Piezoelectric pump and electronic device

Abstract

This application relates to the field of pump technology, and proposes a piezoelectric pump and electronic device. The piezoelectric pump includes a drive assembly, a valve body assembly, and a base plate. The drive assembly includes a piezoelectric vibrator and a cavity plate. The cavity plate has a through hole, and the piezoelectric vibrator covers one side of the through hole to form a pump cavity. The drive assembly is connected to the valve body assembly, which includes a valve plate assembly, which includes at least two stacked valve plates. The base plate is located on the side of the valve body assembly away from the drive assembly. The base plate has an inlet and an outlet. The inlet and outlet are connected to the pump cavity. Each valve plate has at least two check valves, including a first check valve and a second check valve. The first check valve is a check valve corresponding to the inlet, and the second check valve is a check valve corresponding to the outlet. This can effectively enhance the fatigue resistance of the check valves in the piezoelectric pump and effectively extend the service life of the piezoelectric pump.

Description

Technical Field

[0001] This application relates to the field of pump technology, and in particular to a piezoelectric pump and electronic equipment. Background Technology

[0002] Piezoelectric pumps are a new type of fluid transport device that uses piezoelectric vibrators as drivers. They are widely used in electronic devices such as medical devices, laboratory instruments, and consumer electronics.

[0003] However, current piezoelectric pumps still have shortcomings that need to be addressed. For example, current piezoelectric pumps typically use one valve to control the inflow of liquid into the pump chamber and another valve to control the outflow of liquid. The long-term opening and closing of the valves can lead to a decrease in the valves' fatigue resistance, thus shortening the service life of the piezoelectric pump. Utility Model Content

[0004] In view of this, embodiments of this application provide a piezoelectric pump and electronic device to solve the problem that the valves of existing piezoelectric pumps are prone to fatigue performance degradation, resulting in a short service life of the piezoelectric pump.

[0005] The first aspect of this application discloses a piezoelectric pump, comprising a drive assembly, a valve body assembly, and a base plate. The drive assembly includes a piezoelectric vibrator and a cavity plate. The cavity plate has a through hole, and the piezoelectric vibrator covers one side of the through hole to form a pump cavity. The piezoelectric vibrator is used to vibrate to change the volume of the pump cavity. The drive assembly is connected to the valve body assembly, and the valve body assembly includes a valve plate group, which includes at least two stacked valve plates. The base plate is disposed on the side of the valve body assembly away from the drive assembly, and the base plate has an inlet and an outlet. The inlet and outlet are connected to the pump cavity. Each valve plate has at least two one-way valves, including a first one-way valve and a second one-way valve. The first one-way valve is a one-way valve corresponding to the inlet, and the second one-way valve is a one-way valve corresponding to the outlet.

[0006] The beneficial effects of the piezoelectric pump provided in this application embodiment are as follows: The piezoelectric pump in this application embodiment includes a drive assembly, a valve body assembly, and a base plate. The drive assembly includes a piezoelectric vibrator and a cavity plate. The cavity plate has a through hole. The piezoelectric vibrator covers one side of the through hole to form a pump cavity. The piezoelectric vibrator is used to vibrate to change the volume of the pump cavity. The drive assembly is connected to the valve body assembly. The valve body assembly includes at least two stacked valve plates. The base plate is located on the side of the valve body assembly away from the drive assembly. The base plate has an inlet and an outlet. The inlet is connected to the pump cavity, and the outlet is connected to the pump cavity. Each valve plate has a first one-way valve and a second one-way valve. The first one-way valve is a one-way valve corresponding to the inlet, and the second one-way valve is a one-way valve corresponding to the outlet, so as to form at least two unidirectional liquid channels (including a liquid channel flowing through at least two first one-way valves and a liquid channel flowing through at least two second one-way valves). Each liquid channel passes through at least two one-way valves. When the volume of the pump chamber increases, the pressure inside the pump chamber decreases, thereby driving at least two first check valves to open and the second check valves to close, so that liquid flows into the pump chamber sequentially from the inlet and at least two first check valves. When the volume of the pump chamber decreases, the pressure inside the pump chamber increases, thereby driving at least two second check valves to open and the first check valves to close, so that liquid flows out of the piezoelectric pump sequentially from the pump chamber, at least two second check valves, and the outlet. Since each liquid channel passes through at least two check valves, the fatigue resistance of the check valves in the piezoelectric pump can be greatly enhanced, the shut-off capability of the check valves can be effectively improved, and the service life of the piezoelectric pump can be effectively extended.

