A single crystal furnace equipped with a hearth insulation structure

Abstract

The utility model relates to single crystal furnace heat preservation technical field discloses a single crystal furnace equipped with furnace bottom heat preservation structure, include: furnace body, top plate, the outer circumferential side fixed connection has the baffle, the baffle will the top surface of top plate define and heat preservation interval, and the furnace body places in heat preservation interval, bottom plate, set up below top plate, and bottom plate with top plate between along vertical direction fixed connection has a plurality of support tubes, and both ends of support tube penetrate top plate and bottom plate, and other areas of top plate and bottom plate away from support tube fill with heat preservation layer, sleeve pipe, bottom plate and top plate sliding connection in the cavity of sleeve pipe, and bottom plate and top plate are separated out sealed cavity in the cavity, and the bottom of cavity is provided with driving piece, and the drive end of driving piece is connected with bottom plate, so that heat preservation layer has the selective extension cavity. Can realize the heat preservation effect of reinforcing to single crystal furnace.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace insulation technology, and in particular to a single crystal furnace equipped with a furnace bottom insulation structure. Background Technology

[0002] The production of monocrystalline silicon requires the use of a monocrystalline furnace, which includes a heating furnace and a crucible located in the heating furnace. By pulling the molten silicon in the crucible, a monocrystalline silicon rod is finally obtained. In order to reduce heat loss during the process, an insulation layer is laid at the bottom of the heating furnace.

[0003] In existing technologies, such as the structure for bottom insulation of a single crystal furnace described in patent number CN221701701U, an insulation cavity is set at the bottom of the furnace, and an inert gas is introduced into the cavity to insulate the furnace. This avoids the need for insulation felt to prevent pulverization and replacement. However, the single crystal furnace itself requires electrode cylinders, gas guide cylinders, and heat dissipation cylinders to form a through-hole thermal field structure during production. Gas guide pipes are then connected to the insulation body. The structure, which uses a cavity to support the single crystal furnace, already has low structural strength. The added gas guide structure further reduces the structural strength of the insulation body. Since the crucible, furnace, and other structures are heavy, existing technologies can easily affect the normal production and use of the single crystal furnace, creating safety hazards. Therefore, there is an urgent need for a single crystal furnace equipped with a furnace bottom insulation structure to solve the above-mentioned problems. Utility Model Content

[0004] The purpose of this invention is to provide a single crystal furnace equipped with a furnace bottom insulation structure to solve the problems existing in the prior art and to enhance the insulation effect of the single crystal furnace.

[0005] To achieve the above objectives, this utility model provides the following solution: This utility model provides a single crystal furnace equipped with a furnace bottom insulation structure, comprising: Furnace body; The top plate has a retaining edge fixed to its outer periphery, which defines a heat preservation zone on the top surface of the top plate, and the furnace body is placed within the heat preservation zone. A base plate is disposed below the top plate. Several support tubes are fixedly connected between the base plate and the top plate in a vertical direction. Both ends of the support tubes penetrate the top plate and the base plate. The area between the top plate and the base plate away from the support tubes is filled with an insulation layer. The sleeve has a bottom plate and a top plate slidably connected within its cavity, and the bottom plate and top plate separate a sealed cavity within the cavity. A driving member is provided at the bottom end of the cavity, and the driving end of the driving member is connected to the bottom plate so that the insulation layer can selectively extend out of the cavity.

[0006] Preferably, a sealing ring is fixed to the outer periphery of the top plate and the bottom plate, and the sealing ring is used to slide in contact with the inner wall of the sleeve.

[0007] Preferably, the sealing ring is a carbon fiber ring.

[0008] Preferably, a cover plate is fixed to the outer periphery of the retaining edge, the cover plate is disposed above the top plate, and the top end of the sleeve abuts against or does not contact the bottom surface of the cover plate.

