Mini yz axis device applied to semiconductor detection

Abstract

The utility model relates to a MiniYZ axle device for semiconductor detection, Z direction transmission mechanism includes Z axle precision motor, Z axle screw rod and Z axle lift fixed base, Z axle screw rod is connected with the output end transmission of Z axle precision motor, Z axle lift fixed base is screwed on Z axle screw rod, Y direction transmission structure includes Y axle precision motor, Y axle screw rod, wedge seat and wedge reversing block, the output end of Y axle precision motor is connected with Y axle screw rod transmission, and the nut fixed block is screwed on Y axle screw rod, wedge reversing block and wedge seat are connected through inclined plane sliding, and are connected with nut fixed block through Y direction guide rail sliding, MiniYZ axle mounting plate is connected through Z direction guide rail with wedge reversing block sliding, and is connected through Y direction decoupling guide rail with Z axle lift fixed base sliding. Realize the immobility of camera Y direction movement process Z direction, Y direction immobility when Z direction movement, and Y direction and Z direction can move simultaneously.

Description

Technical Field

[0001] This utility model relates to glass panel inspection equipment, specifically, to a MiniYZ axis device for semiconductor inspection. Background Technology

[0002] Panel inspection equipment consists of: a gantry, a camera, and a stage. The panel is attached to the stage, and the gantry and moving camera inspect the panel.

[0003] To improve the inspection efficiency of large-size panel products, multiple cameras are installed on a gantry for simultaneous inspection. However, during the gantry's movement, positional deviations occur on both sides, causing the cameras to be out of alignment and preventing synchronous inspection.

[0004] The panel appears out of focus during the detection process due to the flatness of the stage.

[0005] To address the above issues, the camera needs to be adjusted along the gantry movement direction (Y direction) and focused in the Z direction, with a movement accuracy required to reach the micrometer level. Utility Model Content

[0006] The technical problem to be solved by this utility model is to provide a MiniYZ axis device for semiconductor detection, in which the Y-axis movement and Z-axis movement of the camera are required to be independent of each other: the Z-axis does not move during the Y-axis movement, the Y-axis does not move during the Z-axis movement, and the Y-axis and Z-axis can move simultaneously.

[0007] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A MiniYZ axis device for semiconductor testing includes a MiniYZ axis mounting plate, and a Y-axis transmission structure and a Z-axis transmission structure fixed on the same MiniYZ axis mounting base. The Z-axis transmission mechanism includes a Z-axis precision motor, a Z-axis lead screw, and a Z-axis lifting and fixing seat. The Z-axis lead screw is connected to the output end of the Z-axis precision motor, and the Z-axis lifting and fixing seat is threaded onto the Z-axis lead screw. The Y-axis transmission structure includes a Y-axis precision motor, a Y-axis lead screw, a wedge-shaped seat, and a wedge-shaped reversing block; the output end of the Y-axis precision motor is connected to the Y-axis lead screw and transmission, and a nut fixing block is threaded onto the Y-axis lead screw; the wedge reversing block is slidably connected to the wedge seat via an inclined surface, and is slidably connected to the nut fixing block via a Y-axis guide rail; The Z-axis lifting and fixing seat and the nut fixing block are both slidably connected to the MiniYZ axis mounting seat; the MiniYZ axis mounting plate is slidably connected to the wedge-shaped reversing block through the Z-guide rail, and is slidably connected to the Z-axis lifting and fixing seat through the Y-direction decoupling guide rail.

[0008] The beneficial effects of this utility model are as follows: Z-axis motion is driven by a Z-axis precision motor, which drives the Z-axis lead screw to move the Z-axis lifting and fixing seat. Y-axis decoupling is achieved through the guide rail. Y-axis motion is driven by a Y-axis precision motor, which drives the Y-axis lead screw to move the nut fixing block. Since the nut fixing block and the wedge-shaped reversing block are connected through the Y-axis guide rail, and under the action of the inclined surface of the wedge-shaped seat, the Z-axis motion of the nut fixing block is converted into the Y-axis motion of the wedge-shaped reversing block. The Z-axis guide rail and the decoupling guide rail enable the MiniYZ axis mounting plate to move in both the Z and Y directions.

[0009] Based on the above technical solution, the present invention can be further improved as follows.

[0010] Furthermore, the Y-axis transmission structure and the Z-axis transmission structure are fixed on the same MiniYZ axis mounting base, and the Z-axis lead screw is parallel to the Y-axis lead screw.

