The bottom block (502) has a conical structure, the through hole (301) corresponds to and matches the bottom block (502), the top block (501) has an annular structure, and the inner diameter of the top block (501) is smaller than the inner diameter of the bottom block (502).

6. The single crystal furnace with good cooling effect according to claim 1, characterized in that: The first cooling body is a cooling box (8), which is fixedly connected to the outer bottom of the furnace body (1) in a ring. The outer wall of the cooling box (8) is connected to an inlet pipe (9) and an outlet pipe (10) on opposite sides.

7. The single crystal furnace with good cooling effect according to claim 6, characterized in that: The height of the top surface of the hot melt pool (11) inside the furnace body (1) is lower than the height of the top surface of the cooling box (8) in the horizontal direction.

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