A kind of air extraction device and coating film integrated equipment

Abstract

The utility model relates to solar cell preparation technical field especially relates to a kind of air extraction device and coating film-forming integrated equipment, including air extraction pedestal and vacuum cover;Air extraction pedestal has horizontal base and air extraction plate, air extraction plate is set to the bottom of horizontal base, and the circumferential side of air extraction plate is provided with air hole;Vacuum cover can be buckled in horizontal base, to be formed with horizontal base and form vacuum cavity, the bottom of vacuum cover is provided with air extraction hole, and is provided with air dispersion cavity and air dispersion hole, air extraction hole is connected air dispersion cavity and vacuum cavity, and air dispersion hole is set to the circumferential side of air dispersion cavity and air hole intercommunication;By being set to the circumferential side of air extraction plate and air hole, and being connected with air dispersion hole, so that vacuum cover can pass through air extraction empty and extract the air in vacuum cavity into air dispersion cavity, air dispersion hole disperses into the vacuum extraction pipeline, to realize the gas in vacuum cavity from bottom to top, from middle to outer is extracted, ensure the air extraction stability when vacuum film-forming, speed up air extraction speed, avoid local airflow accumulation.

Description

Technical Field

[0001] This utility model relates to the technical field of solar cell fabrication technology, and in particular to an integrated equipment for air extraction and coating film formation. Background Technology

[0002] In the fabrication of thin-film solar cells, slot coating equipment is commonly used to prepare perovskite layers and other thin film coatings. The drying of these films generally takes two forms: air knife drying and rapid vacuum drying (vacuum film formation). Vacuum film formation yields better results and higher quality films. Within slot coating equipment, the film formation equipment itself determines the quality of the solar cell film. Conventional film formation equipment typically moves the substrate with the wet film fixed to a vacuum chamber for vacuum drying.

[0003] Currently, there is a vacuum coating film forming machine, which is equipped with a base platform for fixing the substrate and a vacuum hood above the base platform. The vacuum hood can be moved up and down by a lifting structure. The vacuum hood is equipped with a vacuum gas supply valve and a vacuum gas extraction valve that communicate with the inside of the vacuum hood, thereby realizing the creation of a vacuum cavity after coating and rapid film formation without moving the base platform.

[0004] However, the existing vacuum coating film forming machine has a vacuum pumping device that is connected to the vacuum pipe on the vacuum hood. It pumps air from the top of the substrate into the vacuum chamber, which can easily cause local gas accumulation in the vacuum pipe at the top of the vacuum hood, reducing pumping stability and affecting the substrate adsorption stability and the uniformity of film deposition. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum pumping device and an integrated coating and film-forming equipment to solve the technical problems in the prior art where vacuuming the vacuum chamber from the top of the substrate easily causes local gas accumulation in the vacuum pipeline at the top of the vacuum hood, reducing the pumping stability and affecting the substrate adsorption stability and the uniformity of film deposition.

[0006] Firstly, the present invention provides an air extraction device, comprising an air extraction base and a vacuum hood; The vacuum base has a horizontal base and a vacuum plate. The horizontal base is used to support the substrate with a wet film. The vacuum plate is disposed at the bottom of the horizontal base and connected to the horizontal base. The vacuum plate has ventilation holes on its periphery, which can be connected to the vacuum pipeline. The vacuum hood can be fastened to the horizontal base to form a vacuum cavity with the horizontal base. The bottom of the vacuum hood is provided with an air extraction hole. The vacuum hood is provided with a gas dissipation cavity and a gas dissipation hole. The air extraction hole connects the gas dissipation cavity and the vacuum cavity. The gas dissipation hole is located on the periphery of the gas dissipation cavity and is connected to the vent hole.

[0007] Furthermore, the thickness of the air dispersion chamber gradually increases from the air extraction hole towards the air dispersion hole, the top wall of the air dispersion chamber is set in the horizontal direction, and the bottom wall of the air dispersion chamber is set at an angle to the horizontal direction.