[0009] Preferably, a guide seat is fixedly connected between the bottom of the inner ring side of the retaining edge and the top plate. The guide seat has a ring structure and an inclined edge is provided on the top surface of the guide seat. The inclined edge smoothly transitions toward the center of the top surface of the top plate.

[0010] Preferably, the insulation layer is a graphite felt.

[0011] Preferably, the driving component includes a servo cylinder, and the piston end of the servo cylinder is fixedly connected to the base plate in the vertical direction.

[0012] Preferably, the inner cavity of the support tube defines a through hole for the thermal field structure along the vertical direction.

[0013] The present invention discloses the following technical effects: In this invention, a heat-insulating zone is enclosed by a top plate and a retaining edge fixed to the outer periphery of the top plate, allowing the furnace body to be placed within the heat-insulating zone for the bottom of the furnace body. A bottom plate is installed below the top plate, and several support pipes are used to fix the top plate and the bottom plate together. The two ends of the support pipes penetrate the top plate and the bottom plate, facilitating the installation of the thermal field structure and ensuring normal heating and production of the furnace body. In addition, the support pipes define a gap between the top plate and the bottom plate, and the heat-insulating layer is filled within the gap to form a heat-insulating structure, which helps to enhance the structural strength and is used to insulate the furnace body. At the same time, a sleeve is fitted on the outer periphery of the top plate and the bottom plate, allowing the top plate and the bottom plate to slide within the sleeve, and a sealed cavity is separated in the cavity. At this time, the heat-insulating layer is filled in the sealed cavity. With prolonged high temperature, the heat-insulating layer pulverizes. The bottom plate is driven to rise and fall by a driving component, and the bottom plate drives the top plate and the heat-insulating layer to extend out of the sleeve, which facilitates the direct replacement of the heat-insulating layer by the operator, thereby enhancing the heat-insulating effect of the single crystal furnace. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1This is a diagram showing the positional relationship between the furnace body and the casing in this utility model; Figure 2 This is a diagram showing the connection relationship between the guide seat and the top plate in this utility model; Figure 3 This is a diagram showing the positional relationship between the insulation layer and the top and bottom plates in this utility model. Figure 4 This is a diagram showing the connection relationship between the support tube and the base plate in this utility model; The components include: 1. Furnace body; 2. Top plate; 3. Bottom plate; 4. Support pipe; 5. Insulation layer; 6. Sleeve; 7. Sealing ring; 8. Cover plate; 9. Guide seat; 10. Servo cylinder; 11. Side flange; 41. Through hole for thermal field structure. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0018] Reference Figures 1-4 This utility model provides a single crystal furnace equipped with a furnace bottom insulation structure, comprising: Furnace body 1; The top plate 2 has a retaining edge 11 fixed to its outer periphery. The retaining edge 11 defines the heat preservation area on the top surface of the top plate 2, and the furnace body 1 is placed in the heat preservation area. The bottom plate 3 is set below the top plate 2. Several support pipes 4 are fixed vertically between the bottom plate 3 and the top plate 2. The two ends of the support pipes 4 penetrate the top plate 2 and the bottom plate 3. The other areas between the top plate 2 and the bottom plate 3 away from the support pipes 4 are filled with a thermal insulation layer 5. The sleeve 6, the bottom plate 3 and the top plate 2 are slidably connected in the cavity of the sleeve 6, and the bottom plate 3 and the top plate 2 are separated into a sealed cavity in the cavity. A driving component is provided at the bottom end of the cavity, and the driving end of the driving component is connected to the bottom plate 3 so that the insulation layer 5 can selectively extend out of the cavity.