[0007] In some embodiments, the valve body assembly further includes a first support plate and a second support plate. The first support plate is connected to the valve plate assembly and is located on the side of the valve plate assembly opposite to the base plate. The second support plate is connected to the valve plate assembly and is located on the side of the valve plate assembly opposite to the drive assembly. The first support plate has a first through hole corresponding to the liquid inlet and a second through hole corresponding to the liquid outlet. The second support plate has a third through hole corresponding to the liquid inlet and a fourth through hole corresponding to the liquid outlet. The valve plate of the first one-way valve is larger than the size of the third through hole, the valve plate of the second one-way valve is larger than the size of the second through hole, the first through hole is larger than the size of the third through hole, and the fourth through hole is larger than the size of the second through hole.

[0008] In some embodiments, the first through hole and the fourth through hole have the same shape and the same size; the third through hole and the second through hole have the same shape and the same size.

[0009] In some embodiments, each valve plate includes a valve seat and at least two check valves disposed on the valve seat. Each check valve includes a valve plate with a single cantilever beam structure on the valve plate. The valve plate has a fixed end, a cantilever portion and a free end. The fixed end is integrally formed with or fixedly connected to the valve seat, and the cantilever portion is located between the fixed end and the free end.

[0010] In some embodiments, the valve plates in the valve plate assembly corresponding to the same inlet have different orientations, wherein the orientation is: the direction from the fixed end to the free end when the free end abuts against the valve seat.

[0011] In some embodiments, the number of valve plates in the valve plate assembly is equal to two, and the two valve plates corresponding to the same liquid inlet in the valve plate assembly are oriented in opposite directions.

[0012] In some embodiments, the piezoelectric vibrator includes a first piezoelectric ceramic layer, a metal substrate, and a second piezoelectric ceramic layer. The first piezoelectric ceramic layer is attached to the side of the metal substrate opposite to the valve body assembly, and the second piezoelectric ceramic layer is attached to the side of the metal substrate opposite to the first piezoelectric ceramic layer.

[0013] In some embodiments, the area of ​​the second piezoelectric ceramic layer is smaller than the cross-sectional area of ​​the through hole.

[0014] A second aspect of this application provides an electronic device comprising the aforementioned piezoelectric pump.

[0015] The electronic device employs any one or more embodiments of the piezoelectric pump described above, and thus has the beneficial effects of the embodiments described above, which will not be elaborated further here.

[0016] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is an exploded structural diagram of a piezoelectric pump provided in some embodiments of this application; Figure 2This is a schematic diagram of the structure of a piezoelectric vibrator provided in some embodiments of this application; Figure 3 This is a schematic diagram of the valve plate assembly provided in some embodiments of this application.

[0019] The markings in the diagram mean: 10. Piezoelectric pump; 101, Drive assembly; 1011, Piezoelectric vibrator; 1012, Cavity plate; 10121, Through hole; 10112, Metal substrate; 10111a, First piezoelectric ceramic layer; 10111b, Second piezoelectric ceramic layer; 102. Valve body assembly; 1021. Valve plate assembly; 10211. First valve plate; 10212. Second valve plate; 10213. Third valve plate; 102111. First check valve; 102112. Second check valve; 1022, First support plate; 1023, Second support plate; 10221, First through hole; 10222, Second through hole; 10231, Third through hole; 10232, Fourth through hole; 104001, First valve plate; 104002, Second valve plate; 104003, Third valve plate; 104004, Fourth valve plate; 104005, Fifth valve plate; 104006, Sixth valve plate; 103. Base plate; Inlet 1031; Outlet 1032. Detailed Implementation

[0020] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0022] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0023] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0024] In the description of the embodiments in this application, the term "or / and" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0025] In the description of the embodiments of this application, the term "multiple" refers to two or more (including two), similarly, "multiple sets" refers to two or more (including two sets), and "multiple pieces" refers to two or more (including two pieces).

[0026] In the description of the embodiments of this application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0027] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0028] To address the problem that valves in existing piezoelectric pumps are prone to fatigue performance degradation, leading to a short service life, the first aspect of this application provides a piezoelectric pump.

