A quartz boat loading mechanism

CN224884248UActive Publication Date: 2026-10-23GUANGDONG XIANRUI TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202522244405.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-23
Publication Date
2026-10-23
Estimated Expiration
2035-10-23

AI Technical Summary

Technical Problem

[0003]本实用新型要解决的技术问题是:石英舟的子晶装料以及多晶原料的填充普遍依赖人工操作,不仅操作不便且效率低下,同时劳动强度高,装料重量难以准确把控,易导致批次间质量不一致

Benefits of technology

本实用新型实施例的工作人员将空石英舟放置于石英舟底座,将子晶放置在子晶底座的第一放置槽中;随后吸料装置从子晶底座吸取子晶,放入石英舟内,搬运装置将已装载子晶的石英舟从石英舟底座移至称重底座;称重传感器测量当前重量,随后装载多晶原料,并在装载多晶原料的过程中检测整体重量,以便于确定装载的重量。本实施例采用人工辅助上子晶配合装料与计量功能,各底座和装置协同工作,确保子晶准确插入石英舟,实现子晶的自动化装载,装载子晶更为便捷,且提高了效率,解决了人工装载由于作业空间受限,操作不便且效率低下的问题;此外,通过搬运装置搬运石英舟,降低了工人的劳动强度,且实时监控装载质量,使得多晶原料的装载重量更易把控,避免批次间质量不一致,提高后续工艺的稳定性和产品良率。

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Abstract

The utility model discloses a quartz boat loading mechanism, including quartz boat, base device, suction material device and handling device, base device includes the sub -crystal base that sets up in first direction interval in proper order, quartz boat base and weighing base, quartz boat base has the second placement groove for placing quartz boat, weighing base has the weighing sensor, suction material device sets up one side of base device to with sub -crystal from sub -crystal base handling to quartz boat, handling device sets up the other side of base device, and with opposite setting of suction material device, handling device is used for with quartz boat from quartz boat base handling to weighing base, the utility model discloses solved the problem that artificial loading is due to the limited operation space, inconvenient operation and low efficiency, reduced the labor intensity of worker, and real -time monitoring loading quality makes the loading weight of polycrystal raw material more easily control.
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Description

Technical Field

[0001] This utility model relates to the field of quartz boat loading technology, and in particular to a quartz boat loading mechanism. Background Technology

[0002] Currently, in the production of photovoltaic or semiconductor materials, the loading of daughter crystals and the filling of polycrystalline raw materials in quartz boats generally rely on manual operation. Due to the long and deep structure of the quartz boat, operators have limited working space when loading daughter crystals, making the operation inconvenient and inefficient. Furthermore, the quartz boat itself is quite heavy, whether empty or fully loaded, making manual transport to the polycrystalline raw material loading area labor-intensive. In addition, the polycrystalline raw material loading process lacks metering control, making it difficult to accurately control the loading weight, which can easily lead to batch-to-batch quality inconsistencies, affecting the stability of subsequent processes and product yield. Utility Model Content

[0003] The technical problem this invention aims to solve is that the loading of daughter crystals and polycrystalline raw materials into quartz boats generally relies on manual operation, which is not only inconvenient and inefficient, but also labor-intensive, and the loading weight is difficult to control accurately, which can easily lead to inconsistent quality between batches.

[0004] To solve the above-mentioned technical problems, this utility model provides a quartz boat loading mechanism, comprising: quartz boat; The base device includes a sub-crystal base, a quartz boat base, and a weighing base arranged sequentially at intervals along a first direction; the sub-crystal base has a first placement slot for placing sub-crystals; the quartz boat base has a second placement slot for placing quartz boats; and the weighing base has a weighing sensor. A suction device, disposed on one side of the base device, is used to transport the seed crystal from the seed crystal base to the quartz boat; and A conveying device is disposed on the other side of the base device and opposite to the suction device. The conveying device is used to convey the quartz boat from the quartz boat base to the weighing base.

[0005] Furthermore, the quartz boat includes a body, a quartz cover for covering one end of the body, and a sub-crystal portion disposed at the other end of the body. The body has a raw material cavity for placing polycrystalline raw materials, and the sub-crystal portion has a sub-crystal cavity for placing sub-crystals. The sub-crystal cavity is in communication with the raw material cavity.

