Valve structure and production equipment

Abstract

The application discloses a valve structure and a production device, relates to the technical field of semiconductor processing, and solves the problem of particle pollution. The valve structure comprises a valve frame, a valve plate and a driving assembly. The valve frame comprises a valve hole, and the valve frame is connected to the body of an external device. The valve plate can move to a first position and a second position relative to the valve frame. The valve plate blocks the valve hole at the first position, and the valve plate is separated from the valve frame at the second position. The driving assembly comprises an output shaft. The driving assembly drives the valve plate to move between the first position and the second position through the output shaft. The output shaft and the valve plate are in an integrated structure. The valve structure is used for sealing a processing chamber.

Description

Technical Field

[0001] This application relates to, but is not limited to, the field of semiconductor processing, and particularly to a valve structure and production equipment. Background Technology

[0002] Semiconductor manufacturing equipment typically consists of multiple chambers with different functions. Workpieces (such as wafers) are transferred between these chambers to perform corresponding processes. This requires that the two chambers be connected during workpiece transfer but isolated during process execution. Installing valve structures between chambers allows for either isolation or connection between them through valve actuation, improving the transferability of workpieces and the independence of the chamber environment.

[0003] In related technologies, the valve plate and the power component are independent parts. The valve plate is fixed to the power component by fasteners such as screws. When the valve structure performs an action, the friction of the fasteners can easily generate particles that cause contamination. Utility Model Content

[0004] The valve structure and production equipment provided in this application have the technical advantage of reducing particulate pollution, which is specifically achieved through the following solutions:

[0005] In a first aspect, embodiments of this application provide a valve structure, including a valve frame, a valve plate, and a drive assembly. The valve frame includes a valve hole and is connected to an external device body. The valve plate is movable relative to the valve frame to a first position and a second position. In the first position, the valve plate blocks the valve hole, and in the second position, the valve plate separates from the valve frame. The drive assembly includes an output shaft, which drives the valve plate to move between the first and second positions. The output shaft and the valve plate are integrally formed.

[0006] The valve structure provided in this application includes a valve frame and a valve plate. The valve frame is connected to an external equipment body, allowing the processing chamber of the equipment body to communicate with the outside through a valve hole in the valve frame. The valve plate can move relative to the valve frame. When the valve plate moves to a first position relative to the valve frame, it blocks the valve hole, thus closing the processing chamber of the equipment body. When the valve plate moves to a second position relative to the valve frame, it separates from the valve frame, thus opening the processing chamber of the equipment body. Furthermore, the valve structure also includes a drive assembly, which includes an output shaft. The drive assembly drives the valve plate to move between the first and second positions via the output shaft, making the movement of the valve plate more intelligent and controllable. The output shaft and valve plate are an integral structure, providing good connection stability. During the movement of the valve plate driven by the output shaft, there is no relative movement between the output shaft and the valve plate, thus eliminating the possibility of particulate contamination due to wear caused by relative movement. Compared with related technologies where the valve plate and output shaft are connected in a detachable manner, the valve structure of this application provides a more reliable connection between the valve plate and the output shaft, is less prone to particulate contamination, and facilitates optimization of the production process.

[0007] In one implementation of this application, the valve plate includes a blocking part and an extension part. The blocking part is used to block the valve hole, the end of the output shaft is connected to the blocking part, and the extension part is located on the periphery of the output shaft. The extension part is connected to the blocking part and the output shaft respectively.

[0008] Here, the valve plate includes a blocking part and an extension part. When the valve plate is in the first position, the blocking part is used to block the valve hole. The end of the output shaft is connected to the blocking part so as to drive the blocking part to move. The extension part is connected to the blocking part and the output shaft respectively, and the extension part is located on the periphery of the output shaft. The blocking part and the extension part are connected to different positions of the output shaft, thereby improving the connection stability between the output shaft and the valve plate.

[0009] In one implementation of this application, the extension portion and the sealing portion are arranged sequentially along a first direction, which is parallel to the axis of the output shaft; along the first direction, the extension portion gradually extends to the end of the sealing portion along a second direction, which is perpendicular to the first direction and the axis of the valve hole.

