A pure water heater

Abstract

The utility model discloses a kind of pure water heaters, it relates to pure water heater field, it includes the installation space formed in cabinet body, installation space is equipped with several groups of parallelly arranged heating components, water inlet pipeline is located in installation space and the end is equipped with shunt component, for pure water is evenly shunted to different heating components, water outlet pipeline is located in installation space, and one end is connected with the shunt component between several groups of heating components, to make pure water in heating component converging to water outlet pipeline inside. The present application achieves the technical effects of reducing the internal pressure of the heater, reducing the risk of tank rupture, shortening the path and heating time of pure water in the heater, improving the diversity of use scenarios, and meeting the needs of larger flow supply.

Description

Technical Field

[0001] This utility model relates to the field of pure water heater technology, and more specifically, to a pure water heater. Background Technology

[0002] Pure water heaters are essential equipment in fields such as semiconductor manufacturing. This system is specifically designed for handling sulfuric acid (H₂SO₄), phosphoric acid (H₃PO₄), hydrochloric acid (HCl), pure water, and other quartz-compatible chemicals, promoting the widespread acceptance of high-purity materials in extreme operations while optimizing performance and reliability. The piping assembly uses high-purity quartz, complemented by high-purity PFA tubing and connectors, and the heating element employs a halogen / carbon lamp.

[0003] Currently, heating in various situations presents significant limitations. Most commercially available pure water heaters are installed in series, with multiple heaters connected sequentially via PFA pipes. This pipe layout forces pure water to pass through each heater sequentially for temperature control, increasing the time the water spends in the heaters and raising the internal pressure, thus increasing the risk of tank rupture.

[0004] In summary, how to reduce the risk of heater tank rupture while maintaining the same pure water flow rate and heating efficiency is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a pure water heater that diverts the pure water entering the heater without affecting the heating efficiency, thereby reducing the water intake of each heater while meeting the same inlet flow rate, thus reducing the heater pressure and the risk of heater tank rupture.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A pure water heater, comprising:

[0008] The cabinet has an installation space inside it;

[0009] A heating assembly, wherein several groups of heating assemblies are provided and disposed within the installation space, and the several groups of heating assemblies are arranged in parallel;

[0010] A water inlet pipe is provided within the installation space, and a diversion component is provided at the end of the water inlet pipe. The diversion component is used to evenly distribute the pure water in the water inlet pipe to different heating components.

[0011] A water outlet pipe is provided within the installation space. One end of the water outlet pipe is connected to a manifold assembly between several sets of heating components, so that pure water from the several sets of heating components flows into the water outlet pipe.

[0012] Preferably, the heating assembly is provided in two sets, and the diversion assembly includes a first tee connector, the three ports of the first tee connector being connected to the water inlet pipe and the water inlet of the two sets of heating assemblies respectively;

[0013] The manifold assembly includes a second tee connector, the three ports of which are respectively connected to the outlets of the two sets of heating components and the outlet pipe.

[0014] Preferably, an elbow is provided between the end of the water inlet pipe and the first tee joint, so that the first tee joint is arranged horizontally.

[0015] Preferably, each heating assembly includes a plurality of heaters arranged in series, with the outlet of one heater connected to the inlet of the next heater between adjacent heaters.

[0016] Preferably, the heaters within each heating assembly are arranged vertically.

[0017] Preferably, the water inlet pipe is sequentially equipped with a pneumatic diaphragm valve and a flow regulating valve.

[0018] Preferably, the water inlet pipe is equipped with a first pressure sensor, which is located between the flow regulating valve and the flow diversion assembly;

[0019] The water outlet pipe is equipped with a second pressure sensor.

[0020] Preferably, the water inlet pipe is provided with a first temperature measuring component, which is located between the diversion component and the first pressure sensor;

[0021] The water outlet pipe is equipped with a second temperature measuring component at the junction assembly.

[0022] Preferably, it also includes a drainage pipe, which is connected to both the inlet pipe and the outlet pipe;

[0023] A third tee connector is provided at the connection between the drainage pipe and the water inlet pipe, and the third tee connector is located between the first pressure sensor and the diversion component;

[0024] The connection between the drainage pipe and the outlet pipe is provided with a fourth T-joint, and the fourth T-joint is located downstream of the second temperature measuring component.