[0011] The beneficial effect of adopting the above-mentioned further solution is that the Y-axis movement of the wedge-shaped reversing block driven by the Y-axis lead screw is consistent with the movement direction of the decoupling guide rail, and the Z-axis movement of the Z-axis lifting fixed seat driven by the Z-axis lead screw is consistent with the movement direction of the Z-axis guide rail on the wedge-shaped reversing block.

[0012] Furthermore, the Z-axis transmission structure also includes a Z-axis bearing housing and a Z-axis free end bearing housing, and the Z-axis lead screw is rotatably connected to the Z-axis bearing housing and the Z-axis free end bearing housing.

[0013] The advantage of adopting the above-mentioned further solution is that it restricts the position of the Z-axis lead screw and ensures the precise rotation of the Z-axis lead screw through the bearings at both ends.

[0014] Furthermore, the Z-axis precision motor is fixed to the MiniYZ-axis mounting base by an L-shaped plate, and its output end passes through the L-shaped plate and is connected to the Z-axis lead screw via a Z-axis coupling.

[0015] The advantages of adopting the above-mentioned further solution are that the Z-axis precision motor is fixed by the L-shaped plate, and the coupling facilitates the disassembly, maintenance and replacement of the Z-axis precision motor and the Z-axis lead screw.

[0016] Furthermore, a Z-axis grating ruler is fixed on the MiniYZ axis mounting base next to the Z-axis lifting and fixing base, and a Z-axis reading head is fixed on the Z-axis lifting and fixing base. The Z-axis grating ruler feeds back the Z-axis displacement of the Z-axis lifting and fixing base through the Z-axis reading head.

[0017] The beneficial effect of adopting the above-mentioned further solution is that the Z-axis reading head and Z-axis grating ruler provide real-time feedback on the position of the Z-axis lifting and fixing seat, thereby achieving closed-loop control and improving motion accuracy.

[0018] Furthermore, a Z-axis photoelectric switch is fixed to the side of the MiniYZ axis mounting base located next to the Z-axis transmission mechanism, and a Z-axis sensing plate is fixed to one side of the Z-axis lifting and fixing base. The Z-axis sensing plate and the Z-axis photoelectric switch cooperate with each other to limit the Z-axis displacement of the Z-axis lifting and fixing base.

[0019] The advantage of adopting the above-mentioned further solution is that the travel distance of the Z-axis movement is limited by the photoelectric limit switch.

[0020] Furthermore, the wedge-shaped seat is fixed on the MiniYZ axis mounting base, and there are two sets of wedge-shaped reversing blocks. Both sets of wedge-shaped reversing blocks are slidably connected to the wedge-shaped seat through inclined surfaces. The Y-axis lead screw has a double thread structure and is connected to two sets of nut fixing blocks by two sets of opposite threads. The two sets of nut fixing blocks are slidably connected to two sets of wedge-shaped reversing blocks by two sets of Y-guide rails.

[0021] The beneficial effect of adopting the above-mentioned further solution is that the double-threaded Y-axis screw drives two sets of wedge-shaped reversing blocks to move in opposite directions or in opposite directions, while simultaneously moving in the same direction in the Y-axis. The two sets of wedge-shaped reversing blocks are connected to the MiniYZ axis mounting plate through the Z-axis guide rail, which improves the connection stability between the Y-axis motion mechanism and the MiniYZ axis mounting plate.

[0022] Furthermore, the Y-axis precision motor is fixed to the MiniYZ axis mounting base by an L-shaped plate, and its output end passes through the L-shaped plate and is connected to the Y-axis lead screw via a Y-axis coupling.

[0023] The advantages of adopting the above-mentioned further solution are that the Y-axis precision motor is fixed by the L-shaped plate, and the coupling facilitates the disassembly, maintenance, and replacement of the Y-axis precision motor and the Y-axis lead screw. Furthermore, a Y-axis grating ruler is fixed on one side of one of the sets of wedge-shaped commutator blocks on the wedge-shaped seat, and a Y-axis reading head is fixed on the corresponding wedge-shaped commutator block. The Y-axis grating ruler feeds back the Y-axis displacement of the corresponding wedge-shaped commutator block through the Y-axis reading head.

[0024] The beneficial effect of adopting the above-mentioned further scheme is that the position of the wedge-shaped commutator is fed back in real time by using the Y-axis reading head and the Y-axis grating ruler to realize closed-loop control and improve motion accuracy.

