Vacuum rectangular valve

Abstract

The utility model discloses a vacuum rectangular valve, include: valve body subassembly has the valve cavity and with the valve port of valve cavity intercommunication, the valve plate sets up in the valve cavity, two guide rails interval setting are set up on valve body subassembly, be equipped with the sliding slot on the guide rail, and the sliding slot includes first linear section, inclined section and second linear section, push rod subassembly sets up between two guide rails and is connected with the valve plate, and push rod subassembly interval is equipped with first bearing assembly and second bearing assembly, and first bearing assembly and second bearing assembly all are connected with the sliding slot sliding, when second bearing assembly slides by inclined section to first linear section, push rod subassembly rotates to the valve plate and closes the valve port to the direction close to the valve port, when second bearing assembly slides by inclined section to second linear section, push rod subassembly rotates to the valve plate and opens the valve port to the direction away from the valve port, and drive subassembly drives push rod subassembly and does axial movement and rotation movement along the sliding slot to drive the valve plate and open or close the valve port. Solveed how to reduce the sealing surface abrasion of valve problem.

Description

Technical Field

[0001] This utility model relates to the field of valve technology, specifically to a vacuum rectangular valve. Background Technology

[0002] In vacuum coating, the valves in each chamber are crucial, as their sealing performance, stability, low vibration, and ease of maintenance have a significant impact on the efficiency and yield of the entire process.

[0003] In related technologies, various valves are usually driven by cylinders, and the valve lifting and lowering actions are completed by designing corresponding air circuits. When the valve is closed and opened, there will be a certain amount of friction on the valve sealing surface, which will aggravate the wear of the sealing ring, reduce the overall life, and the wear of the sealing ring can easily generate tiny particles, which will contaminate the chamber environment and make it difficult to withstand the reverse pressure generated by the vacuum when the valve is closed. Therefore, how to reduce the wear of the valve sealing surface is an urgent problem to be solved. Utility Model Content

[0004] In view of this, the present invention provides a vacuum rectangular valve to solve the problem of how to reduce the wear of the valve's sealing surface.

[0005] This utility model provides a vacuum rectangular valve, comprising: A valve body assembly having a valve cavity and a valve port communicating with the valve cavity; A valve plate, disposed within the valve cavity, is used to open or close the valve port; Two guide rails are spaced apart on the valve body assembly along a first direction; the guide rails are provided with a sliding groove, the sliding groove including a first straight segment, a ramp segment and a second straight segment connected sequentially along a second direction; the first straight segment and the second straight segment are parallel, and the second straight segment is offset from the first straight segment in a third direction; the third direction is perpendicular to the sealing surface of the valve port, and the first direction, the second direction and the third direction are perpendicular to each other; A push rod assembly is disposed between the two guide rails and connected to the valve plate; a first bearing assembly and a second bearing assembly are spaced apart along the axial direction of the push rod assembly, and both the first bearing assembly and the second bearing assembly are slidably connected to the slide groove; when the second bearing assembly slides from the ramp section to the first straight section, the push rod assembly rotates toward the valve port until the valve plate closes the valve port; when the second bearing assembly slides from the ramp section to the second straight section, the push rod assembly rotates away from the valve port until the valve plate opens the valve port. A drive assembly is connected to the valve body assembly, and its output end is driven to the push rod assembly. It is used to drive the push rod assembly to move axially and rotate along the slide groove, so as to drive the valve plate to open or close the valve port.

[0006] In one optional embodiment, the push rod assembly includes a first push rod and a second push rod; one end of the first push rod is movably inserted into the valve cavity and connected to the valve plate, and the other end is coaxially and movably inserted with the second push rod; the second push rod is drivenly connected to the drive assembly; an elastic element is provided between the first push rod and the second push rod; the first bearing assembly is connected to the first push rod, and the second bearing assembly is connected to the second push rod.

[0007] In one alternative implementation, the elastic element is a compression spring.

[0008] In one optional embodiment, the end face of the first push rod is provided with a slot corresponding to the second push rod, and the end of the first push rod is detachably connected to a cover corresponding to the slot; the second push rod is movably inserted through the cover, and one end of the second push rod extending into the slot is slidably engaged with the slot through an annular portion; the bottom of the slot is provided with a mounting groove, and the elastic element is embedded in the mounting groove.

[0009] In one alternative embodiment, a bellows is further included, which is sleeved on the first push rod; one end of the bellows is sealed to the valve body assembly, and the other end is sealed to the first push rod.

