An inert gas protection device for air-sensitive samples

Abstract

The utility model discloses an inert gas protection device for air sensitive sample, the utility model relates to scanning electron microscope experimental equipment matching technical field, and inert gas protection device includes: sample placing cabin is located in the shell, and the placing groove is used for placing sample, at least part of cabin cover is located in the shell, at least part of drive mechanism is located in the shell and is connected with cabin cover side, and drive mechanism is used for driving cabin cover movement to make cabin cover open or close the open end of placing groove, wherein, under the condition that drive mechanism drives cabin cover to open the open end of placing groove, drive mechanism can be configured as delaying preset time drive cabin cover to open the open end of placing groove. Therefore, by setting an inert gas protection device for air sensitive sample, it is favorable to reduce the risk that sample is oxidized or contaminated due to sample and air contact, it is favorable to improve the versatility of inert gas protection device, also is favorable to improve the operation convenience of inert gas protection device.

Description

Technical Field

[0001] This utility model relates to the technical field of scanning electron microscope (SEM) experimental equipment, and in particular to an inert gas protection device for air-sensitive samples. Background Technology

[0002] In existing technologies, the drive mechanism of inert gas protection devices for samples lacks the function of delaying the opening of the sample placement compartment cover by a preset time. This easily leads to sample contact with air, resulting in sample oxidation or contamination, and preventing operators from obtaining accurate and reliable analytical results. Furthermore, existing inert gas protection devices cannot precisely control the opening / closing time of the sample placement compartment, making them unsuitable for different manufacturers and models of scanning electron microscopes, thus lacking versatility. Additionally, the operation of existing inert gas protection devices is relatively complex, resulting in a lack of ease of use. Utility Model Content

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. Therefore, one objective of the present invention is to provide an inert gas protection device for air-sensitive samples, which helps to reduce the risk of sample contact with air, improves the versatility of the inert gas protection device, and also enhances the ease of operation of the inert gas protection device.

[0004] According to a first aspect of the present invention, an inert gas protection device for air-sensitive samples is provided. The inert gas protection device includes: a housing; a sample placement chamber disposed within the housing, the sample placement chamber defining a placement slot with one end open for placing a sample; a cover, at least a portion of which is disposed within the housing and movable relative to the housing to open or close the open end of the placement slot; and a drive mechanism, at least a portion of which is disposed within the housing and connected to the cover, the drive mechanism being used to drive the cover to open or close the open end of the placement slot, wherein, when the drive mechanism drives the cover to open the open end of the placement slot, the drive mechanism can be configured to delay the opening of the cover by a preset time.

[0005] The inert gas protection device according to the first aspect of the utility model is beneficial to reducing the risk of air-sensitive samples coming into contact with air, improving the versatility of the inert gas protection device, and also improving the ease of operation of the inert gas protection device.

[0006] In some examples of this utility model, the drive mechanism includes: a timing control module and a drive unit, the timing control module and the drive unit are communicatively connected, the drive unit is connected to the hatch, the timing control module is configured to set a preset time, and control the drive unit to drive the hatch to open the open end of the placement slot.

[0007] In some examples of this utility model, the inert gas protection device further includes: a hatch cover switch, which is located on the housing and is communicatively connected to the drive mechanism. The hatch cover switch is used to trigger the drive mechanism to drive the hatch cover to open or close the open end of the placement slot.

[0008] In some examples of this utility model, the outer shell has a top wall with a mounting hole, the hatch switch is mounted in the mounting hole, and the upper surface of the hatch switch is flush with the upper surface of the top wall.

[0009] In some examples of this utility model, the sample placement chamber defines a placement slot with an open upper end. The driving unit includes a drive motor, the drive motor and the chamber cover are arranged along a first direction and are connected to the chamber cover in a transmission manner. The drive motor is used to drive the chamber cover to reciprocate along the first direction so that the chamber cover opens or closes the open end of the placement slot. The first direction is perpendicular to the height direction of the inert gas protection device.

[0010] In some examples of this utility model, the inert gas protection device further includes: a guide rail disposed inside the housing and extending along a first direction, and a hatch movably disposed on the guide rail along the first direction.