[0025] Preferably, both the inlet pipe and the outlet pipe are PFA pipes.

[0026] The pure water heater provided by this utility model reduces the amount of pure water passing through a single heating element under the same inlet water volume, shortens the path and heating time of pure water in the heater, effectively reduces the pressure of pure water on the heater, reduces the risk of tank rupture, and can also meet a larger flow supply under extreme conditions. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the overall structure of the pure water heater in this embodiment;

[0029] Figure 2 This is a first-view schematic diagram of the internal structure of the cabinet in this embodiment;

[0030] Figure 3 This is a second-view schematic diagram of the internal structure of the cabinet in this embodiment;

[0031] Figure 4 This is a third-view schematic diagram of the internal structure of the cabinet in this embodiment;

[0032] Figure 5 This is a simplified schematic diagram of the pure water heater system in this embodiment.

[0033] Figures 1-5 In the accompanying drawings, the reference numerals include:

[0034] 1. Cabinet; 2. Heating assembly; 3. Water inlet pipe; 4. Water outlet pipe; 5. First tee connector; 6. Second tee connector; 7. Elbow; 8. Pneumatic diaphragm valve; 9. Flow regulating valve; 10. First pressure sensor; 11. Second pressure sensor; 12. Drainage pipe; 13. Third tee connector; 14. Fourth tee connector; 15. First manual valve; 16. Second manual valve. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0036] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar words used in this utility model do not indicate any order, quantity, or importance. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly. An embodiment of this application discloses a pure water heater.

[0037] The core of this invention is to provide a pure water heater.

[0038] Please refer to Figure 1 .

[0039] The pure water heater provided by this utility model includes a cabinet 1, heating components 2, an inlet pipe 3, and an outlet pipe 4. The cabinet 1 has an installation space. Several sets of heating components 2 are arranged in parallel within the installation space. The inlet pipe 3 is located within the installation space, and a diversion component is provided at the end of the inlet pipe 3. The diversion component is used to evenly distribute the pure water in the inlet pipe 3 to different heating components 2. The outlet pipe 4 is located within the installation space, and a confluence component is connected between one end of the outlet pipe 4 and several sets of heating components 2 so that the pure water in several sets of heating components 2 flows into the outlet pipe 4.

[0040] Specifically, cabinet 1 provides installation space for heating components 2, inlet pipe 3, and outlet pipe 4. Cabinet 1 can be made of metal, such as stainless steel, which has good strength and corrosion resistance, or high-strength plastic to reduce overall weight. Cabinet 1 is typically rectangular in shape to facilitate the placement and installation of internal components. Similarly, to facilitate observation of the installation space, transparent glass is provided on all sides of cabinet 1 for easy viewing. A diversion component at the end of the inlet pipe 3 evenly distributes pure water to several groups of heating components 2 arranged in parallel. The heating components 2 heat the pure water, and then a manifold component collects the pure water from the heating components 2 and flows out through the outlet pipe 4. This layout reduces the amount of pure water passing through a single heating component with the same inlet volume, effectively reducing the pressure of pure water on the heater's interior, reducing the risk of tank rupture, and shortening the path and heating time of pure water within the heater.

[0041] It should be noted that the inlet of the water inlet pipe 3 and the outlet of the water outlet pipe 4 both extend out of the outside of the cabinet 1 and are equipped with connectors to facilitate water inlet and outlet operations.

[0042] In the aforementioned pure water heater, pure water flows in from the inlet pipe 3 and is evenly distributed to the parallel heating elements 2 by a flow-dividing component. Each heating element 2 heats the pure water. The heated pure water then flows through a manifold to the outlet pipe 4 and exits. This parallel arrangement of multiple heating elements 2 reduces the amount of pure water passing through each individual heating element 2 with the same inlet volume, effectively reducing the pressure of the pure water inside the heating element 2, decreasing the risk of tank rupture, and shortening the path and heating time of the pure water within the heating element 2, thus improving heating efficiency. This represents a significant improvement and enhancement compared to the traditional series arrangement.

