A probe detection device

Abstract

The utility model discloses a kind of probe detection equipment in probe detection field, mainly including microscope, probe seat, industrial camera, light source, XYZ displacement platform;The probe to be detected is set on probe seat;Industrial camera and light source are set on XYZ displacement platform, light source provides auxiliary light, so that probe can be imaged in industrial camera, and accurately position probe position and judge displacement angle size by external display;Probe is observed by microscope, then the position of probe seat and XYZ displacement platform is adjusted, let the imaging of probe be most clear, then the physical characteristics of probe are detected using visual algorithm.The utility model can batch, accurately measure the length, diameter, tip curvature radius and other key dimensions of probe, quickly screen out unqualified probe, improve production efficiency;The service life of probe is identified in advance, and the service life of probe is predicted by material defect;Compatible multiple types test demand, same equipment can complete the multidimensional detection of probe, avoid repeated purchase.

Description

Technical Field

[0001] This utility model relates to the field of probe detection, and in particular to a probe detection device. Background Technology

[0002] Radio frequency (RF) probes and CD probes are commonly used in electronics, medical, and high-precision manufacturing fields. Before being put into use, RF probes and CD probes require precise testing of their physical characteristics, such as geometry and surface quality, to ensure their reliability in electrical performance testing and other stages. These physical characteristics are typically tested using multiple testing devices, which is inefficient and unsuitable for high-volume testing scenarios. Utility Model Content

[0003] To address the aforementioned problems in existing technologies, this invention provides a probe inspection device. Under a high-magnification microscope, a certain number of probes are fixed on a probe holder. Then, with the aid of a digital display and an industrial camera, the device performs high-precision observation and inspection of the probe's geometric structure, needle marks, and other physical characteristics, ensuring that the probes can pass the subsequent production process.

[0004] The technical solution of this utility model is as follows: A probe inspection device includes an inspection stand 1, a microscope 2, a probe holder 3, an industrial camera 4, a light source 5, an XYZ displacement platform 6, a needle mark inspection platform 7, a grating ruler and digital display 8, an arc guide rail 9, and a guide rail screw 10. The testing platform 1 includes two platforms parallel to the horizontal plane: an upper platform 11 and a lower platform 12, with the upper platform 11 located above the lower platform 12. The arc-shaped guide rail 9 is mounted on the upper platform 11, and the XYZ displacement platform 6 is mounted on the lower platform 12. The XYZ displacement platform 6 has screws and grating rulers on its X, Y, and Z axes. The position of the XYZ displacement platform 6 on each axis can be adjusted by rotating the screws on the X, Y, or Z axes, and the displacement of the XYZ displacement platform 6 on each axis can be measured using the grating rulers. The X and Y axes are located on the horizontal plane. The grating ruler digital display 8 displays the displacement data of all grating rulers in real time. The probe holder 3 is mounted on the arc guide rail 9; the industrial camera 4, the light source 5, and the needle mark detection platform 7 are all mounted on the XYZ displacement platform 6 and move together with the XYZ displacement platform 6; the light source 5 is located directly below the needle mark detection platform 7; The probe 14 to be tested is placed on the probe holder 3. By adjusting the knob on the probe holder 3 to change its position in the horizontal and vertical directions, the probe 14 can be moved above the needle mark detection platform 7. The guide screw 10 is placed on the upper platform 11. When the guide screw 10 is rotated, the probe holder 3 is pushed by the guide screw 10 and makes a circular motion on the arc guide rail 9, and the center of the circular motion coincides with the needle mark detection platform 7. The light source 5 shines from below the needle mark detection platform 7 to provide light for the imaging of the probe 14 in the industrial camera 4. The microscope 2 is positioned directly above the needle mark detection platform 7. The position of the probe 14 is observed through the microscope 2, and then the positions of the probe 13 and the XYZ displacement platform 6 are adjusted so that the probe 13 is imaged in the industrial camera 4. The image of the probe 13 in the industrial camera 4 is observed through the display, and the positions of the probe holder 3 and the XYZ displacement platform 6 are further adjusted to make the image of the probe 13 clearest. Then, the physical features of the probe 13 are detected using a visual algorithm.

[0005] Furthermore, the physical characteristics include: length, diameter, tip curvature, scratches, and oxidation marks.