[0011] In some examples of this utility model, the inert gas protection device further includes: a sample stage, the bottom wall of the placement groove having a shaft support, and the sample stage being fixed to the shaft support.

[0012] In some examples of this utility model, the sample placement chamber defines a placement groove with an open upper end, the outer shell has a top wall with a clearance hole formed therein, and the clearance hole and the open end of the placement groove are arranged opposite to each other.

[0013] In some examples of this utility model, the cover is reciprocating along a first direction to open or close the open end of the placement slot. The cover defines a first assembly slot that opens toward the sample placement compartment. Along the first direction, the sample placement compartment has a fixing frame on the side away from the cover. A second assembly slot is formed on the side of the fixing frame facing the sample placement compartment. The end of the sample placement compartment away from the cover extends into the second assembly slot and is fixed to the fixing frame. The inner sidewalls of the sample placement compartment and the second assembly slot are spaced apart. A sealing ring is provided in the second assembly slot and is fitted onto the sample placement compartment. The side of the cover facing the fixing frame has an insertion end that is adapted to be inserted into the second assembly slot. The first direction is perpendicular to the height direction of the inert gas protection device.

[0014] In some examples of this utility model, the outer shell has a bottom wall, which is a metal structure.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the external structure of the inert gas protection device according to an embodiment of the present utility model; Figure 2 This is a schematic diagram of the internal structure of an inert gas protection device according to an embodiment of the present utility model; Figure 3 This is a side view of the hatch and guide rail according to an embodiment of the present utility model; Figure 4 This is a schematic diagram of the timing control module according to an embodiment of the present utility model; Figure 5 This is a side sectional view of the timing control module according to an embodiment of the present utility model; Figure 6 This is a schematic diagram of the sample stage and shaft support according to an embodiment of the present utility model.

[0017] Figure label: Inert gas protection device 100; 200 housing; 210 top wall of housing; 211 mounting hole; 212 clearance hole; 220 charging structure; 230 power display structure; 231 battery icon module; 232 power display module; 240 main switch; Sample placement chamber 300; placement slot 310; shaft support 320; fixing frame 330; second assembly slot 340; sealing ring 350; hatch cover 400; insertion end 401; Drive mechanism 500; timing control module 510; drive unit 520; timer component 511; delay unit 512; time setting button 513; time display unit 514; time adjustment button 515; Drive motor 521; drive battery 522; hatch opener 600; Guide rail 700; Sample stage 800; 900 on the bottom of the shell. Detailed Implementation

[0018] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0019] The following is for reference. Figures 1-6 This invention describes an inert gas protection device 100 for air-sensitive samples according to an embodiment of the present invention. When testing and analyzing air-sensitive samples using a scanning electron microscope (SEM), the inert gas protection device 100 provides a protective environment for the sample. The inert gas protection device 100, through the sealed space defined by the cover 400 and the sample placement chamber 300, achieves complete isolation of the sample from air exposure throughout the entire process. The inert gas protection device 100 can be constructed with a length not exceeding 140 cm, a width not exceeding 90 cm, and a height not exceeding 40 cm. For example, the inert gas protection device 100 can be constructed with a length of 130 cm, a width of 90 cm, and a height of 35 cm, which facilitates its adaptation to most SEM sample chamber spaces.

[0020] like Figure 1 and Figure 2 As shown, according to a first aspect embodiment of the present invention, an inert gas protection device 100 for air-sensitive samples includes: a housing 200; a sample placement chamber 300 disposed within the housing 200, the sample placement chamber 300 defining a placement groove 310 with one end open for placing a sample; and a cover 400, at least a portion of which is disposed within the housing 200 and movable relative to the housing 200. 0. Open or close the open end of the placement slot 310; drive mechanism 500, at least a portion of which is disposed within the housing 200 and connected to the hatch 400, the drive mechanism 500 being used to drive the hatch 400 to move so that the hatch 400 opens or closes the open end of the placement slot 310, wherein, when the drive mechanism 500 drives the hatch 400 to open the open end of the placement slot 310, the drive mechanism 500 can be configured to delay the drive mechanism 400 to open the open end of the placement slot 310 for a preset time.