[0010] Here, along the first direction, the extension gradually extends along the second direction to the end of the sealing part, that is, the size of the extension along the second direction gradually increases in the first direction, so that the extension, the sealing part, and the output shaft all have a large connection area, and the overall space occupied by the extension is small, that is, the connection effect of the extension is improved with a small space occupation.

[0011] In one implementation of this application, the blocking part includes a structural surface facing the extension, the output shaft is connected to the middle of the structural surface, and the output shaft is located between at least two extensions.

[0012] Here, the output shaft is located in the middle of the structural surface so that the output shaft can evenly transmit power to the sealing part. The output shaft is located between at least two extensions, and multiple extensions are evenly arranged around the output shaft, which helps to improve the connection stability and the balance of force transmission.

[0013] In one implementation of this application, the output shaft is located in the middle of the structural surface so that the output shaft can evenly transmit power to the sealing part. The output shaft is located between at least two extensions, and multiple extensions are evenly arranged around the periphery of the output shaft, which helps to improve the connection stability and the balance of force transmission.

[0014] Here, the first dimension of the sealing part is greater than or equal to the second dimension of the extension part, and the second dimension of the extension part is less than or equal to the third dimension of the output shaft. By reducing the size of the extension part, it is easy to reduce weight and space occupation.

[0015] In one implementation of this application, the valve structure further includes a housing and a sealing structure. The housing has a receiving space, at least a portion of the drive assembly is disposed within the receiving space, and the sealing structure is disposed between the output shaft and the housing. The sealing structure is used to isolate the receiving space from the external environment.

[0016] Here, the valve structure housing has a receiving space, in which at least part of the drive component is housed. The housing provides protection for the drive component, reducing the possibility of damage to the drive component and valve plate from collisions with external components. By setting a sealing structure, the sealing structure isolates the receiving space from the external environment, so as to provide an independent working environment for the drive component within the receiving space.

[0017] In one implementation of this application, the blocking part has a first dimension along a third direction, and the opening of the accommodating space has a fourth dimension along a third direction. The ratio of the first dimension to the fourth dimension is greater than or equal to 0.5 and less than or equal to 0.9.

[0018] Here, the dimensions of the sealing part along the third direction are set within a reasonable range, which not only facilitates the sealing part to pass through the opening of the receiving space, but also ensures the structural strength of the sealing part.

[0019] In one implementation of this application, the valve structure further includes a sealing element connected to the valve frame and surrounding the valve hole. When the valve plate moves relative to the valve frame to a first position, the sealing element seals against the valve plate.

[0020] Here, a seal is installed between the valve frame and the valve plate. The seal surrounds the valve hole to achieve a good sealing effect. Compared with the seal connected to the valve plate, the seal connected to the valve frame is easier for the operator to observe, making it easier to determine the condition of the seal and helping to replace failed seals in a timely manner.

[0021] In one implementation of this application, the valve frame has a third surface that fits the valve plate, and the valve frame is provided with a limiting groove. The opening of the limiting groove is located on the third surface, and at least a portion of the seal is accommodated in the limiting groove. The side of the valve plate facing the third surface is set as a plane. Alternatively, the valve plate is provided with a protruding structure at the position corresponding to the limiting groove, and the protruding structure extends into the limiting groove and abuts against the seal.

[0022] Here, the valve frame is provided with a limiting groove, the opening of which is located on the third surface. The limiting groove facilitates the installation and fixing of the seal. The valve plate can fit against the valve plate to compress the seal, thus achieving a good sealing effect. The valve plate can be designed as a flat structure for a more regular structure, or it can be designed with a raised structure so that the raised structure extends into the limiting groove to achieve more effective sealing and limiting.

[0023] Secondly, embodiments of this application provide a production device, including a device body and a valve structure as described in the first aspect. The device body is provided with a processing chamber and a mounting hole communicating with the processing chamber; a valve frame is provided in the mounting hole, and a drive assembly is connected to the device body.

