Multi-path nitrogen supply oxygen-free oven

Abstract

The utility model discloses a kind of multi-path nitrogen supply's oxygen-free oven, including oven cabinet and heating component, oven cabinet is provided with the large-flow nitrogen passage and small-flow nitrogen passage being communicated with oven cabinet chamber, the nitrogen supply flow of large-flow nitrogen passage is first flow, the nitrogen supply flow of small-flow nitrogen passage is second flow, first flow is greater than second flow, first valve is provided on large-flow nitrogen passage, second valve is provided on small-flow nitrogen passage;Heating component, the chamber of oven cabinet is toasted.Compared with prior art, the oxygen-free oven of the utility model has the nitrogen passage of different nitrogen supply amount, can be under the premise of not affecting air intake stability, realize multiple flow air intake.

Description

Technical Field

[0001] This utility model relates to semiconductor equipment, and more particularly to an oxygen-free oven. Background Technology

[0002] In the precision manufacturing chain of the semiconductor industry, the purity of materials and the cleanliness of the process environment directly determine chip performance and yield. Semiconductor materials are particularly sensitive to the presence and content of oxygen, and oxygen-free ovens, as core equipment for achieving inert atmosphere heating treatment, have been applied in many key stages of chip manufacturing.

[0003] In an oxygen-free oven, nitrogen is supplied through a gas pipeline to maintain a low oxygen content within the chamber. However, while the flow rate of the gas pipeline in existing oxygen-free ovens is adjustable, to ensure stable gas intake and chamber pressure, the flow control valve is not adjusted further after initial commissioning. Excessive nitrogen flow during oven operation leads to significant N2 waste, so a low-flow-rate nitrogen supply is typically used, resulting in longer deoxygenation times and slower cooling.

[0004] Therefore, there is an urgent need for an oxygen-free oven with multi-channel nitrogen supply that can solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a multi-channel nitrogen supply oxygen-free oven with multiple nitrogen supply channels having different nitrogen supply flow rates, which can achieve multiple flow rates of air intake without affecting the stability of air intake.

[0006] To achieve the above objectives, this utility model provides a multi-channel nitrogen-supply oxygen-free oven, including an oven body and a heating assembly. The oven body is provided with a high-flow-rate nitrogen passage and a low-flow-rate nitrogen passage communicating with the cavity of the oven body. The nitrogen supply flow rate of the high-flow-rate nitrogen passage is a first flow rate, and the nitrogen supply flow rate of the low-flow-rate nitrogen passage is a second flow rate. The first flow rate is greater than the second flow rate. A first valve is provided on the high-flow-rate nitrogen passage to control the on / off of the nitrogen supply, and a second valve is provided on the low-flow-rate nitrogen passage to control the on / off of the nitrogen supply. The heating assembly is disposed in the oven body to bake the cavity of the oven body.

[0007] Preferably, the first flow rate is 500 L / min and the second flow rate is 150 L / min.

[0008] Preferably, the multi-channel nitrogen-supply oxygen-free oven further includes a controller and an oxygen analyzer. The oxygen analyzer is used to detect the oxygen content in the oven chamber. The controller is connected to the first valve, the second valve, and the oxygen analyzer to obtain the oxygen content detected by the oxygen analyzer, and controls the operation of the first valve and the second valve based on the oxygen content.

[0009] Preferably, the diameter of the high-flow-rate nitrogen passage is larger than the diameter of the low-flow-rate nitrogen passage. Specifically, the diameter of the high-flow-rate nitrogen passage is 20 mm, and the diameter of the low-flow-rate nitrogen passage is 10 mm.

[0010] Preferably, the first valve and the second valve are electric valves, pneumatic valves, solenoid valves, or manual valves.

[0011] Preferably, the multi-channel nitrogen-supplying oxygen-free oven further includes a high-precision large-range flow controller, which is installed on the large-flow nitrogen passage and supplies nitrogen to the oven chamber at the first flow rate when the large-flow nitrogen passage is turned on.

