A full-automatic probe station dedicated vibration isolation platform

Abstract

The utility model discloses a kind of vibration isolation platform special for full-automatic probe station, it relates to vibration isolation platform structure technical field, to solve the vibration isolation effect of the existing vibration isolation platform special for full-automatic probe station is not good, full-automatic probe station cannot be isolated in multiple directions, to affect the working efficiency of full-automatic probe, its technical scheme main point includes support frame, the periphery of support frame outer wall is equipped with protective baffle, the below of support frame is installed with support leg, the below of support leg is installed with shock pad, the side of support leg is installed with moving wheel, the above of support frame is installed with shock absorber, the upper end of shock absorber is provided with support rod, the above of support rod is installed with vibration isolation plate, the vibration isolation plate includes support plate and mounting plate, the above of support plate is installed with mounting plate, the inside of support plate is provided with mounting chamber, the inside of mounting chamber is installed with vibration isolation pad.

Description

Technical Field

[0001] This utility model relates to the field of vibration isolation platform structure technology, and in particular to a vibration isolation platform specifically for a fully automatic probe station. Background Technology

[0002] Fully automated probe stations are automated testing equipment used in the research and development and production of semiconductor devices. They achieve automatic alignment of wafers and probes through a high-precision positioning system to complete electrical parameter measurements. Their core functions include fully automated operation, wide-temperature testing adaptability, and multi-sample compatibility. They are suitable for wafer-level electronic performance testing. During operation, fully automated probe stations require a vibration isolation platform to prevent errors caused by vibration during the testing process.

[0003] A search revealed that authorization announcement number CN1102068468B discloses a dual-frequency damping vibration isolation platform, comprising a platform (1) and a support (2) arranged from top to bottom. A damping vibration isolation mechanism (3) is provided at the top of the support (2). The damping vibration isolation mechanism (3) includes a first damping vibration isolation component and a second damping vibration isolation component stacked vertically. The first damping vibration isolation component is a first damping rubber vibration isolation pad (31), a second damping vibration isolation pad (32), or a third damping vibration isolator (33). The second damping vibration isolation component is also a first damping rubber vibration isolation pad (31), a second damping vibration isolation pad (32), or a third damping vibration isolator (33). The dual-frequency damping vibration isolation platform combines two vibration isolation materials with different natural frequency ranges, which reduces the natural frequency of the damping vibration isolation platform, increases its stability, and enhances its vibration isolation effect.

[0004] However, the existing vibration isolation platforms for fully automatic probe stations are not effective and cannot isolate the fully automatic probe station from multiple directions, thus affecting the working efficiency of the fully automatic probe. Therefore, there is an urgent need in the market for a vibration isolation platform specifically for fully automatic probe stations to solve these problems. Utility Model Content

[0005] The purpose of this utility model is to provide a vibration isolation platform for fully automatic probe stations, in order to solve the problem mentioned in the background art that the existing vibration isolation platforms for fully automatic probe stations have poor vibration isolation effect and cannot isolate the fully automatic probe station from multiple directions, thereby affecting the working efficiency of the fully automatic probe.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A vibration isolation platform for a fully automatic probe station includes a support frame. Protective baffles are installed around the outer walls of the support frame. Support legs are installed below the support frame, and shock-absorbing pads are installed below the support legs. Casters are installed on one side of each support leg. A shock absorber is installed above the support frame, and a support rod is provided at the upper end of the shock absorber. A vibration isolation plate is installed above the support rod. The vibration isolation plate includes a support plate and a mounting plate. A mounting plate is installed above the support plate, and a mounting chamber is provided inside the support plate. Vibration isolation pads are installed inside the mounting chamber.

[0008] Preferably, four support feet are provided, and the four support feet are symmetrical about the vertical center line of the lower end of the support frame. The support feet are fixedly connected to the support frame by threads.

[0009] Preferably, the upper end of the movable wheel is provided with a mounting base, and the mounting base is fixedly connected to the support frame by mounting screws.

[0010] Preferably, four shock absorbers are provided, and the lower end of each shock absorber is provided with a fixed foot, which is fixedly connected to the support frame by fixing screws.

[0011] Preferably, the vibration isolation pad has through holes inside, and there are several through holes evenly distributed inside the vibration isolation pad.

