A single crystal furnace auxiliary pump tail gas recovery system

Abstract

The utility model relates to single crystal furnace equipment technical field especially relates to a kind of single crystal furnace auxiliary pump tail gas recovery system, comprising: single crystal furnace main chamber, single crystal furnace auxiliary room, main chamber tail gas filter, auxiliary room tail gas filter, auxiliary room tail gas collection pipeline, tail gas recovery main pipeline, tail gas recovery branch pipeline, oxygen content analyzer and jumper pipeline;Wherein, the tail gas outlet of single crystal furnace main chamber is connected with the air inlet of main chamber tail gas filter by first gas collection pipeline, and first ball valve is equipped on first gas collection pipeline;The air outlet of main chamber tail gas filter is connected with the air inlet of main chamber tail gas vacuum pump by second gas collection pipeline;The air outlet of main chamber tail gas vacuum pump is connected with tail gas recovery main pipeline by main chamber gas collection pipeline, and second ball valve is equipped on main chamber gas collection pipeline;The utility model is connected by setting main, auxiliary room independent tail gas filtration and transport path, and realizes main auxiliary room tail gas unified recovery in conjunction with tail gas recovery main pipeline, reduces resource waste.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace equipment technology, and in particular to a single crystal furnace auxiliary pump tail gas recovery system. Background Technology

[0002] During single crystal production, the main and auxiliary chambers of the single crystal furnace continuously generate exhaust gases containing recyclable components (such as high-purity argon). Direct emission of these exhaust gases not only wastes resources but may also adversely affect the surrounding environment due to trace amounts of harmful components. However, existing single crystal furnace exhaust gas treatment technologies face several pressing problems that need to be addressed: Traditional exhaust gas treatment devices often focus on recovering exhaust gas from the main chamber of a single-crystal furnace, while exhaust gas from the auxiliary chamber is typically vented separately or discharged after simple filtration. This lack of integrated design for unified recovery of exhaust gas from both main and auxiliary chambers leads to a significant loss of recyclable components in the auxiliary chamber exhaust gas. Furthermore, traditional filter components are mostly made of ordinary carbon steel or plastic, which not only have poor corrosion resistance and are easily damaged, but also lack sufficient filtration accuracy. With prolonged use, impurities can easily accumulate and clog pipelines, severely impacting system efficiency. More importantly, traditional filter components are difficult to maintain, requiring complete disassembly for filter element replacement, significantly increasing downtime for maintenance.

[0003] Based on the problems of "inconsistent recovery, poor filtration effect, inconvenient maintenance, and high collection cost of multiple auxiliary chambers" in the above-mentioned traditional technologies, this utility model provides a brand-new single crystal furnace auxiliary pump tail gas recovery system. It aims to achieve efficient and unified recovery of tail gas from the main and auxiliary chambers through integrated design, improve filtration performance and maintenance convenience, ensure recovery safety, adapt to the needs of centralized processing of multiple auxiliary chambers, and ultimately reduce production costs and improve resource utilization. Utility Model Content

[0004] The purpose of this utility model is to address the shortcomings of the existing technology by providing a single crystal furnace auxiliary pump tail gas recovery system. To achieve the above objectives, the technical solution adopted by this utility model is as follows: A single crystal furnace auxiliary pump tail gas recovery system includes: a single crystal furnace main chamber, a single crystal furnace auxiliary chamber, a main chamber tail gas filter, an auxiliary chamber tail gas filter, an auxiliary chamber tail gas collection pipe, a tail gas recovery main pipe, tail gas recovery branch pipes, an oxygen content analyzer, and a bridging pipe. The exhaust outlet of the main chamber of the single crystal furnace is connected to the inlet of the exhaust gas filter of the main chamber through a first gas collection pipe, and a first ball valve is provided on the first gas collection pipe; the exhaust outlet of the exhaust gas filter of the main chamber is connected to the inlet of the exhaust gas vacuum pump of the main chamber through a second gas collection pipe; the exhaust outlet of the exhaust gas vacuum pump of the main chamber is connected to the exhaust gas recovery main pipe through the main chamber gas collection pipe, and a second ball valve is provided on the main chamber gas collection pipe. The exhaust gas outlet of the single crystal furnace auxiliary chamber is connected to the auxiliary chamber exhaust gas collection pipe through the third gas collection pipe, and the third gas collection pipe is equipped with a third ball valve. The auxiliary chamber exhaust gas collection pipe is connected to the air inlet of the auxiliary chamber exhaust gas filter through the fourth gas collection pipe; The outlet of the auxiliary chamber exhaust gas filter is connected to the inlet of the auxiliary chamber exhaust gas vacuum pump through the fifth gas collection pipe; the outlet of the auxiliary chamber exhaust gas vacuum pump is connected to the exhaust gas recovery branch pipe through the auxiliary chamber gas collection pipe, and a fourth ball valve is installed on the auxiliary chamber gas collection pipe. The exhaust gas recovery branch pipeline is connected to the inlet of the three-way valve. The first outlet of the three-way valve is connected to the outside, and the second outlet of the three-way valve is connected to the exhaust gas recovery main pipeline through a jumper pipe. An oxygen content analyzer is installed on the exhaust gas recovery branch pipeline, and the oxygen content analyzer is located between the fourth ball valve and the three-way valve.