[0010] In one alternative embodiment, the first bearing assembly includes a clamping seat and a first bearing, the clamping seat being disposed on the first push rod; the first bearing is detachably connected to the clamping seat and slidably connected to the groove.

[0011] In one optional embodiment, the second bearing assembly includes a drive shaft and two second bearings; the drive shaft is arranged along a first direction; the two second bearings are sleeved on the drive shaft and slidably connected in the two grooves respectively; the push rod assembly is rotatably connected to the drive shaft.

[0012] In one alternative embodiment, the drive assembly includes two cylinders symmetrically arranged on both sides of the two guide rails; the cylinder shafts of the cylinders are arranged along a second direction and are hinged to the end of the drive shaft via a connecting rod assembly.

[0013] In one alternative embodiment, the connecting rod assembly includes a connecting plate, one end of which is hinged to the output shaft of the cylinder and the other end of which is hinged to the drive shaft.

[0014] In one optional embodiment, the valve body assembly includes a valve body, a first sealing plate, and a second sealing plate. The valve body has the valve cavity and the valve port. The first sealing plate and the second sealing plate are detachably connected to both sides of the valve body in a second direction. The second sealing plate is provided with a through hole through which the push rod assembly can move.

[0015] The technical solution of this utility model has at least the following advantages: In this invention, the push rod assembly slides in conjunction with the first bearing assembly and the second bearing assembly on the first straight section, the ramp section, and the second straight section, allowing the push rod assembly to perform both rotational and axial movements during sliding. The rotational movement causes the valve plate to separate from or abut against the sealing surface of the valve port, preventing friction between the valve plate and the sealing surface of the valve port during opening or closing, and reducing the generation of microparticles. Attached Figure Description

[0016] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of a vacuum rectangular valve according to an embodiment of the present invention from a first-view perspective; Figure 2 This is a structural schematic diagram of a vacuum rectangular valve from a second perspective, according to an embodiment of the present invention. Figure 3 This is a schematic diagram of the internal structure of a vacuum rectangular valve from a third perspective, according to an embodiment of the present invention. Figure 4 This is a schematic diagram of the guide rail structure according to an embodiment of the present utility model; Figure 5 This is a schematic diagram of the internal structure of the valve assembly in the open state from a fourth perspective, according to an embodiment of the present invention. Figure 6 This is a schematic diagram of the internal structure of the valve assembly in the open state from a fifth perspective, according to an embodiment of the present invention. Figure 7 This is a schematic diagram of the internal structure of the valve assembly in an intermediate state from a fourth perspective, according to an embodiment of the present invention. Figure 8 This is a schematic diagram of the internal structure of the valve assembly in an intermediate state from a fifth perspective, according to an embodiment of the present invention. Figure 9This is a schematic diagram of the internal structure of the valve assembly in a closed state from a fourth perspective, according to an embodiment of the present invention. Figure 10 This is a schematic diagram of the internal structure of the valve assembly in a closed state from a fifth perspective, according to an embodiment of the present invention.

[0018] Explanation of reference numerals in the attached figures: 1. Valve body assembly; 101. Valve cavity; 102. Valve port; 103. Valve body; 104. First sealing plate; 105. Second sealing plate; 2. Valve plate; 3. Guide rail; 4. Slide groove; 401. First straight section; 402. Sloping section; 403. Second straight section; 5. Push rod assembly; 501. First push rod; 502. Second push rod; 503. Elastic element; 504. Slot; 505. Cover; 506. Annular part; 6. First bearing assembly; 601. Clamping seat; 602. First bearing; 7. Second bearing assembly; 701. Drive shaft; 702. Second bearing; 8. Drive assembly; 9. Bellows; 10. Connecting rod assembly. Detailed Implementation

[0019] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0020] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0022] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0023] The following is combined Figures 1 to 10 The following describes embodiments of the present invention.

