High-precision thin film thickness detection device

Abstract

The utility model discloses a kind of high-precision film thickness detection devices, including film thickness tester, four groups of adaptive adjustment structure are installed in film thickness tester top end, four groups of adaptive adjustment structure are separately arranged in film thickness tester top end four corners, each group of adaptive adjustment structure is independent of each other, the adaptive adjustment structure includes lower support structure, the lower support structure includes mounting seat, recess is centrally provided in mounting seat top end, arc-shaped groove is provided in the side of mounting seat top end and is penetrated, first spring is fixedly connected in recess, support ball is fixedly connected in the top end of first spring, the arc of arc-shaped groove is compatible with the support ball. Adaptive adjustment structure is compatible with various different shapes of film by the support ball of lower support structure and the arc-shaped support plate of upper support structure, especially profiled film, solve the problem that the fixing capacity of conventional plane clamping mode is limited when adapting profiled film.

Description

Technical Field

[0001] This utility model relates to the field of thin film thickness detection technology, specifically a high-precision thin film thickness detection device. Background Technology

[0002] Thin film materials are widely used in numerous industrial production and scientific research fields, such as display screen films in the electronics industry, food packaging films in the packaging industry, and optical films in the optics field. The thickness of the film, as one of its key performance indicators, has a crucial impact on the quality and performance of the product. For example, in the manufacturing of electronic displays, uneven film thickness can lead to problems such as color deviation and uneven brightness; in the food packaging industry, film thickness that does not meet standards can affect the freshness and shelf life of food.

[0003] The existing patent publication number CN216791150U, entitled "A Precision Film Thickness Testing Device," includes a test platform. A hinged cover, capable of opening and closing, is attached to the top of the test platform. A film thickness tester, detachably connected to an external computer, is mounted on the cover via a sliding structure. A placement slot, penetrating the top of the test platform and directly below the film thickness tester, is provided for placing an external metal element sample. At least one fixing structure is provided in the placement slot for clamping and securing the external metal element sample. This invention offers advantages such as stable fixation of the metal element sample, reduced sample displacement due to external environmental factors during testing, and improved testing efficiency and accuracy.

[0004] However, the clamping structure of the testing device is a planar design, and not all the edges of the films to be measured are flat. Oxidation or improper daily maintenance can easily cause the film edges to curl or become uneven. In this case, the clamping structure is prone to instability during use.

[0005] Therefore, this invention provides a high-precision thin film thickness detection device. Utility Model Content

[0006] To address the shortcomings of existing technologies, this invention provides a high-precision thin film thickness detection device, aiming to solve the aforementioned problems.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A high-precision thin film thickness detection device includes a film thickness tester. The top of the film thickness tester is equipped with four sets of adaptive adjustment structures, which are located at the four corners of the top of the film thickness tester. Each set of adaptive adjustment structures is independent of the others.

[0009] The adaptive adjustment structure includes a lower support structure, which includes a mounting base. The top of the mounting base has a groove in the center, and a through arc-shaped groove is formed on one side of the top of the mounting base. A first spring is fixedly connected in the groove, and a support ball is fixedly connected to the top of the first spring. The curvature of the arc-shaped groove is adapted to the support ball.

[0010] Preferably, the adaptive adjustment structure further includes an upper support structure, which includes a fixed base. The fixed base has several sets of adjustment slots at its lower rear end. The several sets of adjustment slots are parallel and equidistant from each other. The top of the front end of the fixed base is rotatably connected to a support plate via a rotating shaft. The support plate is located directly above the support ball, and the lower part of the support plate has an arc-shaped design.

[0011] Preferably, the adaptive adjustment structure further includes a limiting structure, the limiting structure including a slider, a protrusion integrally formed and fixed on the rear side of the top of the slider, a second spring fixedly connected to the rear end of the slider, and the front end of the slider being designed to be protruding and corresponding to the adjustment groove.

[0012] Preferably, the film thickness tester includes a main body, and the top of the main body is provided with a sliding groove and a mounting groove. There are four sets of the sliding groove and the mounting groove, which are symmetrically located at the four corners of the top of the main body.

[0013] Preferably, each set of lower support structures is fixedly connected inside the corresponding mounting groove, each set of upper support structures slides longitudinally on one side inside the corresponding slide groove, and the end of the second spring away from the slider is fixed to the other side inside the corresponding slide groove.

[0014] Preferably, the main body of the device is a C1202 thin film thickness gauge.

[0015] Beneficial effects

[0016] Compared with the prior art, the present invention has the following advantages:

[0017] 1. The adaptive adjustment structure of this utility model can adapt to films of various shapes, especially irregular films, through the support ball of the lower support structure and the arc-shaped support plate of the upper support structure, thus solving the problem of limited fixing ability of conventional planar clamping methods when adapting to irregular films.