[0008] Furthermore, the air extraction base also includes an air outlet plate; The vent plate is connected to the bottom of the horizontal base. The vent plate is provided with a ventilation groove. The center of the vent plate has a vertically penetrating vent. One end of the vent is connected to the ventilation groove, and the other end of the vent is used to connect to the vacuum pipeline. The vent hole is connected to the ventilation groove.

[0009] Furthermore, the vacuum base also includes a pad; The pad is disposed at the bottom of the air outlet plate and connected to the air outlet plate. The pad is used to support the horizontal platform on which the air extraction base is installed. Several of the pads are connected end to end to form a gasket, which surrounds the air outlet.

[0010] Furthermore, a negative pressure adsorption hole is provided vertically through the horizontal base; A number of negative pressure adsorption holes are evenly distributed on the horizontal base. One end of each negative pressure adsorption hole is used to adsorb the substrate, and the other end of each negative pressure adsorption hole is used to communicate with a negative pressure source.

[0011] Furthermore, the suction plate is provided with an adsorption groove and a negative pressure passage; The adsorption tank is located below the negative pressure adsorption hole and is connected to the negative pressure adsorption hole. The negative pressure passage is located on the periphery of the adsorption tank. One end of the negative pressure passage is connected to the adsorption tank, and the other end of the negative pressure passage is connected to the negative pressure source.

[0012] Furthermore, the suction plate is also provided with a sealing groove, which surrounds the adsorption groove and all the ventilation holes. A sealing ring is provided in the sealing groove, and the top of the sealing ring can abut against the horizontal base.

[0013] Furthermore, the air extraction device also includes a contact switch; The contact switch is fixed to the horizontal base and can abut against the vacuum hood to detect the position of the vacuum hood.

[0014] Furthermore, the horizontal base is constructed from marble or artificial quartz.

[0015] Secondly, this utility model also provides an integrated coating and film-forming device, including the horizontal platform, assembly base, coating components, gantry structure and the aforementioned air extraction device.

[0016] Compared with the prior art, the present invention provides a vacuum pumping device, including a vacuum pumping base and a vacuum hood; the vacuum pumping base has a horizontal platform and a vacuum plate, the horizontal platform is used to support a substrate with a wet film, the vacuum plate is disposed at the bottom of the horizontal platform and connected to the horizontal platform, and the vacuum plate has ventilation holes on its periphery, which can be connected to a vacuum pumping pipeline; the vacuum hood can be fastened to the horizontal platform to form a vacuum cavity with the horizontal platform, the bottom of the vacuum hood is provided with a vacuum hole, and the vacuum hood is provided with a gas dissipation chamber and a gas dissipation hole, the vacuum hole connects the gas dissipation chamber and the vacuum cavity, the gas dissipation hole is disposed on the periphery of the gas dissipation chamber and is connected to the ventilation hole; by providing a vacuum plate on its periphery... A vent is provided that connects to the vacuum pumping pipeline and is also connected to the vents on the periphery of the inner venting chamber of the vacuum hood. This allows the vacuum hood to draw air from the vacuum chamber into the venting chamber through the vent, and then disperse the air into the vacuum pumping pipeline through the vents on the periphery. This achieves the extraction of gas from the bottom up and from the center outwards within the vacuum chamber, ensuring stable gas extraction during vacuum film deposition, accelerating the extraction speed, and preventing localized gas accumulation. This solves the technical problem in existing technologies where venting the vacuum chamber from the top of the substrate easily causes localized gas accumulation in the vacuum pipeline at the top of the vacuum hood, reducing extraction stability and affecting the substrate adsorption stability and the uniformity of film deposition. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the overall structure of the coating and film-forming integrated equipment provided in this embodiment of the utility model; Figure 2 This is a schematic diagram of the overall structure of the vacuum shroud in the air extraction device provided in this embodiment of the utility model. Figure 3 This is a schematic diagram of the structure of the air extraction base in the air extraction device provided in the embodiment of this utility model; Figure 4 This is an exploded view of the structure of the air extraction base in the air extraction device provided in the embodiment of this utility model; Figure 5 This is a schematic diagram of the structure of the air extraction plate in the air extraction device provided in the embodiment of this utility model.