[0025] Furthermore, a Y-axis photoelectric switch is fixed on one side of another set of wedge-shaped commutator blocks, and a Y-axis sensing plate is fixed on one side of the corresponding wedge-shaped commutator block. The Y-axis sensing plate and the Y-axis photoelectric switch cooperate with each other to limit the Y-axis displacement of the wedge-shaped commutator block.

[0026] The advantage of adopting the above-mentioned further solution is that the travel distance of the Z-axis movement is limited by the photoelectric limit switch. Attached Figure Description

[0027] Figure 1 A schematic diagram of the MiniYZ axis device provided by this utility model (I); Figure 2 Schematic diagram (II) of the MiniYZ axis device provided by this utility model; Figure 3 This is a schematic diagram of the overall structure of the MiniYZ axis device provided by this utility model.

[0028] The attached diagram lists the components represented by each number as follows: 1. Z-axis precision motor; 2. Z-axis coupling; 3. Z-axis bearing housing; 4. Z-axis photoelectric switch; 5. Z-axis sensing plate; 6. Z-axis reading head; 7. Z-axis grating ruler; 8. Z-axis lifting fixing seat; 9. First lead screw nut; 10. Z-axis hard limit switch; 11. Z-axis free end bearing housing; 12. Z-axis lead screw; 13. Decoupling guide rail; 14. Y-axis precision motor; 15. Y-axis coupling; 16. Y-axis bearing housing; 17. Limit block; 18. First wedge-shaped reversing block; 19. First mounting plate; 20. First Y-axis guide rail; 21. Z-axis guide rail; 22. Second lead screw nut; 23. Nut fixing block; 24. Y-axis lead screw; 25. Y-axis photoelectric switch; 26. Y-axis sensing plate; 27. Wedge seat; 28. MiniYZ-axis mounting base; 29. ​​Second wedge-shaped reversing block; 30. Second mounting plate; 31. Second Y-axis guide rail; 32. Y-axis reading head; 33. Y-axis grating ruler; 34. MiniYZ-axis mounting plate. Detailed Implementation

[0029] The principles and features of this utility model are described below. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0030] according to Figures 1 to 3 As shown, this utility model provides a MiniYZ axis device for semiconductor testing, including a MiniYZ axis mounting plate 34, and a Y-axis transmission structure and a Z-axis transmission structure fixed on the same MiniYZ axis mounting base 28.

[0031] The Z-axis transmission mechanism includes a Z-axis precision motor 1, a Z-axis lead screw 12, and a Z-axis lifting and fixing seat 8. The Z-axis lead screw 12 is connected to the output end of the Z-axis precision motor 1, and the Z-axis lifting and fixing seat 8 is threaded onto the Z-axis lead screw 12.

[0032] The Y-axis transmission structure includes a Y-axis precision motor 14, a Y-axis lead screw 24, a wedge-shaped seat 27, and a wedge-shaped reversing block; the output end of the Y-axis precision motor 14 is connected to the Y-axis lead screw 24 for transmission, and a nut fixing block 23 is threadedly connected to the Y-axis lead screw 24; the wedge-shaped reversing block is slidably connected to the wedge seat 27 through an inclined surface, and is slidably connected to the nut fixing block 23 through a Y-axis guide rail.

[0033] The Z-axis lifting and fixing seat 8 and the nut fixing block 23 are both slidably connected to the MiniYZ axis mounting seat 28 to restrict the circumferential rotation of the Z-axis lifting and fixing seat 8 and the nut fixing block 23; the MiniYZ axis mounting plate 34 is slidably connected to the wedge-shaped reversing block through the Z-guide rail 21, and is slidably connected to the Z-axis lifting and fixing seat 8 through the Y-direction decoupling guide rail 13.

[0034] The beneficial effects of this embodiment are as follows: Z-axis motion is driven by Z-axis precision motor 1, which drives Z-axis lead screw 12 to move Z-axis lifting and fixing seat 8, and Y-axis decoupling is achieved through guide rail. Y-axis motion is driven by Y-axis precision motor 14, which drives Y-axis lead screw 24 to move nut fixing block 23. Since nut fixing block 23 is connected to wedge reversing block through Y-axis guide rail, and under the action of the inclined surface of wedge seat 27, the Z-axis motion of nut fixing block 23 is converted into the Y-axis motion of wedge reversing block. Z-axis guide rail 21 and decoupling guide rail 13 enable MiniYZ axis mounting plate 34 to move in both the Z and Y directions.