[0012] Preferably, the multi-channel nitrogen-supplying oxygen-free oven further includes a high-precision medium-range flow controller, which is installed on the low-flow nitrogen passage and supplies nitrogen to the oven chamber at the second flow rate when the low-flow nitrogen passage is activated.

[0013] Preferably, the multi-channel nitrogen-supply oxygen-free oven further includes an exhaust passage connected to the oven body, and a pressure valve is installed on the exhaust passage to adjust the air pressure in the oven body chamber by adjusting the opening of the pressure valve, so that the pressure in the oven body chamber is controllable.

[0014] Specifically, the multi-channel nitrogen-supply oxygen-free oven also includes a pressure gauge, which is used to detect the air pressure value in the chamber of the oven body, and can adjust the opening of the pressure valve under the guidance of the pressure value.

[0015] More preferably, the pressure valve is connected to the output of the pressure gauge to receive the air pressure value detected by the pressure gauge and control the opening of the air outlet passage so that the air pressure inside the oven cavity remains constant.

[0016] Compared with existing technologies, this invention features a high-flow-rate nitrogen passage and a low-flow-rate nitrogen passage on the oven body. Without changing the nitrogen opening on the passage, different flow rates of nitrogen can be supplied to the oven cavity. This allows for multiple nitrogen flow rates without affecting intake stability. For example, when rapid deoxygenation and cooling are needed, the first valve can be opened to use the high-flow-rate nitrogen passage to supply nitrogen to the oven. When rapid deoxygenation and cooling are not needed, the first valve can be closed and the second valve opened to switch to the low-flow-rate nitrogen passage, eliminating concerns about nitrogen waste. Attached Figure Description

[0017] Figure 1 This is a structural diagram of the multi-channel nitrogen supply oxygen-free oven of this utility model.

[0018] Figure 2 This is the circuit diagram of the multi-channel nitrogen supply oxygen-free oven of this utility model.

[0019] Figure label: Oxygen-free oven 100, oven body 11; high-flow nitrogen passage 21, first valve 211, high-precision large-range flow controller 212; low-flow nitrogen passage 22, second valve 221, high-precision medium-range flow controller 222; oxygen analyzer 30; gas outlet passage 40, pressure gauge 41, pressure valve 42; controller 51, heating component 52. Detailed Implementation

[0020] To explain in detail the technical content, structural features, objectives and effects of this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0021] refer to Figure 1 and Figure 2 This utility model discloses a multi-channel nitrogen-supply oxygen-free oven 100, including an oven body 11, a heating component 52, and a controller 51. The oven body 11 is provided with a high-flow nitrogen passage 21 and a low-flow nitrogen passage 22 communicating with the cavity of the oven body 11. The nitrogen supply flow rate of the high-flow nitrogen passage 21 is a first flow rate, and the nitrogen supply flow rate of the low-flow nitrogen passage 22 is a second flow rate. The first flow rate is greater than the second flow rate. The high-flow nitrogen passage 21 is provided with a first valve 211 to control the on / off of nitrogen supply, and the low-flow nitrogen passage 22 is provided with a second valve 221 to control the on / off of nitrogen supply. The heating component 52 is disposed in the oven body 11 to bake the cavity of the oven body 11. The controller 51 is connected to the heating component 52 and controls the operation of the heating component 52.

[0022] The first valve 211 and the second valve 221 are control valves. The controller 51 is connected to the first valve 211 and the second valve 221 and controls the operation of the first valve 211 and the second valve 221. The first valve 211 and the second valve 221 can be electric valves, pneumatic valves, solenoid valves, etc. Of course, the first valve 211 can also be a manual valve, and the second valve 221 can also be a manual valve.

[0023] The first flow rate is 500 L / min, and the second flow rate is 150 L / min. The diameter of the high-flow-rate nitrogen passage 21 is larger than the diameter of the low-flow-rate nitrogen passage 22. The diameter of the high-flow-rate nitrogen passage 21 is 20 mm, and the diameter of the low-flow-rate nitrogen passage 22 is 10 mm. Of course, the first flow rate is not limited to 500 L / min; its specific value can be selected between 300 and 3000 standard liters / min. The second flow rate is also not limited to 150 L / min; its specific value can be selected between 30 and 300 standard liters / min.