[0029] Please see Figure 1 This application proposes a piezoelectric pump 10, which includes a drive assembly 101, a valve body assembly 102, and a base plate 103.

[0030] The drive assembly 101 includes a piezoelectric vibrator 1011 and a cavity plate 1012. The cavity plate 1012 has a through hole 10121. The piezoelectric vibrator 1011 covers one side of the through hole 10121 to form a pump cavity. The piezoelectric vibrator 1011 is used to vibrate so that the volume of the pump cavity changes.

[0031] The drive assembly 101 is connected to the valve body assembly 102, which includes a valve plate group 1021, which includes at least two stacked valve plates.

[0032] The base plate 103 is located on the side of the valve body assembly 102 away from the drive assembly 101 (i.e., the base plate 103 is located below the valve body assembly 102). The base plate 103 is provided with an inlet 1031 and an outlet 1032. The inlet 1031 is connected to the pump chamber, and the outlet 1032 is connected to the pump chamber.

[0033] Each valve plate is provided with at least two one-way valves, including a first one-way valve 102111 and a second one-way valve 102112. The first one-way valve 102111 is a one-way valve corresponding to the liquid inlet 1031, and the second one-way valve 102112 is a one-way valve corresponding to the liquid outlet 1032.

[0034] The drive assembly 101 includes a piezoelectric vibrator 1011 and a cavity plate 1012. The cavity plate 1012 has a through hole 10121. The piezoelectric vibrator 1011 covers one side of the through hole 10121 to form a pump cavity. The piezoelectric vibrator 1011 is a structure with piezoelectric effect. When an electric field is applied, the piezoelectric vibrator 1011 will deform, that is, the piezoelectric vibrator 1011 will vibrate, so that the volume of the pump cavity will change, thereby causing the liquid to flow in the piezoelectric pump 10.

[0035] For example, the drive assembly 101 is fixedly connected to the valve body assembly 102, and the drive assembly 101 is disposed above the valve body assembly 102. When the piezoelectric vibrator 1011 expands and deforms away from the valve plate assembly 1021 under the action of the electric field, the volume of the pump chamber will increase, resulting in a decrease in the pressure inside the pump chamber, causing liquid to be drawn into the pump chamber from the inlet 1031; when the piezoelectric vibrator 1011 expands and deforms towards the valve plate assembly 1021 under the action of the electric field, the volume of the pump chamber will decrease, resulting in an increase in the pressure inside the pump chamber, causing liquid inside the pump chamber to flow out from the outlet 1032.

[0036] Understandably, the drive assembly 101, valve body assembly 102, and base plate 103 are stacked sequentially.

[0037] The piezoelectric pump in this embodiment includes a drive assembly, a valve body assembly, and a base plate. The drive assembly includes a piezoelectric vibrator and a cavity plate. The cavity plate has a through hole, and the piezoelectric vibrator covers one side of the through hole to form a pump cavity. The piezoelectric vibrator is used to vibrate to change the volume of the pump cavity. The drive assembly is connected to the valve body assembly, which includes at least two stacked valve plates. The base plate is located on the side of the valve body assembly away from the drive assembly. The base plate has an inlet and an outlet. The inlet and outlet are connected to the pump cavity. Each valve plate has a first check valve and a second check valve. The first check valve is a check valve corresponding to the inlet, and the second check valve is a check valve corresponding to the outlet, to form at least two unidirectional liquid channels (including a liquid channel flowing through at least two first check valves and a liquid channel flowing through at least two second check valves). Each liquid channel passes through at least two check valves. When the volume of the pump chamber increases, the pressure inside the pump chamber decreases, thereby driving at least two first check valves to open and the second check valves to close, so that liquid flows into the pump chamber sequentially from the inlet and at least two first check valves. When the volume of the pump chamber decreases, the pressure inside the pump chamber increases, thereby driving at least two second check valves to open and the first check valves to close, so that liquid flows out of the piezoelectric pump sequentially from the pump chamber, at least two second check valves, and the outlet. Since each liquid channel passes through at least two check valves, the fatigue resistance of the check valves in the piezoelectric pump can be greatly enhanced, the shut-off capability of the check valves can be effectively improved, and the service life of the piezoelectric pump can be effectively extended.