[0043] The pure water heater provided by this utility model will be described in more detail below with reference to the accompanying drawings and specific embodiments.

[0044] In one specific implementation, reference is made to... Figure 1 and Figure 2 The heating components 2 are provided in two sets. The diversion component includes a first three-way connector 5, the three ports of which are respectively connected to the water inlet pipe 3 and the water inlet of the two sets of heating components 2. The confluence component includes a second three-way connector 6, the three ports of which are respectively connected to the water outlet of the two sets of heating components 2 and the water outlet pipe 4.

[0045] Specifically, this application employs two sets of heating components 2 connected in parallel. Therefore, the corresponding diversion component uses a first tee connector 5 to divert pure water from the inlet pipe 3. The first tee connector 5 can be a P-UT-W6 tee connector, which has a T-shaped structure. One end of the tee connector is connected to the inlet pipe 3 via a 3 / 4-inch PFA pipe, and its two ends on the same axis are connected to the two heating components 2 via 3 / 4-inch PFA pipes, ensuring that the flow rate of pure water through the first and second heating components is the same after diversion. Correspondingly, a second tee connector 6 is provided at the outlet end of the heating component 2 as a confluence component. The second tee connector 6 can also be a P-UT-W6 tee connector, with its two ends on the same axis connected to the two heating components 2 via 3 / 4-inch PFA pipes, and its extended end connected to the outlet pipe 4 via a 3 / 4-inch PFA pipe, thus achieving diversion before heating and confluence after heating.

[0046] For further details, please refer to... Figure 2 An elbow 7 is provided between the end of the water inlet pipe 3 and the first tee joint 5 so that the first tee joint 5 is arranged horizontally.

[0047] Specifically, since the cabinet 1 is placed vertically, in order to improve the utilization of the installation space and ensure that the pure water flow to the two heating components 2 is consistent, an elbow 7 is set at the end of the water inlet pipe 3 and at the front end of the first tee connector 5 so that the first tee connector 5 is located above the water inlet pipe 3, thereby saving space reasonably. The elbow 7 can be a P-EA-T19BS elbow.

[0048] Based on any of the above embodiments, refer to Figure 1 and Figure 2 Each heating component 2 includes several heaters arranged in series, with the outlet of one heater connected to the inlet of the next heater between adjacent heaters.

[0049] Specifically, each heating component 2 is formed by several heaters connected in series. Each heater is equipped with the same electric heating element and temperature sensor, and each is connected to the controller (which is the overall control unit of this device. This control unit is the same as the conventional control unit and is used to control the heaters, valves, sensors, etc. in the equipment, which will not be described in detail here).

[0050] Furthermore, several heaters within each heating component 2 are arranged vertically.

[0051] Specifically, in this application, each heating assembly 2 is provided with three heaters. The three heaters are arranged vertically in the installation space. Each heater is provided with a bracket between itself and the cabinet 1 to support the heater and fix it in the cabinet 1. Adjacent heaters are connected by PFA pipes.

[0052] Based on any of the above embodiments, refer to Figure 2 The water inlet pipe 3 is equipped with a pneumatic diaphragm valve 8 and a flow regulating valve 9 in sequence.

[0053] Specifically, the water inlet pipe 3 is sequentially equipped with a pneumatic diaphragm valve 8 and a flow regulating valve 9. The pneumatic diaphragm valve 8 controls the on / off state of the water inlet, and the flow regulating valve 9 regulates the flow rate of the water inlet. The pneumatic diaphragm valve 8 can use a rubber diaphragm, which has good sealing performance, while the flow regulating valve 9 can be an electric flow regulating valve, which facilitates precise flow control.

[0054] In a specific embodiment provided in this application, the inlet pipe 3 is provided with a first pressure sensor 10, which is located between the flow regulating valve 9 and the diversion assembly; the outlet pipe 4 is provided with a second pressure sensor 11.

[0055] Specifically, the inlet pipe is equipped with a first pressure sensor 10, located between the flow regulating valve 9 and the flow divider assembly, for real-time monitoring of the pressure within the inlet pipe. The outlet pipe 4 is equipped with a second pressure sensor 11, for real-time monitoring of the pressure within the outlet pipe. Both the first pressure sensor 10 and the second pressure sensor 11 are conventional pressure sensors.