[0006] Furthermore, the sub-crystal portions are multiple, and the multiple sub-crystal portions are spaced apart along the axis of the body.

[0007] Furthermore, the sub-crystal base has a plurality of first placement slots, which are spaced apart along the axis of the sub-crystal base.

[0008] Furthermore, the suction device includes a first bracket, a first driving assembly, a second driving assembly, a connecting rod, and a suction cup connected to one end of the connecting rod. The first bracket is disposed on one side of the base device. The first driving assembly is mounted on the first bracket and connected to the second driving assembly to drive the second driving assembly to reciprocate along a first direction. The second driving assembly is connected to the other end of the connecting rod to drive the suction cup to reciprocate along a second direction, which is perpendicular to the first direction.

[0009] Furthermore, the first drive assembly includes a first lead screw, a first mounting bracket, a first connecting plate, a first coupling, and a first drive component. The first mounting bracket is mounted on the first support, and the first drive component and the first lead screw are mounted on the first mounting bracket. One end of the first lead screw is rotatably connected to the first mounting bracket, and the other end of the first lead screw is connected to the first drive component through the first coupling. The first mounting bracket is provided with a first slide rail, the first connecting plate is drivenly mounted on the first lead screw, and the first connecting plate is slidably mounted on the first slide rail. The second drive assembly is mounted on the first connecting plate.

[0010] Furthermore, the second drive assembly includes a second lead screw, a second mounting bracket, a second connecting plate, a second coupling, and a second drive member. The second mounting bracket is mounted on the first drive assembly, and the second drive member and the second lead screw are mounted on the second mounting bracket. One end of the second lead screw is rotatably connected to the second mounting bracket, and the other end of the second lead screw is connected to the second drive member through the second coupling. The second mounting bracket is provided with a second slide rail. The second connecting plate is drivenly mounted on the second lead screw and slidably mounted on the second slide rail. The connecting rod is mounted on the second connecting plate.

[0011] Furthermore, the conveying device includes a clamping assembly, a third driving assembly, and a lifting driving member. The third driving assembly is mounted on the mounting plane and located on the other side of the base device. The third driving assembly is connected to the lifting driving member to drive the lifting driving member to reciprocate along a first direction. The lifting driving member is connected to the clamping assembly to drive the clamping assembly to reciprocate along a second direction.

[0012] Furthermore, the third drive assembly includes a third lead screw, a third mounting bracket, a third connecting plate, a third coupling, and a third drive component. The third mounting bracket is mounted on the mounting plane, and the third drive component and the third lead screw are mounted on the third mounting bracket. One end of the third lead screw is rotatably connected to the third mounting bracket, and the other end of the third lead screw is connected to the third drive component through the third coupling. The third mounting bracket is provided with a third slide rail. The third connecting plate is drivenly mounted on the third lead screw and slidably mounted on the third slide rail. The lifting drive component is mounted on the third connecting plate.

[0013] Furthermore, the clamping assembly includes a clamping drive and a gripper, the clamping drive being connected to the gripper to drive the gripper to open or clamp.

[0014] Compared with the prior art, the quartz boat loading mechanism of this utility model has the following advantages: In this embodiment of the invention, an operator places an empty quartz boat on a quartz boat base and places the seed crystal in the first placement slot of the seed crystal base. Then, a suction device picks up the seed crystal from the seed crystal base and places it into the quartz boat. A transport device moves the quartz boat loaded with the seed crystal from the quartz boat base to a weighing base. A weighing sensor measures the current weight, and then polycrystalline raw materials are loaded. The overall weight is monitored during the loading process to determine the loading weight. This embodiment employs manual assistance in loading the seed crystal in conjunction with the loading and metering functions. All bases and devices work together to ensure accurate insertion of the seed crystal into the quartz boat, achieving automated loading of the seed crystal. Loading the seed crystal is more convenient and efficient, solving the problems of limited working space, inconvenience, and low efficiency associated with manual loading. Furthermore, the transport device reduces the labor intensity of workers and allows for real-time monitoring of the loading quality, making it easier to control the loading weight of the polycrystalline raw materials, avoiding batch-to-batch quality inconsistencies, and improving the stability of subsequent processes and product yield. Attached Figure Description

[0015] The present application will be further described in detail below with reference to the accompanying drawings and preferred embodiments. However, those skilled in the art will appreciate that these drawings are drawn only for the purpose of explaining the preferred embodiments and therefore should not be construed as limiting the scope of the present application. Furthermore, unless specifically indicated, the drawings are intended only to conceptually represent the composition or structure of the described objects and may contain exaggerated representations, and the drawings are not necessarily drawn to scale.