[0035] Specifically, according to Figure 3 As shown, both the Y-axis motion mechanism and the Z-axis motion mechanism are fixed on the MiniYZ axis mounting base 28, while the other side is connected to the MiniYZ axis mounting plate 34 through the Z-guide rail 21 in the Y-axis motion mechanism and the decoupling guide rail 13 in the Z-axis motion mechanism, respectively. During the entire movement process, the MiniYZ axis mounting base 28 remains relatively fixed with the Y-axis motion mechanism and the Z-axis motion mechanism, while the MiniYZ axis mounting plate 34 remains relatively movable with the Y-axis motion mechanism and the Z-axis motion mechanism. The camera used for semiconductor detection in this application is fixed on the MiniYZ axis mounting plate 34, and the MiniYZ axis mounting plate 34 drives the camera to achieve the following: the Z-axis remains stationary during the Y-axis movement, the Y-axis remains stationary during the Z-axis movement, and the Y and Z-axis can move simultaneously.

[0036] Then according to Figure 1 and Figure 2 As shown, the Z-axis motion mechanism is analyzed first: The output of the Z-axis precision motor 1 drives the Z-axis lead screw 12 to rotate. The Z-axis lead screw 12 is connected to a first lead screw nut 9 via a thread, and the Z-axis lifting and fixing seat 8 is fixed to the first lead screw nut 9. Under the premise that the circumferential rotation of the Z-axis lifting and fixing seat 8 is restricted, the rotation of the Z-axis lead screw 12 is converted into the linear movement of the Z-axis lifting and fixing seat 8 along the Z-axis lead screw 12, that is, the Z-axis movement in this application. Since the Z-axis lifting and fixing seat 8 is connected to the MiniYZ axis mounting plate 34 through the decoupling guide rail 13, it means that the movement of the Z-axis lifting and fixing seat 8 will inevitably cause the MiniYZ axis mounting plate 34 to move synchronously in the Z-axis direction. However, the MiniYZ axis mounting plate 34 and the wedge-shaped reversing block are connected through the Z-axis guide rail 21. The movement direction of the Z-axis guide rail 21 is completely consistent with the movement direction of the Z-axis lifting and fixing seat 8, that is, the Y-axis remains stationary when the Z-axis moves.

[0037] Next, we analyze the Y-axis motion mechanism: The output end of the Y-axis precision motor 14 drives the Y-axis lead screw 24 to rotate. The Y-axis lead screw 24 is connected to a second lead screw nut 22 by a thread, and the nut fixing block 23 is fixed on the second lead screw nut 22. Under the premise that the nut fixing block 23 is restricted from circumferential rotation, the rotation of the Y-axis lead screw 24 is converted into the linear movement of the nut fixing block 23 along the Y-axis lead screw 24. The wedge-shaped reversing block is connected to the nut fixing block 23, so the wedge-shaped reversing block will also realize the linear movement along the Y-axis lead screw 24 synchronously with the nut fixing block 23. However, since the wedge seat 27 and the wedge reversing block are connected by a sloping surface, although the wedge reversing block is connected to the nut fixing block 23, its sloping surface inevitably forces the wedge reversing block to have a Y-direction movement perpendicular to the Y-axis lead screw 24. Therefore, in this embodiment, the wedge reversing block and the nut fixing block 23 are slidably connected by a Y-guide rail. While the nut fixing block 23 moves linearly on the Y-axis lead screw 24, the wedge reversing block moves in the Y direction under the action of the wedge seat 27. Since the wedge reversing block and the MiniYZ axis mounting plate 34 are connected by a Z-guide rail 21, and the lifting and lowering of the wedge reversing block is in the same direction as the movement of the Z-guide rail 21, there will only be synchronous movement in the Y direction between the wedge reversing block and the MiniYZ axis mounting plate 34, i.e., the Y-direction movement in this application.

[0038] Although the movement of the wedge-shaped reversing block will inevitably cause the MiniYZ axis mounting plate 34 to move synchronously in the Y direction, the MiniYZ axis mounting plate 34 and the Z-axis lifting fixed seat 8 are connected by the decoupling guide rail 13. The movement direction of the decoupling guide rail 13 is completely consistent with the Y-direction movement direction of the wedge-shaped reversing block, that is, the Z direction remains stationary when the Y direction moves.

