Automatic feeding and discharging torsion detection equipment

Abstract

The utility model relates to torsion detection technical field, concretely is a kind of torsion detection equipment of automatic feeding and discharging, including connecting flange, motor, torsion detector, crosspiece, threaded rod, sliding block, connecting rod and clamping arm, still including connecting plate, mounting sleeve, controller, temperature sensor and cooling mechanism and chucking mechanism, the mounting sleeve is connected to the outside of torsion detector, the connecting plate is installed in the side wall of mounting sleeve, the controller is installed in the outside of connecting plate, the temperature sensor is installed in the inner wall of mounting sleeve, and is pasted with the side wall of torsion detector, cooling mechanism and chucking mechanism are all installed in the inner wall of mounting sleeve, wherein chucking mechanism is fixedly installed in the inner wall of mounting sleeve cooling mechanism, the side wall of cooling mechanism and torsion detector is pasted, when the working temperature of torsion detection equipment exceeds rated value, can realize automatic detection, and the heat dissipation cooling of torsion detection equipment is completed quickly, prevent torsion detection equipment because of working temperature excessively high and influence torsion detection value accuracy.

Description

Technical Field

[0001] This utility model relates to the field of torque detection technology, specifically to an automatic loading and unloading torque detection device. Background Technology

[0002] In the process of electronic component processing and production, when clamping and transferring components such as small PCB boards and semiconductor wafers, chip manufacturing enters mass production. A large number of wafers are processed in a single batch, and multiple processes such as photolithography, etching, and deposition need to be carried out continuously. Each process requires rapid loading and unloading to avoid production line stagnation. The semiconductor wafer components mentioned above are fragile or have high precision requirements. Therefore, there are also requirements for the clamping force of the claws in the automated loading and unloading device. Thus, a torque detection device is needed on the drive shaft of the claw to detect the clamping force of the claw in real time to prevent the semiconductor wafers from falling or being damaged due to unstable clamping force. Currently, the torque detectors used in grippers, when used in conjunction with the grippers in automated semiconductor wafer loading and unloading equipment, frequently and efficiently detect the gripping force. The elastic body inside the torque detector undergoes torsional deformation under torque, and the strain gauge, tightly bonded to the surface of the elastic body, stretches or compresses along with the elastic body's deformation. As the core sensing element, the strain gauge requires a stable excitation current during operation. Frequent deformation causes friction and resistance heating of the internal metal grid wires of the strain gauge. Under high-intensity torque, the deformation amplitude increases, and the heating becomes more pronounced. Overheating of the strain gauge can cause the torque detection value to drift (too high / too low). The gripping force of the gripper is usually controlled through a torque feedback closed-loop. If the detection value is too high, the system may mistakenly determine that the "set gripping force" has been reached and prematurely stop clamping, resulting in loose gripping and the gripped semiconductor wafer falling out. If the detection value is too low, the system will continuously increase the clamping force, causing excessive clamping and damage to the semiconductor wafer.

[0003] Therefore, an automatic loading and unloading torque detection device is proposed. Utility Model Content

[0004] The purpose of this invention is to provide an automatic loading and unloading torque testing device to solve the problem that when the torque detector performs frequent and efficient testing, the internal elastic body and strain gauge undergo frequent deformation, resulting in resistance heating and high temperature of the strain gauge, which causes the test values ​​to drift and affect the accuracy of the test values.

[0005] To achieve the above objectives, this utility model provides the following technical solution: An automatic loading and unloading torque detection device includes a connecting flange, a motor, a torque detector, a cross plate, a threaded rod, a slider, a connecting rod, and a clamping arm. It also includes a connecting plate, a mounting sleeve, a controller, a temperature sensor, a cooling mechanism, and a clamping mechanism. The mounting sleeve is fitted onto the outside of the torque detector. The connecting plate is mounted on the side wall of the mounting sleeve. The controller is mounted on the outside of the connecting plate. The temperature sensor is mounted on the inner wall of the mounting sleeve and is in contact with the side wall of the torque detector. Both the cooling mechanism and the clamping mechanism are mounted on the inner wall of the mounting sleeve, with the clamping mechanism fixing the cooling mechanism to the inner wall of the mounting sleeve. The cooling mechanism is in contact with the side wall of the torque detector. The temperature sensor detects the operating temperature of the torque detector. When the operating temperature of the torque detector exceeds a set value, the controller activates the cooling mechanism according to the feedback signal from the temperature sensor. When the cooling mechanism is activated, it reduces the operating temperature of the torque detector to within the set temperature range.