[0024] The production equipment provided in this application includes the valve structure of this application. The connection between the valve plate and the output shaft of the valve structure is more reliable and less prone to particulate contamination, which facilitates the optimization of the production process. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the valve structure provided in the embodiments of this application;

[0026] Figure 2 This is a schematic diagram of the valve plate in the valve structure provided in the embodiments of this application;

[0027] Figure 3 This is a schematic diagram of the valve plate and output shaft in the valve structure provided in the embodiments of this application;

[0028] Figure 4 This is a schematic diagram of the valve plate and the housing in the valve structure provided in the embodiments of this application;

[0029] Figure 5 A schematic diagram of the structure of the production equipment provided in the embodiments of this application.

[0030] Figure label:

[0031] 100-Valve frame; 110-Valve hole; 120-Third surface; 200-Valve plate; 210-Sealing part; 211-First surface; 212-Second surface; 213-Structural surface; 220-Extension; 300-Drive assembly; 310-Output shaft; 400-Housing; 410-Accommodation space; 500-Seal; 600-Equipment body; 610-Processing chamber; 620-Mounting hole; 700-Sealing structure; Z-First direction; X-Second direction; Y-Third direction; D1-First dimension; D2-Second dimension; D3-Third dimension; D4-Fourth dimension. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the specific technical solutions of this application will be further described in detail below with reference to the accompanying drawings of the embodiments of this application. The following embodiments are used to illustrate this application, but are not intended to limit the scope of this application.

[0033] In the embodiments of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more.

[0034] Furthermore, in the embodiments of this application, directional terms such as "upper," "lower," "left," and "right" are defined relative to the positions in which the components are schematically placed in the accompanying drawings. It should be understood that these directional terms are relative concepts, used for relative description and clarification, and can change accordingly depending on the position of the components in the accompanying drawings.

[0035] In the embodiments of this application, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0036] In embodiments of this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0037] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0038] This application provides a production equipment, which may be a lithography equipment, etching equipment, deposition equipment, implantation equipment, polishing equipment, cleaning equipment, testing equipment, or packaging equipment on a semiconductor production line.

[0039] Semiconductor manufacturing equipment typically consists of multiple chambers with different functions. Workpieces (such as wafers) are transferred between these chambers to perform corresponding processes. This requires that the two chambers be connected during workpiece transfer but isolated during process execution. Installing valve structures between chambers allows for either isolation or connection between them through valve actuation, improving the transferability of workpieces and the independence of the chamber environment.

[0040] In some technical solutions, the valve structure consists of three components: a power component (cylinder), a valve plate, and a valve frame. The power component is mounted on the outside of the machine base, while the valve plate and valve frame are located inside the chamber. A seal is installed on the surface of the valve plate, and the bottom of the valve plate is fixed to the connecting rod of the power component. A support structure is installed on the back of the valve plate to prevent deformation. When the valve structure is closed, the cylinder actuates to close the valve plate and valve frame, isolating the chamber through the seal. When the valve structure is open, the cylinder causes the valve plate to fall and separate from the valve frame, allowing the chamber to connect.

[0041] In the above technical solution, the valve plate and the power component are independent parts. The valve plate is fixed to the power component by screws and other fasteners. When the valve structure performs an action, the connecting rod drives the valve plate to move. The connecting rod, screws, and side walls of the valve plate are subjected to force, inevitably generating friction. With frequent operation of the valve structure, wear intensifies. At the same time, wear particles accumulate here and fall into the chamber, ultimately affecting the mechanical particle level of the machine. Furthermore, the seal is located on the surface of the valve plate, facing the inside of the chamber. Even when the valve structure is open, it is difficult to observe the condition of the surface seal. The seal is a common failure point, and when it fails, the component it is located in also needs to be replaced, which is not conducive to timely detection of abnormalities in daily maintenance.

[0042] Therefore, this application also provides a valve structure, referring to... Figure 1 and Figure 2 The valve structure includes a valve frame 100, a valve plate 200, and a drive assembly 300. The valve frame 100 includes a valve hole 110 and is connected to an external device body 600. The valve plate 200 can move relative to the valve frame 100 to a first position and a second position. In the first position, the valve plate 200 blocks the valve hole 110, and in the second position, the valve plate 200 is separated from the valve frame 100. The drive assembly 300 includes an output shaft 310. The drive assembly 300 drives the valve plate 200 to move between the first position and the second position through the output shaft 310, and the output shaft 310 and the valve plate 200 are integrally formed.