[0019] Figure label: 100. Vacuum base; 110. Horizontal base; 111. Negative pressure adsorption hole; 120. Exhaust plate; 121. Vent hole; 122. Adsorption tank; 123. Negative pressure passage; 124. Sealing tank; 130. Vent plate; 131. Vent groove; 132. Vent outlet; 140. Spacer blocks; 200. Vacuum hood; 210. Evacuation port; 220. Ventilation chamber; 230. Ventilation port; 300, substrate. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0025] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0027] Example 1 like Figures 1 to 5 As shown, this utility model embodiment provides a vacuuming device, including a vacuuming base 100 and a vacuum hood 200. The vacuuming base 100 has a horizontal platform and a vacuuming plate 120. The horizontal platform is used to support a substrate 300 with a wet film. The vacuuming plate 120 is disposed at the bottom of the horizontal platform and connected to the horizontal platform. A vent hole 121 is provided on the periphery of the vacuuming plate 120, which can be connected to a vacuuming pipeline. The vacuum hood 200 can be fastened to the horizontal platform to form a vacuum cavity with the horizontal platform. A vacuuming hole 210 is provided at the bottom of the vacuum hood 200. A gas dissipation chamber 220 and a gas dissipation hole 230 are provided inside the vacuum hood 200. The vacuuming hole 210 connects the gas dissipation chamber 220 and the vacuum cavity. The gas dissipation hole 230 is disposed on the periphery of the gas dissipation chamber 220 and is connected to the vent hole 121.

[0028] That is, the gas extraction device provided in this embodiment of the present invention provides a vent hole 121 on the periphery of the gas extraction plate 120 that is connected to the vacuum extraction pipeline and connected to the gas dispersing hole 230 on the periphery of the inner gas dispersing cavity 220 of the vacuum cover 200. This allows the vacuum cover 200 to extract air from the vacuum cavity into the gas dispersing cavity 220 through the gas extraction hole, and then disperse it into the vacuum extraction pipeline through the gas dispersing hole 230 on the periphery. This achieves the extraction of gas from the bottom up and from the center outward in the vacuum cavity, ensuring stable gas extraction during vacuum film formation, accelerating the gas extraction speed, avoiding local gas accumulation, and solving the technical problem in the prior art where gas extraction from the top of the substrate 300 to the vacuum cavity easily causes local gas accumulation in the vacuum pipeline at the top of the vacuum cover 200, reducing gas extraction stability, affecting the adsorption stability of the substrate 300 and the uniformity of film deposition.

