A finished product appearance inspection apparatus for semiconductor chip packaging

CN224888535UActive Publication Date: 2026-10-23FURE AUTOMATION EQUIP (WUXI) CO LTD
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Patent Information

Application Number
CN202522152989.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-11
Publication Date
2026-10-23
Estimated Expiration
2035-10-11

AI Technical Summary

Technical Problem

[0002]在半导体封装后段制程中,自动光学检测(AOI)系统需对器件表面激光刻印字符,进行识别,当前行业普遍采用垂直俯视成像架构:工业相机镜头轴线垂直于器件平面,配合同轴或环形光源获取表面图像,然而表面字符如果非正位在识别时会出现错误,需要将其调整为正位进行识别,现有的都是采用人工摆正,这样会导致检测效率低下,为此,我们提出一种半导体芯片封装用成品外观检测设备

Benefits of technology

通过电机输出端与转杆的刚性连接,转杆带动内环使平台绕轴旋转运动,从而实现芯片载板方位自动校正,消除人工摆正环节。

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Abstract

The utility model relates to detection equipment technical field provides a kind of finished product appearance detection equipment for semiconductor chip packaging, including side frame and fixed on the crossbeam of side frame, motor is installed in crossbeam bottom, outer ring is installed in crossbeam upper portion, concentric suspension inner ring is set in the inner side of outer ring, and platform is fixedly connected in the bottom of inner ring, and through groove is set in the central of platform. Through the rigid connection of motor output end and rotating rod, rotating rod drives inner ring to make platform rotate around shaft movement, to realize chip carrier plate orientation automatic correction, eliminate artificial alignment link.
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Description

Technical Field

[0001] This utility model relates to the field of testing equipment technology, specifically to a finished product appearance testing device for semiconductor chip packaging. Background Technology

[0002] In the back-end process of semiconductor packaging, the Automated Optical Inspection (AOI) system needs to identify laser-engraved characters on the surface of the device. Currently, the industry generally adopts a vertical top-down imaging architecture: the axis of the industrial camera lens is perpendicular to the plane of the device, and a coaxial or ring light source is used to obtain the surface image. However, if the surface characters are not in the correct position, errors will occur during recognition, and they need to be adjusted to be in the correct position for recognition. Existing methods all use manual alignment, which leads to low inspection efficiency. To address this, we propose a finished product appearance inspection device for semiconductor chip packaging. Utility Model Content

[0003] In view of the shortcomings of the prior art, this utility model provides a finished product appearance inspection device for semiconductor chip packaging, so as to solve the problems existing in the prior art. To achieve the above objectives, this utility model provides the following technical solution: A finished product appearance inspection device for semiconductor chip packaging includes a side frame and a crossbeam fixed on the side frame. A motor is installed at the bottom of the crossbeam, an outer ring is installed at the top of the crossbeam, an inner ring is concentrically suspended inside the outer ring, a platform is fixed to the bottom of the inner ring, and a through slot is opened in the center of the platform.

[0004] Preferably, the output end of the motor is coaxially fixed to a rotating rod, the extension end of the rotating rod is fixed to a roller, the roller slides against the upper surface of the outer ring, and the rotating rod is rigidly connected to the inner ring.

[0005] Preferably, grooves are formed on both sides of the through groove, and a limiting plate is hinged in the groove through a rotating column. The limiting plate is composed of a straight plate and an arc plate. The end of the straight plate is connected to the inner wall of the groove through a spring, and the concave surface of the arc plate faces the inlet direction of the through groove.

[0006] Preferably, one end of the spring is connected to the limiting plate, and the other end is connected to the inner wall of the groove.

[0007] Preferably, the convex surface of the limiting arc plate at the inlet of the through groove points to the central axis of the through groove, and the concave surface of the limiting arc plate at the outlet of the through groove points to the central axis of the through groove.

[0008] Preferably, the outer circumference is secured to the uprights of the side frame by at least three connecting plates.

[0009] Preferably, the rotating rod extends radially to the inner ring and is connected and fixed.

[0010] This invention provides a finished product appearance inspection device for semiconductor chip packaging. It has the following beneficial effects: Through the rigid connection between the motor output end and the rotating rod, the rotating rod drives the inner ring to make the platform rotate around the axis, thereby realizing automatic correction of the chip carrier board orientation and eliminating the manual alignment process.

[0011] As the platform rotates, the corners of the carrier plate engage with the convex / concave surfaces of the limiting plate's arc plate, creating a mechanical lock that prevents the carrier plate from slipping radially, thus ensuring high-speed testing stability. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This utility model Figure 1 A frontal view diagram; Figure 3 This utility model Figure 1 Bottom diagram; Figure 4 This utility model Figure 1 Partial structural diagram; Figure 5 This utility model Figure 1 A schematic diagram of the limiting piece.