[0043] In some examples, the valve frame 100 is connected to the mounting hole 620 of the device body 600, and the outer contour of the valve frame 100 is consistent with the inner contour of the mounting hole 620; for example, the outer contour of the valve frame 100 is approximately rectangular.

[0044] In some examples, the projection of the valve plate 200 along the central axis of the valve hole 110 covers the projection of the valve hole 110, and the valve plate 200 can cover the valve hole 110 in a first position; in other examples, at least a portion of the valve plate 200 can extend into the valve hole 110, and the two achieve a seal by means of hole-axis cooperation.

[0045] In some examples, the inner contour of the valve hole 110 is set to the same shape as the outer contour of the valve frame 100, and the outer contour of the valve plate 200 is set to the same shape as the inner contour of the valve hole 110. For example, the valve frame 100 is a rectangular frame structure, and at least part of the valve plate 200 is a rectangular plate structure.

[0046] In some examples, the drive assembly 300 includes drive components such as motors and cylinders, and the drive components are connected to the output shaft 310 via a transmission connection. The transmission connection can be a direct connection or an indirect connection via one or more of gears, racks, worm gears, worms, transmission chains, transmission belts, and connecting rods.

[0047] In some examples, the drive component 300 drives the valve plate 200 to move along a straight and / or curved path. For example, the drive component 300 can drive the valve plate 200 to move along a first direction Z, or it can drive the valve plate 200 to move along a third direction Y. The first direction Z and the third direction Y have an angle, and the movement path of the valve plate 200 is similar to an inverted "L" shape.

[0048] In some examples, the valve plate 200 and the output shaft 310 are integrally formed, for example, by integral casting; in other examples, the valve plate 200 and the output shaft 310 are processed into an integral structure, for example, the valve plate 200 and the output shaft 310 are welded or bonded into an integral structure.

[0049] The technical solution provided in this application embodiment includes a valve structure comprising a valve frame 100 and a valve plate 200. The valve frame 100 is connected to an external equipment body 600 so that the processing chamber 610 of the equipment body 600 communicates with the outside through the valve hole 110 of the valve frame 100. The valve plate 200 is movable relative to the valve frame 100. When the valve plate 200 moves to a first position relative to the valve frame 100, the valve plate 200 blocks the valve hole 110 to close the processing chamber 610 of the equipment body 600. When the valve plate 200 moves to a second position relative to the valve frame 100, the valve plate 200 separates from the valve frame 100 to open the processing chamber 610 of the equipment body 600.

[0050] Based on this, the valve structure also includes a drive assembly 300, which includes an output shaft 310. The drive assembly 300 drives the valve plate 200 to move between a first position and a second position through the output shaft 310, so that the movement of the valve plate 200 is more intelligent and controllable. Moreover, the output shaft 310 and the valve plate 200 are an integral structure, and the connection stability between the output shaft 310 and the valve plate 200 is good. During the movement of the valve plate 200 driven by the output shaft 310, there is no relative movement between the output shaft 310 and the valve plate 200, thereby solving the possibility of particulate contamination caused by wear due to relative movement.

[0051] Compared with the related technologies in which the valve plate 200 and the output shaft 310 are connected in a detachable manner, the valve structure of this application has a more reliable connection between the valve plate 200 and the output shaft 310, and is less prone to particulate contamination, which facilitates the optimization of the production process.

[0052] Reference Figure 1 , Figure 2 and Figure 3 In some embodiments of this application, the valve plate 200 includes a blocking part 210 and an extension part 220. The blocking part 210 is used to block the valve hole 110. The end of the output shaft 310 is connected to the blocking part 210. The extension part 220 is located on the periphery of the output shaft 310 and is connected to the blocking part 210 and the output shaft 310 respectively.

[0053] In some examples, the end face of the output shaft 310 is connected to the plug 210; in other examples, the end of the output shaft 310 is connected to the side of the plug 210 away from the valve frame 100.

[0054] In some examples, the outer contour of the extension 220 and the inner contour of the valve hole 110 have the same shape, both being rectangular contours.