[0039] Finally, a synchronous analysis of the Z-axis and Y-axis motion mechanisms is performed, meaning that the two sets of motion mechanisms operate simultaneously. This can be achieved by ensuring that the displacement of the decoupling guide rail 13 and the Y-axis guide rail in the Y-axis is consistent, and that the displacement of the Z-axis guide rail 21 and the Z-axis lifting fixed seat 8 in the Z-axis is consistent.

[0040] Based on the above technical solution, the present invention can be further improved as follows.

[0041] Preferably, in this embodiment, the Y-axis transmission structure and the Z-axis transmission structure are fixed on the same MiniYZ axis mounting base 28, and the Z-axis lead screw 12 and the Y-axis lead screw 24 are parallel to each other. This ensures that the Y-axis movement of the wedge-shaped reversing block driven by the Y-axis lead screw 24 is consistent with the movement direction of the decoupling guide rail 13, and the Z-axis movement of the Z-axis lifting fixed base 8 driven by the Z-axis lead screw 12 is consistent with the movement direction of the Z-axis guide rail 21 on the wedge-shaped reversing block.

[0042] Preferably, in this embodiment, the Z-axis transmission structure further includes a Z-axis bearing housing 3 and a Z-axis free end bearing housing 11, with the Z-axis lead screw 12 rotatably connected to the Z-axis bearing housing 3 and the Z-axis free end bearing housing 11. This restricts the position of the Z-axis lead screw 12 and ensures precise rotation of the Z-axis lead screw 12 through the bearings at both ends.

[0043] Preferably, in this embodiment, the Z-axis precision motor 1 is fixed to the MiniYZ-axis mounting base 28 by an L-shaped plate, and its output end passes through the L-shaped plate and is connected to the Z-axis lead screw 12 via a Z-axis coupling 2. The L-shaped plate secures the Z-axis precision motor 1, and the coupling facilitates disassembly, maintenance, and replacement between the Z-axis precision motor 1 and the Z-axis lead screw 12.

[0044] Preferably, in this embodiment, a Z-axis grating ruler 7 is fixed on the MiniYZ axis mounting base 28 next to the Z-axis lifting and fixing base 8, and a Z-axis reading head 6 is fixed on the Z-axis lifting and fixing base 8. The Z-axis grating ruler 7 provides feedback on the Z-axis displacement of the Z-axis lifting and fixing base 8 through the Z-axis reading head 6. By using the Z-axis reading head 6 and the Z-axis grating ruler 7 to provide real-time feedback on the position of the Z-axis lifting and fixing base 8, closed-loop control is achieved to improve motion accuracy.

[0045] Preferably, in this embodiment, the MiniYZ axis mounting base 28 is located beside the Z-axis transmission mechanism and a Z-axis photoelectric switch 4 is fixed thereon. A Z-axis sensing plate 5 is fixed to one side of the Z-axis lifting and fixing base 8. The Z-axis sensing plate 5 and the Z-axis photoelectric switch 4 cooperate to limit the Z-axis displacement of the Z-axis lifting and fixing base 8. The travel distance of the Z-axis movement is limited by the photoelectric limit switch. Figure 1As shown, in this embodiment of the application, the Z-axis photoelectric switch 4 is provided in two sets along the Z direction, which respectively correspond to the endpoints of the Z-axis lifting and fixing seat 8. When the Z-axis sensing plate 5 moves with the Z-axis lifting and fixing seat 8 and approaches the position of the Z-axis photoelectric switch 4, the Z-axis precision motor 1 is stopped.

[0046] In addition, in this embodiment, two sets of Z-axis hard limiters 10 are provided on the movement path of the Z-axis lifting and fixing seat 8. The two sets of Z-axis hard limiters 10 are fixed on the MiniYZ-axis mounting seat 28 respectively. When the Z-axis lifting and fixing seat 8 moves to the position of the Z-axis hard limiter 10, it is blocked by the Z-axis hard limiter 10, the Z-axis lead screw 12 is restricted from rotating, and the Z-axis precision motor 1 completely stops driving.