[0018] 2. The four sets of independent adaptive adjustment structures of this utility model clamp the four corners of the film, which can ensure that the film remains stable during the detection process, avoid affecting the accuracy and stability of the detection due to the film sliding or shaking, and reduce damage to the film.

[0019] 3. The height of the upper support structure of this utility model can be flexibly adjusted. Through the limiting structure, the upper support structure can be quickly and accurately adjusted to a suitable height to accommodate films of different heights, thereby improving the versatility and detection efficiency of the device. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model. Figure 1 ;

[0021] Figure 2 This is a schematic diagram of the structure of this utility model. Figure 2 ;

[0022] Figure 3 This is the utility model Figure 1 A detailed schematic diagram of a part of the image;

[0023] Figure 4 This is a schematic diagram of the adaptive adjustment structure of this utility model.

[0024] In the diagram: 1. Film thickness tester; 11. Equipment body; 12. Slide groove; 13. Mounting groove; 2. Adaptive adjustment structure; 21. Lower support structure; 211. Mounting seat; 212. First spring; 213. Support ball; 22. Upper support structure; 221. Fixed seat; 222. Adjustment groove; 223. Support plate; 23. Limiting structure; 231. Slider; 232. Protrusion; 233. Second spring. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figures 1-4 A high-precision thin film thickness detection device includes a film thickness tester 1. The top of the film thickness tester 1 is equipped with four sets of adaptive adjustment structures 2. The four sets of adaptive adjustment structures 2 are located at the four corners of the top of the film thickness tester 1, and each set of adaptive adjustment structures 2 is independent of each other.

[0027] The adaptive adjustment structure 2 includes a lower support structure 21, which includes a mounting base 211. The top of the mounting base 211 has a groove in the center, and a through arc-shaped groove is provided on one side of the top of the mounting base 211. A first spring 212 is fixedly connected in the groove, and a support ball 213 is fixedly connected to the top of the first spring 212. The curvature of the arc-shaped groove is adapted to the support ball 213.

[0028] It should be noted that during use, the four sets of adaptive adjustment structures 2 can clamp the four corners of the film to be fixed. Compared with conventional planar clamping, the lower support structure 21 can support the film from below using support balls 213. The overall spherical design of the support balls 213 can be adapted to various shapes of films. Not all films are flat; some films have uneven edges. Conventional planar clamping methods have limited fixing ability when adapting to such irregularly shaped films.

[0029] In one embodiment of this utility model, such as Figures 1-4 As shown, the adaptive adjustment structure 2 also includes an upper support structure 22. The upper support structure 22 includes a fixed seat 221. Several sets of adjustment slots 222 are provided below the rear end of the fixed seat 221. The several sets of adjustment slots 222 are parallel to each other and equidistantly designed. The front end of the fixed seat 221 is rotatably connected to a support plate 223 via a rotating shaft. The support plate 223 is located directly above the support ball 213. The lower part of the support plate 223 has an arc design.

[0030] Specifically, when clamping the film, the upper support structure 22 can work in conjunction with the lower support structure 21. The arc-shaped support plate 223 can rotate on its own. Together with the support ball 213, it can clamp films of any shape. Since the four sets of adaptive adjustment structures 2 are independent of each other, they can adapt to all four corners of the film.

[0031] In one embodiment of this utility model, such as Figures 1-4 As shown, the adaptive adjustment structure 2 also includes a limiting structure 23, which includes a slider 231. A protrusion 232 is integrally formed and fixed on the rear side of the top of the slider 231. A second spring 233 is fixedly connected to the rear end of the slider 231. The front end of the slider 231 is designed to be protruding and corresponds to the adjustment groove 222.

[0032] In one embodiment of this utility model, such as Figures 1-4 As shown, the film thickness tester 1 includes a main body 11. The top of the main body 11 is provided with a sliding groove 12 and a mounting groove 13. There are four sets of sliding grooves 12 and mounting grooves 13, which are symmetrically located at the four corners of the top of the main body 11.

[0033] In one embodiment of this utility model, such as Figures 1-4 As shown, each set of lower support structures 21 is fixedly connected inside the corresponding mounting groove 13, and each set of upper support structures 22 slides longitudinally on one side inside the corresponding slide groove 12. The end of the second spring 233 away from the slider 231 is fixed on the other side inside the corresponding slide groove 12.

[0034] Specifically, the height of the upper support structure 22 can be adjusted to accommodate films of different heights. If the film has a raised edge design, the gap height between the upper support structure 22 and the lower support structure 21 needs to be adjusted. During adjustment, the limiting structure 23 can slide inside the slide groove 12 using the protrusion 232, so that the protrusion at the front end of the slider 231 disengages from the adjustment groove 222. At this time, the upper support structure 22 can be slid longitudinally to adjust the height. After the height adjustment is completed, the protrusion 232 is released. Under the elastic force of the second spring 233, the protrusion at the front end of the slider 231 is locked in the corresponding adjustment groove 222, limiting and fixing the upper support structure 22. The height of the support ball 213 is controlled by the first spring 212. The elastic force of the first spring 212 can ensure that the support ball 213 is always close to the bottom of the support plate 223.