[0006] Preferably, the cooling mechanism includes a circulating pump, an inlet pipe, an outlet pipe, a heat exchange pipe, a water tank, and heat dissipation fins. The circulating pump and the water tank are respectively installed on the outside of the connecting plate. The heat exchange pipe is clamped to the inner wall of the mounting sleeve by a clamping mechanism. The heat exchange pipe is attached to the side wall of the torque detector. The inlet pipe and the outlet pipe are respectively connected to the water inlet and water outlet of the circulating pump. The inlet pipe is connected to the water tank. The end of the outlet pipe extends into the interior of the mounting sleeve and is connected to the water inlet of the heat exchange pipe. The outlet of the heat exchange pipe extends into the interior of the water tank. The heat dissipation fins are installed on the side wall of the water tank.

[0007] Preferably, the heat exchange tube is installed on the inner wall of the mounting sleeve by spiral winding and fits against the outer wall of the torque detector, and the interior of the heat exchange tube is filled with coolant.

[0008] Preferably, the clamping mechanism includes a U-shaped plate, mounting blocks, elastic springs, and a snap-fit ​​plate. The U-shaped plate is arranged in a ring and longitudinally evenly on the inner wall of the mounting sleeve. The mounting blocks are symmetrically installed on the upper and lower inner walls of the U-shaped plate. The elastic springs are connected between two symmetrically arranged mounting blocks. The snap-fit ​​plate is installed on the upper end of the bow portion of the elastic springs.

[0009] Preferably, the contact surface between the snap-fit ​​plate and the heat exchange tube is provided with an arc-shaped groove, and the heat exchange tube is snapped into the arc-shaped groove on the side wall of the snap-fit ​​plate.

[0010] Preferably, the inner wall of the mounting sleeve is symmetrically fixedly connected with multiple locking blocks, and the top surface of the torque detector is provided with multiple slots corresponding to the multiple locking blocks.

[0011] Preferably, the multiple locking blocks fixedly connected to the inner wall of the mounting sleeve are slidably engaged with the interior of the multiple locking slots opened on the periphery of the top surface of the torque detector.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. By working together with the temperature sensor and the controller, when the temperature sensor detects that the temperature in the torque detector exceeds the predetermined value, the controller will activate the cooling mechanism. The cooling mechanism drives the coolant to circulate around the outer wall of the torque detector, thereby quickly cooling the torque detector and preventing inaccurate detection values ​​due to temperature rise.

[0013] 2. The heat exchange tube in the cooling mechanism is installed on the inner wall of the mounting sleeve by a screw-coil clamping mechanism, and the side wall of the heat exchange tube is in contact with the side wall of the torque detector. This design enables the heat exchange tube to quickly exchange heat with the inside of the torque detector when the circulating pump drives the coolant to flow in the heat exchange tube, thereby achieving the purpose of rapid cooling. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is an exploded structural diagram of the torque detector and mounting sleeve in this utility model; Figure 3 This is a partial sectional view of the mounting sleeve in this utility model; Figure 4 This is an exploded structural diagram of the clamping mechanism in this utility model.

[0015] In the diagram: 1. Connecting flange; 2. Motor; 3. Torque detector; 4. Horizontal plate; 5. Threaded rod; 6. Slider; 7. Connecting rod; 8. Clamping arm; 9. Connecting plate; 10. Mounting sleeve; 11. Controller; 12. Temperature sensor; 13. Cooling mechanism; 1301. Circulating pump; 1302. Inlet pipe; 1303. Outlet pipe; 1304. Heat exchanger tube; 1305. Water tank; 1306. Heat dissipation fins; 14. Clamping mechanism; 1401. U-shaped plate; 1402. Mounting block; 1403. Elastic spring; 1404. Snap-fit ​​plate; 15. Clamping block; 16. Clamping slot. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. However, the embodiments described below are only some embodiments of the present utility model, and not all of them. If other embodiments are obtained by those skilled in the art without creative effort, they shall fall within the protection scope of the present utility model.

