A silane filling system

Abstract

The application discloses a silane filling system and belongs to the technical field of silane gas filling. The silane filling system comprises a supply unit, a filling main pipe and a pipe bundle container. The supply unit is used for conveying liquid silane. The supply unit is connected with the filling main pipe, and the supply unit can convey the liquid silane to the filling main pipe. The filling main pipe is connected with filling branch pipes. The filling branch pipes can be one or more, and each filling branch pipe is used for filling the liquid silane for one pipe bundle container. The maximum weight of the liquid silane filling can be calculated through a filling coefficient of the pipe bundle container. The weight of the liquid silane filled in the pipe bundle container is obtained in real time through a weighing unit. The weighing unit can adopt an electronic scale or other weighing equipment. When the liquid silane is conveyed to the pipe bundle container through the supply unit, the weight of the liquid silane filled in the pipe bundle container is obtained in real time through the weighing unit. When the weight of the filled liquid silane reaches the maximum filling weight, the filling is completed.

Description

Technical Field

[0001] This application relates to the field of silane gas filling technology, and more particularly to a silane filling system. Background Technology

[0002] With the expansion of the electronic-grade silane gas market, manufacturers are widely adopting tubular containerized containers for production. These containers offer large storage capacity and long replacement cycles, significantly reducing the safety risks associated with disassembling and reassembling cylinders. The market widely utilizes tubular containerized containers in 2.5-ton, 4-ton, and 6-ton models. When filling these containers with silane gas, the commonly used technology involves compressing the gas. However, silane gas has a critical temperature of -4.3℃ and a boiling point of -112℃ at normal pressure. During filling in hot summer weather, the later stages of filling can reach pressures of 12-14 MPa. If a leak occurs, spontaneous combustion can occur, potentially leading to a delayed explosion. Furthermore, the high filling pressure reduces the filling rate; the entire gaseous silane filling process can take at least 20 hours to complete. Additionally, during the compression filling process, the silane gas is continuously heated by the compressor, posing a risk of generating ethylsilane. Summary of the Invention

[0003] The purpose of this application is to provide a silane filling system to solve the problems of high filling pressure and low efficiency in silane gas filling in related technologies.

[0004] To solve the above-mentioned technical problems, this application adopts the following technical solution:

[0005] This application provides a silane filling system, comprising:

[0006] A supply unit for conveying liquid silane;

[0007] A filling pipe, which is connected to the supply unit, is adapted to receive liquid silane supplied by the supply unit;

[0008] A tubular container, wherein the tubular container is connected to the main filling pipe via a filling branch pipe;

[0009] A weighing unit is used to obtain the real-time weight of the liquid silane filled in the tube bundle container.

[0010] This solution uses liquid silane for filling tube bundle containers. During filling, there is no risk associated with the container heating up. The maximum weight of liquid silane can be calculated using the container's filling coefficient. As liquid silane is supplied to the container via the supply unit, the weight of the liquid silane is recorded in real-time using a weighing unit. Filling stops when the maximum weight is reached. The liquid silane in the container can slowly increase in temperature due to ambient conditions. In some cases, water spraying can be used to increase the heat exchange rate and accelerate pressurization. Once the container reaches ambient temperature, the pressure eventually stabilizes. This solution, using liquid silane for filling tube bundle containers, significantly shortens filling time, improves filling efficiency, and avoids the risk of generating silane gas due to high temperatures associated with gas compression filling.

[0011] Optionally, the supply unit includes:

[0012] A silane storage tank, said silane storage tank being adapted to store liquid silane;

[0013] A vertical tubular bag pump, wherein the suction end of the vertical tubular bag pump is connected to the silane storage tank, and the discharge end is connected to the filling main pipe through a delivery pipe.

[0014] Optionally, the delivery pipe is connected to the silane storage tank via a return pipe.

[0015] Optionally, the top of the vertical bag pump is connected to the silane storage tank via a vaporization pipe.

[0016] In this design, liquid silane is stored in a silane storage tank. One or more vertical bag pumps can be used. The suction end of the vertical bag pump is connected to the silane storage tank, and the pump draws liquid silane from the tank and pumps it to the main delivery pipe via a delivery pipeline. The vertical bag pump generates heat during operation, which partially vaporizes the liquid silane. In this design, the top of the vertical bag pump is connected to the silane storage tank via a vaporization pipe, thereby returning the partially vaporized silane to the storage tank for re-liquefaction. Furthermore, in this design, the delivery pipe is connected to the silane storage tank via a return pipe. A portion of the liquid silane can flow back to the storage tank via the return pipe to maintain the minimum operating flow rate of the vertical bag pump.