[0016] Figure 1 This utility model embodiment provides a structural schematic diagram of the quartz boat loading mechanism; Figure 2 This utility model embodiment provides a structural schematic diagram of a quartz boat; Figure 3 This is provided along with the embodiments of the present utility model. Figure 2 A cross-sectional view along the AA direction; Figure 4 This utility model provides a schematic diagram of the structure of the suction device; Figure 5 This utility model provides a schematic diagram of the structure of the conveying device. In the diagram, 1. Quartz boat; 11. Body; 111. Raw material chamber; 12. Quartz cover; 13. Sub-crystal section; 131. Sub-crystal cavity; 2. Base device; 21. Sub-crystal base; 22. Quartz boat base; 23. Weighing base; 3. Material suction device; 31. First bracket; 32. First drive assembly; 321. First lead screw; 322. First mounting bracket; 323. First connecting plate; 324. First coupling; 325. First drive component; 326. First slide rail; 33. Second drive... 331. Moving component; 332. Second lead screw; 333. Second mounting bracket; 334. Second connecting plate; 335. Second driving component; 34. Connecting rod; 35. Suction cup; 4. Handling device; 41. Clamping component; 411. Clamping driving component; 412. Gripper; 42. Third driving component; 421. Third lead screw; 422. Third mounting bracket; 423. Third connecting plate; 424. Third coupling; 425. Third driving component; 43. Lifting driving component. Detailed Implementation

[0017] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0018] like Figure 1As shown, this utility model provides a quartz boat loading mechanism, including a quartz boat 1, a base device 2, a suction device 3, and a conveying device 4. The quartz boat 1 is used to load seed crystals and polycrystalline raw materials, serving as a carrier in subsequent high-temperature processes. The base device 2 includes a seed crystal base 21, a quartz boat base 22, and a weighing base 23 arranged sequentially and at intervals along a first direction. The seed crystal base 21 has a first placement slot for placing seed crystals, facilitating the placement of the seed crystals to be loaded by the operator, and enabling subsequent suction by the suction device 3. The quartz boat base 22 has a second placement slot for placing the quartz boat 1, for fixing and supporting it. The suspended quartz boat 1 facilitates the placement of the seed crystal by the suction device 3. The weighing base 23 is equipped with a weighing sensor, which moves to this position for weighing before loading the quartz boat 1 and detects the overall weight during the loading of polycrystalline raw materials to determine the loading weight. The suction device 3 is located on one side of the base device 2 to transport the seed crystal from the seed crystal base 21 to the quartz boat 1, realizing automatic feeding, replacing manual operation, and improving accuracy and efficiency. The conveying device 4 is located on the other side of the base device 2 and is opposite to the suction device 3. The conveying device 4 is used to transport the quartz boat 1 from the quartz boat base 22 to the weighing base 23.

[0019] Based on the above structure, the worker places the empty quartz boat 1 on the quartz boat base 22 and places the seed crystal in the first placement slot of the seed crystal base 21; then the suction device 3 picks up the seed crystal from the seed crystal base 21 and puts it into the quartz boat 1, and the conveying device 4 moves the quartz boat 1 loaded with seed crystal from the quartz boat base 22 to the weighing base 23; the weighing sensor measures the current weight, then loads the polycrystalline raw material, and detects the overall weight during the loading of the polycrystalline raw material in order to determine the loaded weight.