[0021] The outer casing 200 can be made of black plastic, which helps reduce its weight and facilitates a lightweight design for the inert gas protection device 100. The drive mechanism 500 may include a drive battery 522. A charging structure 220 (i.e., a charging plug) can be provided on the outer wall of the outer casing 200, allowing the drive battery 522 to be charged. A power display structure 230 can be provided on the outer wall of the outer casing 200, including a battery icon module 231 and a vertical bar power display module 232. The remaining power of the drive battery 522 is displayed dynamically in real time based on the number of bars in the power display module 232. A master switch 240 can also be provided on the outer wall of the outer casing 200. The master switch 240 can be located in a prominent and easily accessible position on the outer wall of the outer casing 200, serving as the core hub component of the entire inert gas protection device 100, controlling its opening and closing.

[0022] The placement slot 310 can be constructed as a cylindrical slot, a rectangular slot, or other structures. The thickness of the hatch cover 400 can be constructed to be 2mm-2.5mm. As one embodiment, the drive mechanism 500 can be partially located within the outer casing 200. As another embodiment, the drive mechanism 500 can be entirely located within the outer casing 200. As an example, the drive mechanism 500 can be equipped with a drive motor 521, which has a drive motor push rod. One end of the drive motor push rod is fixedly connected to the side or bottom of the hatch cover 400. By reciprocating the drive motor push rod, the hatch cover 400 is driven to reciprocate, thereby opening or closing the open end of the placement slot 310 of the hatch cover 400. As another example, the drive mechanism 500 can be equipped with a drive pulley, and a mounting bracket can be provided on the corresponding side wall of the hatch 400. The mounting bracket is equipped with a driven pulley of the same size as the drive pulley, and a synchronous belt is provided between the drive pulley and the driven pulley. The drive pulley drives the synchronous belt to rotate, the synchronous belt drives the driven pulley to rotate, the driven pulley drives the mounting bracket to reciprocate, and the mounting bracket drives the hatch 400 to reciprocate, thereby achieving the effect of opening or closing the hatch 400 and opening the placement slot 310.

[0023] In an illustrative embodiment, when the inert gas protection device 100 is in operation, outside an inert gas environment (e.g., an inert gas glove box), the main switch 240 is turned on. The inert gas protection device 100 is placed in the inert gas environment, and the drive mechanism 500 is activated, causing the drive mechanism 500 to move the cover 400 relative to the outer shell 200 until the cover 400 fully opens the open end of the placement slot 310. An air-sensitive sample is placed into the placement slot 310, and the drive mechanism 500 is activated, causing the drive mechanism 500 to move the cover 400 relative to the outer shell 200 until the cover 400 fully closes the open end of the placement slot 310. The inert gas protection device 100 is removed from the inert gas environment, transferred to the sample chamber of the scanning electron microscope (SEM), and fixed. Based on the time required for the SEM to reach the target vacuum state (i.e., high vacuum), the drive mechanism 500 is preset to operate so that the delay time for the drive mechanism 500 to open the open end of the placement slot 310 is the same as or approximately the same as the time required for the SEM to reach the target environment. The scanning electron microscope (SEM) preparation procedure is initiated, simultaneously triggering the delay timer function of the drive mechanism 500. This puts the drive mechanism 500 into a delayed waiting state, keeping the cover 400 closed for a preset delay time to prevent sample exposure before the SEM reaches its target state. When the delay time ends, the drive mechanism 500 automatically moves the cover 400 relative to the outer shell 200, opening the open end of the placement slot 310 to expose the sample. After sample testing is completed, the drive mechanism 500 restarts, moving the cover 400 to close the open end of the placement slot 310. Then, the inert gas protection device 100 is removed from the SEM, and the drive mechanism 500 moves the cover 400 to open the open end of the placement slot 310, removing the sample and completing the sample testing.