[0055] In some examples, the extension 220 is a plate-like structure, and the thickness direction of the extension 220 is the same as or at an angle to the thickness direction of the sealing part 210; in other examples, the extension 220 is a column-like structure or a rod-like structure.

[0056] The technical solution provided in this application embodiment includes a valve plate 200 comprising a blocking part 210 and an extension part 220. When the valve plate 200 is in a first position, the blocking part 210 is used to block the valve hole 110. The end of the output shaft 310 is connected to the blocking part 210 so as to drive the blocking part 210 to move. The extension part 220 is connected to the blocking part 210 and the output shaft 310 respectively, and the extension part 220 is located on the periphery of the output shaft 310. The blocking part 210 and the extension part 220 are connected to different positions of the output shaft 310, thereby improving the connection stability between the output shaft 310 and the valve plate 200.

[0057] Reference Figure 1 and Figure 2 In some embodiments of this application, the extension portion 220 and the blocking portion 210 are arranged sequentially along the first direction Z, which is parallel to the axis of the output shaft 310; along the first direction Z, the extension portion 220 gradually extends along the second direction X to the end of the blocking portion 210, which is perpendicular to the first direction Z and the axis of the valve hole 110.

[0058] In some examples, the extension 220 is approximately a triangular structure, with the two right-angled sides of the extension 220 connecting the sealing part 210 and the output shaft 310 respectively. The hypotenuse of the extension 220 can be set along a straight line or an arc, and the hypotenuse set along an arc can be set to be concave or convex.

[0059] The technical solution provided in this application embodiment is that, along the first direction Z, the extension 220 gradually extends along the second direction X to the end of the blocking part 210, that is, the size of the extension 220 along the second direction X gradually increases in the first direction Z, so that the extension 220, the blocking part 210, and the output shaft 310 all have a large connection area, and the overall space occupied by the extension 220 is small, that is, the connection effect of the extension 220 is improved with a small space occupation.

[0060] Reference Figure 1 and Figure 2 In some embodiments of this application, the blocking portion 210 includes a structural surface 213 facing the extension portion 220, the output shaft 310 is connected to the middle of the structural surface 213, and the output shaft 310 is located between at least two extension portions 220.

[0061] In some examples, the valve plate 200 includes two extensions 220 distributed along a second direction X on both sides of the output shaft 310, and the two extensions 220 are symmetrically distributed about the central axis of the output shaft 310.

[0062] The technical solution provided in this application embodiment has an output shaft 310 located in the middle of the structural surface 213 so that the output shaft 310 can evenly transmit power to the sealing part 210. The output shaft 310 is located between at least two extensions 220. Multiple extensions 220 are evenly arranged around the output shaft 310, which helps to improve connection stability and force transmission balance.

[0063] Reference Figure 3 In some embodiments of this application, the blocking portion 210 has a first dimension D1 along the third direction Y, which is parallel to the axis of the valve hole 110; the extension portion 220 has a second dimension D2 along the third direction Y, and the output shaft 310 has a third dimension D3 along the third direction Y. The first dimension D1 is greater than or equal to the second dimension D2, and the second dimension D2 is less than or equal to the third dimension D3.

[0064] In some examples, the first dimension D1 of the blocking portion 210 is greater than the second dimension D2 of the extension portion 220; in other examples, the first dimension D1 of the blocking portion 210 is equal to the second dimension D2 of the extension portion 220.

[0065] In some examples, the second dimension D2 of the extension 220 is smaller than the third dimension D3 of the output shaft 310; in other examples, the second dimension D2 of the extension 220 is equal to the third dimension D3 of the output shaft 310.

[0066] In some examples, the first dimension D1 of the blocking part 210 is greater than the third dimension D3 of the output shaft 310; in other examples, the first dimension D1 of the blocking part 210 is equal to the third dimension D3 of the output shaft 310.

[0067] For example, the first dimension D1 of the blocking part 210 is greater than the third dimension D3 of the output shaft 310, and the third dimension D3 of the output shaft 310 is greater than the second dimension D2 of the extension part 220; or, the first dimension D1 of the blocking part 210, the second dimension D2 of the extension part 220 and the third dimension D3 of the output shaft 310 are all set to be equal.