[0017] Optionally, the silane storage tank is connected to a vent pipe, and the vent pipe is equipped with a vent valve.

[0018] Vent pipes are installed for emergency venting in case of accidents.

[0019] Optionally, the silane storage tank is connected to a tail gas pipe, which is used to connect to a tail gas treatment device.

[0020] In this design, the tail gas pipe is connected to the silane storage tank, and a residual liquid recovery device can be connected to it for recovering residual liquid in the silane storage tank. In some cases, the tail gas pipe can also be connected to the vaporization pipe, serving as part of the vaporization pipe for silane gas recirculation.

[0021] Optionally, the main filling pipe is provided with a first valve, and the branch filling pipe is provided with a second valve.

[0022] Optionally, the filling main pipe is connected to a helium pipe, a vacuum pipe, and a vent pipe; wherein, the helium pipe is used to transport helium and is equipped with a helium valve; the vacuum pipe is used to connect to a vacuum pumping device and is equipped with a vacuum valve; and the vent pipe is equipped with a vent valve.

[0023] Optionally, an analysis tube is connected to the filling main pipe, and an analysis valve is provided on the analysis tube. The analysis tube is used to connect to a gas sample detection device.

[0024] This scheme has a first valve on the main filling pipe. A filling branch pipe is connected to the side opposite the first valve and the supply unit, and a second valve is installed on the filling branch pipe. Before filling with liquid silane, all pipes and tube bundle containers need to be purged, and after filling, all pipes need to be purged. This scheme uses a helium purging process to perform the above purging work. Specifically, a helium pipe, a vacuum pipe, a vent pipe, and an analysis pipe are connected to the side of the main filling pipe opposite the supply unit; the helium pipe is used to transport helium and has a helium valve; the vacuum pipe is used to connect to a vacuum pumping device and has a vacuum valve; the vent pipe has a vent valve; and the analysis pipe is used to connect to a gas sample detection device. Before filling with liquid silane, the first valve is closed and then opened. The purging is repeated several times through the helium pipe, the vent pipe, and the vacuum pumping. After the liquid silane filling is completed, the second valve and the first valve are closed, and the liquid silane is first released through the vent pipe. Specifically, it can be released into an external silane gas reaction device. Unremovable silane gas can be absorbed by connecting the vent pipe to the tail gas absorption device. After completion, the filling main pipe is evacuated. After evacuation, the second valve and the analysis valve are opened to introduce the gas from the wire harness container into the analysis tube and transmit it to the gas sample detection device for analysis. If the analysis is satisfactory, the replacement work can be performed again, and the wire harness container can be replaced.

[0025] Optionally, the first valve is a flow regulating valve, and the filling branch pipe is equipped with a cumulative flow meter.

[0026] In this design, a cumulative flow meter is installed on the filling branch pipe to obtain the cumulative flow rate of liquid silane filling the tube bundle container, further ensuring the accuracy of the silane filling amount. In addition, a flow regulating valve is installed on the filling main pipe to adjust the filling rate of the liquid silane, thereby controlling the filling time.

[0027] Compared with existing technologies, the beneficial effects achieved by this application are as follows: This application uses liquid silane for filling tubular containers. During the filling process, there is no need to worry about the risks associated with the heating of the tubular container. The maximum weight of liquid silane can be calculated using the filling coefficient of the tubular container. While the liquid silane is being supplied to the tubular container via the supply unit, the weight of the liquid silane being filled in the tubular container is measured in real time by a weighing unit. Filling stops when the maximum filling weight of the liquid silane is reached. The liquid silane in the tubular container can slowly increase in temperature due to ambient temperature. Once the temperature of the tubular container reaches ambient temperature, the pressure will stabilize. Filling tubular containers with liquid silane significantly shortens the filling time, improves filling efficiency, and avoids the risk of generating silane gas due to high temperatures caused by gas compression filling. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments or related technologies of this disclosure, the accompanying drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of Embodiment 1 provided in this application;

[0030] Figure 2 This is a structural schematic diagram of Embodiment 2 or 3 provided in this application.