[0024] According to an embodiment of the present invention, a vacuum rectangular valve is provided, comprising: a valve body assembly 1 having a valve cavity 101 and a valve port 102 communicating with the valve cavity 101; a valve plate 2 disposed within the valve cavity 101 for opening or closing the valve port 102; two guide rails 3 spaced apart on the valve body assembly 1 along a first direction; a sliding groove 4 provided on the guide rails 3, the sliding groove 4 comprising a first straight segment 401, a ramp segment 402, and a second straight segment 403 sequentially connected along a second direction; the first straight segment 401 and the second straight segment 403 are parallel, and the second straight segment 403 is offset from the first straight segment 401 in a third direction; the third direction is perpendicular to the sealing surface of the valve port 102, and the first direction, the second direction, and the third direction are perpendicular to each other; and a push rod assembly 5 disposed on the two guide rails 101. The guide rails 3 are connected to the valve plate 2; the push rod assembly 5 is provided with a first bearing assembly 6 and a second bearing assembly 7 at intervals along its axial direction, and both the first bearing assembly 6 and the second bearing assembly 7 are slidably connected to the slide groove 4; when the second bearing assembly 7 slides from the ramp section 402 to the first straight section 401, the push rod assembly 5 rotates towards the valve port 102 to close the valve port 102; when the second bearing assembly 7 slides from the ramp section 402 to the second straight section 403, the push rod assembly 5 rotates away from the valve port 102 to open the valve port 102; the drive assembly 8 is connected to the valve body assembly 1, and its output end is driven to the push rod assembly 5, which is used to drive the push rod assembly 5 to move axially and rotate along the slide groove 4, so as to drive the valve plate 2 to open or close the valve port 102.

[0025] It should be noted that the first bearing assembly 6 is slidably connected to the first straight segment 401; the axial direction of the push rod assembly 5 extends in the second direction; the first straight segment 401 and the second straight segment 403 are arranged along the second direction.

[0026] In this embodiment, when both the first bearing assembly 6 and the second bearing assembly 7 are located in the first straight segment 401, the axial direction of the push rod assembly 5 remains parallel to the second direction, that is, parallel to the sealing surface of the valve port 102, so that the valve plate 2 is parallel to the sealing surface of the valve port 102 and abuts against the sealing surface of the valve port 102 to close it; when it is necessary to open the valve port 102, the push rod assembly 5 is driven by the drive assembly 8 to slide along the slide groove 4 away from the valve body assembly 1. When the second bearing assembly 7 interacts from the first straight segment 401 to the ramp segment 402, the first bearing assembly 6 is still located in the first straight segment 401, so that the second bearing assembly 7 and the first bearing assembly 6 are in contact with each other. The component 6 is misaligned in the second direction, causing the push rod assembly 5 to rotate around the first bearing assembly 6 in a direction away from the valve port 102. This causes the valve plate 2 to rotate away from the sealing surface of the valve port 102, or rotate while moving away from the valve port 102 in the second direction, until the second bearing assembly 7 slides to the second straight segment 403, after which the valve plate 2 maintains a preset tilt angle with the sealing surface of the valve port 102. When the second bearing assembly 7 reaches the second straight segment 403, since the first straight segment 401 and the second straight segment 403 are parallel, the first bearing assembly 6 and the second bearing assembly 7 simultaneously continue along the second direction in the first straight segment 401 and the second straight segment 403. The valve plate 2 moves along the second direction at a preset tilt angle to a suitable position, keeping the valve port 102 open. At this time, the valve body assembly 1 is in the open state. When it is necessary to close the valve port 102, the drive assembly 8 drives the push rod assembly 5 to move towards the valve port 102. The valve plate 2 first moves towards the valve port 102 while maintaining the preset tilt angle. When the second bearing assembly 7 slides to the ramp section 402 and slides from the ramp section 402 towards the first straight section 401, the push rod assembly 5 rotates around the first bearing assembly 6 towards the valve port 102, thereby driving the valve plate 2 to rotate towards the sealing surface of the valve port 102 or rotate while moving towards the first straight section 401. The valve plate 2 moves away from the valve port 102 in two directions until the second bearing assembly 7 slides to the first straight segment 401, after which the valve plate 2 rotates to align with and abut against the sealing surface of the valve port 102, at which point the valve body assembly 1 is in a closed state. The vacuum rectangular valve provided in this embodiment slides in the slide groove 4 through the push rod assembly 5 via the first bearing assembly 6 and the second bearing assembly 7, so that the push rod assembly 5 can perform both rotational and axial movements when sliding. The rotational movement causes the valve plate 2 to separate from or abut against the sealing surface of the valve port 102, avoiding friction between the valve plate 2 and the sealing surface of the valve port 102 when opening or closing, and reducing the generation of microparticles.

[0027] Specifically, such as Figures 5 to 10 As shown, there are two valve ports 102 symmetrically arranged in the third direction, and the valve plate 2 seals one of the valve ports 102.