[0068] The technical solution provided in this application embodiment has a first dimension D1 of the blocking part 210 that is greater than or equal to the second dimension D2 of the extension part 220, and a second dimension D2 of the extension part 220 that is less than or equal to the third dimension D3 of the output shaft 310. By reducing the size of the extension part 220, it is easy to reduce weight and space occupation.

[0069] Reference Figure 4 In some embodiments of this application, the valve structure further includes a housing 400 and a sealing structure 700. The housing 400 is provided with a receiving space 410. At least a portion of the drive assembly 300 is disposed within the receiving space 410. The sealing structure 700 is disposed between the output shaft 310 and the housing 400. The sealing structure 700 is used to isolate the receiving space 410 from the external environment.

[0070] In some examples, the housing 400 and the valve frame 100 are fixedly disposed relative to each other; for example, both the housing 400 and the valve frame 100 are fixedly connected to the equipment body 600 of the production equipment. The receiving space 410 is used to receive the driving component of the drive assembly 300, such as a cylinder.

[0071] In some examples, the sealing structure 700 is a bellows, which is sleeved on the outer periphery of the output shaft 310. The outer edge of the bellows is connected to the housing 400. The bellows is sealed and fixed to both the output shaft 310 and the housing 400. The bellows is a telescopic structure, which can achieve dynamic sealing as the output shaft 310 moves. In the technical solution provided by the embodiments of this application, the housing 400 of the valve structure has a receiving space 410. At least a portion of the drive assembly 300 is received within the receiving space 410. The housing 400 provides protection for the drive assembly 300, reducing the possibility of damage to the drive assembly 300 and the valve plate 200 from collisions with external components. By providing the sealing structure 700, the sealing structure 700 isolates the receiving space 410 from the external environment, thereby providing an independent working environment for the drive assembly 300 within the receiving space 410.

[0072] In some examples, the receiving space 410 includes an opening through the housing 400, through which the plug 210 enters or exits the receiving space 410. The dimension of the plug 210 along the third direction Y is close to the dimension of the opening along the third direction Y. For example, the dimension of the plug 210 along the third direction Y is 4 / 5 to 1 of the dimension of the opening along the third direction Y, so that it can easily enter the opening of the receiving space 410 when the valve plate 200 has a thicker dimension and higher structural strength.

[0073] Reference Figure 3 and Figure 4 In some embodiments of this application, the blocking part 210 has a first dimension D1 along the third direction Y, and the opening of the accommodating space 410 has a fourth dimension D4 along the third direction Y. The ratio of the first dimension D1 to the fourth dimension D4 is greater than or equal to 0.5 and less than or equal to 0.9.

[0074] For example, the ratio of the first dimension D1 to the fourth dimension D4 is 0.5, 0.6, 0.7, 0.8, 0.9, etc.

[0075] Reference Figure 3 The sealing part 210 includes a first surface 211 and a second surface 212 disposed opposite to each other along the third direction Y, and the distance between the first surface 211 and the second surface 212 along the third direction Y is uniformly arranged.

[0076] In some examples, the first surface 211 is the surface facing the valve frame 100, and the first surface 211 can fit against the surface of the valve frame 100. The second surface 212 is the surface facing away from the valve frame 100.

[0077] In some examples, both the first surface 211 and the second surface 212 are planes, and the distance from any point on the first surface 211 to the second surface 212 along the third direction Y is the first dimension D1.

[0078] The technical solution provided in this application embodiment has the sealing part 210 having a dimension set within a reasonable range along the third direction Y. This facilitates the sealing part 210's passage through the opening of the receiving space 410 while ensuring the structural strength of the sealing part 210. The spacing between the first surface 211 and the second surface 212 of the sealing part 210 is uniformly set, making the structure of the sealing part 210 more regular, giving it higher structural stability, and facilitating its processing and manufacturing.

[0079] Reference Figure 1 In some embodiments of this application, the valve structure further includes a seal 500, which is connected to the valve frame 100 and surrounds the valve hole 110. When the valve plate 200 moves to a first position relative to the valve frame 100, the seal 500 seals against the valve plate 200.