[0024] The sample placement chamber 300 is equipped with a placement slot 310. The cover 400 can open or close the open end of the placement slot 310. Before the scanning electron microscope (SEM) is evacuated to the target state, the sample is always within the enclosed space defined by the placement slot 310 and the cover 400, which helps reduce the sample's contact with air and thus reduces the risk of sample oxidation or contamination caused by air contact. The drive mechanism 500 can adjust the preset delay time according to the actual time it takes for different models of SEMs to reach the target state, which helps the inert gas protection device 100 to be adapted to different manufacturers and models of SEMs, thereby improving the versatility of the inert gas protection device 100. The drive mechanism 500 is configured to drive the cover 400 to open the open end of the placement slot 310 after a preset delay time, which helps improve the autonomous operation performance of the inert gas protection device 100, reduces the number of operation steps, and lowers the operation difficulty of the inert gas protection device 100, thereby improving the ease of operation of the inert gas protection device 100. At least a portion of the sample placement chamber 300, the cover 400, and at least a portion of the drive mechanism 500 are all located within the outer casing 200, which is beneficial for protecting the sample placement chamber 300, the cover 400, and the drive mechanism 500, and for improving the structural relative positional stability of the inert gas protection device 100.

[0025] Therefore, by setting up an inert gas protection device 100, it is beneficial to reduce the risk of air-sensitive samples coming into contact with air, improve the versatility of the inert gas protection device 100, improve the ease of operation of the inert gas protection device 100, and also improve the structural relative positional stability of the inert gas protection device 100.

[0026] According to some embodiments of this utility model, such as Figure 2 , Figure 4 , Figure 5 As shown, the drive mechanism 500 includes a timing control module 510 and a drive unit 520. The timing control module 510 and the drive unit 520 are communicatively connected. The drive unit 520 is connected to the hatch 400. The timing control module 510 is configured to set a preset time and control the drive unit 520 to drive the hatch 400 to open the open end of the placement slot 310.

[0027] The timing control module 510 can be installed on the side wall of the inert gas protection device 100. The timing control module 510 may include a timer component 511, a delay component 512, a time setting button 513, a time display unit 514, and a time adjustment button 515. The timer component 511 can control the start and stop of the drive mechanism 500 according to preset time parameters. The delay component 512 can achieve delay control of specific preset time parameters. The time display unit 514 can intuitively display the remaining parameters of the currently set preset time. During the operation of the inert gas protection device 100, when the time setting button 513 is pressed, the timing control module 510 enters the time setting mode, and the opening and closing times of the hatch 400 can be independently and precisely adjusted using the time adjustment button 515. After all time parameters are set, press the time setting button 513 again. The timer control module 510 exits the time parameter setting mode and locks and saves the current preset time parameter. The preset time parameter is successfully set, and subsequent precise control of opening or closing the open end of the placement slot 310 of the cover 400 will be based on this successfully set preset time. The timer control module 510 has a time accuracy of up to the second level, and the duration setting range is from several seconds to tens of minutes and can be autonomously controlled, fully adapting to scanning electron microscope equipment from different manufacturers, models, and with different vacuuming durations. As an example, the drive unit 520 may be equipped with a drive motor 521, and the drive motor 521 may be equipped with a drive motor push rod. The drive unit 520 can be connected to the cover 400 through the drive motor push rod. As another embodiment, the drive unit 520 may be provided with a drive pulley, and a mounting bracket may be provided on the corresponding side wall of the hatch 400. A driven pulley of the same size as the drive pulley may be provided on the mounting bracket, and a synchronous belt may be provided between the drive pulley and the driven pulley. The design requirement of connecting the drive unit 520 and the hatch 400 is achieved through the drive pulley, the driven pulley, the synchronous belt and the mounting bracket.

[0028] This application describes the drive unit 520 with a drive motor push rod as an example. The drive unit 520 receives instructions from the timing control module 510 and drives the drive motor push rod. The drive motor push rod provides power for the hatch 400 to open or close the open end of the placement slot 310, causing the hatch 400 to reciprocate and thus opening or closing the open end of the placement slot 310. The drive battery 522 can be charged through the charging structure 220, and the drive battery 522 can provide power to the drive unit 520, enabling the drive unit 520 to have sufficient power to drive the hatch 400 to open the open end of the placement slot 310.