[0038] In some embodiments, the piezoelectric vibrator 1011 includes a piezoelectric ceramic layer and a metal substrate. The piezoelectric ceramic layer and the metal substrate are bonded together. The metal substrate is connected to the cavity plate 1012. The piezoelectric ceramic layer will deform under the action of an electric field, and this deformation will cause the metal substrate to deform.

[0039] By way of example, and not limitation, the piezoelectric ceramic layer is disposed on the side of the metal substrate facing away from the valve body assembly, and the metal material corresponding to the metal substrate can be aluminum or copper. The center of the surface of the metal substrate that is in contact with the piezoelectric ceramic layer and the center of the surface of the piezoelectric ceramic layer that is in contact with the metal substrate are both on the central axis of the through hole 10121. This application does not limit the shape of the piezoelectric ceramic layer and the metal substrate. For example, the surface of the piezoelectric ceramic layer that is in contact with the metal substrate can be circular or elliptical, and the surface of the metal substrate that is in contact with the piezoelectric ceramic layer can be circular, elliptical, or square.

[0040] In some embodiments, the area of ​​the surface of the piezoelectric ceramic layer that is in contact with the metal substrate is smaller than the area of ​​the cross-section of the through hole 10121, thereby effectively preventing the vibration of the piezoelectric ceramic layer from being restricted by the through hole 10121.

[0041] In some embodiments, please refer to Figure 2The piezoelectric oscillator 1011 includes a first piezoelectric ceramic layer 10111a, a metal substrate 10112, and a second piezoelectric ceramic layer 10111b. The first piezoelectric ceramic layer 10111a is attached to the side of the metal substrate 10112 opposite to the valve body assembly 102, and the second piezoelectric ceramic layer 10111b is attached to the side of the metal substrate 10112 opposite to the first piezoelectric ceramic layer 10111a. Since piezoelectric ceramic layers are provided on both sides of the metal substrate 10112, the driving force of the piezoelectric oscillator 1011 can be effectively improved.

[0042] By way of example and not limitation, when the first piezoelectric ceramic layer 10111a and the second piezoelectric ceramic layer 10111b are not energized, the sizes of the first piezoelectric ceramic layer 10111a and the second piezoelectric ceramic layer 10111b may be the same or different, and the shapes of the first piezoelectric ceramic layer 10111a and the second piezoelectric ceramic layer 10111b may be the same or different. The center of the surface of the first piezoelectric ceramic layer 10111a that is attached to the metal substrate 10112, the center of the surface of the second piezoelectric ceramic layer 10111b that is attached to the metal substrate 10112, and the center of the cross-section of the through hole 10121 are on the same straight line, that is, the center of the surface of the first piezoelectric ceramic layer 10111a that is attached to the metal substrate 10112 and the center of the surface of the second piezoelectric ceramic layer 10111b that is attached to the metal substrate 10112 are all on the central axis of the through hole 10121.

[0043] In some embodiments, the area of ​​the second piezoelectric ceramic layer 10111b is smaller than the cross-sectional area of ​​the through hole 10121. That is, the area of ​​the surface of the second piezoelectric ceramic layer 10111b facing the valve body assembly 102 is smaller than the cross-sectional area of ​​the through hole 10121, thereby preventing the vibration of the second piezoelectric ceramic layer 10111b from being restricted by the through hole 10121.

[0044] In some embodiments, please refer to Figure 1 The valve plate assembly 1021 includes two stacked valve plates, namely a first valve plate 10211 and a second valve plate 10212. The first valve plate 10211 is provided with a first check valve and a second check valve, and the second valve plate 10212 is provided with a first check valve and a second check valve. The first check valve of the first valve plate 10211 and the first check valve of the second valve plate 10212 are both check valves corresponding to the liquid inlet 1031, and the second check valve of the first valve plate 10211 and the second check valve of the second valve plate 10212 are both check valves corresponding to the liquid outlet 1032.

[0045] In some embodiments, the valve plate assembly 1021 includes three or more valve plates stacked together, that is, the number of valve plates in the valve plate assembly 1021 is greater than two.

[0046] Understandably, all the first check valves in valve assembly 1021 are located above the inlet 1031, and all the second check valves in valve assembly 1021 are located above the outlet 1032. By way of example, and not limitation, all the first check valves in valve assembly 1021 are located directly above the inlet 1031, and all the second check valves in valve assembly 1021 are located directly above the outlet 1032.