[0047] Preferably, in the embodiment, the wedge seat 27 is fixed on the MiniYZ axis mounting base 28, and the wedge reversing block is provided in two sets. Both sets of wedge reversing blocks are slidably connected to the wedge seat 27 through inclined surfaces. It should be noted that the inclination directions of the two inclined surfaces on the wedge seat 27 are opposite. The Y-axis lead screw 24 has a double-threaded structure, with Y-axis bearing seats 16 at both ends. The two sets of Y-axis bearing seats 16 are fixed to the MiniYZ axis mounting plate. The Y-axis lead screw 24 is connected to two sets of nut fixing blocks 23 via two sets of opposite threads. The two sets of nut fixing blocks 23 are slidably connected to two sets of wedge-shaped reversing blocks via two sets of Y-guide rails. The double-threaded Y-axis lead screw 24 drives the two sets of wedge-shaped reversing blocks to move in opposite or opposite directions while simultaneously moving in the same direction in the Y-axis direction. Furthermore, the two sets of wedge-shaped reversing blocks are connected to the MiniYZ axis mounting plate 34 via Z-guide rails 21, improving the connection stability between the Y-axis motion mechanism and the MiniYZ axis mounting plate 34. Correspondingly, the two sets of wedge-shaped reversing blocks are the first wedge-shaped reversing block 18 and the second wedge-shaped reversing block 29. Since the first wedge-shaped reversing block 18 and the second wedge-shaped reversing block 29 have a certain volume, in this embodiment, the first wedge-shaped reversing block 18 and the second wedge-shaped reversing block 29 are fixedly connected to the sliding sections of the first Y-guide rail 20 and the second Y-guide rail 31 by the first mounting plate 19 and the second mounting plate 30, respectively. The two sets of nut fixing blocks 23 are fixedly connected to the fixed sections of the first Y-guide rail 20 and the second Y-guide rail 31, thereby realizing the Y-direction movement between the first wedge-shaped reversing block 18 and the second wedge-shaped reversing block 29 and the two sets of nut fixing blocks 23.

[0048] Preferably, in this embodiment, the Y-axis precision motor 14 is fixed to the MiniYZ axis mounting base 28 by an L-shaped plate, and its output end passes through the L-shaped plate and is connected to the Y-axis lead screw 24 via a Y-axis coupling 15. The L-shaped plate secures the Y-axis precision motor 14, and the coupling facilitates disassembly, maintenance, and replacement between the Y-axis precision motor 14 and the Y-axis lead screw 24. Preferably, in this embodiment, a Y-axis grating ruler 33 is fixed on one side of one set of wedge-shaped commutator blocks on the wedge seat 27, and a Y-axis reading head 33 is fixed on the corresponding wedge-shaped commutator block. The Y-axis grating ruler 33 feeds back the Y-axis displacement of the corresponding wedge-shaped commutator block through the Y-axis reading head 32. By using the Y-axis reading head 32 and the Y-axis grating ruler 33 to provide real-time feedback on the position of the wedge-shaped commutator blocks, closed-loop control is achieved to improve motion accuracy.

[0049] Preferably, in this embodiment, a Y-axis photoelectric switch 25 is fixed to one side of another set of wedge-shaped commutator blocks on the wedge-shaped seat 27, and a Y-axis sensing plate 26 is fixed to one side of the corresponding wedge-shaped commutator block. The Y-axis sensing plate 26 and the Y-axis photoelectric switch 25 cooperate with each other to limit the Y-axis displacement of the wedge-shaped commutator block. The Z-axis movement is limited by a photoelectric limit switch. Figure 2 As shown, there is also a hard limit in the Y-axis motion mechanism. On the MiniYZ axis mounting base 28, a limit block 17 is set on the Z-axis motion path of the wedge reversing block. The limit block 17 is fixed on the MiniYZ axis mounting base 28. When the wedge reversing block moves to the position of the limit block 17 along with the nut fixing seat, it is blocked by the limit block 17, the Y-axis lead screw 24 is restricted from rotating, and the Y-axis precision motor 14 completely stops driving.