[0005] Furthermore, both the main chamber exhaust gas filter and the auxiliary chamber exhaust gas filter are made of stainless steel, and both the main chamber exhaust gas filter and the auxiliary chamber exhaust gas filter have filter elements inside.

[0006] Furthermore, the first ball valve, the second ball valve, the third ball valve, and the fourth ball valve are all flange-connected gate valves.

[0007] Furthermore, the three-way valve is either an electric three-way valve or a pneumatic three-way valve, and the control unit of the three-way valve is electrically connected to the signal output terminal of the oxygen content analyzer.

[0008] Furthermore, the exhaust gas collection pipe of the auxiliary chamber is connected to the third gas collection pipe of several single crystal furnace auxiliary chambers. Furthermore, a pressure detection element is installed on the auxiliary chamber gas collection pipeline, which is located between the fourth ball valve and the auxiliary chamber exhaust gas vacuum pump.

[0009] Furthermore, the side walls of the main chamber exhaust filter and the auxiliary chamber exhaust filter are equipped with removable maintenance doors.

[0010] The present invention adopts the above technical solution and has the following technical effects compared with the prior art: This invention achieves unified recovery of exhaust gases from both main and auxiliary chambers by setting up independent exhaust gas filtration and conveying channels for the main and auxiliary chambers, combined with a main exhaust gas recovery pipeline, thus reducing resource waste. The exhaust gas filters in both main and auxiliary chambers use built-in filter elements to improve impurity filtration efficiency, and the detachable inspection doors facilitate future maintenance. Flange-connected shut-off valves ensure pipeline sealing performance and prevent exhaust gas leakage. An oxygen content analyzer is electrically connected to a three-way valve, which can automatically switch between recovery and emission channels based on the oxygen content of the exhaust gas, ensuring recovery safety. The exhaust gas collection pipeline in the auxiliary chamber can connect to multiple auxiliary chambers of single crystal furnaces for centralized collection, reducing equipment costs and space occupation. Pressure detection elements can monitor the pressure in the exhaust gas passage of the auxiliary chamber in real time, ensuring stable system operation. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the process flow structure of this utility model; The reference numerals in the attached figures are: 1. Single crystal furnace auxiliary chamber; 3. Single crystal furnace main chamber; 4. Third gas collection pipe; 5. Third ball valve; 6. First ball valve; 7. First gas collection pipe; 8. Main chamber tail gas filter; 9. Second gas collection pipe; 10. Main chamber tail gas vacuum pump; 11. Second ball valve; 12. Main chamber gas collection pipe; 13. Fourth gas collection pipe; 14. Auxiliary chamber tail gas filter; 15. Fifth gas collection pipe; 16. Auxiliary chamber tail gas vacuum pump; 17. Fourth ball valve; 18. Auxiliary chamber gas collection pipe; 19. Auxiliary chamber tail gas collection pipe; 20. Tail gas recovery branch pipe; 21. Tail gas recovery main pipe; 22. Oxygen content analyzer; 23. Three-way valve; 24. Jumper pipe. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0014] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention. Example