[0047] In some embodiments, the valve body assembly 102 further includes a first support plate 1022 and a second support plate 1023. The first support plate 1022 is connected to the valve plate assembly 1021 and is located on the side of the valve plate assembly 1021 away from the bottom plate 103. The second support plate 1023 is connected to the valve plate assembly 1021 and is located on the side of the valve plate assembly 1021 away from the drive assembly 101. The first support plate 1022 is provided with a first through hole 10221 corresponding to the liquid inlet 1031 and a second through hole 10222 corresponding to the liquid outlet 1032; The second support plate 1023 is provided with a third through hole 10231 corresponding to the liquid inlet 1031 and a fourth through hole 10232 corresponding to the liquid outlet 1032; Among them, the valve plate of the first one-way valve 102111 is larger than the size of the third through hole 10231, the valve plate of the second one-way valve 102112 is larger than the size of the second through hole 10222, the size of the first through hole 10221 is larger than the size of the third through hole 10231, and the size of the fourth through hole 10232 is larger than the size of the second through hole 10222.

[0048] As an example, and not a limitation, the third through hole 10231 has a circular cross-section, the length of the valve plate of the first one-way valve 102111 is greater than the diameter of the third through hole 10231, and the area of ​​the valve plate of the first one-way valve 102111 is greater than the area of ​​the cross-section of the third through hole 10231, so that the valve plate of the first one-way valve 102111 can cover the third through hole 10231; the second through hole 10222 has a circular cross-section, the length of the valve plate of the second one-way valve 102112 is greater than the diameter of the second through hole 10222, and the area of ​​the valve plate of the second one-way valve 102112 is greater than the area of ​​the cross-section of the second through hole 10222, so that the valve plate of the second one-way valve 102112 can cover the second through hole 10222.

[0049] Understandably, the first support plate 1022, the valve plate assembly 1021, and the second support plate 1023 are stacked sequentially. It can be considered that the first support plate 1022 is located above the valve plate assembly 1021, the second support plate 1023 is located below the valve plate assembly 1021, the first through hole 10221 is located above the first one-way valve 102111, the third through hole 10231 is located below the first one-way valve 102111, the second through hole 10222 is located above the second one-way valve 102112, and the fourth through hole 10232 is located below the second one-way valve 102112. The third through hole 10231 is used to prevent the valve plate of the first one-way valve 102111 from swinging towards the direction of the base plate, thereby preventing the first one-way valve 102111 from opening in the reverse direction; the second through hole 10222 is used to prevent the valve plate of the second one-way valve 102112 from swinging towards the direction of the drive assembly, thereby preventing the second one-way valve 102112 from opening in the reverse direction; the first through hole 10221 is used to provide swing space for the valve plate of the first one-way valve 102111 (the valve plate of the first one-way valve 102111 can extend into the first through hole 10221), and the fourth through hole 10232 is used to provide swing space for the valve plate of the second one-way valve 102112 (the valve plate of the second one-way valve 102112 can extend into the fourth through hole 10232). The shape, position, and size of the first through hole 10221 must meet the swing requirements of the valve plate of the first one-way valve 102111, and the shape, position, and size of the fourth through hole 10232 must meet the swing requirements of the valve plate of the second one-way valve 102112.

[0050] When the volume of the pump chamber increases, the pressure inside the pump chamber decreases, thereby driving at least two first check valves to open, so that liquid flows into the pump chamber sequentially from the inlet, the third through hole 10231, at least two first check valves, and the first through hole 10221, while the second check valve remains closed. When the volume of the pump chamber decreases, the pressure inside the pump chamber increases, thereby driving at least two second check valves to open, so that liquid flows out of the piezoelectric pump sequentially from the pump chamber, the second through hole 10222, at least two second check valves, the fourth through hole 10232, and the outlet, while the first check valve remains closed. In this way, unidirectional flow control of the liquid can be achieved.

[0051] Understandably, this application does not limit the shape of the through-hole described herein. By way of example and not limitation, the shape of the through-hole described herein may be any of the following: circular, rectangular, or rhomboid.

[0052] In some embodiments, the first through hole 10221 and the fourth through hole 10232 have the same shape and the same size; the third through hole 10231 and the second through hole 10222 have the same shape and the same size. This reduces the complexity of the first support plate 1022 and the second support plate 1023, effectively saving costs in designing and manufacturing them.