[0028] In one embodiment, such as Figure 3 , Figures 5 to 10As shown, the push rod assembly 5 includes a first push rod 501 and a second push rod 502; one end of the first push rod 501 can be movably inserted into the valve cavity 101 and connected to the valve plate 2, and the other end is coaxially and movably inserted with the second push rod 502; the second push rod 502 is drivenly connected to the drive assembly 8; an elastic element 503 is provided between the first push rod 501 and the second push rod 502; the first bearing assembly 6 is connected to the first push rod 501, and the second bearing assembly 7 is connected to the second push rod 502.

[0029] It should be noted that when the elastic element 503 is installed between the first push rod 501 and the second push rod 502, it is pre-compressed to a certain length so that the elastic element 503 is in a compressed state. This allows the first push rod 501 to push the second push rod 502 to move synchronously during the process of the valve body assembly 1 changing from a closed state to an intermediate state.

[0030] In this embodiment, through the sliding engagement of the first push rod 501 and the second push rod 502, and the provision of an elastic element 503 between the first push rod 501 and the second push rod 502, the strokes of the first straight segment 401, the ramp segment 402, and the second straight segment 403 can be reasonably adjusted so that during the opening process of the valve body assembly 1 from the closed state, when the second bearing assembly 7 moves from the second straight segment 403 to just reach the ramp segment 402, the first bearing assembly 6 just moves to the upper limit position of the first straight segment 401. At this time, the valve... When plate 2 reaches the position aligned with valve port 102, valve body assembly 1 is in the middle state. Then, the second push rod 502 is driven to further compress the elastic element 503, causing the second bearing assembly 7 to move from the ramp section 402 to the first straight section 401. During this process, valve plate 2 only rotates until it abuts against the sealing surface of valve port 102 to close it. Conversely, when opening valve port 102, the second bearing assembly 7 slides from the first straight section 401 to the ramp section 402, and under the elastic action of the elastic element 503, it... During the movement of the second bearing assembly 7 in the ramp section 402, the elastic element 503 exerts a force on the first push rod 501 in the direction of the valve port 102, so that the first bearing assembly 6 is kept at the upper limit position of the first straight section 401, that is, the valve plate 2 only rotates at the position aligned with the valve port 102, until the second bearing assembly 7 slides to the second straight section 403, when the inclination angle between the valve plate 2 and the sealing surface of the valve port 102 reaches the maximum, that is, the valve body assembly 1 returns to the middle state again. At the same time, the elastic element 503 unfolds to the extended state, and then the whole continues to move along the second direction to the appropriate position at this inclination angle. Through the sliding connection between the first push rod 501 and the second push rod 502, and the elastic element 503 is set between the two, the compression stroke provided by the elastic element 503 allows the valve plate 2 to only rotate at the position aligned with the valve port 102, so that the valve plate 2 separates or closes with the sealing surface of the valve port 102 in a rotating manner, avoiding rotation and movement at the same time, further avoiding friction between the valve plate 2 and the sealing surface of the valve port 102, and improving service life.

[0031] In one embodiment, such as Figure 3 , Figures 5 to 10 As shown, the elastic element 503 is a compression spring.

[0032] In this embodiment, the elastic element 503 is a compression spring, which is easy to compress.

[0033] In one embodiment, such as Figure 3 , Figures 5 to 10As shown, a slot 504 is provided on the end face of the first push rod 501 corresponding to the second push rod 502, and a cover 505 is detachably connected to the end of the first push rod 501 corresponding to the slot 504; the second push rod 502 is movably inserted through the cover 505, and one end of the second push rod 502 extending into the slot 504 slides into the slot 504 through the annular part 506; the bottom of the slot 504 is provided with an installation groove, and the elastic element 503 is embedded in the installation groove.

[0034] It should be noted that the cover plate is provided with an opening for the second push rod 502 to pass through, and the diameter of the opening is smaller than the diameter of the annular portion 506; one end of the elastic member 503 is embedded in the mounting groove, and the other end extends to the slot 504 and abuts against the second push rod 502.