[0012] Preferably, a positioning mounting seat is provided above the lower end of the installation chamber, and three positioning mounting seats are provided. The positioning mounting seats and the installation chamber are an integral structure. The lower end of the vibration isolation pad is provided with a positioning mounting groove corresponding to the positioning mounting seat, and the positioning mounting seat is located inside the positioning mounting groove.

[0013] Preferably, a dustproof pad is installed around the upper part of the support frame, the upper end of the dustproof pad is connected to the support plate by adhesive, and the lower end of the dustproof pad is connected to the support frame by adhesive.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] (1) This utility model improves the vibration isolation effect of the vibration isolation platform by installing the fully automatic probe on the top of the mounting plate and the vibration damping pads set by the support feet. The vibration damper can further reduce the vibration, thereby avoiding the vibration from affecting the vibration isolation effect of the vibration isolation platform. The support plate is equipped with vibration damping pads, and the vibration damping pads are provided with several through holes. When the fully automatic probe vibrates during operation, the vibration damping pads can further isolate the vibration, thereby avoiding the vibration from affecting the operation of the fully automatic probe.

[0016] (2) The support frame of this utility model is equipped with a protective baffle on the outside. The protective baffle can protect the support frame, and the dustproof pad installed can prevent dust from entering the interior of the support frame, avoiding long-term dust accumulation that makes the vibration isolation platform difficult to clean, and may even affect the performance of the vibration isolation platform. Attached Figure Description

[0017] Figure 1 This is a perspective view of the entire utility model;

[0018] Figure 2 This is a partial perspective view of the present invention;

[0019] Figure 3 This is a partial bottom view of the present invention;

[0020] Figure 4 This is a front sectional view of the vibration isolation plate of this utility model.

[0021] In the diagram: 1. Support frame; 2. Protective baffle; 3. Support foot; 4. Vibration damping pad; 5. Caster wheel; 501. Mounting base; 6. Mounting screw; 7. Vibration damper; 701. Fixed foot; 8. Fixed screw; 9. Support rod; 10. Vibration isolation plate; 11. Support plate; 1101. Mounting chamber; 1102. Positioning mounting base; 12. Mounting plate; 13. Vibration isolation pad; 1301. Through hole; 1302. Positioning mounting groove; 14. Dustproof baffle. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0023] Please see Figure 1-4This utility model provides an embodiment of a vibration isolation platform for a fully automatic probe station, comprising a support frame 1, with protective baffles 2 installed around the outer walls of the support frame 1, and four support feet 3 installed below the support frame 1. The four support feet 3 are symmetrical about the vertical center line of the lower end of the support frame 1, and are fixedly connected to the support frame 1 by threads. A shock-absorbing pad 4 is installed below the support feet 3, and a movable wheel 5 is installed on one side of each support foot 3. A mounting base 501 is provided at the upper end of each movable wheel 5, and the mounting base 501 is fixedly connected to the support frame 1 by mounting screws 6. Four shock absorbers 7 are installed above the support frame 1, and a fixed foot 701 is provided at the lower end of each shock absorber 7. The fixed foot 701 is fixedly connected to the support frame 1 by fixing screws 8. The upper end of the shock absorber 7 is provided with a support rod 9, and a vibration isolation plate 10 is installed above the support rod 9. The vibration isolation plate 10 includes a support plate 11 and a mounting plate 12. The mounting plate 12 is installed above the support plate 11. The support plate 11 has a mounting chamber 1101 inside, and a vibration isolation pad 13 is installed inside the mounting chamber 1101. The protective baffle 2 can effectively protect the support frame 1. The threaded fixing can easily install and fix the support foot 3 to the support frame 1. The movable wheel 5 can easily move the device to the required position and then support it with the support foot 3. The shock absorber 7 can improve the vibration isolation effect of the vibration isolation plate 10.

[0024] See Figure 4 The vibration isolation pad 13 has several through holes 1301 evenly distributed inside. A positioning mounting seat 1102 is provided above the lower end of the mounting chamber 1101. Three positioning mounting seats 1102 are provided, and they are integral with the mounting chamber 1101. A positioning mounting groove 1302 corresponding to the positioning mounting seat 1102 is provided inside the lower end of the vibration isolation pad 13. The positioning mounting seat 1102 is located inside the positioning mounting groove 1302. The corresponding positioning mounting seats 1102 and positioning mounting grooves 1302 facilitate the positioning and installation of the vibration isolation pad 13. The several through holes 1301 improve the vibration isolation effect of the vibration isolation pad 13. It should be noted that, to save space and highlight the innovative elements of this patent, such as the specific working principle and process of the vibration isolation platform, and the installation and use of the fully automatic probe, these will not be elaborated upon in this patent.