[0053] By way of example and not limitation, the first through hole 10221, the fourth through hole 10232, the third through hole 10231, and the second through hole 10222 are all circular in shape; the first through hole 10221 and the fourth through hole 10232 have the same size; the third through hole 10231 and the second through hole 10222 have the same size.

[0054] In some embodiments, the first through hole 10221 and the fourth through hole 10232 have different shapes, or / and the first through hole 10221 and the fourth through hole 10232 have different sizes, or / and the third through hole 10231 and the second through hole 10222 have different shapes, or / and the third through hole 10231 and the second through hole 10222 have different sizes.

[0055] In some embodiments, the line connecting the geometric center of the first through hole 10221 and the geometric center of the third through hole 10231 is parallel to the central axis of the through hole 10121, and the line connecting the geometric center of the second through hole 10222 and the geometric center of the fourth through hole 10232 is parallel to the central axis of the through hole 10121.

[0056] Optionally, each of the one-way valves may be a passive valve, for example, the one-way valve may be an umbrella valve or a wheel valve.

[0057] Optionally, each valve plate includes a valve seat and at least two check valves disposed on the valve seat. Each check valve includes a valve plate with a single cantilever beam structure on the valve plate. The valve plate has a fixed end, a cantilever portion and a free end. The fixed end is integrally formed or fixedly connected to the valve seat, and the cantilever portion is located between the fixed end and the free end.

[0058] Understandably, the fixed end is integrally formed or fixedly connected to the valve seat. When the volume of the pump chamber increases, the pressure inside the pump chamber decreases, and the free end of the first check valve on each valve plate moves towards the drive assembly to open the first check valve and close the second check valve. When the volume of the pump chamber decreases, the pressure inside the pump chamber increases, and the free end of the second check valve on each valve plate moves towards the base plate to open the second check valve and close the first check valve.

[0059] In addition, since the valve plate assembly 1021 includes at least two stacked valve plates, each unidirectional liquid passage includes at least two check valves with a single cantilever beam structure, forming a "multi-cantilever beam structure". The cantilever beams in this "multi-cantilever beam structure" are shorter, have better elasticity, better fatigue resistance, and the valve plates are easier to open, enabling a larger opening degree and thus a larger liquid delivery flow rate.

[0060] In some embodiments, the valve plates in the valve plate assembly 1021 corresponding to the same liquid inlet have different orientations, wherein the orientation is: the direction from the fixed end to the free end when the free end abuts against the valve seat.

[0061] As an example, and not a limitation, please refer to Figure 3 The valve plate assembly 1021 contains three valve plates, namely, the valve plate assembly 1021 includes three valve plates, including a first valve plate 10211, a second valve plate 10212, and a third valve plate 10213. The three valve discs corresponding to the same liquid inlet in the valve plate assembly 1021 include a first valve disc 104001, a second valve disc 104002, and a third valve disc 104003. The orientations of the first valve disc 104001, the second valve disc 104002, and the third valve disc 104003 are all different.

[0062] In some embodiments, the number of valve plates in the valve plate assembly 1021 is equal to two, and the two valve plates corresponding to the same liquid inlet in the valve plate assembly 1021 are oriented in opposite directions.

[0063] In some embodiments, the valve plates in the valve plate assembly 1021 corresponding to the same inlet have the same orientation.

[0064] Understandably, the orientation of each valve plate in the valve plate assembly 1021 corresponding to the same liquid outlet may be the same or different.

[0065] As an example, and not a limitation, please refer to Figure 3 The valve plate assembly 1021 contains three valve plates, meaning that the valve plate assembly 1021 includes three valve plates. The three valve plates corresponding to the same liquid outlet in the valve plate assembly 1021 include the fourth valve plate 104004, the fifth valve plate 104005, and the sixth valve plate 104006. The orientations of the fourth valve plate 104004, the fifth valve plate 104005, and the sixth valve plate 104006 are all different.

[0066] A second aspect of this application provides an electronic device including the aforementioned piezoelectric pump 10.

[0067] The electronic device employs any one or more embodiments of the piezoelectric pump 10 described above, and thus has the beneficial effects of the above embodiments, which will not be described in detail here.