[0029] The timing control module 510 can set a preset time according to the vacuuming duration of different manufacturers and models of scanning electron microscopes (SEMs). This facilitates the adaptation of the timing control module 510 to different manufacturers and models of SEMs, and further improves the versatility of the inert gas protection device 100. After the SEM is evacuated, the timing control module 510 controls the drive unit 520 via communication connection to drive the chamber cover 400 to open the open end of the placement slot 310. This ensures that the target state reached by the SEM and the opening of the chamber cover 400 occur simultaneously, reducing the risk of sample exposure to air due to the time difference between the target state reached by the SEM and the opening of the chamber cover 400, and reducing the risk of sample oxidation or contamination. After the preset time is set, the timing control module 510 can automatically start the countdown. After the countdown ends, the timing control module 510 can send a signal to the drive unit 520, causing the drive unit 520 to open the open end of the placement slot 310 through the drive compartment cover 400. This helps to reduce the operation steps of the staff when using the inert gas protection device 100, improves the ease of operation of the inert gas protection device 100, and also helps to reduce the risk of analysis result errors caused by the staff's operation errors.

[0030] According to some embodiments of this utility model, such as Figure 1 As shown, the inert gas protection device 100 also includes: a hatch cover switch 600, which is located on the housing 200 and is communicatively connected to the drive mechanism 500. The hatch cover switch 600 is used to trigger the drive mechanism 500 to drive the hatch cover 400 to open or close the open end of the placement slot 310.

[0031] The hatch cover switch 600 can be located on the upper side of the housing 200 along the height direction of the inert gas protection device 100. The hatch cover switch 600 can adopt a recessed structure design, and the outer surface of the hatch cover switch 600 (such as...) Figure 1 The upper surface of the middle) and the outer surface of the outer casing 200 (such as the upper surface of the middle) and the Figure 1 The upper surface of the hatch cover switch 600 is on the same horizontal plane, which helps to reduce the risks of accidental contact, dust accumulation, and obstruction of the overall layout of the device caused by the height difference between the outer surface of the hatch cover switch 600 and the outer surface of the outer shell 200.

[0032] When the cover switch 600 is pressed by the operator, the timing control module 510 quickly reads the preset time parameters and starts the real-time countdown function. During the countdown, the countdown time can be displayed clearly and intuitively in real time through the time display unit 514 on the inert gas protection device 100, which helps the operator to keep track of the progress of the sample cover 400's movement at any time. At the instant the countdown reaches zero, the drive unit 520, as the actuator, accurately receives the command signal from the timing control module 510. The drive unit 520 responds quickly and stably to the command, driving the sample cover 400 to open or close the open end of the placement slot 310 in a preset direction. The operator can start the drive mechanism 500 by pressing the cover switch 600, which simplifies the operation process of the inert gas protection device 100 and further improves its ease of operation.

[0033] According to some embodiments of this utility model, such as Figure 1 As shown, the outer casing 200 has a top wall 210, and the top wall 210 has a mounting hole 211. The hatch cover switch 600 is mounted in the mounting hole 211, and the upper surface of the hatch cover switch 600 is flush with the upper surface of the top wall 210.

[0034] The mounting hole 211 can be constructed in shapes such as circular or square, and the hatch cover switch 600 can be installed in the mounting hole 211 by means of clips, bolts, etc. The upper surface of the hatch cover switch 600 is flush with the upper surface of the shell top wall 210, which helps to reduce the risks of accidental contact, dust accumulation, and obstruction of the overall layout of the device caused by the height difference between the hatch cover switch 600 and the shell top wall 210. It also helps to make the shape of the inert gas protection device 100 more regular, thereby improving the overall appearance of the inert gas protection device 100. Furthermore, it helps to make the connection between the hatch cover switch 600 and the shell 200 more stable, and helps to reduce the risk of displacement of the hatch cover switch 600 due to vibration of the inert gas protection device 100.

[0035] According to some embodiments of this utility model, such as Figure 2 As shown, the sample placement chamber 300 defines a placement slot 310 with an open upper end. The drive unit 520 includes a drive motor 521. The drive motor 521 and the chamber cover 400 are arranged along a first direction and are connected to the chamber cover 400 in a transmission manner. The drive motor 521 is used to drive the chamber cover 400 to reciprocate along the first direction so that the chamber cover 400 opens or closes the open end of the placement slot 310. The first direction is perpendicular to the height direction of the inert gas protection device 100.