[0020] This embodiment employs manual assistance in loading and metering the sub-crystals, with each base and device working in concert to ensure accurate insertion of the sub-crystals into the quartz boat 1. This achieves automated loading of the sub-crystals, making loading more convenient and efficient. It solves the problems of inconvenient and inefficient manual loading due to limited workspace. Furthermore, the quartz boat 1 is moved by the handling device 4, reducing the labor intensity of workers and allowing for real-time monitoring of loading quality. This makes it easier to control the loading weight of polycrystalline raw materials, avoiding batch-to-batch quality inconsistencies and improving the stability of subsequent processes and product yield.

[0021] It should be noted that the first direction in this embodiment is the horizontal direction.

[0022] like Figure 2 and Figure 3As shown, the quartz boat 1 includes a body 11, a quartz cover 12, and a sub-crystal section 13. The quartz cover 12 is used to cover one end of the body 11. The body 11 has a raw material cavity 111 for placing polycrystalline raw materials. The sub-crystal section 13 is disposed at the other end of the body 11 and has a sub-crystal cavity 131 for placing sub-crystals. The sub-crystal cavity 131 is connected to the raw material cavity 111.

[0023] Based on the above structure, at the start of the transfer, the quartz boat 1 is moved to the quartz boat base 22, at which time the sub-crystal part 13 is inserted into the second placement slot. After the feeding device 3 places the sub-crystal into the sub-crystal cavity 131, the conveying device 4 moves the quartz boat 1 to the weighing base 23 for loading and weighing. After the raw material cavity 111 is loaded with the rated weight of polycrystalline raw material, the quartz cover 12 is placed on one end of the main body 11.

[0024] Understandably, the quartz boat 1 in this embodiment can be moved to the quartz boat base 22 by a mechanical device, such as a robotic arm; or it can be moved to the quartz boat base 22 manually.

[0025] In some embodiments, there are multiple sub-crystal sections 13, which are spaced apart along the axis of the body 11. Understandably, the feeding device 3 can simultaneously place multiple sub-crystals at the bottom of the quartz boat 1 to form a multi-sub-crystal structure, thereby improving the yield of single crystal formation. Preferably, in this embodiment, there are six sub-crystal sections 13.

[0026] Furthermore, the sub-crystal base 21 has a plurality of first placement slots, which are spaced apart along the axis of the sub-crystal base 21.

[0027] This embodiment uses multiple first placement slots to ensure that multiple seed crystals can be stably placed, avoiding mutual collisions or damage, thus facilitating the positioning and gripping of the suction device and improving the efficiency of loading the seed crystals into the quartz boat 1. Preferably, the arrangement of the first placement slots in this embodiment corresponds to the arrangement of the seed crystal section 13.

[0028] like Figure 1 As shown, the suction device 3 includes a first support 31, a first drive assembly 32, a second drive assembly 33, a connecting rod 34, and a suction cup 35 connected to one end of the connecting rod 34. The first support 31 serves as a structure to support and fix the entire suction device 3, and is located on one side of the base device 2. The first drive assembly 32 is mounted on the first support 31 and is connected to the second drive assembly 33 to drive the second drive assembly 33 to reciprocate along a first direction. The second drive assembly 33 is connected to the other end of the connecting rod 34 to drive the suction cup 35 to reciprocate along a second direction, which is perpendicular to the first direction. The suction cup 35 is externally connected to a vacuum device, which directly contacts the seed crystal to adsorb the seed crystal through vacuum negative pressure.

[0029] Based on the above structure, during operation, the second drive assembly 33 is activated, driving the connecting rod 34 and the suction cup 35 to move along the second direction to the top of the sub-crystal, where the suction cup 35 picks up the sub-crystal. Subsequently, the suction cup 35 moves upward until the sub-crystal detaches from the sub-crystal base 21 and is above the top of the quartz boat 1. Then, the first drive assembly 32 is activated, driving the second drive assembly 33 (along with the connecting rod 34 and the suction cup 35) to move along the first direction to the top of the quartz boat 1. At this time, the suction cup 35 moves downward to the sub-crystal portion 13 at the bottom of the quartz boat 1. Once the sub-crystal is placed in the sub-crystal cavity 131, the suction cup 35 stops adsorbing and moves upward to the top of the quartz boat 1. In this embodiment, through coordinated movement in two directions, the suction cup 35 can automatically grasp and transport the sub-crystal without manual operation, improving the degree of automation. It should be noted that the second direction in this embodiment is the vertical direction.