[0015] This embodiment provides a single crystal furnace auxiliary pump tail gas recovery system, including: single crystal furnace main chamber 3, single crystal furnace auxiliary chamber 1, main chamber tail gas filter 8, auxiliary chamber tail gas filter 14, auxiliary chamber tail gas collection pipe 19, tail gas recovery main pipe 21, tail gas recovery branch pipe 20, oxygen content analyzer 22, and bridging pipe 24. The exhaust outlet of the main chamber 3 of the single crystal furnace is connected to the inlet of the exhaust gas filter 8 of the main chamber through the first gas collection pipe 7. The first gas collection pipe 7 is equipped with a first ball valve 6. The first ball valve 6 is a flange-connected shut-off valve with good sealing performance. It can manually control the opening and closing of the exhaust gas passage of the main chamber 3 of the single crystal furnace. When it is necessary to repair the relevant components of the main chamber, closing the first ball valve 6 can cut off the exhaust gas source of the main chamber and prevent exhaust gas leakage.

[0016] The main chamber exhaust gas filter 8 is made of stainless steel, which is corrosion-resistant and has high strength, making it suitable for the complex environment of exhaust gas treatment. The main chamber exhaust gas filter 8 has a filter element inside, which can effectively filter solid impurities such as dust in the exhaust gas, preventing impurities from entering the subsequent pump body and pipeline and causing blockage. The main chamber exhaust gas filter 8 has a detachable maintenance door on the side wall. When the filter element has accumulated a lot of impurities after a period of use, the maintenance door can be opened to quickly replace the filter element without disassembling the entire filter, which greatly shortens the maintenance time.

[0017] The outlet of the main chamber exhaust gas filter 8 is connected to the inlet of the main chamber exhaust gas vacuum pump 10 through the second gas collection pipe 9. The main chamber exhaust gas vacuum pump 10 provides power for exhaust gas transportation and can stably extract the filtered main chamber exhaust gas to the subsequent pipeline. The outlet of the main chamber exhaust gas vacuum pump 10 is connected to the exhaust gas recovery main pipeline 21 through the main chamber gas collection pipe 12. The main chamber gas collection pipe 12 is equipped with a second ball valve 11, which is also a flange-connected shut-off valve. It can control the passage of the filtered exhaust gas in the main chamber into the exhaust gas recovery main pipeline 21. When the exhaust gas recovery main pipeline 21 needs maintenance, closing the second ball valve 11 can cut off the transportation of the main chamber exhaust gas to the main pipeline.

[0018] The exhaust gas outlet of the single crystal furnace auxiliary chamber 1 is connected to the auxiliary chamber exhaust gas collection pipe 19 through the third gas collection pipe 4. The third gas collection pipe 4 is equipped with a third ball valve 5, which is a flange-connected shut-off valve used to control the delivery of exhaust gas from a single single crystal furnace auxiliary chamber 1 to the auxiliary chamber exhaust gas collection pipe 19. In this embodiment, the auxiliary chamber exhaust gas collection pipe 19 is connected to the third gas collection pipes 4 of three single crystal furnace auxiliary chambers 1, realizing the centralized collection of exhaust gas from multiple single crystal furnace auxiliary chambers 1. Compared with setting up a separate recovery path for each auxiliary chamber, this reduces the number of pipes and pumps, lowers equipment costs, and saves space in the production workshop.

[0019] The auxiliary chamber exhaust gas collection pipe 19 is connected to the air inlet of the auxiliary chamber exhaust gas filter 14 through the fourth air collection pipe 13. The auxiliary chamber exhaust gas filter 14 has the same structure as the main chamber exhaust gas filter 8, and is also made of stainless steel, has a built-in filter element and is equipped with a detachable maintenance door. It can filter the exhaust gas from multiple auxiliary chambers in a unified manner, remove impurities from the exhaust gas, and ensure the stable operation of subsequent equipment.

[0020] The outlet of the auxiliary chamber exhaust gas filter 14 is connected to the inlet of the auxiliary chamber exhaust gas vacuum pump 16 through the fifth gas collection pipe 15. The auxiliary chamber exhaust gas vacuum pump 16 provides power for the transportation of the auxiliary chamber exhaust gas. Its power can be adapted according to the number of connected auxiliary chambers to ensure stable extraction of exhaust gas generated by multiple auxiliary chambers. The outlet of the auxiliary chamber exhaust gas vacuum pump 16 is connected to the exhaust gas recovery branch pipe 20 through the auxiliary chamber gas collection pipe 18. The auxiliary chamber gas collection pipe 18 is equipped with a fourth ball valve 17, which is a flange-connected shut-off valve that can control the passage of the filtered exhaust gas from the auxiliary chamber into the exhaust gas recovery branch pipe 20.