[0080] In some examples, the seal 500 is an elastic member, for example, the seal 500 is made of rubber, and the seal 500 can compensate for the small gap between the valve plate 200 and the valve frame 100 through elastic deformation, thereby improving the sealing effect.

[0081] In some examples, the shape of the seal 500 matches the shape of the valve orifice 110, and the size of the seal 500 is larger than the size of the valve orifice 110. For example, both the seal 500 and the valve frame 100 have rectangular outlines.

[0082] The technical solution provided in this application embodiment provides a sealing element 500 between the valve frame 100 and the valve plate 200. The sealing element 500 surrounds the valve hole 110 to achieve a good sealing effect. Compared with the sealing element 500 connected to the valve plate 200, the sealing element 500 connected to the valve frame 100 is easier for the operator to observe, making it easier to determine the usage status of the sealing element 500 and helping to replace the failed sealing element 500 in a timely manner.

[0083] Reference Figure 1 In some embodiments of this application, the valve frame 100 has a third surface 120 that fits the valve plate 200, the valve frame 100 is provided with a limiting groove, the opening of the limiting groove is located on the third surface 120, and at least a portion of the seal 500 is accommodated in the limiting groove; the side of the valve plate 200 facing the third surface 120 is set as a plane; or, the valve plate 200 is provided with a protruding structure at the position corresponding to the limiting groove, the protruding structure extends into the limiting groove and abuts against the seal.

[0084] In some examples, the third surface 120 is the surface of the valve frame 100 facing the valve plate 200, and the third surface 120 is in contact with the first surface 211 of the valve plate 200 so that the valve plate 200 compresses the seal 500 to provide good sealing performance.

[0085] In some examples, a portion of the seal 500 is received within the limiting groove, while another portion of the seal 500 protrudes from the third surface 120; in other examples, the entire seal 500 is located within the limiting groove, and the valve plate 200 is provided with a protruding structure that can extend into the limiting groove and abut against the seal.

[0086] The technical solution provided in this application embodiment includes a limiting groove in the valve frame 100, with the opening of the limiting groove located on the third surface 120. The limiting groove facilitates the installation and fixing of the sealing element 500. The valve plate 200 can fit against the valve plate 200 to compress the sealing element 500, thereby achieving a good sealing effect. The valve plate 200 can be configured as a planar structure, which is more regular in structure. Alternatively, the valve plate 200 can be configured with a protruding structure, so that the protruding structure extends into the limiting groove to achieve more effective sealing and limiting.

[0087] Reference Figure 5 In some embodiments of this application, the production equipment includes an equipment body 600 and a valve structure according to the embodiments of this application. The equipment body 600 is provided with a processing chamber 610 and a mounting hole 620 communicating with the processing chamber 610; the valve frame 100 is provided in the mounting hole 620, and the drive assembly 300 is connected to the equipment body 600.

[0088] In some examples, the production equipment includes a processing mechanism disposed in a processing chamber 610. The workpiece to be processed enters or exits the processing chamber 610 through a valve port 110. The processing mechanism is used to perform a process on the workpiece to be processed in the processing chamber 610.

[0089] In some examples, the valve frame 100 and the device body 600 are connected in a sealed manner. For example, a sealing ring is provided between the valve frame 100 and the device body 600, or the valve frame 100 and the device body 600 are configured as an integral structure.

[0090] The technical solution provided in this application embodiment includes a production equipment comprising the valve structure of this application embodiment. The connection between the valve plate 200 and the output shaft 310 of the valve structure is more reliable and less prone to particulate contamination, which facilitates the optimization of the production process.

[0091] In one embodiment of this application, the output shaft 310 of the drive assembly 300 is integrated with the valve plate 200 into a single structure. The connection between the output shaft 310 and the valve plate 200 is an integral structure. An extension 220 is provided to widen the connection area between the valve plate 200 and the output shaft 310. The seal 500 is provided on the third surface 120 of the valve frame 100. The first surface 211 of the valve plate 200 is set as a smooth plane. The support structure on the valve plate 200 is removed, and the valve plate 200 is thickened as a whole so that the first surface 211 and the second surface 212 are equally spaced.