[0017] As one embodiment of this utility model, refer to Figures 1 to 4The system includes a connecting flange 1, a motor 2, a torque detector 3, a horizontal plate 4, a threaded rod 5, a slider 6, a connecting rod 7, and a clamping arm 8. The connecting flange 1 is bolted to the end of the automated robotic arm. The motor 2 is fixedly mounted on the bottom of the connecting flange 1. The rotating shaft of the torque detector 3 is connected to the output shaft of the motor 2. A top plate is bolted to the top surface of the torque detector 3, and the top plate is fixedly connected to the connecting flange 1 by a screw. The screw prevents the torque detector 3 from rotating synchronously when the output shaft of the motor 2 rotates. The horizontal plate 4 is fixedly mounted on the bottom of the torque detector 3, and the rotating shaft of the torque detector 3 passes through it. The horizontal plate 4 and threaded rod 5 are fixedly connected to the end of the rotating shaft of the torque detector 3. The slider 6 is threaded onto the outside of the threaded rod 5. The clamping arms 8 and connecting rods 7 are arranged symmetrically. One end of each connecting rod 7 is symmetrically rotatably connected to both sides of the slider 6. The two clamping arms 8 are symmetrically rotatably installed at the bottom of the horizontal plate 4. The other ends of each connecting rod 7 are rotatably connected to the side walls of the two clamping arms 8. The system also includes a connecting plate 9, a mounting sleeve 10, a controller 11, a temperature sensor 12, a cooling mechanism 13, and a clamping mechanism 14. A rubber pad is adhered to the top surface of the mounting sleeve 10. The top plate is bolted to the top surface of the torque detector 3. This allows the rubber pad to be squeezed and installed between the top plate and the mounting sleeve 10, thereby improving the stability of the mounting sleeve 10. The mounting sleeve 10 is fitted onto the outside of the torque detector 3. The connecting plate 9 is installed on the side wall of the mounting sleeve 10, and the controller 11 is installed on the outside of the connecting plate 9. The temperature sensor 12 is installed on the inner wall of the mounting sleeve 10 and fits against the side wall of the torque detector 3. The controller 11 and the temperature sensor 12 are electrically connected. When the temperature sensor 12 detects that the internal temperature of the torque detector 3 has risen and is higher than a predetermined temperature, the temperature sensor 12 will transmit an electrical signal to the controller 11, and the controller 11 will analyze the signal. After the data is collected, the cooling mechanism 13 is activated to rapidly cool the temperature inside the torque detector 3. Both the cooling mechanism 13 and the clamping mechanism 14 are installed on the inner wall of the mounting sleeve 10. The clamping mechanism 14 fixes the cooling mechanism 13 to the inner wall of the mounting sleeve 10. The cooling mechanism 13 is in contact with the side wall of the torque detector 3. The temperature sensor 12 detects the working temperature of the torque detector 3. When the working temperature of the torque detector 3 exceeds the set value, the controller 11 activates the cooling mechanism 13 according to the feedback signal of the temperature sensor 12. When the cooling mechanism 13 is activated, it reduces the working temperature of the torque detector 3 to the set temperature range.