[0021] A pressure detection element (not shown in the figure) is installed on the auxiliary chamber gas collection pipe 18. The pressure detection element is located between the fourth ball valve 17 and the auxiliary chamber tail gas vacuum pump 16. It can monitor the pressure of the pipeline between the outlet of the auxiliary chamber tail gas vacuum pump 16 and the fourth ball valve 17 in real time. When the pipeline is blocked, the pressure will rise abnormally. The pressure detection element can transmit the pressure signal to the control system to remind the staff to troubleshoot the fault in time and avoid damage to the pump body and pipeline due to excessive pressure.

[0022] An oxygen content analyzer 22 is installed on the exhaust gas recovery branch pipeline 20, and the oxygen content analyzer 22 is located between the fourth ball valve 17 and the three-way valve 23. The oxygen content analyzer 22 can detect the oxygen content in the exhaust gas after filtration in the auxiliary chamber in real time. In this embodiment, the set threshold of the oxygen content analyzer 22 is 2%. When the oxygen content of the exhaust gas is lower than 2%, it means that the purity of the exhaust gas meets the recovery requirements. When the oxygen content is higher than 2%, the purity of the exhaust gas does not meet the standard and needs to be treated for emission.

[0023] The exhaust gas recovery branch pipe 20 is connected to the inlet of the three-way valve 23. In this embodiment, the three-way valve 23 is an electric three-way valve. The control unit of the three-way valve 23 is electrically connected to the signal output terminal of the oxygen content analyzer 22. When the oxygen content analyzer 22 detects that the oxygen content of the exhaust gas is lower than 2%, it sends a signal to the control unit of the three-way valve 23 to control the three-way valve 23 to switch to the second outlet passage. The exhaust gas flows into the exhaust gas recovery main pipe 21 through the jumper pipe 24 and is subsequently recovered and treated together with the exhaust gas in the main chamber. When the oxygen content analyzer 22 detects that the oxygen content of the exhaust gas is higher than 2%, the control unit receives the signal and controls the three-way valve 23 to switch to the first outlet passage. The exhaust gas is directly connected to the outdoor discharge to avoid unqualified exhaust gas from entering the recovery system and affecting the quality of the recovered products.

[0024] In operation, first open all ball valves: open ball valve 6, ball valve 11, ball valve 5, and ball valve 17, and start the main chamber exhaust gas vacuum pump 10 and the auxiliary chamber exhaust gas vacuum pump 16. The exhaust gas generated in the main chamber 3 of the single crystal furnace enters the main chamber exhaust gas filter 8 through the first gas collection pipe 7 for filtration. After filtration, under the action of the main chamber exhaust gas vacuum pump 10, it enters the exhaust gas recovery main pipe 21 through the second gas collection pipe 9, the main chamber gas collection pipe 12, and the second ball valve 11. The exhaust gas generated in the auxiliary chambers 1 of the three single crystal furnaces enters the auxiliary chamber exhaust gas collection pipe 19 through the third gas collection pipe 4 and the third ball valve 5 respectively for collection. The collected exhaust gas then enters the auxiliary chamber exhaust gas collection pipe 13. Filter 14 filters the gas, and the filtered gas, under the action of the auxiliary chamber exhaust gas vacuum pump 16, enters the exhaust gas recovery branch pipeline 20 through the fifth gas collection pipeline 15, the auxiliary chamber exhaust gas collection pipeline 18, and the fourth ball valve 17. The oxygen content analyzer 22 detects the oxygen content of the exhaust gas in real time. If the oxygen content is lower than 2%, the three-way valve 23 switches to the second outlet, and the exhaust gas enters the exhaust gas recovery main pipeline 21 through the bridging pipeline 24. If the oxygen content is higher than 2%, the three-way valve 23 switches to the first outlet, and the exhaust gas is discharged outdoors. The pressure detection element monitors the pressure of the auxiliary chamber exhaust gas collection pipeline 18 in real time to ensure stable system operation. The maintenance doors of the main and auxiliary chamber exhaust gas filters are opened regularly to replace the filter elements to ensure the filtration effect.