[0029] Specifically, the horizontal base provided in this embodiment is configured as a rectangular platform arranged horizontally. A rectangular frame is provided above the horizontal base to enclose the fixing area of ​​the substrate 300, and the substrate 300 is placed in the fixing area. A vacuum plate 120 is provided at the bottom of the horizontal base, and the horizontal base can be fixed to the vacuum plate 120 by bolts. The vacuum plate 120 is generally rectangular flat and arranged horizontally. The vacuum hood 200 can be moved above the vacuum base 100 through a gantry structure and fastened to the horizontal base. The bottom of the vacuum hood 200 is provided with a roughly rectangular vacuum cavity with a rectangular opening at the bottom. When the vacuum hood 200 is fastened to the horizontal base, the horizontal base will abut against the bottom of the side wall of the vacuum cavity, thereby sealing the bottom of the vacuum cavity to form a vacuum chamber, and fastening the horizontal base, the substrate 300, and the wet film on the substrate 300 into the vacuum chamber. At the top of the vacuum chamber, a vacuum hole 210 is provided, and the vacuum hole 210 is located at the center of the top of the vacuum chamber. A gas dissipation chamber 220 is provided at the top of the vacuum chamber, and an evacuation port 210 is arranged vertically to connect the gas dissipation chamber 220 and the vacuum chamber. A gas dissipation hole 230 is provided at the bottom edge of the gas dissipation chamber 220, extending vertically downward to the bottom of the vacuum cover 200. At the position corresponding to the gas dissipation hole 230, a through hole is provided on the horizontal base, and a vent hole 121 is provided on the periphery of the evacuation plate 120. The vent hole 121 is connected to the gas dissipation hole 230 through the through hole. The vent hole 121 is specifically designed as an elongated slot, evenly spaced along the periphery of the evacuation plate 120, and is arranged vertically and connected to the evacuation source. Thus, the air in the vacuum chamber can be evacuated by the evacuation source along the evacuation path of vent hole 121-gas dissipation hole 230-gas dissipation chamber 220-evacuation port 210-vacuum chamber. Meanwhile, the gas inside the vacuum chamber is extracted from bottom to top and from center to outside, ensuring stable gas extraction during vacuum film formation. Simultaneously, the presence of a gas dispersion chamber 220 along the extraction path prevents localized airflow accumulation and accelerates the extraction speed.

[0030] Furthermore, the thickness of the air dispersion chamber 220 gradually increases from the air extraction hole 210 to the air dispersion hole 230, the top wall of the air dispersion chamber 220 is set in the horizontal direction, and the bottom wall of the air dispersion chamber 220 is set at an angle to the horizontal direction.

[0031] Specifically, in this embodiment, the bottom of the air dispersion chamber 220 is conical, forming a 30° angle with the horizontal direction, while the top of the air dispersion chamber 220 is horizontal. This causes the thickness of the air dispersion chamber 220 to gradually increase from the suction hole 210 towards the air dispersion hole 230, thereby increasing the suction speed and improving suction efficiency.

[0032] Preferably, the vacuum base 100 further includes an air outlet plate 130; the air outlet plate 130 is connected to the bottom of the horizontal base, the air outlet plate 130 is provided with a ventilation groove 131, the center of the air outlet plate 130 has an air outlet 132 extending vertically through it, one end of the air outlet 132 is connected to the ventilation groove 131, the other end of the air outlet 132 is used to connect to the vacuum pipeline, and the ventilation hole 121 is connected to the ventilation groove 131.

[0033] Specifically, the vent plate 130 is designed as a rectangular flat plate, and the vent groove 131 is positioned in an inverted trapezoidal shape at the center of the vent plate 130. The vent plate 130 is connected to the suction plate 120 by bolts, and the vent hole 121 communicates with the vent groove 131. At the center of the bottom of the vent groove 131, there is a through-hole vent 132, which is circular and connected to a vacuum pumping pipeline, and further connected to the suction source. This allows air drawn from multiple vent holes 121 to converge at the through-hole 132 and enter the suction source through the pipeline, thereby achieving vacuuming within the vacuum chamber. Simultaneously, the vent groove 131 further ensures stable air pressure along the suction path.

[0034] Furthermore, the vacuum base 100 also includes a pad 140; the pad 140 is disposed at the bottom of the air outlet plate 130 and connected to the air outlet plate 130, and the pad 140 is used to support the horizontal platform on which the vacuum base 100 is installed; a plurality of pads 140 are connected end to end to form a washer, and the washer is arranged around the air outlet 132.

[0035] Specifically, in this embodiment, the pad 140 is in the shape of a long strip, and four pads 140 are arranged in a rectangle, with their ends connected to form a rectangular washer. The pads 140 are fixed to the bottom of the air outlet plate 130 by bolts, and the washer is arranged around the air outlet 132. This separates the air outlet plate 130 from the horizontal platform supporting the suction base 100, forming a space for gas flow around the air outlet 132, preventing gas from blocking the air outlet 132 during suction, and improving suction efficiency.