[0018] As one embodiment of this utility model, refer to Figures 2 to 4The cooling mechanism 13 includes a circulating pump 1301, an inlet pipe 1302, an outlet pipe 1303, a heat exchange tube 1304, a water tank 1305, and heat dissipation fins 1306. The circulating pump 1301 and the water tank 1305 are respectively installed on the outside of the connecting plate 9. The heat exchange tube 1304 is clamped to the inner wall of the mounting sleeve 10 by a clamping mechanism 14. The heat exchange tube 1304 is attached to the side wall of the torque detector 3. The heat exchange tube 1304 is wide and flat. 04 can further increase the contact area with the side wall of the torque detector 3, thereby further improving the heat exchange effect between the coolant inside the heat exchange tube 1304 and the torque detector 3. The inlet pipe 1302 and the outlet pipe 1303 are respectively connected to the water inlet and outlet of the circulating pump 1301. The end of the inlet pipe 1302 is connected to the water tank 1305, and the end of the outlet pipe 1303 extends into the interior of the mounting sleeve 10 and is connected to the water inlet of the heat exchange tube 1304. The heat exchange tube 1304 The outlet extends into the interior of the water tank 1305. Heat dissipation fins 1306 are installed on the side wall of the water tank 1305, extending through the inside and outside of the tank. The heat dissipation fins 1306 are arranged horizontally. When the automated loading and unloading robotic arm clamps the workpiece and moves it, it can simultaneously move the water tank 1305 and the heat dissipation fins 1306 installed on its side wall, thereby rapidly cooling the heat dissipation fins 1306. This cools the water in the water tank 1305 after heat exchange with the torque detector 3, and, in conjunction with the circulating pump 1301, completes the circulation of the coolant. The heat exchange tube 1304 is installed on the inner wall of the mounting sleeve 10 in a spiral winding manner and adheres to the outer wall of the torque detector 3. The interior of the heat exchange tube 1304 is filled with coolant. The spiral winding method allows the coolant to flow from top to bottom along the side wall of the torque detector 3, increasing the contact area between the heat exchange tube 1304 and the side wall of the torque detector 3, further improving the heat exchange effect.

[0019] As one embodiment of this utility model, refer to Figure 3 and Figure 4The clamping mechanism 14 includes a U-shaped plate 1401, mounting blocks 1402, elastic springs 1403, and a snap-fit ​​plate 1404. The U-shaped plates 1401 are arranged in a ring, longitudinally and evenly distributed on the inner wall of the mounting sleeve 10. Multiple U-shaped plates 1401 are arranged to correspond to the rotation direction of the heat exchange tube 1304, used to snap the heat exchange tube 1304 into the interior of the U-shaped plates 1401 and fix the heat exchange tube 1304. The mounting blocks 1402 are symmetrically installed on the upper and lower inner walls of the U-shaped plates 1401. The elastic springs 1403 are connected between two symmetrically arranged mounting blocks 1402. The snap-fit ​​plate 1404 is installed on the upper end of the arch of the elastic springs 1403. The elastic springs 1403 push the snap-fit ​​plate 1404 to snap and fix the heat exchange tube 1304. This elastic component saves space and is easy to install. The snap-fit ​​plate 1404 and the heat exchange tube 1304 are connected in a ring. The contact surface of plate 4 has an arc-shaped groove, and the heat exchange tube 1304 is snapped into the arc-shaped groove on the side wall of the snap-fit ​​plate 1404. Thanks to the arc-shaped groove on the contact surface between the snap-fit ​​plate 1404 and the heat exchange tube 1304, when installing the heat exchange tube 1304, after the side wall of the heat exchange tube 1304 is attached between the two snap-fit ​​plates 1404, the heat exchange tube 1304 is pushed and pressed into the U-shaped plate 1401. At this time, with the cooperation of the elastic spring 1403, This causes the two snap-fit ​​plates 1404 to separate from each other until the heat exchange tube 1304 is snapped into the inside of the arc groove. Similarly, when it is necessary to remove the heat exchange tube 1304, simply pull the heat exchange tube 1304 outward. Under the action of the arc groove, the snap-fit ​​plates 1404 will push the elastic spring 1403 to deform, thereby causing the two snap-fit ​​plates 1404 to separate from each other until the heat exchange tube 1304 is pulled out of the inside of the U-shaped plate 1401.