[0019] In this invention, a heat-insulating zone is enclosed by a top plate 2 and a retaining edge 11 fixed to the outer periphery of the top plate 2, thereby placing the furnace body 1 within the heat-insulating zone to insulate the bottom of the furnace body 1. A bottom plate 3 is installed below the top plate 2, and the top plate 2 and the bottom plate 3 are fixedly connected by several support pipes 4, with both ends of the support pipes 4 penetrating through the top plate 2 and the bottom plate 3, facilitating the installation of the thermal field structure and ensuring the normal heating and production of the furnace body 1. In addition, the support pipes 4 define a gap between the top plate 2 and the bottom plate 3, and the heat-insulating layer 5 is filled within the gap to form a heat-insulating layer. The insulation structure enhances structural strength and provides insulation for the furnace body 1. A sleeve 6 is fitted around the outer periphery of the top plate 2 and bottom plate 3, allowing the top plate 2 and bottom plate 3 to slide within the sleeve 6, creating a sealed cavity. The insulation layer 5 fills this sealed cavity. Over time, the high temperature causes the insulation layer 5 to pulverize. A drive mechanism raises and lowers the bottom plate 3, allowing the top plate 2 and insulation layer 5 to extend out of the sleeve 6, facilitating direct replacement of the insulation layer 5 by staff and enhancing the insulation effect on the single crystal furnace.

[0020] Specifically, the top plate 2, the bottom plate 3, and the support pipe 4 are preferably, but not limited to, made of carbon / carbon composite material.

[0021] Furthermore, sealing rings 7 are fixed to the outer periphery of the top plate 2 and the bottom plate 3, and the sealing rings 7 are used to slide in contact with the inner wall of the sleeve 6.

[0022] Furthermore, the sealing ring 7 is a carbon fiber ring.

[0023] Specifically, the sealing ring 7 is made of carbon fiber ring to ensure the heat resistance of the sealing ring 7. At the same time, during the sliding contact between the sealing ring 7 and the inner wall of the sleeve 6, the sealing ring 7 abuts against the inner wall of the sleeve 6, so that the top plate 2 and the bottom plate 3 cooperate with the two sealing rings 7 to separate the sealing cavity in the cavity.

[0024] By filling the insulation layer 5 into the sealed cavity, the stability of the insulation environment of the insulation layer 5 is improved, and the insulation effect on the bottom of the furnace body 1 is enhanced.

[0025] Furthermore, a cover plate 8 is fixedly connected to the outer periphery of the retaining edge 11. The cover plate 8 is located above the top plate 2, and the top of the sleeve 6 abuts against or does not contact the bottom surface of the cover plate 8.

[0026] By fixing the cover plate 8 to the outside of the flange 11, the top end of the sleeve 6 can be covered, and as the bottom plate 3 and the top plate 2 descend and extend into the cavity, the cover plate 8 abuts against the top end of the sleeve 6, further improving the sealing performance of the sealing cavity.

[0027] Furthermore, a guide seat 9 is fixedly connected between the bottom of the inner ring side of the flange 11 and the top plate 2. The guide seat 9 has a ring structure and a bevel is provided on the top surface of the guide seat 9. The bevel smoothly transitions toward the center of the top surface of the top plate 2.

[0028] The guide seat 9 smoothly transitions along the center of the top plate 2, raising the top surface of the top plate 2. When the bottom of the furnace body 1 abuts against the top surface of the guide seat 9, the furnace body 1 and the top plate 2 can be tightly connected to improve the heat preservation effect.

[0029] Furthermore, the insulation layer 5 is made of graphite soft felt.

[0030] Furthermore, the driving component includes a servo cylinder 10, the piston end of which is fixedly connected to the base plate 3 in the vertical direction.

[0031] The servo cylinder 10 drives the bottom plate 3 to be lifted, and the servo cylinder 10 is arranged below the center of the bottom plate 3, so that the servo cylinder 10 drives the bottom plate 3 and the top plate 2 to be lifted stably. After the insulation layer 5 is pulverized, the insulation layer 5 can be replaced by lifting the bottom plate 3, which is convenient for operation and enhances the insulation effect of the furnace body 1.

[0032] Furthermore, the inner cavity of the support tube 4 defines a through hole 41 for the thermal field structure along the vertical direction.