[0036] In this application, the first direction is Figure 1 The X direction in this application. The drive motor 521 described herein is a linear drive motor 521. For example... Figure 2As shown, along the height direction of the inert gas protection device 100, the drive motor 521 can be positioned above the drive battery 522. This invention uses a linear drive motor 521 as a power source to provide stable and precise power support for opening and closing the open end of the placement slot 310 of the cover 400. The linear drive motor 521 has advantages such as fast response speed, high control precision, and smooth operation, ensuring smooth operation of the cover 400 during the opening and closing of the open end of the placement slot 310, which helps reduce the adverse effects of mechanical vibration on the sample caused by the inert gas protection device 100.

[0037] The open design of the placement slot 310 facilitates the use of scanning electron microscopes for top-down observation. The drive motor 521 and the hatch 400 are connected in a first direction, and the drive motor 521 can drive the hatch 400 to move back and forth in the first direction, which helps to reduce the risk of the hatch 400 getting stuck or colliding due to deviation of its movement trajectory.

[0038] According to some embodiments of this utility model, such as Figure 3 As shown, the inert gas protection device 100 further includes: a guide rail 700, which is disposed inside the housing 200 and extends along a first direction, and a cover 400 is movably disposed on the guide rail 700 along the first direction.

[0039] The guide rail 700 can be a linear guide rail, located below the sample placement chamber 300. The guide rail 700 can be fixed to the outer casing 200 by adhesive, snap-fit, or other means. As one embodiment, the chamber cover 400 can be equipped with casters, which cooperate with the guide rail 700 to movably mount the chamber cover 400. As another embodiment, the chamber cover 400 can be equipped with a slide rail, which cooperates with the guide rail 700 to movably mount the chamber cover 400.

[0040] The hatch cover 400 can move along the guide rail 700 in a first direction, which helps reduce the risk of the hatch cover 400 shifting due to movement on the guide rail 700, improves the stability of the hatch cover 400 during the opening and closing of the open end of the placement slot 310, and allows operators to move the hatch cover 400 along the guide rail 700 by pushing or pulling, thus reducing the difficulty of using the inert gas protection device 100. By adjusting the length, shape, and installation position of the guide rail 700, the range and method of movement of the hatch cover 400 can be changed, allowing the inert gas protection device 100 to meet different working scenarios and needs, and further enhancing the versatility of the inert gas protection device.

[0041] According to some embodiments of this utility model, such as Figure 6As shown, the inert gas protection device 100 also includes: a sample stage 800, with a shaft support 320 formed on the bottom wall of the placement groove 310, and the sample stage 800 fixed to the shaft support 320.

[0042] The sample stage 800 can be used to place samples. The inert gas protection device 100 can be equipped with a set of sample stages 800 of different heights, which is beneficial for fixing samples of different heights. After the sample stage 800 is fixed in the sample placement chamber 300, the distance between the sample stage 800 and the chamber cover 400 can be 1.5mm, 2mm, 2.5mm, 4mm, 5mm, etc. The sample stage 800 can be fixed to the shaft support 320 by means of adhesive, bolts, or clips. The shaft support 320 can stably support the sample stage 800, so that the sample can be placed stably on the sample stage 800.

[0043] According to some embodiments of this utility model, such as Figure 1 As shown, the sample placement chamber 300 defines a placement groove 310 with an open upper end, and the outer shell 200 has a shell top wall 210, which has a clearance hole 212 formed therein. The clearance hole 212 and the open end of the placement groove 310 are arranged opposite to each other.

[0044] The top wall 210 of the shell can be formed with clearance holes 212 by drilling, molding, or other methods. Operators can use the clearance holes 212 to remove samples from the outside of the inert gas protection device 100 or place them into the placement slot 310. The open ends of the clearance holes 212 and the placement slot 310 are arranged opposite each other along the height direction of the inert gas protection device 100, which can reduce the distance between the clearance holes 212 and the sample stage 800 and facilitate the handling of samples.