[0025] See Figure 1Dustproof pads 14 are installed around the upper part of the support frame 1. The upper end of the dustproof pads 14 is connected to the support plate 11 by adhesive, and the lower end of the dustproof pads 14 is connected to the support frame 1 by adhesive. The adhesive connection makes the dustproof pads 14 more securely installed. The dustproof pads 14 can prevent dust from entering the support frame 1 and make the device more aesthetically pleasing.

[0026] Working principle: In use, by installing the fully automatic probe above the mounting plate 12, the vibration isolation effect of the vibration isolation platform can be improved by the shock-absorbing pads 4 set by the support feet 3. The vibration damper 7 can further reduce vibration, thereby preventing vibration from affecting the vibration isolation effect of the vibration isolation platform. The support plate 11 is equipped with vibration isolation pads 13, which have several through holes 1301. When the fully automatic probe vibrates during operation, the vibration isolation pads 13 can further isolate the vibration, thereby preventing the vibration from affecting the operation of the fully automatic probe. The support frame 1 is equipped with a protective baffle 2, which can protect the support frame 1. The dustproof baffle 14 installed can prevent dust from entering the interior of the support frame 1, avoiding long-term dust accumulation that makes the vibration isolation platform difficult to clean and may even affect the use effect of the vibration isolation platform.

[0027] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A vibration isolation platform for a fully automatic probe station, comprising a support frame (1), characterized in that: The support frame (1) is equipped with protective baffles (2) on all four sides of its outer wall. Support legs (3) are installed below the support frame (1). Shock-absorbing pads (4) are installed below the support legs (3). A moving wheel (5) is installed on one side of the support legs (3). A shock absorber (7) is installed above the support frame (1). A support rod (9) is provided at the upper end of the shock absorber (7). A vibration isolation plate (10) is installed above the support rod (9). The vibration isolation plate (10) includes a support plate (11) and an mounting plate (12). The mounting plate (12) is installed above the support plate (11). An installation chamber (1101) is provided inside the support plate (11). A vibration isolation pad (13) is installed inside the installation chamber (1101).

2. The vibration isolation platform for a fully automatic probe station according to claim 1, characterized in that: The support feet (3) are provided in four ways. The four support feet (3) are symmetrical about the vertical center line of the lower end of the support frame (1). The support feet (3) and the support frame (1) are fixedly connected by threads.

3. The vibration isolation platform for a fully automatic probe station according to claim 2, characterized in that: The upper end of the movable wheel (5) is provided with a mounting base (501), and the mounting base (501) is fixedly connected to the support frame (1) by mounting screws (6).

4. The vibration isolation platform for a fully automatic probe station according to claim 3, characterized in that: The shock absorber (7) is provided in four parts, and the lower end of the shock absorber (7) is provided with a fixing foot (701). The fixing foot (701) is fixedly connected to the support frame (1) by fixing screws (8).

5. The vibration isolation platform for a fully automatic probe station according to claim 4, characterized in that: The vibration isolation pad (13) has through holes (1301) inside, and there are several through holes (1301) evenly distributed inside the vibration isolation pad (13).

6. The vibration isolation platform for a fully automatic probe station according to claim 5, characterized in that: A positioning mounting seat (1102) is provided above the lower end of the installation chamber (1101). There are three positioning mounting seats (1102). The positioning mounting seat (1102) and the installation chamber (1101) are an integral structure. The lower end of the vibration isolation pad (13) is provided with a positioning mounting groove (1302) corresponding to the positioning mounting seat (1102). The positioning mounting seat (1102) is located inside the positioning mounting groove (1302).

7. The vibration isolation platform for a fully automatic probe station according to claim 6, characterized in that: Dustproof pads (14) are installed around the upper end of the support frame (1). The upper end of the dustproof pads (14) is connected to the support plate (11) by adhesive, and the lower end of the dustproof pads (14) is connected to the support frame (1) by adhesive.

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