[0030] like Figure 4 As shown, the first drive assembly 32 includes a first lead screw 321, a first mounting bracket 322, a first connecting plate 323, a first coupling 324, and a first drive component 325. The first drive component 325 is a motor (such as a servo motor or a stepper motor) to serve as the power source for the entire first drive assembly 32, providing rotational power to drive the suction cup 35 to move. The first mounting bracket 322 is mounted on the first support 31. The first drive component 325 and the first lead screw 321 are mounted on the first mounting bracket 322. One end of the first lead screw 321 is rotatably connected to the first mounting bracket 322, and the other end of the first lead screw 321 is connected to the first drive component 325 through the first coupling 324. The first mounting bracket 322 is provided with a first slide rail 326 to provide linear guidance and support for the first connecting plate 323, ensuring that it can only slide smoothly along the first direction (i.e., the axial direction of the first lead screw 321) and avoid rotation or deviation. The first connecting plate 323 is driven and mounted on the first lead screw 321, and the first connecting plate 323 is slidably mounted on the first slide rail 326. The second drive assembly 33 is mounted on the first connecting plate 323.

[0031] Based on the above structure, the first driving component 325 is activated, its output shaft rotates, and the rotation is transmitted to the first lead screw 321 through the first coupling 324, so that the first lead screw 321 rotates, driving the first connecting plate 323 that cooperates with it to move linearly along the axial direction of the first lead screw 321, so as to drive the second driving component 33 and the suction cup 35 installed on the first connecting plate 323 to move together along the first direction, thereby realizing the movement of the sub-crystal in the first direction.

[0032] Furthermore, the second drive assembly 33 includes a second lead screw 331, a second mounting bracket 332, a second connecting plate 333, a second coupling 334, and a second drive component 335. The second drive component 335 is a motor (such as a servo motor or a stepper motor) to serve as the power source for the entire second drive assembly 33, providing rotational power to drive the suction cup 35 to move. The second mounting bracket 332 is mounted on the first drive assembly 32. The second drive member 335 and the second lead screw 331 are mounted on the second mounting bracket 332. One end of the second lead screw 331 is rotatably connected to the second mounting bracket 332, and the other end of the second lead screw 331 is connected to the second drive member 335 through the second coupling 334. The second mounting bracket 332 is provided with a second slide rail to provide linear guidance and support for the second connecting plate 333, ensuring that it can only slide smoothly along the second direction (i.e., the direction of the axis of the second lead screw 331) and avoid rotation or deviation. The second connecting plate 333 is driven and mounted on the second lead screw 331, and the second connecting plate 333 is slidably mounted on the second slide rail. The connecting rod 34 is mounted on the second connecting plate 333.

[0033] Based on the above structure, the second driving component 335 is activated, its output shaft rotates, and the rotation is transmitted to the second lead screw 331 through the second coupling 334, causing the second lead screw 331 to rotate, which drives the second connecting plate 333 that cooperates with it to move linearly along the axial direction of the second lead screw 331, so as to drive the suction cup 35 installed on the second connecting plate 333 to move together along the second direction, thereby realizing the movement of the sub-crystal in the second direction.

[0034] like Figure 1 As shown, the conveying device 4 includes a clamping assembly 41, a third drive assembly 42, and a lifting drive component 43. The third drive assembly 42 is mounted on the mounting plane and located on the other side of the base device 2. The third drive assembly 42 is connected to the lifting drive component 43 to drive the lifting drive component 43 to reciprocate along a first direction. The lifting drive component 43 is connected to the clamping assembly 41 to drive the clamping assembly 41 to reciprocate along a second direction, thereby driving the quartz boat 1 to rise and fall. The clamping assembly 41 is used to clamp the quartz boat 1 to ensure that the object will not fall during the movement.