[0045] According to some embodiments of this utility model, such as Figure 3 As shown, the cover 400 is reciprocating along a first direction to open or close the open end of the placement slot 310. The cover 400 defines a first mounting slot that opens toward the sample placement chamber 300. Along the first direction, the sample placement chamber 300 has a fixing frame 330 on the side away from the cover 400. A second mounting slot 340 is formed on the side of the fixing frame 330 facing the sample placement chamber 300. The end of the sample placement chamber 300 away from the cover 400 extends into the second mounting slot 340 and is fixed to the fixing frame 330. The inner sidewalls of the sample placement chamber 300 and the second mounting slot 340 are spaced apart. A sealing ring 350 is provided in the second mounting slot 340 and is fitted onto the sample placement chamber 300. The side of the cover 400 facing the fixing frame 330 has an insertion end 401, which is adapted to be inserted into the second mounting slot 340. The first direction is perpendicular to the height direction of the inert gas protection device 100.

[0046] The sealing ring 350 can be an O-ring rubber seal 350, and the second assembly groove 340 can be constructed as an annular sealing groove, into which the sealing ring 350 can be embedded. Along the first direction, the first assembly groove is open towards the sample placement chamber 300. When the drive motor 521 receives a closing command and pushes the cover 400 towards the open end of the closing placement groove 310, the sample placement chamber 300 extends into the first assembly groove from its open end. The cover 400 gradually approaches the second assembly groove 340 of the sample placement chamber 300, and the insertion end 401 inserts into the second assembly groove 340, ultimately pressing the sealing ring 350 tightly into the second assembly groove 340. Utilizing the elastic deformation characteristics of the O-ring rubber seal 350, the gap between the sample placement chamber 300 and the cover 400 is completely filled, which helps reduce the risk of sample oxidation or contamination due to contact with air.

[0047] Because the cover 400 is equipped with a first mounting groove, which is structurally designed to form a tight nesting relationship with the sample placement chamber 300, when the cover 400 moves towards closing the open end of the placement groove 310, the first mounting groove completely accommodates the sample placement chamber 300, achieving full enclosure of the sample placement chamber 300. When the cover 400 closes the open end of the placement groove 310 and the sealing ring 350 presses against the second mounting groove 340, the sample placement chamber 300 can form an independent space completely isolated from the outside world, providing a highly reliable sealed environment for the sample. This helps reduce contamination of the sample by external gases, dust, etc., and improves the safety and stability of the sample during storage and transfer.

[0048] According to some embodiments of this utility model, such as Figure 1 , Figure 2 As shown, the outer shell 200 has a bottom wall 900, which is a metal structure.

[0049] The thickness of the bottom wall 900 can be 2mm-2.5mm. The bottom wall 900 can be made of aluminum material, which is beneficial for the grounding of the inert gas protection device 100 and also for conducting the static electricity and interference charge inside the inert gas protection device 100 to the ground through the bottom wall 900, so as to achieve safe grounding of the inert gas protection device 100.

[0050] The working process of the inert gas protection device 100 is described in detail below: Sample pretreatment and preparation of inert gas protection device 100: Outside the inert gas glove box (i.e., inert gas environment), turn on the main switch 240 of inert gas protection device 100, open the open end of the placement slot 310 through the cover switch 600, and place the entire inert gas protection device 100 into the sample inlet chamber of the inert gas glove box. Keep the cover 400 open and perform vacuuming to ensure that the inside of the inert gas protection device 100 is purified synchronously with the glove box environment to avoid external air pollution.

[0051] Sample loading and inert environment encapsulation: After vacuuming, the inert gas protection device 100 is transferred to the glove box. Based on the vacuuming time required for the target scanning electron microscope, the timer control module 510 presets the delay time for opening the chamber cover 400. The sample is then fixed on the sample stage 800, ensuring it is centered and stable. The chamber cover switch 600 closes the open end of the placement slot 310, creating a sealed inert gas protection environment. The inert gas protection device 100 is then removed from the inert gas glove box. At this point, the sample remains under inert gas protection within the sample placement chamber 300.

[0052] Electron microscope vacuum synchronization control: After fixing the inert gas protection device 100 containing the sample into the scanning electron microscope sample chamber, press the chamber cover switch 600 to synchronously trigger the delay control. The timing control module 510 starts the countdown, closes the scanning electron microscope sample chamber door and starts the vacuuming program. When the countdown reaches zero, the drive unit 520 pushes the chamber cover 400 to slowly slide along the guide rail 700 until the sample placement chamber 300 is fully exposed, and normal electron microscope observation can begin.