[0024] refer to Figure 2 The multi-channel nitrogen-supplying oxygen-free oven 100 also includes a high-precision large-range flow controller 212, which is installed on the large-flow nitrogen passage 21 and supplies nitrogen to the chamber of the oven body 11 at the first flow rate when the large-flow nitrogen passage 21 is turned on.

[0025] refer to Figure 2 The multi-channel nitrogen-supplying oxygen-free oven 100 also includes a high-precision medium-range flow controller 222, which is installed on the low-flow nitrogen passage 22 and supplies nitrogen to the chamber of the oven body 11 at the second flow rate when the low-flow nitrogen passage 22 is turned on.

[0026] The high-precision large-range flow controller 212 and the high-precision medium-range flow controller 222 can be selected as thermal gas mass flow controllers (MFC). The high-precision large-range flow controller 212 has a range of 300-3000 standard liters / minute (SLM), and the high-precision medium-range flow controller 222 has a range of 30-300 standard liters / minute.

[0027] refer to Figure 1 and Figure 2 The multi-channel nitrogen-supply oxygen-free oven 100 also includes an oxygen analyzer 30, which is used to detect the oxygen content in the oven body 11; the controller 51 is connected to the oxygen analyzer 30 to obtain the oxygen content detected by the oxygen analyzer 30, and controls the first valve 211 and the second valve 221 to operate according to the oxygen content.

[0028] The controller 51 includes a comparison circuit that compares the oxygen content with a preset value. When the oxygen content is less than the preset value, the comparison circuit outputs a control signal to the control terminals of the first valve 211 and the second valve 221 to control the first valve 211 to close and the second valve 221 to open.

[0029] refer to Figure 1 and Figure 2 The multi-channel nitrogen-supplying oxygen-free oven 100 also includes a pressure gauge 41 and an exhaust passage 40 communicating with the chamber of the oven body 11. A pressure valve 42 is installed on the exhaust passage 40. The pressure gauge 41 detects the air pressure value in the chamber of the oven body 11. The pressure valve 42 is connected to the output end of the pressure gauge 41 to receive the air pressure value detected by the pressure gauge. The opening degree of the pressure valve 42 is controlled according to the air pressure value, thereby adjusting the opening degree of the exhaust passage 40 so that the air pressure in the chamber of the oven body 11 is maintained at a preset air pressure, which is 4 kPa.

[0030] The gas outlet passage 40 is located on one side of the oven body 11, while the high-flow nitrogen passage 21 and the low-flow nitrogen passage 22 are located on the other opposite side of the oven body 11.

[0031] refer to Figure 1 and Figure 2 The working process of the multi-channel nitrogen supply oxygen-free oven 100 of this utility model is described as follows: At startup, the oxygen content inside the oven chamber 10 of the oxygen-free oven 100 is high. The controller 51 opens the first valve 211 to open the high-flow nitrogen passage 21. The high-precision, large-range flow controller 212 controls the high-flow nitrogen passage 21 to stably deliver nitrogen to the oven chamber 10 at a first flow rate (500 L / min). Oxygen in the oven chamber 10 is rapidly discharged through the exhaust passage 40. During this process, the controller 51 controls the opening of the pressure valve 42 based on the pressure detected by the pressure gauge 41, so that the air pressure inside the oven chamber 11 is maintained at a preset pressure. The oxygen analyzer 30 monitors the oxygen content in the oven chamber 11 in real time and sends this oxygen content to the controller 51. In one embodiment, the oxygen content in the oven chamber 10 decreases from 209,500 ppm to below 20 ppm within 20 minutes. This stage is the deoxygenation stage.