[0035] Based on the above structure, the clamping component 41 clamps the quartz boat 1, and then the lifting drive component 43 drives the clamping component 41 to rise until the quartz boat 1 is separated from the quartz boat base 22. The third drive component 42 is activated, driving the lifting drive component 43 and the clamping component 41 to move along the first direction (e.g., the horizontal X-axis) to the weighing base 23. The lifting drive component 43 drives the clamping component 41 to descend until the quartz boat 1 is inserted into the weighing base 23. At this time, the clamping component 41 releases the quartz boat 1, and the polycrystalline raw material is loaded manually according to the weighing sensor data. Finally, the quartz cover 12 is closed to complete the operation.

[0036] It should be noted that the lifting drive component 43 in this embodiment is a lifting cylinder.

[0037] like Figure 5 As shown, the third drive assembly 42 includes a third lead screw 421, a third mounting bracket 422, a third connecting plate 423, a third coupling 424, and a third drive component 425. The third drive component 425 is a motor (such as a servo motor or a stepper motor) to serve as the power source for the entire third drive assembly 42, providing rotational power to drive the lifting drive component 43 and the clamping assembly 41 to move. The third mounting bracket 422 is mounted on the mounting plane. The third drive component 425 and the third lead screw 421 are mounted on the third mounting bracket 422. One end of the third lead screw 421 is rotatably connected to the third mounting bracket 422, and the other end of the third lead screw 421 is connected to the third drive component 425 through the third coupling 424. The third mounting bracket 422 is provided with a third slide rail to provide linear guidance and support for the third connecting plate 423, ensuring that it can only slide smoothly along the first direction (i.e., the direction of the axis of the third lead screw 421) and avoid rotation or deviation. The third connecting plate 423 is driven and mounted on the third lead screw 421, and the third connecting plate 423 is slidably mounted on the third slide rail. The lifting drive component 43 is mounted on the third connecting plate 423.

[0038] Based on the above structure, the third drive unit 425 is activated, its output shaft rotates, and the rotation is transmitted to the third lead screw 421 through the third coupling 424, causing the third lead screw 421 to rotate, which drives the third connecting plate 423 that cooperates with it to move linearly along the axial direction of the third lead screw 421, so as to drive the lifting drive unit 43 and the clamping assembly 41 installed on the third connecting plate 423 to move together along the first direction, thereby realizing the movement of the quartz boat 1 in the first direction.

[0039] Furthermore, the clamping assembly 41 includes a clamping drive 411 and grippers 412. The clamping drive 411 is connected to the grippers 412 to drive the grippers 412 to open or close. Based on the above structure, when the clamping drive 411 is activated, the two grippers 412 close towards the middle to clamp the quartz boat 1; or the two grippers 412 separate outwards to release the quartz boat 1. The clamping drive 411 can adjust the output force to stably clamp the quartz boat 1, thereby achieving automated handling.

[0040] It should be noted that the clamping drive component 411 in this embodiment is a clamping cylinder.

[0041] In summary, this embodiment of the utility model provides a quartz boat loading mechanism. An operator places an empty quartz boat 1 on a quartz boat base 22 and places the seed crystal in the first placement slot of the seed crystal base 21. Then, a suction device 3 picks up the seed crystal from the seed crystal base 21 and places it into the quartz boat 1. A transport device 4 moves the quartz boat 1 loaded with the seed crystal from the quartz boat base 22 to a weighing base 23. A weighing sensor measures the current weight, and then polycrystalline raw materials are loaded. The overall weight is monitored during the loading process to determine the loading weight. This embodiment employs manual assistance in loading the seed crystal in conjunction with the loading and metering functions. All bases and devices work together to ensure accurate insertion of the seed crystal into the quartz boat 1, achieving automated loading of the seed crystal. Loading the seed crystal is more convenient and efficient, solving the problems of limited working space, inconvenience, and low efficiency associated with manual loading. Furthermore, the transport device 4 reduces the labor intensity of workers and allows for real-time monitoring of the loading quality, making it easier to control the loading weight of the polycrystalline raw materials, avoiding batch-to-batch quality inconsistencies, and improving the stability of subsequent processes and product yield.