[0056] Based on any of the above embodiments, refer to Figures 2 to 4 The inlet pipe 3 is equipped with a first temperature measuring component, which is located between the diversion component and the first pressure sensor 10; the outlet pipe 4 is equipped with a second temperature measuring component at the confluence component.

[0057] Specifically, a first temperature sensing component is installed downstream of the first pressure sensor 10 in the inlet pipe 3. This component is installed via a P-RUTW6-W6-F4TA reducing tee to measure the temperature of the pure water in the inlet pipe 3, thus facilitating the control of the heating amplitude of the subsequent heater. In the outlet pipe 4, a second temperature sensing component is installed downstream of the manifold assembly. This component is also installed via a P-RUTW6-W6-F4TA reducing tee to measure the temperature of the pure water in the outlet pipe 4, determining whether the heated pure water temperature meets the requirements.

[0058] Optionally, two second temperature measuring components can be provided, respectively located between the outlet of the end heater in each heating component 2 and the manifold, so as to measure the temperature of the pure water heated by the two heating components 2 respectively.

[0059] Based on any of the above embodiments, refer to Figures 2 to 4The pure water heater also includes a drain pipe 12, which is connected to the inlet pipe 3 and the outlet pipe 4 respectively; a third tee connector 13 is provided at the connection between the drain pipe 12 and the inlet pipe 3, and the third tee connector 13 is located between the first pressure sensor 10 and the diversion component; a fourth tee connector 14 is provided at the connection between the drain pipe 12 and the outlet pipe 4, and the fourth tee connector 14 is located downstream of the second pressure sensor 11.

[0060] Specifically, in special circumstances, the pure water may be discharged before or after heating instead of flowing out from the outlet pipe 4. Therefore, this application also includes a drain pipe 12.

[0061] Before the pure water heating, a third tee connector 13 can be installed downstream of the first temperature measuring component. The two coaxial ports of the third tee connector 13 are connected to the inlet pipe 3 and the elbow 7, respectively, while the other port is connected to the drain pipe 12. For details, please refer to [reference needed]. Figure 2 or Figure 5 A simplified illustration is provided, and a first manual valve 15 is installed on the drain pipe 12 to open or close the drain pipe 12.

[0062] After the pure water is heated, it is located downstream of the second temperature measuring component and also on the outlet pipe 4, such as... Figure 3 As shown, the two coaxial ports of the fourth tee connector 14 are connected to the water outlet pipe 4, and the protruding port is connected to the drainage pipe 12 through a pipe to introduce it into the drainage pipe 12. A second manual valve 16 is provided on the connecting pipe to open or close the drainage pipe 12. The connection point between the connecting pipe and the drainage pipe 12 can be located upstream or downstream of the first manual valve 15.

[0063] Therefore, there are three scenarios after pure water enters the pipeline. Pure water flows in from the inlet pipe 3, passes through the pneumatic diaphragm valve 8 and the flow regulating valve 9. Scenario 1: Open the first manual valve 15, and pure water flows directly out from the 1 / 2-inch PFA drain pipe 12. Scenario 2: Close the first manual valve 15, and pure water flows through the first tee connector 5, through the 3 / 4-inch PFA pipe into the two sets of heating components 2. It is heated by three heaters in each set, and the controller detects and controls the temperature to ensure that the pure water reaches the set temperature. Then it flows through the second tee connector 6 and is discharged from the outlet pipe 4. Scenario 3: After the pure water is heated and merged by the two sets of heating components 2, open the second manual valve 16, and pure water flows directly out from the 1 / 2-inch PFA drain pipe 12.

[0064] It should be noted that both the inlet pipe 3 and the outlet pipe 4 are PFA pipes. The inlet on the right end of the inlet pipe 3 is a 1-inch inlet, while the outlet pipe 12 is a 1 / 2-inch PFA pipe.