[0006] Furthermore, the number of the arc guide rail 9 and the probe seat 3 is 4.

[0007] Furthermore, the microscope 2 has an adjustment device that can change the position of the microscope 2 in the horizontal and vertical directions.

[0008] Furthermore, the angle between the probe 13 and the needle mark detection platform 7 is 45 degrees.

[0009] The beneficial technical effects of this utility model are as follows: It can be used for needle position detection of radio frequency needles or CD needles, accurately measuring key dimensions such as probe length, diameter, and tip curvature radius to ensure that the probe's geometric accuracy meets customer testing requirements (typically reaching micron-level accuracy). The equipment occupies a small area and has a double-layer aluminum frame structure, which can provide a stable platform structure support for probe detection. It can perform batch testing and quickly screen out unqualified probes, reducing the probability of wafer testing interruptions and production disruptions caused by probe failures; By identifying the mechanical life and material defects of the probe in advance, the service life of the probe can be predicted. It is compatible with multiple types of testing needs and can perform multi-dimensional testing of probe geometry, mechanics, and materials on the same device, avoiding customers from repeatedly purchasing equipment due to dispersed testing scenarios. Functionality can also be expanded according to specific enterprise needs (such as ultra-low temperature and high-pressure environments) to adapt to different application scenarios. Attached Figure Description

[0010] Figure 1 This is a perspective view of an embodiment; Figure 2 This is a front view of an embodiment.

[0011] In the figure, the correspondence between the component names and the attached drawing numbers is as follows: 1. Inspection platform; 2. Microscope; 3. Probe holder; 4. Industrial camera; 5. Light source; 6. XYZ displacement platform; 7. Needle mark inspection platform; 8. Grating ruler digital display; 9. Circular arc guide rail; 10. Guide rail screw; 11. Upper platform; 12. Lower platform; 13. Probe. Detailed Implementation

[0012] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0013] The working principle of the embodiment is as follows: Under a high-powered microscope lens, a certain number of probes are fixed on the probe holder. Then, with the help of the grating ruler, digital display and display imaging, the geometric structure, needle marks and other physical characteristics of the probes are observed and detected with high precision to ensure that the probes can be qualified to enter the subsequent production process.

[0014] like Figure 1 , 2 As shown, the embodiment mainly includes a testing platform 1, a microscope 2, a probe holder 3, an industrial camera 4, a light source 5, an XYZ displacement platform 6, a needle mark detection platform 7, a grating ruler and digital display 8, an arc guide rail 9, and a guide rail screw 10.

[0015] The testing platform 1 is a double-layer aluminum frame structure, providing stable platform support for probe testing. The testing platform 1 includes two platforms parallel to the horizontal plane: an upper platform 11 and a lower platform 12, with the upper platform 11 located above the lower platform 12. Four arc-shaped guide rails 9 are provided on the upper platform 11, and an XYZ displacement platform 6 is provided on the lower platform 12.

[0016] Four probe mounts 3 are positioned on four circular arc guide rails 9. The industrial camera 4, light source 5, and needle mark detection platform 7 are all mounted on the XYZ displacement platform 6 and move together with it. The light source 5 is located directly below the needle mark detection platform 7. The XYZ displacement platform 6 has screws and grating rulers on its X, Y, and Z axes. The position of the XYZ displacement platform 6 on each axis can be adjusted by rotating the screws on the X, Y (which are horizontal) or Z axes. The displacement of the XYZ displacement platform 6 on each axis can be measured using the grating ruler. A digital display 8 shows the displacement data of all grating rulers in real time.

[0017] The probe 13 to be tested is mounted on the probe holder 3, and the angle between the probe 13 and the needle mark detection platform 7 is 45 degrees. By adjusting the knob on the probe holder 3 to change its position in the horizontal and vertical directions, the probe 13 can be moved above the needle mark detection platform 7. The guide screw 10 is mounted on the upper platform 11. When the guide screw 10 is rotated, the probe holder 3 is pushed by the guide screw 10 and makes a circular motion on the arc guide rail 9, and the center of this circular motion coincides with the needle mark detection platform 7. The probe holder 3 itself has an adjustment mechanism that allows the probe 13 to translate in the X, Y, and Z directions. However, the probe 13 is relatively long, and the adjustment range of the probe holder 3 is not large enough. Therefore, the arc guide rail 9 is set to further increase the adjustment range of the probe 13.