[0031] Explanation of reference numerals in the attached drawings: 1-Supply unit; 2-Main filling pipe; 3-Tube bundle container; 4-Filling branch pipe; 11-Silane storage tank; 12-Vertical bag pump; 13-Transfer pipe; 14-Return pipe; 15-Vaporization pipe; 16-Vent pipe; 17-Tail gas pipe; 21-First valve; 22-Helium pipe; 23-Vacuum pipe; 24-Vent pipe; 25-Analysis pipe; 41-Second valve. Detailed Implementation

[0032] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure / application, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit this application or its application or use.

[0033] Example 1

[0034] This embodiment describes a silane filling system, referencing... Figure 1 The silane filling system in this embodiment includes a supply unit 1, a filling main pipe 2, and a tubular container 3. The supply unit 1 is used to transport liquid silane. The supply unit 1 is connected to the filling main pipe 2, and the supply unit 1 can deliver liquid silane to the filling main pipe 2. A filling branch pipe 4 is connected to the filling main pipe 2. There can be one or more filling branch pipes 4, each used to fill one tubular container 3 with liquid silane. The maximum weight of liquid silane filling can be calculated using the filling coefficient of the tubular container 3. In this embodiment, the weight of the liquid silane filling the tubular container 3 is obtained in real time using a weighing unit. The weighing unit can be an electronic scale or other weighing equipment. When liquid silane is transported to the tubular container 3 through the supply unit 1, the weight of the liquid silane filling the tubular container 3 is obtained in real time by the weighing unit. When the weight of the liquid silane reaches the maximum filling weight, the filling is completed.

[0035] This embodiment uses liquid silane to fill the tube bundle container 3. During the filling process, there is no risk associated with the temperature rise of the tube bundle container 3. After filling, the liquid silane in the tube bundle container 3 can slowly rise to ambient temperature. In some cases, water spraying can also be used to increase the heat exchange rate and accelerate pressurization. Once the temperature of the tube bundle container 3 reaches ambient temperature, the pressure eventually stabilizes. This embodiment, by using liquid silane to fill the tube bundle container 3, significantly shortens the filling time, improves filling efficiency, and avoids the risk of generating silane gas due to high temperatures caused by gas compression filling.

[0036] Example 2

[0037] Based on the same inventive concept as Embodiment 1, refer to Figure 1 and Figure 2In this embodiment, the supply unit 1 includes a silane storage tank 11 and a vertical bag pump 12. The silane storage tank 11 is suitable for storing and liquefying liquid silane. In some embodiments, the silane storage tank 11 is liquefied to 60% level. The suction end of the vertical bag pump 12 is connected to the silane storage tank 11, and the discharge end is connected to the filling main pipe 2 via a delivery pipe 13. There may be one or more vertical bag pumps 12. The vertical bag pump 12 is capable of drawing liquid silane from the silane storage tank 11 and pumping it to the delivery main pipe through the delivery pipe 13.

[0038] The vertical bag pump 12 generates heat during operation, which partially vaporizes the liquid silane. In this embodiment, the top of the vertical bag pump 12 is connected to the silane storage tank 11 via a vaporization pipe 15, thereby transporting the partially vaporized silane back to the silane storage tank 11 for re-liquefaction. Furthermore, in this embodiment, the delivery pipe 13 is connected to the silane storage tank 11 via a return pipe 14. A portion of the liquid silane can flow back to the silane storage tank 11 through the return pipe 14 to maintain the minimum operating flow rate of the vertical bag pump 12.

[0039] In some embodiments, the silane storage tank 11 is connected to a tail gas pipe 17, which is used to connect to a tail gas treatment device for recovering residual liquid in the silane storage tank 11. In some cases, the tail gas pipe 17 may also be connected to a vaporization pipe 15, serving as part of the vaporization pipe 15 for silane gas recirculation.

[0040] In some embodiments, the silane storage tank 11 is connected to a vent pipe 16, and the vent pipe 16 is equipped with a vent valve. The vent pipe 16 is provided for emergency venting in case of an accident.

[0041] In some embodiments, the silane storage tank 11 is connected to a detection device. Before filling, the silane in the silane storage tank 11 is analyzed and tested according to GB15909 standard using the detection device. After the analysis is qualified, the silane storage tank 11 is sealed, and the batch number is recorded.