[0050] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0051] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0052] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0053] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0054] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0055] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A MiniYZ axis device for semiconductor testing, characterized in that, Includes a MiniYZ axis mounting plate (34), and a Y-axis transmission structure and a Z-axis transmission structure fixed on the same MiniYZ axis mounting base (28); The Z-axis transmission mechanism includes a Z-axis precision motor (1), a Z-axis lead screw (12), and a Z-axis lifting and fixing seat (8). The Z-axis lead screw (12) is connected to the output end of the Z-axis precision motor (1), and the Z-axis lifting and fixing seat (8) is threaded onto the Z-axis lead screw (12). The Y-axis transmission structure includes a Y-axis precision motor (14), a Y-axis lead screw (24), a wedge seat (27), and a wedge reversing block; the output end of the Y-axis precision motor (14) is connected to the Y-axis lead screw (24) for transmission, and a nut fixing block (23) is threaded onto the Y-axis lead screw (24); the wedge reversing block is slidably connected to the wedge seat (27) through an inclined surface, and is slidably connected to the nut fixing block (23) through a Y-axis guide rail; The Z-axis lifting and fixing seat (8) and the nut fixing block (23) are both slidably connected to the MiniYZ axis mounting seat (28). The MiniYZ axis mounting plate (34) is slidably connected to the wedge-shaped reversing block through the Z-guide rail, and is slidably connected to the Z-axis lifting and fixing seat (8) through the Y-direction decoupling guide rail (13).

2. The MiniYZ axis device for semiconductor testing according to claim 1, characterized in that, The Z-axis lead screw (12) is parallel to the Y-axis lead screw (24).

3. The MiniYZ axis device for semiconductor testing according to claim 2, characterized in that, The Z-axis transmission structure also includes a Z-axis bearing housing (3) and a Z-axis free end bearing housing (11), and the Z-axis lead screw (12) is rotatably connected to the Z-axis bearing housing (3) and the Z-axis free end bearing housing (11).

4. The MiniYZ axis device for semiconductor testing according to claim 2, characterized in that, The Z-axis precision motor (1) is fixed to the MiniYZ axis mounting base (28) by an L-shaped plate. Its output end passes through the L-shaped plate and is connected to the Z-axis lead screw (12) via a Z-axis coupling (2).

5. The MiniYZ axis device for semiconductor testing according to claim 2, characterized in that, A Z-axis grating ruler (7) is fixed on the side of the Z-axis lifting and fixing seat (8) on the MiniYZ axis mounting base (28), and a Z-axis reading head (6) is fixed on the Z-axis lifting and fixing seat (8). The Z-axis grating ruler (7) feeds back the Z-axis displacement of the Z-axis lifting and fixing seat (8) through the Z-axis reading head (6).

6. The MiniYZ axis device for semiconductor testing according to claim 5, characterized in that, The MiniYZ axis mounting base (28) is located next to the Z-axis transmission mechanism and a Z-axis photoelectric switch (4) is also fixed thereon. A Z-axis sensing plate (5) is fixed on one side of the Z-axis lifting fixing base (8). The Z-axis sensing plate (5) and the Z-axis photoelectric switch (4) cooperate with each other.

7. The MiniYZ axis device for semiconductor testing according to claim 2, characterized in that, The wedge seat (27) is fixed on the MiniYZ shaft mounting base (28). There are two sets of wedge reversing blocks. Both sets of wedge reversing blocks are slidably connected to the wedge seat (27) through inclined surfaces. The Y-axis lead screw (24) has a double thread structure and is connected to two sets of nut fixing blocks (23) by two sets of opposite threads. The two sets of nut fixing blocks (23) are slidably connected to two sets of wedge-shaped reversing blocks by two sets of Y-guide rails respectively.

8. The MiniYZ axis device for semiconductor testing according to claim 7, characterized in that, The Y-axis precision motor (14) is fixed to the MiniYZ axis mounting base (28) by an L-shaped plate. Its output end passes through the L-shaped plate and is connected to the Y-axis lead screw (24) via a Y-axis coupling (15).

9. The MiniYZ axis device for semiconductor testing according to claim 8, characterized in that, A Y-axis grating ruler (32) is fixed on one side of one of the wedge-shaped commutator blocks on the wedge-shaped seat (27), and a Y-axis reading head (33) is fixed on the corresponding wedge-shaped commutator block. The Y-axis grating ruler (32) feeds back the Y-direction displacement of the corresponding wedge-shaped commutator block through the Y-axis reading head (33).

10. The MiniYZ axis device for semiconductor testing according to claim 9, characterized in that, The wedge seat (27) is located on one side of another set of wedge commutator blocks and a Y-axis photoelectric switch (25) is fixed thereon. A Y-axis sensing plate (26) is fixed on one side of the corresponding wedge commutator block. The Y-axis sensing plate (26) and the Y-axis photoelectric switch (25) cooperate with each other to limit the Y-axis displacement of the wedge commutator block.

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