[0036] Furthermore, the vacuum device also includes a contact switch; the contact switch is fixed to a horizontal base and can abut against the vacuum chamber 200 to detect the position of the vacuum chamber 200.

[0037] Specifically, the contact switch is fixed to the horizontal base with bolts. When the vacuum hood 200 is fastened to the horizontal base, the contact switch can abut against the vacuum hood 200, thereby transmitting a signal to the control unit of the coating and film forming integrated equipment to determine that the vacuum chamber is in the preset position and complete the fastening of the vacuum hood 200 and the horizontal base.

[0038] Preferably, the horizontal base is made of marble or artificial quartz.

[0039] Specifically, in this embodiment, the horizontal base is provided with marble material, which has high flatness and can ensure the straightness of the top surface of the horizontal base.

[0040] Furthermore, a negative pressure adsorption hole 111 is provided vertically through the horizontal base; a number of negative pressure adsorption holes 111 are evenly distributed on the horizontal base, one end of the negative pressure adsorption hole 111 is used to adsorb the substrate 300, and the other end of the negative pressure adsorption hole 111 is used to communicate with the negative pressure source.

[0041] Specifically, the negative pressure adsorption holes 111 are configured as circular holes that penetrate the horizontal substrate in a vertical direction. In this embodiment, the negative pressure adsorption holes 111 are arranged in a matrix in the fixed area of ​​the substrate 300 on the horizontal substrate, which allows the substrate 300 to be placed on the negative pressure adsorption holes 111. The bottom end of the negative pressure adsorption holes 111 is connected to the negative pressure source, which realizes that the negative pressure is provided by the negative pressure source to adsorb the substrate 300 onto the horizontal substrate under negative pressure, thus avoiding the substrate 300 from shaking during vacuum pumping and affecting the film formation quality.

[0042] Preferably, the suction plate 120 is provided with an adsorption groove 122 and a negative pressure passage 123; the adsorption groove 122 is located below the negative pressure adsorption hole 111 and communicates with the negative pressure adsorption hole 111, the negative pressure passage 123 is located on the periphery of the adsorption groove 122, one end of the negative pressure passage 123 is communicated with the adsorption groove 122, and the other end of the negative pressure passage 123 is communicated with the negative pressure source.

[0043] Specifically, the adsorption tank 122 is a rectangular groove located at the center of the suction plate 120. When the suction plate 120 is connected to the horizontal base, it is positioned below the negative pressure adsorption tank 122, allowing all negative pressure adsorption holes 111 to communicate with the adsorption tank 122. In this embodiment, the bottom of the adsorption tank 122 also has several grooves, each with a circular hole at both ends. These circular holes extend horizontally out of the suction plate 120 and are connected to a negative pressure source via a pipe. The circular holes and pipes constitute the negative pressure passage 123. Thus, all negative pressure adsorption holes 111 are connected to the adsorption tank 122 before being connected to the negative pressure source, thereby achieving pressure equalization in each negative pressure adsorption hole 111 and ensuring stable adsorption of the substrate 300.

[0044] Furthermore, the suction plate 120 is also provided with a sealing groove 124, which surrounds the adsorption groove 122 and all the ventilation holes 121. A sealing ring is provided in the sealing groove 124, and the top of the sealing ring can abut against the horizontal base.

[0045] Specifically, the sealing groove 124 is provided with a dovetail groove, surrounding all the vent holes 121 of the adsorption groove 122. In this embodiment, the sealing groove 124 is provided as an approximately rectangular annular groove, and the sealing ring is provided as a rubber sealing ring with the same shape as the sealing groove 124. The top of the sealing ring can abut against the horizontal base, and the bottom is set in the sealing groove 124, thereby realizing the sealing between the suction plate 120 and the horizontal base.