[0033] This utility model provides a working principle for a single crystal furnace equipped with a furnace bottom insulation structure: The sleeve 6 and servo cylinder 10 are fixed or placed on the ground using a support structure. The insulation layer 5 is filled between the bottom plate 3 and the top plate 2. The bottom plate 3 and the top plate 2 are lowered into the sleeve 6 by the servo cylinder 10. The sealing ring 7 contacts and abuts against the inner wall of the sleeve 6, thus defining a sealed cavity between the top plate 2 and the bottom plate 3. This process continues until the cover plate 8 abuts against the top of the sleeve 6. The furnace body 1 is placed on the top surface of the top plate 2, and the thermal field structure components on the furnace body 1 are inserted into the vertical thermal field structure through holes 41 formed by the support tube 4. After the furnace body 1 abuts against the top surface of the guide seat 9, the installation of the furnace body 1 and the top plate 2 is completed. During the heating process of the furnace body 1, the insulation layer 5 can effectively insulate the bottom of the furnace body 1. When it is necessary to replace the insulation layer 5, the bottom plate 3 can be raised by the servo cylinder 10.

[0034] In the description of this utility model, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0035] The embodiments described above are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various modifications and improvements made to the technical solutions of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. A single-crystal furnace equipped with a furnace bottom insulation structure, characterized in that, include: Furnace body (1); The top plate (2) has a baffle (11) fixed to its outer periphery. The baffle (11) defines the heat preservation area on the top surface of the top plate (2), and the furnace body (1) is placed in the heat preservation area. A base plate (3) is located below the top plate (2). Several support pipes (4) are fixed between the base plate (3) and the top plate (2) in the vertical direction. The two ends of the support pipes (4) penetrate the top plate (2) and the base plate (3). The other areas between the top plate (2) and the base plate (3) away from the support pipes (4) are filled with a heat insulation layer (5). The sleeve (6), the bottom plate (3) and the top plate (2) are slidably connected in the cavity of the sleeve (6), and the bottom plate (3) and the top plate (2) are separated into a sealed cavity in the cavity. A driving member is provided at the bottom end of the cavity, and the driving end of the driving member is connected to the bottom plate (3) so that the insulation layer (5) can selectively extend out of the cavity.

2. The single crystal furnace equipped with a furnace bottom insulation structure according to claim 1, characterized in that: A sealing ring (7) is fixed to the outer periphery of the top plate (2) and the bottom plate (3), and the sealing ring (7) is used to slide in contact with the inner wall of the sleeve (6).

3. The single crystal furnace equipped with a furnace bottom insulation structure according to claim 2, characterized in that: The sealing ring (7) is a carbon fiber ring.

4. The single crystal furnace equipped with a furnace bottom insulation structure according to claim 1, characterized in that: A cover plate (8) is fixed to the outer periphery of the retaining edge (11). The cover plate (8) is located above the top plate (2). The top end of the sleeve (6) abuts against or does not contact the bottom surface of the cover plate (8).

5. The single crystal furnace equipped with a furnace bottom insulation structure according to claim 1, characterized in that: A guide seat (9) is fixedly connected between the bottom of the inner ring side of the baffle (11) and the top plate (2). The guide seat (9) is a ring structure, and the top surface of the guide seat (9) is provided with a slanted edge, which smoothly transitions toward the center of the top surface of the top plate (2).

6. The single crystal furnace equipped with a furnace bottom insulation structure according to claim 1, characterized in that: The insulation layer (5) is a graphite soft felt.

7. The single crystal furnace equipped with a furnace bottom insulation structure according to claim 1, characterized in that: The driving component includes a servo cylinder (10), the piston end of which is fixedly connected to the base plate (3) in the vertical direction.

8. The single crystal furnace equipped with a furnace bottom insulation structure according to claim 1, characterized in that: The inner cavity of the support tube (4) defines a through hole (41) for the thermal field structure along the vertical direction.

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