[0032] As the high-flow-rate nitrogen passage 21 continuously supplies nitrogen to the cavity of the oven chamber 10 at a first flow rate, the oxygen content in the cavity of the oven chamber 10 gradually decreases. When the oxygen content falls below a preset value (which can be 20 ppm), the controller 51 controls the first valve 211 to close and the second valve 221 to open. At this time, the high-flow-rate nitrogen passage 21 is cut off, and the low-flow-rate nitrogen passage 22 is opened. The high-precision medium-range flow controller 222 controls the low-flow-rate nitrogen passage 22 to stably supply nitrogen to the cavity of the oven chamber 10 at a second flow rate (150 L / min), saving nitrogen usage costs. During this process, the controller 51 controls the opening of the pressure valve 42 based on the pressure detected by the pressure gauge 41, so that the air pressure in the cavity of the oven chamber 11 is maintained at a preset air pressure. At the same time, the controller 51 controls the heating component 52 to work, so as to heat the cavity of the oven chamber 11.

[0033] After baking is complete, cooling begins inside the oven chamber 10: Controller 51 stops the heating element 52 and opens the first valve 211 to allow the high-flow nitrogen passage 21 to be open. A high-precision, large-range flow controller 212 controls the high-flow nitrogen passage 21 to stably deliver nitrogen to the oven chamber 10 at a first flow rate, thereby accelerating cooling. During this process, the second valve 221 can be opened or closed. This stage is the cooling stage.

[0034] The above-disclosed embodiments are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A multi-channel nitrogen-supply oxygen-free oven, characterized in that, include: An oven housing is provided with a high-flow nitrogen passage and a low-flow nitrogen passage communicating with the cavity of the oven housing. The nitrogen supply flow rate of the high-flow nitrogen passage is a first flow rate, and the nitrogen supply flow rate of the low-flow nitrogen passage is a second flow rate. The first flow rate is greater than the second flow rate. A first valve is provided on the high-flow nitrogen passage to control the on / off of nitrogen supply, and a second valve is provided on the low-flow nitrogen passage to control the on / off of nitrogen supply. A heating element is disposed in the oven housing to bake the cavity of the oven housing.

2. The multi-channel nitrogen-supply oxygen-free oven as described in claim 1, characterized in that: The first flow rate is 500 L / min, and the second flow rate is 150 L / min.

3. The oxygen-free oven with multi-channel nitrogen supply as described in claim 1, characterized in that: It also includes a controller and an oxygen analyzer, the oxygen analyzer being used to detect the oxygen content in the oven chamber; The controller is connected to the first valve, the second valve, and the oxygen analyzer to obtain the oxygen content detected by the oxygen analyzer, and controls the operation of the first valve and the second valve based on the oxygen content.

4. The oxygen-free oven with multi-channel nitrogen supply as described in claim 1, characterized in that: The diameter of the high-flow-rate nitrogen passage is 20 mm, and the diameter of the low-flow-rate nitrogen passage is 10 mm.

5. The oxygen-free oven with multi-channel nitrogen supply as described in claim 1, characterized in that: The first valve and the second valve are electric valves, pneumatic valves, solenoid valves or manual valves.

6. The multi-channel nitrogen-supply oxygen-free oven as described in claim 1, characterized in that: It also includes a high-precision, large-range flow controller, which is installed on the large-flow nitrogen passage and supplies nitrogen to the chamber of the oven body at the first flow rate when the large-flow nitrogen passage is turned on.

7. The oxygen-free oven with multi-channel nitrogen supply as described in claim 1, characterized in that: It also includes a high-precision medium-range flow controller, which is installed on the low-flow nitrogen passage and supplies nitrogen to the chamber of the oven body at the second flow rate when the low-flow nitrogen passage is turned on.

8. The oxygen-free oven with multi-channel nitrogen supply as described in claim 1, characterized in that: It also includes an air vent passage connecting to the oven body, and a pressure valve is installed on the air vent passage to adjust the air pressure in the oven body chamber by adjusting the opening of the pressure valve.

9. The oxygen-free oven with multi-channel nitrogen supply as described in claim 8, characterized in that: It also includes a pressure gauge used to detect the air pressure value in the cavity of the oven body.

10. The multi-channel nitrogen-supply oxygen-free oven as described in claim 9, characterized in that: The pressure valve is connected to the output end of the pressure gauge to receive the air pressure value detected by the pressure gauge and control the opening of the air outlet passage.

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