[0020] As one embodiment of this utility model, refer to Figures 2 to 3 The inner wall of the mounting sleeve 10 is symmetrically fixed with multiple locking blocks 15. The top surface of the torque detector 3 is provided with multiple slots 16 corresponding to the multiple locking blocks 15. The multiple locking blocks 15 fixedly connected to the inner wall of the mounting sleeve 10 are slidably engaged with the interior of the multiple slots 16 opened on the top surface of the torque detector 3. When the mounting sleeve 10 is fitted onto the outside of the torque detector 3, the multiple locking blocks 15 on the inner wall of the mounting sleeve 10 are slidably engaged with the interior of the multiple slots 16 opened on the side wall of the torque detector 3. The locking blocks 15 and the slots 16 engage with each other to limit the position of the mounting sleeve 10 and prevent rotation, which would cause the mounting sleeve 10 to be unstable during installation.

[0021] Working principle: During use, the rotation of motor 2 drives the shaft of the torque detector 3 below to rotate. Simultaneously, the shaft of the torque detector 3 drives the threaded rod 5 connected to its end to rotate. The threaded rod 5 drives the slider 6 to move up and down, thereby, with the cooperation of the connecting rod 7, driving the clamping arm 8 to clamp or release. When the clamping arm 8 clamps the material, the elastic body and strain gauge in the torque detector 3 will deform accordingly. The torque detector 3 will detect the torque value to ensure stable clamping of the workpiece by the clamping arm 8. In mass production, the robotic arm and clamping arm 8 need to work together quickly to complete efficient loading and unloading. Frequent deformation can cause friction of the metal wires inside the strain gauge. Resistance heating occurs, and the deformation amplitude increases under high-intensity torque, resulting in more significant heating. Overheating of the strain gauge can cause the torque detection value to drift. At this time, the temperature sensor 12 will detect the temperature of the torque detector 3. If the temperature exceeds the rated temperature, in order to prevent the torque detector 3 from making errors due to excessive temperature, the controller 11 will start the circulation pump 1301 in the cooling mechanism 13 to circulate the coolant along the outer wall of the torque detector 3, so as to achieve heat exchange between the coolant and the torque detector 3 and quickly cool down the torque detector 3. When the temperature sensor 12 detects that the temperature is lower than the rated value, the controller 11 will automatically stop the operation of the circulation pump 1301. When the controller 11 automatically starts the circulation pump 1301, it pumps the coolant in the water tank 1305 into the outlet pipe 1303 through the inlet pipe 1302. Then, the coolant is introduced into the heat exchange tube 1304 through the outlet pipe 1303 and the inlet of the heat exchange tube 1304. At the same time, the coolant in the heat exchange tube 1304 enters the water tank 1305 through the outlet. Then, the coolant in the water tank 1305 is cooled again through the heat dissipation fins 1306. The cooled water in the water tank 1305 will enter the circulation pump 1301 again through the inlet pipe 1302. In this way, the coolant circulates and cools in the heat exchange tube 1304, improving the heat exchange effect with the torque detector 3. When the heat exchange tube 1304 needs to be installed, the side wall of the heat exchange tube 1304 can be placed between the two snap-fit ​​plates 1404. Then, the heat exchange tube 1304 is pressed into the two U-shaped plates 1401. At this time, because the side wall of the heat exchange tube 1304 is arc-shaped, it will push the two snap-fit ​​plates 1404 to separate from each other and push the elastic spring 1403 to deform until the heat exchange tube 1304 is snapped between the two snap-fit ​​plates 1404. Similarly, when the heat exchange tube 1304 needs to be disassembled, the heat exchange tube 1304 is pulled outwards directly. The two snap-fit ​​plates 1404 can be pushed downwards again to separate from each other with the cooperation of the arc groove until the heat exchange tube 1304 is pulled out.

[0022] Although the embodiments of this utility model have been described in detail with reference to the accompanying drawings, those skilled in the art can make changes, modifications, substitutions and variations to these embodiments without departing from the principles and spirit of this utility model. The appended claims and their equivalents define the scope of this utility model.