[0035] In this embodiment, during installation, the elastic element 503 is first embedded in the mounting groove. Then, the second push rod 502 is slidably disposed in the slot 504 through the annular portion 506. Next, the cover 505 is sleeved on the second push rod 502 and fixed to the end of the first push rod 501 by bolts or screws, so that the second push rod 502 is limited in the slot 504 by the annular portion 506, improving stability and making the whole assembly easy to install and disassemble, reducing assembly difficulty. In addition, during the adjustment process of the valve port 102 from the intermediate state to the open state, the annular portion 506 of the second push rod 502 can abut against the cover 505 to apply a force away from the valve port 102 to the push rod assembly 5, improving the overall stability.

[0036] In one embodiment, such as Figures 1 to 3 As shown, the vacuum rectangular valve also includes a bellows 9, which is sleeved on the first push rod 501; one end of the bellows 9 is sealed to the valve body assembly 1, and the other end is sealed to the first push rod 501.

[0037] In this embodiment, a bellows 9 is used for sealing to prevent leakage from the valve cavity 101 at the connection between the push rod assembly 5 and the valve body assembly 1 during the adjustment process, thereby improving the sealing performance. In addition, the bellows 9 can change with the movement of the push rod assembly 5, making it highly adaptable.

[0038] In one embodiment, such as Figure 2 and Figure 3 As shown, the first bearing assembly 6 includes a clamping seat 601 and a first bearing 602. The clamping seat 601 is disposed on the first push rod 501. The first bearing 602 is detachably connected to the clamping seat 601 and is slidably connected to the slide groove 4.

[0039] It should be noted that there are two sets of the first bearing assembly 6, and the two sets of the first bearing assembly 6 are slidably connected to the slide grooves 4 on the two guide rails 3 respectively.

[0040] In this embodiment, by setting the clamping seat 601 on the first push rod 501 and connecting the first bearing 602 through the clamping seat 601, the first bearing 602 is slidably connected in the slide groove 4, which facilitates installation and disassembly, improves stability, and reduces assembly difficulty.

[0041] In one embodiment, such as Figure 2 and Figure 3 As shown, the second bearing assembly 7 includes a drive shaft 701 and two second bearings 702; the drive shaft 701 is arranged along a first direction; the two second bearings 702 are sleeved on the drive shaft 701 and are slidably connected in two slide grooves 4 respectively; the push rod assembly 5 is rotatably connected to the drive shaft 701.

[0042] It should be noted that the slide 4 passes through the guide rail 3 in the first direction.

[0043] In this embodiment, two second bearings 702 are slidably connected in two slide grooves 4, and the two are connected by a transmission shaft 701. The transmission shaft 701 is also connected to the push rod assembly 5 and the drive assembly 8 to realize the transmission between the drive assembly 8 and the push rod assembly 5. The structure is simple, has strong stability, and reduces assembly difficulty.

[0044] Specifically, the end of the second push rod 502 away from the first push rod 501 is rotatably sleeved on the transmission shaft 701.

[0045] In one embodiment, such as Figures 1 to 3 As shown, the drive assembly 8 includes two cylinders, which are symmetrically arranged on both sides of the two guide rails 3; the cylinder shafts are arranged along the second direction and are hinged to the end of the transmission shaft 701 through the connecting rod assembly 10.

[0046] It should be noted that the end of the drive shaft 701 passes through the second bearing 702 and extends to the side of the guide rail 3 away from the push rod assembly 5.

[0047] In this embodiment, two cylinders are provided, and the cylinder shafts of the two cylinders are hinged to the end of the transmission shaft 701 through the connecting rod assembly 10, so as to realize transmission, improve stability, and prevent jamming during transmission by providing multiple degrees of freedom through the connecting rod assembly 10.

[0048] In one embodiment, such as Figures 1 to 3 As shown, the connecting rod assembly 10 includes a connecting plate, one end of which is hinged to the output shaft of the cylinder, and the other end of which is hinged to the transmission shaft 701.

[0049] In this embodiment, the connecting rod assembly 10 adopts a connecting plate. One end of the connecting plate is hinged to the output shaft of the cylinder, and the other end is hinged to the transmission shaft 701. This provides multiple degrees of freedom to avoid jamming caused by the transmission shaft 701 shifting upwards in the third direction during transmission, thereby improving flexibility.

[0050] In one embodiment, such as Figure 2 As shown, the valve body assembly 1 includes a valve body 103, a first sealing plate 104 and a second sealing plate 105. The valve body 103 has a valve cavity 101 and a valve port 102. The first sealing plate 104 and the second sealing plate 105 are respectively detachably connected to the two sides of the valve body 103 in the second direction. The second sealing plate 105 is provided with a through hole for the push rod assembly 5 to move through.