[0042] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A quartz boat loading mechanism, characterized in that, include: quartz boat; The base device includes a sub-crystal base, a quartz boat base, and a weighing base that are sequentially spaced apart along a first direction; The daughter crystal base has a first placement slot for placing the daughter crystal; the quartz boat base has a second placement slot for placing the quartz boat; the weighing base has a weighing sensor; A material suction device is disposed on one side of the base device to transport the seed crystal from the seed crystal base to the quartz boat; as well as A conveying device is disposed on the other side of the base device and opposite to the suction device. The conveying device is used to convey the quartz boat from the quartz boat base to the weighing base.

2. The quartz boat loading mechanism according to claim 1, characterized in that, The quartz boat includes a body, a quartz cover for covering one end of the body, and a sub-crystal section disposed at the other end of the body. The body has a raw material cavity for placing polycrystalline raw materials, and the sub-crystal section has a sub-crystal cavity for placing sub-crystals. The sub-crystal cavity is in communication with the raw material cavity.

3. The quartz boat loading mechanism according to claim 2, characterized in that, The sub-crystal portions are multiple, and the multiple sub-crystal portions are spaced apart along the axis of the body.

4. The quartz boat loading mechanism according to any one of claims 1-3, characterized in that, The sub-crystal base has a plurality of first placement slots, which are spaced apart along the axis of the sub-crystal base.

5. The quartz boat loading mechanism according to claim 1, characterized in that, The suction device includes a first bracket, a first driving assembly, a second driving assembly, a connecting rod, and a suction cup connected to one end of the connecting rod. The first bracket is disposed on one side of the base device. The first driving assembly is mounted on the first bracket and connected to the second driving assembly to drive the second driving assembly to reciprocate along a first direction. The second driving assembly is connected to the other end of the connecting rod to drive the suction cup to reciprocate along a second direction, which is perpendicular to the first direction.

6. The quartz boat loading mechanism according to claim 5, characterized in that, The first drive assembly includes a first lead screw, a first mounting bracket, a first connecting plate, a first coupling, and a first drive component. The first mounting bracket is mounted on the first support, and the first drive component and the first lead screw are mounted on the first mounting bracket. One end of the first lead screw is rotatably connected to the first mounting bracket, and the other end of the first lead screw is connected to the first drive component through the first coupling. The first mounting bracket is provided with a first slide rail. The first connecting plate is drivenly mounted on the first lead screw and slidably mounted on the first slide rail. The second drive assembly is mounted on the first connecting plate.

7. The quartz boat loading mechanism according to claim 5, characterized in that, The second drive assembly includes a second lead screw, a second mounting bracket, a second connecting plate, a second coupling, and a second drive component. The second mounting bracket is mounted on the first drive assembly, and the second drive component and the second lead screw are mounted on the second mounting bracket. One end of the second lead screw is rotatably connected to the second mounting bracket, and the other end of the second lead screw is connected to the second drive component through the second coupling. The second mounting bracket is provided with a second slide rail. The second connecting plate is drivenly mounted on the second lead screw and slidably mounted on the second slide rail. The connecting rod is mounted on the second connecting plate.

8. The quartz boat loading mechanism according to claim 1, characterized in that, The conveying device includes a clamping assembly, a third driving assembly, and a lifting driving member. The third driving assembly is mounted on the mounting plane and located on the other side of the base device. The third driving assembly is connected to the lifting driving member to drive the lifting driving member to reciprocate along a first direction. The lifting driving member is connected to the clamping assembly to drive the clamping assembly to reciprocate along a second direction.

9. The quartz boat loading mechanism according to claim 8, characterized in that, The third drive assembly includes a third lead screw, a third mounting bracket, a third connecting plate, a third coupling, and a third drive component. The third mounting bracket is mounted on the mounting plane, and the third drive component and the third lead screw are mounted on the third mounting bracket. One end of the third lead screw is rotatably connected to the third mounting bracket, and the other end of the third lead screw is connected to the third drive component through the third coupling. The third mounting bracket is provided with a third slide rail. The third connecting plate is drivenly mounted on the third lead screw and slidably mounted on the third slide rail. The lifting drive component is mounted on the third connecting plate.

10. The quartz boat loading mechanism according to claim 8, characterized in that, The clamping assembly includes a clamping drive and a gripper, the clamping drive being connected to the gripper to drive the gripper to open or clamp.