[0065] The implementation principle of a pure water heater according to an embodiment of this application is as follows: Pure water flows in from the inlet pipe 3, first passing through a pneumatic diaphragm valve 8 and a flow regulating valve 9. The pneumatic diaphragm valve 8 controls the flow of water, and the flow regulating valve 9 adjusts the flow rate. A first pressure sensor 10 monitors the inlet water pressure in real time, and a first temperature measuring component measures the inlet water temperature. A first tee connector 5 is horizontally arranged via an elbow 7, evenly distributing the pure water to two sets of parallel heating components 2. Several heaters in each heating component 2 are connected in series to heat the pure water. The heated pure water flows through a second tee connector 6 to the outlet pipe 4. A second pressure sensor 11 monitors the outlet water pressure, and a second temperature measuring component measures the outlet water temperature. Finally, the water flows out from the outlet pipe 4. When drainage is required, the first manual valve 15 or the second manual valve 16 on the drain pipe 12 is opened, and the pure water is discharged through the drain pipe 12. This parallel arrangement of multiple heating components reduces the amount of pure water passing through a single heater under the same inlet water volume, effectively alleviating the pressure of pure water on the heater's interior, reducing the risk of tank rupture, and shortening the path and heating time of pure water within the heater, thus improving heating efficiency. It represents a significant improvement and enhancement compared to the traditional series arrangement.

[0066] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0067] The present invention provides a detailed description of a pure water heater. Specific examples have been used to illustrate the principle and implementation of the present invention. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core idea of ​​the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the present invention.

Claims

1. A pure water heater, characterized in that, include: Cabinet (1), wherein an installation space is formed inside the cabinet (1); Heating components (2), wherein several sets of heating components (2) are provided and located in the installation space, and the several sets of heating components (2) are arranged in parallel; A water inlet pipe (3) is provided in the installation space. A diversion component is provided at the end of the water inlet pipe (3). The diversion component is used to evenly divert the pure water in the water inlet pipe (3) to different heating components (2). The water outlet pipe (4) is located in the installation space. One end of the water outlet pipe (4) is connected to a manifold assembly between several sets of heating components (2) so that pure water in several sets of heating components (2) flows into the water outlet pipe (4).

2. A pure water heater according to claim 1, characterized in that, The heating assembly (2) is provided in two sets. The diversion assembly includes a first three-way connector (5). The three ports of the first three-way connector (5) are respectively connected to the water inlet pipe (3) and the water inlets of the two sets of heating assemblies (2). The manifold assembly includes a second tee connector (6), the three ports of which are respectively connected to the outlets of the two sets of heating components (2) and the outlet pipe (4).

3. A pure water heater according to claim 2, characterized in that, An elbow (7) is provided between the end of the water inlet pipe (3) and the first tee joint (5) so that the first tee joint (5) is arranged horizontally.

4. A pure water heater according to claim 2, characterized in that, Each heating component (2) includes several heaters arranged in series, with the outlet of one heater connected to the inlet of the next heater between adjacent heaters.

5. A pure water heater according to claim 4, characterized in that, The heaters within each heating assembly (2) are arranged vertically.

6. A pure water heater according to claim 1, characterized in that, The water inlet pipe (3) is sequentially equipped with a pneumatic diaphragm valve (8) and a flow regulating valve (9).

7. A pure water heater according to claim 6, characterized in that, The water inlet pipe (3) is equipped with a first pressure sensor (10), which is located between the flow regulating valve (9) and the flow splitting assembly. The water outlet pipe (4) is equipped with a second pressure sensor (11).

8. A pure water heater according to claim 7, characterized in that, The water inlet pipe (3) is equipped with a first temperature measuring component, which is located between the diversion component and the first pressure sensor (10). The water outlet pipe (4) is equipped with a second temperature measuring component at the junction assembly.

9. A pure water heater according to claim 8, characterized in that, It also includes a drainage pipe (12), which is connected to the water inlet pipe (3) and the water outlet pipe (4) respectively; A third tee connector (13) is provided at the connection between the drainage pipe (12) and the water inlet pipe (3), and the third tee connector (13) is located between the first pressure sensor (10) and the diversion component; The connection between the drainage pipe (12) and the water outlet pipe (4) is provided with a fourth tee connector (14), and the fourth tee connector (14) is located downstream of the second temperature measuring component.

10. A pure water heater according to any one of claims 1-9, characterized in that, Both the inlet pipe (3) and the outlet pipe (4) are PFA pipes.

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