[0018] Light source 5 illuminates from below the needle mark detection platform 7, providing light for the imaging of probe 13 in industrial camera 4. Microscope 2 is positioned directly above the needle mark detection platform 7, allowing observation of the position of probe 13. Microscope 2 has adjustment mechanisms that can change its position in the horizontal and vertical directions, enabling clear imaging of probe 13 within it. By observing the position of probe 13 through microscope 2, the positions of probe holder 3 and XYZ displacement platform 6 are further adjusted to achieve the clearest possible image of probe 13. Then, a visual algorithm is used to detect the physical characteristics of probe 13, such as length, diameter, tip curvature, scratches, and oxide marks.

[0019] The detection in this embodiment is achieved through a visual algorithm, which not only has an extremely fast detection speed, but can also complete tasks that would require several devices in traditional methods. Therefore, it can not only significantly improve production efficiency, but also avoid purchasing multiple detection devices and reduce investment costs.

[0020] Although the embodiments of this utility model have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for this utility model. For those skilled in the art, and for those of ordinary skill in the art, various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this utility model. Therefore, without departing from the general concept defined by the claims and their equivalents, this utility model is not limited to the specific details.

Claims

1. A probe detection device, characterized in that: It includes a testing stand (1), microscope (2), probe holder (3), industrial camera (4), light source (5), XYZ displacement platform (6), needle mark detection platform (7), grating ruler digital display (8), arc guide rail (9) and guide rail screw (10). The testing platform (1) includes two platforms parallel to the horizontal plane: an upper platform (11) and a lower platform (12), with the upper platform (11) located above the lower platform (12); the arc guide rail (9) is set on the upper platform (11), and the XYZ displacement platform (6) is set on the lower platform (12); the XYZ displacement platform (6) is equipped with screws and grating rulers on the X-axis, Y-axis, and Z-axis, and the position of the XYZ displacement platform (6) on the axis can be adjusted by rotating the screws of the X-axis, Y-axis, or Z-axis, and the displacement of the XYZ displacement platform (6) on the axis can be measured by the grating ruler of the axis; the X-axis and Y-axis are located on the horizontal plane; the grating ruler digital display (8) displays the displacement data of all grating rulers in real time; The probe holder (3) is set on the arc guide rail (9); the industrial camera (4), the light source (5) and the needle mark detection platform (7) are all set on the XYZ displacement platform (6) and move together with the XYZ displacement platform (6); the light source (5) is located directly below the needle mark detection platform (7); The probe (13) to be tested is set on the probe holder (3). By adjusting the knob on the probe holder (3) to change the position of the probe holder (3) in the horizontal and vertical directions, the probe (13) can be moved above the needle mark detection platform (7). The guide screw (10) is set on the upper platform (11). When the guide screw (10) is rotated, the probe holder (3) is pushed by the guide screw (10) and makes a circular motion on the arc guide rail (9). The center of the circular motion coincides with the needle mark detection platform (7). The light source (5) shines from below the needle mark detection platform (7) to provide light for the imaging of the probe (13) in the industrial camera (4). The microscope (2) is set directly above the needle mark detection platform (7); the position of the probe (13) is observed through the microscope (2), and then the position of the probe (13) and the XYZ displacement platform (6) is adjusted so that the probe (13) is imaged in the industrial camera (4); the image of the probe (13) in the industrial camera (4) is observed through the display, and the position of the probe holder (3) and the XYZ displacement platform (6) is further adjusted so that the image of the probe (13) is clearest, and then the physical characteristics of the probe (13) are detected by the visual algorithm.

2. The probe detection device according to claim 1, characterized in that, The physical characteristics include: length, diameter, tip curvature, scratches, and oxidation marks.

3. The probe detection device according to claim 1, characterized in that, The number of the circular arc guide rail (9) and probe seat (3) is 4.

4. The probe detection device according to claim 1, characterized in that: The microscope (2) has an adjustment device that can change the position of the microscope (2) in the horizontal and vertical directions.

5. The probe detection device according to claim 1, characterized in that, The angle between the probe (13) and the needle mark detection platform (7) is 45 degrees.

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