[0046] Example 2 This utility model also provides an integrated coating and film-forming device, which includes all the technical features of a horizontal platform, an assembly base, a coating component, a gantry structure, and the aforementioned air extraction device, and naturally includes all the technical effects of the aforementioned air extraction device, which will not be repeated in this embodiment.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A vacuum device, characterized in that, Includes a vacuum base (100) and a vacuum hood (200); The vacuum base (100) has a horizontal base and a vacuum plate (120). The horizontal base is used to support a substrate (300) with a wet film. The vacuum plate (120) is disposed at the bottom of the horizontal base and connected to the horizontal base. The vacuum plate (120) has ventilation holes (121) on its periphery. The ventilation holes (121) can be connected to a vacuum pipeline. The vacuum hood (200) can be fastened to the horizontal base to form a vacuum cavity with the horizontal base. The bottom of the vacuum hood (200) is provided with an air extraction hole (210). The vacuum hood (200) is provided with a gas dissipation chamber (220) and a gas dissipation hole (230). The air extraction hole (210) connects the gas dissipation chamber (220) and the vacuum cavity. The gas dissipation hole (230) is located on the periphery of the gas dissipation chamber (220) and is connected to the vent hole (121).

2. The air extraction device according to claim 1, characterized in that, The thickness of the air dispersing cavity (220) gradually increases from the air extraction hole (210) towards the air dispersing hole (230). The top wall of the air dispersing cavity (220) is set in the horizontal direction, and the bottom wall of the air dispersing cavity (220) is set at an angle to the horizontal direction.

3. The air extraction device according to claim 1, characterized in that, The vacuum base (100) also includes an air outlet plate (130); The vent plate (130) is connected to the bottom of the horizontal base. The vent plate (130) is provided with a ventilation groove (131). The center of the vent plate (130) has a vertically penetrating vent (132). One end of the vent (132) is connected to the ventilation groove (131), and the other end of the vent (132) is used to connect with the vacuum pipeline. The ventilation hole (121) is connected to the ventilation groove (131).

4. The air extraction device according to claim 3, characterized in that, The vacuum base (100) also includes a pad (140); The pad (140) is disposed at the bottom of the air outlet plate (130) and connected to the air outlet plate (130). The pad (140) is used to support the horizontal platform on which the air extraction base (100) is installed. Several of the pads (140) are connected end to end to form a gasket, which surrounds the air outlet (132).

5. The air extraction device according to any one of claims 1-4, characterized in that, The horizontal base is provided with a negative pressure adsorption hole (111) extending vertically; A plurality of negative pressure adsorption holes (111) are evenly distributed on the horizontal base. One end of the negative pressure adsorption hole (111) is used to adsorb the substrate (300), and the other end of the negative pressure adsorption hole (111) is used to communicate with a negative pressure source.

6. The air extraction device according to claim 5, characterized in that, The suction plate (120) is provided with an adsorption groove (122) and a negative pressure passage (123); The adsorption tank (122) is located below the negative pressure adsorption hole (111) and communicates with the negative pressure adsorption hole (111). The negative pressure passage (123) is located on the periphery of the adsorption tank (122). One end of the negative pressure passage (123) is communicated with the adsorption tank (122), and the other end of the negative pressure passage (123) is communicated with the negative pressure source.

7. The air extraction device according to claim 6, characterized in that, The suction plate (120) is also provided with a sealing groove (124), which surrounds the adsorption groove (122) and all the ventilation holes (121). A sealing ring is provided in the sealing groove (124), and the top of the sealing ring can abut against the horizontal base.

8. The air extraction device according to any one of claims 1-4, characterized in that, The air extraction device also includes a contact switch; The contact switch is fixed to the horizontal base and can abut against the vacuum chamber (200) to detect the position of the vacuum chamber (200).

9. The air extraction device according to any one of claims 1-4, characterized in that, The horizontal base is made of marble or artificial quartz.

10. A coating and film-forming integrated device, characterized in that, It includes a horizontal platform, an assembly base, a coating assembly, a gantry structure, and an air extraction device as described in any one of claims 1-9.

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