[0092] The valve structure and production equipment provided in this application embodiment fundamentally avoid the problem of particulate contamination caused by wear by making the output shaft 310 and valve plate 200 an integral structure. This effectively solves the problem of particulate contamination caused by valve structure wear in related technologies, thereby extending service life and fully ensuring the particle stability of the production equipment during long-term use. By placing the seal 500 on the valve frame 100, the problem of needing to replace the integral valve plate 200 when the seal 500 fails is avoided, improving maintenance convenience. Furthermore, the seal 500 on the valve frame 100 is easily observable, and its morphology and failure accumulation can be observed in advance, improving the observability of the seal 500. The integral valve plate 200 structure is also more stable, facilitating the installation of sensors and other expansion components, thus improving the scalability of the valve structure.

[0093] The sequence numbers of the embodiments in this application are merely for description and do not represent the superiority or inferiority of the embodiments, nor do they limit the patent scope of this application. Any equivalent structural or procedural transformations made based on the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A valve structure, characterized in that, include: A valve frame, including a valve orifice, the valve frame being connected to an external device body; A valve plate, which is movable relative to the valve frame to a first position and a second position, wherein the valve plate blocks the valve hole in the first position and separates from the valve frame in the second position; A drive assembly includes an output shaft, which drives the valve plate to move between a first position and a second position via the output shaft, and the output shaft and the valve plate are integrally formed.

2. The valve structure according to claim 1, characterized in that, The valve plate includes a blocking part and an extension part. The blocking part is used to block the valve hole. The end of the output shaft is connected to the blocking part. The extension part is located on the periphery of the output shaft and is connected to the blocking part and the output shaft respectively.

3. The valve structure according to claim 2, characterized in that, The extension and the sealing portion are arranged sequentially along a first direction, which is parallel to the axis of the output shaft; Along the first direction, the extension gradually extends along the second direction to the end of the sealing portion, the second direction being perpendicular to the first direction and the axis of the valve orifice.

4. The valve structure according to claim 2, characterized in that, The blocking portion includes a structural surface facing the extension, the output shaft is connected to the middle of the structural surface, and the output shaft is located between at least two of the extensions.

5. The valve structure according to claim 2, characterized in that, The sealing portion has a first dimension along a third direction, and the third direction is parallel to the axis of the valve hole; The extension has a second dimension along the third direction, and the output shaft has a third dimension along the third direction, wherein the first dimension is greater than or equal to the second dimension, and the second dimension is less than or equal to the third dimension.

6. The valve structure according to any one of claims 2 to 5, characterized in that, It also includes a housing and a sealing structure, the housing having a receiving space, at least a portion of the drive assembly being disposed within the receiving space, and the sealing structure being disposed between the output shaft and the housing, the sealing structure being used to isolate the receiving space from the external environment.

7. The valve structure according to claim 6, characterized in that, The sealing portion has a first dimension along a third direction, and the opening of the accommodating space has a fourth dimension along the third direction. The ratio of the first dimension to the fourth dimension is greater than or equal to 0.5 and less than or equal to 0.9, and the third direction is parallel to the axis of the valve orifice.

8. The valve structure according to any one of claims 1 to 5, characterized in that, It also includes a seal that is connected to the valve frame and surrounds the valve hole, and when the valve plate moves relative to the valve frame to the first position, the seal seals and the valve plate seal against each other.

9. The valve structure according to claim 8, characterized in that, The valve frame has a third surface that fits against the valve plate, and the valve frame is provided with a limiting groove, the opening of which is located on the third surface, and at least a portion of the seal is accommodated in the limiting groove. The valve plate is configured as a plane on the side facing the third surface; or, the valve plate is provided with a protruding structure corresponding to the position of the limiting groove, the protruding structure extending into the limiting groove and abutting against the sealing element.

10. A production equipment, characterized in that, include: The equipment body is provided with a processing chamber and a mounting hole communicating with the processing chamber; The valve structure according to any one of claims 1 to 9, wherein the valve frame is disposed in the mounting hole, and the drive assembly is connected to the device body.

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