[0051] In this embodiment, the valve cavity 101 is formed by the first sealing plate 104, the second sealing plate 105 and the valve body 103. The first sealing plate 104 and the second sealing plate 105 are detachably connected to the valve body 103, which facilitates installation and disassembly, reduces assembly difficulty, and facilitates maintenance. The second sealing plate 105 is provided with a through hole to provide operating space, which facilitates the second push rod 502 to extend into the valve cavity 101 and drive the valve plate 2 to move within the valve cavity 101.

[0052] Specifically, the horizontal and vertical cross sections of the valve body 103 are both rectangular, and the valve port 102 and the valve plate 2 are both rectangular.

[0053] Specifically, the bellows 9 is sealed at the through hole.

[0054] Specifically, both the first bearing 602 and the second bearing 702 are rolling bearings.

[0055] The specific working principle of the vacuum rectangular valve provided in this embodiment is as follows: Figures 5 to 10 As shown, with the second direction as the vertical direction, valve body assembly 1 is in the open state (e.g., Figure 5 and Figure 6 The initial state (as shown) is explained below: When it is necessary to close valve port 102, the cylinder retracts upward, driving the transmission shaft 701 to rise. Then, the transmission shaft 701 moves within the slide groove 4 via the second bearing 702 and pushes the second push rod 502 upward. Simultaneously, the second push rod 502 pushes the first push rod 501 via the elastic element 503, causing the second bearing 702 to rise synchronously. This causes the push rod assembly 5 to move the valve plate 2 upward while maintaining a preset angle with the sealing surface of valve port 102. When the second bearing 702 just reaches the ramp section 402, the first bearing 602 reaches the upper limit position of the first straight section 401, and the valve plate 2 reaches the position aligned with valve port 102. At this time, the valve assembly is in the intermediate state (as shown). Figure 7 and Figure 8As shown) and the bellows 9 is in a compressed state, the second push rod 502 continues to drive the elastic element 503 to rise. The second bearing 702 rises and slides to the first straight section 401 after passing the ramp section 402, and is in the same vertical plane as the first bearing 602. This drives the push rod assembly 5 to rotate around the first bearing 602 in the vertical direction, thereby causing the valve plate 2 to rotate toward the sealing surface of the valve port 102 and abut against the sealing surface of the valve port 102, so as to complete the sealing of the valve port 102, that is, the valve body assembly 1 is in a closed state (as shown). Figure 9 and Figure 10 (As shown); Similarly, when it is necessary to open the valve port 102, the cylinder shaft extends downward through the cylinder, driving the transmission shaft 701 to descend. Then, the transmission shaft 701 moves in the slide groove 4 through the second bearing 702 and pushes the second push rod 502 to descend. Due to the elastic action of the elastic element 503, the second push rod 502 remains stationary when the second bearing 702 slides in the ramp section 402. At the same time, because the second bearing 702 and the first bearing 602 are misaligned in the vertical direction, the axial direction of the push rod assembly 5 rotates around the first bearing 602. The valve plate 2 rotates and separates away from the valve port 102, and the valve body assembly 1 returns to the intermediate state. When the second bearing 702 descends to the second straight section 403 and begins to descend in the second straight section 403, the annular part 506 just abuts against the valve. The cover plate exerts a downward force on the first push rod 501, causing the push rod assembly 5 to move downward as a whole. At the same time, it drives the valve plate 2 to move downward while maintaining a preset angle with the sealing surface of the valve port 102, until the second bearing 702 reaches the bottom of the second straight segment 403. The bellows 9 returns to its natural state, thus opening the valve port 102 and putting the valve body assembly 1 in the open state. The push rod assembly 5 rotates to move the valve plate 2 while maintaining a preset distance from the sealing surface of the valve port 102. This reduces the friction between the valve plate 2 and the sealing surface of the valve port 102 during the lifting and lowering of the valve plate 2, reduces the wear of the seals such as the sealing rings, simplifies the overall movement structure, increases reliability, reduces assembly difficulty, and solves the problem of how to reduce the wear of the valve's sealing surface.