[0042] Example 3

[0043] Based on the same inventive concept as Embodiment 1 or 2, see reference. Figure 1 and Figure 2In this embodiment, the main filling pipe 2 is equipped with a first valve 21. Before filling with liquid silane, all pipes and the tube bundle container 3 need to be purged, and after filling, all pipes need to be purged. In this embodiment, the above-mentioned purging work is carried out by a helium purging process. Specifically, the filling branch pipe 4 is connected to the other side of the first valve 21 opposite to the supply unit 1. The filling branch pipe 4 is equipped with a second valve 41. The other side of the main filling pipe 2 opposite to the supply unit 1 is connected to a helium pipe 22, a vacuum pipe 23, a vent pipe 24, and an analysis pipe 25. Among them, the helium pipe includes a low-pressure helium pipe and a high-pressure helium pipe. The helium pipe 22 is used to transport helium and is equipped with a helium valve; the vacuum pipe 23 is used to connect to a vacuum pumping device and is equipped with a vacuum valve; the vent pipe 24 is equipped with a vent valve; the analysis pipe 25 is used to connect to a gas sample detection device.

[0044] Before filling with liquid silane, close and then open the first valve 21. Repeat the replacement process several times through the helium pipe 22, the vent pipe 24, and the vacuum pump. After filling with liquid silane, close the second valve 41 and the first valve 21, and firstly release the liquid silane through the vent pipe 24. Specifically, it can be released into an external silane gas reaction device. Silane gas that cannot be released can be absorbed by connecting the vent pipe 24 to a tail gas absorption device. After completion, evacuate the filling main pipe 2. After evacuation, open the second valve 41 and the analysis valve, introduce the gas in the tube bundle container 3 into the analysis pipe 25, and transmit it to the gas sample detection device for detection and analysis. After the detection and analysis are qualified, the replacement work can be performed again, and the wire harness container can be replaced.

[0045] In some embodiments, the first valve 21 is a flow regulating valve, and a cumulative flow meter is provided on the filling branch pipe 4. The cumulative flow meter on the filling branch pipe 4 is used to obtain the cumulative flow rate of the liquid silane filling the tube bundle container 3, further ensuring the accuracy of the silane filling amount in the tube bundle container 3. In addition, a flow regulating valve is provided on the filling main pipe 2, which can adjust the filling rate of the liquid silane to facilitate control of the filling time.

[0046] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of this disclosure / application, and these improvements and modifications should also be considered within the protection scope of this disclosure / application.

Claims

1. A silane filling system, characterized in that, include: Supply unit (1), the supply unit (1) being used to deliver liquid silane; A filling pipe (2) is connected to the supply unit (1) to receive liquid silane delivered by the supply unit (1); Tube bundle container (3), the tube bundle container (3) is connected to the filling main pipe (2) through filling branch pipe (4); A weighing unit is used to obtain the real-time weight of the liquid silane filled in the tube bundle container (3).

2. The silane filling system according to claim 1, characterized in that, The supply unit (1) includes: Silane storage tank (11), said silane storage tank (11) is suitable for storing liquid silane; A vertical bag pump (12) is provided, with its suction end connected to the silane storage tank (11) and its discharge end connected to the filling main pipe (2) via a delivery pipe (13).

3. The silane filling system according to claim 2, characterized in that, The delivery pipe (13) is connected to the silane storage tank (11) via the return pipe (14).

4. The silane filling system according to claim 3, characterized in that, The top of the vertical bag pump (12) is connected to the silane storage tank (11) via a gasification pipe (15).

5. The silane filling system according to claim 2, characterized in that, The silane storage tank (11) is connected to a vent pipe (16), and a vent valve is provided on the vent pipe (16).

6. The silane filling system according to claim 2, characterized in that, The silane storage tank (11) is connected to a tail gas pipe (17), which is used to connect to a tail gas treatment device.

7. The silane filling system according to claim 1, characterized in that, The main filling pipe (2) is provided with a first valve (21), and the branch filling pipe (4) is provided with a second valve (41).

8. The silane filling system according to claim 7, characterized in that, The filling main pipe (2) is connected to a helium pipe (22), a vacuum pipe (23), and a vent pipe (24); wherein, the helium pipe (22) is used to transport helium and is equipped with a helium valve; the vacuum pipe (23) is used to connect to a vacuum pumping device and is equipped with a vacuum valve; and the vent pipe (24) is equipped with a vent valve.

9. The silane filling system according to claim 8, characterized in that, The filling main pipe (2) is connected to an analysis tube (25), which is equipped with an analysis valve. The analysis tube (25) is used to connect to a gas sample detection device.

10. The silane filling system according to claim 7, characterized in that, The first valve (21) is a flow regulating valve, and the filling branch pipe (4) is equipped with a cumulative flow meter.

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