Claims

1. An automatic loading and unloading torque detection device, comprising a connecting flange (1), a motor (2), a torque detector (3), a cross plate (4), a threaded rod (5), a slider (6), a connecting rod (7), and a clamping arm (8), characterized in that: It also includes a connecting plate (9), a mounting sleeve (10), a controller (11), a temperature sensor (12), a cooling mechanism (13), and a clamping mechanism (14). The mounting sleeve (10) is fitted onto the outside of the torque detector (3). The connecting plate (9) is installed on the side wall of the mounting sleeve (10). The controller (11) is installed on the outside of the connecting plate (9). The temperature sensor (12) is installed on the inner wall of the mounting sleeve (10) and fits against the side wall of the torque detector (3). The cooling mechanism (13) and the clamping mechanism (14) are both installed on the mounting sleeve. (10) inner wall, wherein the clamping mechanism (14) fixes the cooling mechanism (13) to the inner wall of the mounting sleeve (10), the cooling mechanism (13) is attached to the side wall of the torque detector (3), the temperature sensor (12) detects the working temperature of the torque detector (3), when the working temperature of the torque detector (3) exceeds the set value, the controller (11) starts the cooling mechanism (13) according to the feedback signal of the temperature sensor (12), and the cooling mechanism (13) reduces the working temperature of the torque detector (3) to the set temperature range when it starts.

2. The torque detection device for automatic loading and unloading according to claim 1, characterized in that: The cooling mechanism (13) includes a circulating pump (1301), an inlet pipe (1302), an outlet pipe (1303), a heat exchange tube (1304), a water tank (1305), and heat dissipation fins (1306). The circulating pump (1301) and the water tank (1305) are respectively installed on the outside of the connecting plate (9). The heat exchange tube (1304) is clamped and installed on the inner wall of the mounting sleeve (10) by a clamping mechanism (14). The heat exchange tube (1304) is attached to the side wall of the torque detector (3). The inlet pipe (1302) and outlet pipe (1303) are respectively connected to the inlet and outlet of the circulating pump (1301). The inlet pipe (1302) is connected to the water tank (1305). The end of the outlet pipe (1303) extends into the interior of the mounting sleeve (10) and is connected to the inlet of the heat exchange tube (1304). The outlet of the heat exchange tube (1304) extends into the interior of the water tank (1305). The heat dissipation fins (1306) are installed on the side wall of the water tank (1305).

3. The torque detection device for automatic loading and unloading according to claim 2, characterized in that: The heat exchange tube (1304) is installed on the inner wall of the mounting sleeve (10) by spiral winding and is attached to the outer wall of the torque detector (3). The interior of the heat exchange tube (1304) is filled with coolant.

4. The torque detection device for automatic loading and unloading according to claim 1, characterized in that: The clamping mechanism (14) includes a U-shaped plate (1401), a mounting block (1402), an elastic spring (1403), and a snap-fit ​​plate (1404). The U-shaped plate (1401) is arranged in a ring and is evenly distributed longitudinally on the inner wall of the mounting sleeve (10). The mounting blocks (1402) are symmetrically installed on the upper and lower inner walls of the U-shaped plate (1401). The elastic spring (1403) is connected between two symmetrically arranged mounting blocks (1402). The snap-fit ​​plate (1404) is installed on the upper end of the bow of the elastic spring (1403).

5. The torque detection device for automatic loading and unloading according to claim 4, characterized in that: The contact surface between the snap-fit ​​plate (1404) and the heat exchange tube (1304) is provided with an arc-shaped groove, and the heat exchange tube (1304) is snapped into the arc-shaped groove on the side wall of the snap-fit ​​plate (1404).

6. The torque detection device for automatic loading and unloading according to claim 1, characterized in that: The inner wall of the mounting sleeve (10) is symmetrically fixed with multiple locking blocks (15), and the top surface of the torque detector (3) is provided with multiple slots (16) corresponding to the multiple locking blocks (15).

7. The torque detection device for automatic loading and unloading according to claim 6, characterized in that: The multiple locking blocks (15) fixedly connected to the inner wall of the mounting sleeve (10) are respectively slidably locked into the multiple slots (16) opened on the periphery of the top surface of the torque detector (3).

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