[0056] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A vacuum rectangular valve, characterized in that, include: The valve body assembly (1) has a valve cavity (101) and a valve port (102) communicating with the valve cavity (101). A valve plate (2) is disposed in the valve cavity (101) for opening or closing the valve port (102). Two guide rails (3) are spaced apart on the valve body assembly (1) along a first direction; the guide rails (3) are provided with a sliding groove (4), the sliding groove (4) includes a first straight segment (401), a ramp segment (402) and a second straight segment (403) connected sequentially along a second direction; the first straight segment (401) and the second straight segment (403) are parallel, and the second straight segment (403) and the first straight segment (401) are offset in a third direction; the third direction is perpendicular to the sealing surface of the valve port (102), and the first direction, the second direction and the third direction are perpendicular to each other; A push rod assembly (5) is disposed between the two guide rails (3) and connected to the valve plate (2); a first bearing assembly (6) and a second bearing assembly (7) are provided on the push rod assembly (5) at intervals along its axial direction, and the first bearing assembly (6) and the second bearing assembly (7) are slidably connected to the slide groove (4); when the second bearing assembly (7) slides from the ramp section (402) to the first straight section (401), the push rod assembly (5) rotates toward the valve port (102) to the valve plate (2) to close the valve port (102); when the second bearing assembly (7) slides from the ramp section (402) to the second straight section (403), the push rod assembly (5) rotates toward the valve port (102) to the valve plate (2) to open the valve port (102). The drive assembly (8) is connected to the valve body assembly (1), and its output end is driven to the push rod assembly (5). It is used to drive the push rod assembly (5) to move axially and rotate along the slide groove (4) so ​​as to drive the valve plate (2) to open or close the valve port (102).

2. The vacuum rectangular valve according to claim 1, characterized in that, The push rod assembly (5) includes a first push rod (501) and a second push rod (502); one end of the first push rod (501) can be movably inserted into the valve cavity (101) and connected to the valve plate (2), and the other end is coaxially movably inserted with the second push rod (502); the second push rod (502) is drivenly connected to the drive assembly (8); an elastic element (503) is provided between the first push rod (501) and the second push rod (502); the first bearing assembly (6) is connected to the first push rod (501), and the second bearing assembly (7) is connected to the second push rod (502).

3. The vacuum rectangular valve according to claim 2, characterized in that, The elastic element (503) is a compression spring.

4. The vacuum rectangular valve according to claim 2, characterized in that, The first push rod (501) has a slot (504) on its end face corresponding to the second push rod (502), and the end of the first push rod (501) is detachably connected to the slot (504) with a cover (505); the second push rod (502) is movably inserted through the cover (505), and one end of the second push rod (502) extending into the slot (504) slides into the slot (504) through an annular part (506); the bottom of the slot (504) is provided with a mounting groove, and the elastic element (503) is embedded in the mounting groove.

5. The vacuum rectangular valve according to claim 2, characterized in that, It also includes a bellows (9), which is sleeved on the first push rod (501); one end of the bellows (9) is sealed to the valve body assembly (1), and the other end is sealed to the first push rod (501).

6. The vacuum rectangular valve according to claim 2, characterized in that, The first bearing assembly (6) includes a clamping seat (601) and a first bearing (602). The clamping seat (601) is disposed on the first push rod (501). The first bearing (602) is detachably connected to the clamping seat (601) and is slidably connected to the slide groove (4).

7. The vacuum rectangular valve according to any one of claims 1 to 6, characterized in that, The second bearing assembly (7) includes a drive shaft (701) and two second bearings (702); the drive shaft (701) is arranged along a first direction; the two second bearings (702) are sleeved on the drive shaft (701) and are slidably connected in the two slide grooves (4); the push rod assembly (5) is rotatably connected to the drive shaft (701).

8. The vacuum rectangular valve according to claim 7, characterized in that, The drive assembly (8) includes two cylinders, which are symmetrically arranged on both sides of the two guide rails (3); the cylinder shafts of the cylinders are arranged along the second direction and are hinged to the end of the transmission shaft (701) through the connecting rod assembly (10).

9. The vacuum rectangular valve according to claim 8, characterized in that, The connecting rod assembly (10) includes a connecting plate, one end of which is hinged to the output shaft of the cylinder and the other end of which is hinged to the transmission shaft (701).

10. The vacuum rectangular valve according to claim 1, characterized in that, The valve body assembly (1) includes a valve body (103), a first sealing plate (104) and a second sealing plate (105). The valve body (103) has the valve cavity (101) and the valve port (102). The first sealing plate (104) and the second sealing plate (105) are detachably connected to both sides of the valve body (103) in a second direction. The second sealing plate (105) is provided with a through hole through which the push rod assembly (5) can move.

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