[0013] In the diagram: 1. Side frame; 11. Outer ring; 12. Inner ring; 13. Motor; 14. Rotating rod; 15. Roller; 2. Platform; 21. Limiting plate; 22. Rotating column; 23. Spring. Detailed Implementation

[0014] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, what is described is only a part of this utility model, not all of it. Based on this utility model, all other inventions obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0015] See attached document Figure 1-5 A semiconductor chip packaging finished product appearance inspection equipment includes a side frame 1, a crossbeam fixed on the side frame (1), a motor 13 installed at the bottom of the crossbeam, and an outer ring 11 installed at the top of the crossbeam; It also includes an inner ring 12 that is concentrically arranged with the outer ring 11, and the inner ring 12 is suspended on the crossbeam; The output end of the motor 13 passes through the crossbeam and is coaxially arranged with the outer ring 11. Around the output end of the motor 13, there is a rotating rod 14 that extends to the inner ring 12 and is connected to the inner ring 12, so that the rotating rod 14 and the inner ring 12 form a whole. A roller 15 is also connected to the extended end of the rotating rod 14. The roller 15 is located on the outer ring 11. When the motor 13 drives the rotating rod 14 to rotate, the roller 15 slides along the outer ring 11.

[0016] The outer ring 11 is connected to the side frame 1 by several connecting plates.

[0017] Platform 2 is also installed on the outer ring 11. A through slot is opened in the center of platform 2 to accommodate the chip carrier. When the pushing device pushes the chip carrier from the inlet of the through slot to the designated position, the optical detection system takes a picture and identifies it. After completion, the pushing device continues to push the chip carrier until it is detached from the through slot. Grooves aligned with the direction of the through groove are formed on both sides of the through groove. A rotating post 22 is provided in the groove, and the rotating post 22 is installed on both sides of the inlet and outlet of the through groove. A limiting plate 21 is provided on the arc-shaped surface of the rotating post 22. The limiting plate 21 is divided into a straight plate and an arc plate. The straight plate is connected to the rotating post 22, and the concave surface of the arc plate is set in the inlet direction of the through groove. A spring 23 is also connected to the straight plate of the limiting plate 21. The spring 23 is connected to the inner wall of the groove to facilitate the resetting of the limiting plate 21. When the feeding device pushes the chip carrier, the chip carrier squeezes the limiting piece 21 located at the inlet and rotates it around the rotating column 22 towards both sides of the through groove. At this time, the spring 23 at the inlet contracts and continues to push the chip carrier to the designated position. Then, the spring 23 at the inlet rebounds, and the side of the chip carrier near the inlet contacts the convex surface of the arc plate of the limiting piece 21 at the inlet, and the side of the chip carrier near the outlet abuts against the concave surface of the arc plate of the limiting piece 21 at the outlet, forming a limit. When the motor 13 drives the platform 2 to rotate, the corner of the chip carrier corresponds to the convex and concave surfaces of the arc plate of the limiting piece 21, providing resistance and preventing the chip carrier from slipping out of the through slot. Continue pushing the chip carrier, and the chip carrier will spring back the limiting piece 21 at the exit until the chip carrier is detached. The spring 23 will drive the limiting piece 21 to reset and enter the test state, eliminating the need for manual board removal and reset, thus improving efficiency.

[0018] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0019] The above description is only used to illustrate the technical solutions of this utility model, and is not intended to limit it. Although the utility model has been described in detail with reference to the foregoing, those skilled in the art should understand that modifications can still be made to the foregoing technical solutions, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the various technical solutions of this utility model.

Claims

1. A finished product appearance inspection device for semiconductor chip packaging, comprising a side frame (1) and a crossbeam fixed on the side frame (1), characterized in that: A motor (13) is installed at the bottom of the crossbeam; An outer ring (11) is installed on the upper part of the crossbeam, and an inner ring (12) is concentrically suspended on the inner side of the outer ring (11). The bottom of the inner ring (12) is fixed to the platform (2), and a through slot is opened in the center of the platform (2).

2. The semiconductor chip packaging finished product appearance inspection equipment as described in claim 1, characterized in that: The output end of the motor (13) is coaxially fixed to the rotating rod (14), and the extension end of the rotating rod (14) is fixed to the roller (15). The roller (15) slides against the upper surface of the outer ring (11), and the rotating rod (14) is rigidly connected to the inner ring (12).

3. The finished product appearance inspection equipment for semiconductor chip packaging as described in claim 1, characterized in that: The two side walls of the through groove are provided with grooves, and the limiting plate (21) is hinged in the groove by a rotating column (22). The limiting plate (21) is composed of a straight plate and an arc plate. The end of the straight plate is connected to the inner wall of the groove by a spring (23), and the concave surface of the arc plate faces the inlet direction of the through groove.

4. The finished product appearance inspection equipment for semiconductor chip packaging as described in claim 3, characterized in that: One end of the spring (23) is connected to the straight plate of the limiting piece (21), and the other end is connected to the inner wall of the groove.

5. The finished product appearance inspection equipment for semiconductor chip packaging as described in claim 3, characterized in that: The convex surface of the limiting plate (21) at the inlet of the channel points to the central axis of the channel, and the concave surface of the limiting plate (21) at the outlet of the channel points to the central axis of the channel.

6. The finished product appearance inspection equipment for semiconductor chip packaging as described in claim 1, characterized in that: The outer ring (11) is secured to the uprights of the side frame (1) by at least three connecting plates.

7. The semiconductor chip packaging finished product appearance inspection equipment as described in claim 2, characterized in that: The rotating rod (14) extends radially to the inner ring (12) and is fixedly connected.