[0025] In summary, this utility model achieves efficient exhaust gas recovery by combining independent filtration in the main and auxiliary chambers with unified recovery; centralized collection in multiple auxiliary chambers reduces costs and space occupation; the linkage between the oxygen content analyzer and the electric three-way valve ensures safe recovery; and the detachable inspection door and pressure detection element improve the system's ease of maintenance and operational stability, effectively solving many problems in the treatment of exhaust gas from traditional single crystal furnaces.

[0026] The above description of this utility model is merely a preferred embodiment of this utility model and does not limit the implementation method and protection scope of this utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of this utility model should be included within the protection scope of this utility model.

Claims

1. A single crystal furnace auxiliary pump tail gas recovery system, characterized in that, include: The main chamber of the single crystal furnace (3), the auxiliary chamber of the single crystal furnace (1), the tail gas filter of the main chamber (8), the tail gas filter of the auxiliary chamber (14), the tail gas collection pipe of the auxiliary chamber (19), the main tail gas recovery pipe (21), the tail gas recovery branch pipe (20), the oxygen content analyzer (22), and the bridging pipe (24). The exhaust outlet of the main chamber (3) of the single crystal furnace is connected to the inlet of the exhaust filter (8) of the main chamber through a first gas collection pipe (7). The first gas collection pipe (7) is equipped with a first ball valve (6); the outlet of the main chamber exhaust gas filter (8) is connected to the inlet of the main chamber exhaust gas vacuum pump (10) through the second gas collection pipe (9); the outlet of the main chamber exhaust gas vacuum pump (10) is connected to the exhaust gas recovery main pipe (21) through the main chamber gas collection pipe (12), and the main chamber gas collection pipe (12) is equipped with a second ball valve (11). The exhaust outlet of the single crystal furnace sub-chamber (1) is connected to the exhaust gas collection pipe (19) of the sub-chamber through the third gas collection pipe (4), and the third gas collection pipe (4) is equipped with a third ball valve (5). The auxiliary chamber exhaust gas collection pipe (19) is connected to the air inlet of the auxiliary chamber exhaust gas filter (14) through the fourth gas collection pipe (13); The outlet of the auxiliary chamber exhaust gas filter (14) is connected to the inlet of the auxiliary chamber exhaust gas vacuum pump (16) through the fifth gas collection pipe (15); the outlet of the auxiliary chamber exhaust gas vacuum pump (16) is connected to the exhaust gas recovery branch pipe (20) through the auxiliary chamber gas collection pipe (18), and the auxiliary chamber gas collection pipe (18) is equipped with a fourth ball valve (17). The exhaust gas recovery branch pipeline (20) is connected to the inlet of the three-way valve (23), the first outlet of the three-way valve (23) is connected to the outside, and the second outlet of the three-way valve (23) is connected to the exhaust gas recovery main pipeline (21) through the jumper pipeline (24); the oxygen content analyzer (22) is installed on the exhaust gas recovery branch pipeline (20), and the oxygen content analyzer (22) is located between the fourth ball valve (17) and the three-way valve (23).

2. The system according to claim 1, characterized in that, The main chamber exhaust gas filter (8) and the auxiliary chamber exhaust gas filter (14) are both made of stainless steel, and the main chamber exhaust gas filter (8) and the auxiliary chamber exhaust gas filter (14) are equipped with filter elements inside.

3. The system according to claim 1, characterized in that, ...The first ball valve (6), the second ball valve (11), the third ball valve (5), and the fourth ball valve (17) are all flange-connected shut-off valves.

4. The system according to claim 1, characterized in that, The three-way valve (23) is an electric three-way valve or a pneumatic three-way valve, and the control unit of the three-way valve (23) is electrically connected to the signal output terminal of the oxygen content analyzer (22).

5. The system according to claim 1, characterized in that, The exhaust gas collection pipe (19) of the sub-chamber is connected to the third gas collection pipe (4) of several of the single crystal furnace sub-chambers (1).

6. The system according to claim 1, characterized in that, The auxiliary chamber gas collection pipe (18) is equipped with a pressure detection element, which is located between the fourth ball valve (17) and the auxiliary chamber tail gas vacuum pump (16).

7. The system according to claim 2, characterized in that, The main chamber exhaust gas filter (8) and the auxiliary chamber exhaust gas filter (14) are provided with detachable maintenance doors on their side walls.

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