[0068] As an example, and not a limitation, electronic devices are terminal devices that require heat dissipation, such as smartphones, tablets, laptops, wearable devices (e.g., smartwatches, augmented reality glasses, wristbands), in-vehicle smart terminals, action cameras, etc.

[0069] Understandably, electronic devices require liquid cooling systems to dissipate heat from their components. The inlet 1031 and outlet 1032 of the piezoelectric pump 10 are connected to pipes in the liquid cooling system. Based on the reciprocating vibration of the piezoelectric oscillator 1011, the volume of the pump chamber changes, causing liquid to flow into or out of the pump chamber, thereby achieving heat dissipation for the electronic device.

[0070] The electronic device provided in this application embodiment can achieve heat dissipation through the piezoelectric pump 10. Since the one-way valve in the piezoelectric pump 10 has strong fatigue resistance, it can effectively extend the service life of the piezoelectric pump, thereby improving the service life and working stability of the electronic device.

[0071] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A piezoelectric pump, characterized in that, include: A drive assembly, comprising a piezoelectric vibrator and a cavity plate, wherein the cavity plate has a through hole, and the piezoelectric vibrator covers one side of the through hole to form a pump cavity, the piezoelectric vibrator being used to vibrate to cause a change in the volume of the pump cavity; A valve body assembly, wherein the drive assembly is connected to the valve body assembly, the valve body assembly includes a valve plate group, and the valve plate group includes at least two stacked valve plates; A base plate is disposed on the side of the valve body assembly away from the drive assembly. The base plate is provided with an inlet and an outlet. The inlet is connected to the pump chamber, and the outlet is connected to the pump chamber. Each valve plate is provided with at least two one-way valves, including a first one-way valve and a second one-way valve. The first one-way valve is a one-way valve corresponding to the liquid inlet, and the second one-way valve is a one-way valve corresponding to the liquid outlet.

2. The piezoelectric pump according to claim 1, characterized in that, The valve body assembly further includes a first support plate and a second support plate. The first support plate is connected to the valve plate assembly and is located on the side of the valve plate assembly opposite to the bottom plate. The second support plate is connected to the valve plate assembly and is located on the side of the valve plate assembly opposite to the drive assembly. The first support plate is provided with a first through hole corresponding to the liquid inlet and a second through hole corresponding to the liquid outlet; The second support plate is provided with a third through hole corresponding to the liquid inlet and a fourth through hole corresponding to the liquid outlet; Wherein, the valve plate of the first one-way valve is larger than the size of the third through hole, the valve plate of the second one-way valve is larger than the size of the second through hole, the size of the first through hole is larger than the size of the third through hole, and the size of the fourth through hole is larger than the size of the second through hole.

3. The piezoelectric pump according to claim 2, characterized in that, The first through hole and the fourth through hole have the same shape and the same size; The third through hole and the second through hole have the same shape and the same size.

4. The piezoelectric pump according to claim 1, characterized in that, Each valve plate includes a valve seat and at least two check valves disposed on the valve seat. Each check valve includes a valve plate with a single cantilever beam structure on the valve plate. The valve plate has a fixed end, a cantilever portion and a free end. The fixed end is integrally formed with or fixedly connected to the valve seat, and the cantilever portion is located between the fixed end and the free end.

5. The piezoelectric pump according to claim 4, characterized in that, The valve plates in the valve plate assembly that correspond to the same liquid inlet have different orientations. The orientation is: the direction from the fixed end to the free end when the free end abuts against the valve seat.

6. The piezoelectric pump according to claim 5, characterized in that, The valve plate group contains two valve plates, and the two valve plates corresponding to the same liquid inlet in the valve plate group are oriented in opposite directions.

7. The piezoelectric pump according to claim 1, characterized in that, The piezoelectric vibrator includes a first piezoelectric ceramic layer, a metal substrate, and a second piezoelectric ceramic layer. The first piezoelectric ceramic layer is attached to the side of the metal substrate away from the valve body assembly, and the second piezoelectric ceramic layer is attached to the side of the metal substrate away from the first piezoelectric ceramic layer.

8. The piezoelectric pump according to claim 7, characterized in that, The area of ​​the second piezoelectric ceramic layer is smaller than the cross-sectional area of ​​the through hole.

9. An electronic device, characterized in that, Including the piezoelectric pump as described in any one of claims 1 to 8.

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