[0053] Because the preset delay time for the inert gas protection device 100 to open the open end of the placement slot 310 is completely customizable, the electron microscope is already in a high vacuum state when the cover 400 opens the open end of the placement slot 310, thus achieving electron microscope sample introduction without any air contact throughout the process. Also, because the preset time for the cover 400 to open the open end of the placement slot 310 can be set according to the vacuuming time of different electron microscopes, this inert gas protection device 100 is suitable for scanning electron microscopes of different models from different instrument manufacturers.

[0054] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of protection of this utility model. Therefore, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

[0055] Other configurations and operations of the inert gas protection device 100 for air-sensitive samples according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0056] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0057] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An inert gas protection device for air-sensitive samples, characterized in that, include: shell; A sample placement chamber is disposed within the outer shell, and the sample placement chamber defines a placement slot with one end open, the placement slot being used to place a sample; A hatch, at least a portion of which is disposed within the outer casing, the hatch being movable relative to the outer casing to open or close the open end of the placement slot; A drive mechanism, at least a portion of which is disposed within the housing and connected to the hatch, is used to drive the hatch to move so that the hatch opens or closes the open end of the placement slot. In the case where the drive mechanism drives the hatch to open the open end of the placement slot, the drive mechanism can be configured to drive the hatch to open the open end of the placement slot after a preset time.

2. The inert gas protection device for air-sensitive samples according to claim 1, characterized in that, The drive mechanism includes a timing control module and a drive unit. The timing control module and the drive unit are communicatively connected. The drive unit is connected to the hatch. The timing control module is configured to set the preset time and control the drive unit to drive the hatch to open the open end of the placement slot.

3. The inert gas protection device for air-sensitive samples according to claim 1, characterized in that, The inert gas protection device further includes a hatch cover switch, which is located on the outer casing and is communicatively connected to the drive mechanism. The hatch cover switch is used to trigger the drive mechanism to drive the hatch cover to open or close the open end of the placement slot.

4. The inert gas protection device for air-sensitive samples according to claim 3, characterized in that, The outer shell has a top wall with a mounting hole, the hatch switch is mounted in the mounting hole, and the upper surface of the hatch switch is flush with the upper surface of the top wall.

5. The inert gas protection device for air-sensitive samples according to claim 2, characterized in that, The sample placement chamber defines the placement slot with an open upper end. The driving unit includes a drive motor. The drive motor and the chamber cover are arranged along a first direction and are pulsatorically connected to the chamber cover. The drive motor is used to drive the chamber cover to reciprocate along the first direction to open or close the open end of the placement slot. The first direction is perpendicular to the height direction of the inert gas protection device.

6. The inert gas protection device for air-sensitive samples according to claim 5, characterized in that, The inert gas protection device further includes: a guide rail, which is disposed inside the housing and extends along the first direction, and the hatch is movably disposed on the guide rail along the first direction.

7. The inert gas protection device for air-sensitive samples according to claim 5, characterized in that, The inert gas protection device further includes a sample stage, the bottom wall of the placement groove is formed with a shaft support, and the sample stage is fixed to the shaft support.

8. The inert gas protection device for air-sensitive samples according to any one of claims 1-7, characterized in that, The sample placement chamber defines the placement slot with an open upper end. The outer shell has a top wall with a clearance hole formed therein, and the clearance hole is disposed opposite to the open end of the placement slot.

9. The inert gas protection device for air-sensitive samples according to claim 8, characterized in that, The cover is reciprocating along a first direction to open or close the open end of the placement slot. The cover defines a first mounting slot that opens toward the sample placement chamber. Along the first direction, the sample placement chamber has a fixing frame on the side opposite to the cover. The fixing frame has a second mounting slot on the side facing the sample placement chamber. The end of the sample placement chamber opposite to the cover extends into the second mounting slot and is fixed to the fixing frame. The inner walls of the sample placement chamber and the second mounting slot are spaced apart. A sealing ring is provided in the second mounting slot and is fitted onto the sample placement chamber. The cover has an insertion end on the side facing the fixing frame, which is adapted to be inserted into the second mounting slot. The first direction is perpendicular to the height direction of the inert gas protection device.

10. The inert gas protection device for air-sensitive samples according to any one of claims 1-7, characterized in that, The outer shell has a bottom wall, which is a metal structure.

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