[0035] In one embodiment of this utility model, such as Figures 1-4 As shown, the main body of the device 11 is a C1202 thin film thickness gauge.

[0036] Specifically, this thickness gauge is a commercially available instrument. The adaptive adjustment structure 2 is an improvement made on the basis of this device. The four sets of adaptive adjustment structures 2 fix the four corners of the film, and press the probe vertically and lightly on the surface of the film to be measured to ensure good contact and constant pressure. Wait for the instrument to complete the measurement automatically, or press the measurement button to start the measurement.

[0037] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0038] Working principle: The film to be tested is placed above the film thickness tester 1, and the four sets of adaptive adjustment structures 2 begin to work. Under the elastic force of the first spring 212, the support ball 213 in the lower support structure 21 automatically adjusts its position according to the shape of the bottom of the film, providing initial support and positioning for the film. Because the support ball 213 is spherical, it can fit well with the bottom contour of various irregularly shaped films.

[0039] Next, the limiting structure 23 is operated, and the protrusion 232 slides inside the slide groove 12, causing the protrusion at the front end of the slider 231 to disengage from the adjustment groove 222. At this time, the upper support structure 22 can be slid longitudinally according to the height of the film. The support plate 223 of the upper support structure 22 is adjusted to a suitable height so that the arc-shaped surface below the support plate 223 contacts the top of the film. After the height adjustment is completed, the protrusion 232 is released, and under the elastic force of the second spring 233, the protrusion at the front end of the slider 231 is locked in the corresponding adjustment groove 222, limiting and fixing the upper support structure 22. At this time, the upper support structure 22 and the lower support structure 21 work together to tightly clamp the four corners of the film through the arc-shaped surface of the support plate 223 and the spherical surface of the support ball 213, ensuring that the film remains stable during the detection process.

[0040] After the film is fixed in place, gently press the probe of the film thickness gauge 1 vertically onto the surface of the film to be measured, ensuring good contact and constant pressure. The C1202 film thickness gauge begins operation. Its internal detection system uses a specific detection principle (such as optical or ultrasonic principles, depending on the operating mode of the thickness gauge) to detect the film thickness. Wait for the instrument to complete the measurement automatically, or press the measurement button to start the measurement. After the measurement is completed, the instrument displays the film thickness data, achieving high-precision film thickness detection.

[0041] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0042] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-precision thin film thickness detection device, comprising a film thickness tester (1), characterized in that, The film thickness tester (1) is equipped with four sets of adaptive adjustment structures (2) at its top. The four sets of adaptive adjustment structures (2) are located at the four corners of the top of the film thickness tester (1). Each set of adaptive adjustment structures (2) is independent of the others. The adaptive adjustment structure (2) includes a lower support structure (21), which includes a mounting base (211). The mounting base (211) has a groove in the center of its top end and a through arc-shaped groove on one side of its top end. A first spring (212) is fixedly connected in the groove, and a support ball (213) is fixedly connected to the top end of the first spring (212). The curvature of the arc-shaped groove is adapted to the support ball (213).

2. The high-precision thin film thickness detection device according to claim 1, characterized in that, The adaptive adjustment structure (2) also includes an upper support structure (22), which includes a fixed seat (221). Several sets of adjustment slots (222) are provided below the rear end of the fixed seat (221). The several sets of adjustment slots (222) are parallel and equidistant from each other. A support plate (223) is rotatably connected to the top front end of the fixed seat (221) via a rotating shaft. The support plate (223) is located directly above the support ball (213), and the bottom of the support plate (223) is arc-shaped.

3. The high-precision thin film thickness detection device according to claim 2, characterized in that, The adaptive adjustment structure (2) further includes a limiting structure (23), the limiting structure (23) includes a slider (231), the slider (231) has a protrusion (232) integrally formed and fixed on the rear side of the top end, the slider (231) has a second spring (233) fixedly connected to the rear end, and the front end of the slider (231) is designed to be protruding and corresponds to the adjustment groove (222).

4. The high-precision thin film thickness detection device according to claim 3, characterized in that, The film thickness tester (1) includes a main body (11), and a sliding groove (12) and a mounting groove (13) are provided at the top of the main body (11). The sliding groove (12) and the mounting groove (13) are provided in four sets and are symmetrically opened at the four corners of the top of the main body (11).

5. The high-precision thin film thickness detection device according to claim 4, characterized in that, Each set of lower support structures (21) is fixedly connected inside the corresponding mounting groove (13), and each set of upper support structures (22) slides longitudinally on one side inside the corresponding slide groove (12). The end of the second spring (233) away from the slider (231) is fixed on the other side inside the corresponding slide groove (12).

6. The high-precision thin film thickness detection device according to claim 5, characterized in that, The main body of the equipment (11) is a C1202 thin film thickness gauge.

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