A device for testing the trajectory of an electron beam
Patent Information
- Application Number
- CN202522037840.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-23
- Publication Date
- 2026-10-23
- Estimated Expiration
- 2035-09-23
AI Technical Summary
[0003]常规方法一般是通过观察窗观测或仿真得到,但由于电子束亮度过高,肉眼直视困难,观察窗观测不准确;且电子束的传输过程较为复杂,仿真结果与实际偏差较大
本实用新型的上述方案,通过在电子束传输路径上设置监测板,高能电子束穿过时熔融并击穿监测板,并在监测板上留下印记;将所有监测板的印记进行测量,即可拟合得到电子束的传输轨迹;并且,该测试装置中的监测板装在定位槽和固定槽中,方便拆装,便于多次重复测量。与通过观察窗观测或仿真方法比较,通过该测试装置可更加直观、准确的得到电子束的测试轨迹。
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Figure CN224888864U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of electron beam transmission trajectory testing technology, and in particular to a testing device for electron beam transmission trajectory. Background Technology
[0002] Electron guns, as high-performance heating sources that directly emit electron beams, have been widely used in various fields such as melting, welding, and evaporation. In certain special applications, precise control of the electron beam transmission is required to avoid interference between the electron beam transmission process and certain structures. Therefore, it is necessary to obtain the electron beam transmission path through some method.
[0003] Conventional methods typically involve observation through a viewing window or simulation. However, due to the excessive brightness of the electron beam, it is difficult to observe directly with the naked eye, and observation through a viewing window is inaccurate. Furthermore, the transmission process of the electron beam is quite complex, resulting in significant discrepancies between simulation and actual values. Therefore, a testing device that more closely resembles reality and yields more accurate results is needed to fit the electron beam's transmission trajectory. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide a testing device for electron beam transmission trajectory, which can obtain the test trajectory of electron beam more intuitively and accurately.
[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows: An apparatus for testing electron beam transmission trajectories, comprising: A support frame having a first end at which an electron beam is incident and a second end opposite to the first end; Multiple monitoring plates are fixedly installed within the support frame, and the multiple monitoring plates are arranged face-to-face and parallel between the first end and the second end of the support frame. The upper end of the monitoring plate is fixedly connected to the support frame via an upper positioning component, and the lower end of the monitoring plate is fixedly connected to the support frame via a lower positioning component. The upper positioning component is provided with a positioning groove that runs vertically through it, and the lower positioning component is provided with a fixing groove with a solid bottom. The monitoring plate is inserted into the positioning groove and the fixing groove.
[0006] Optionally, the testing apparatus further includes: A protective plate is fixedly installed at the second end of the support frame.
[0007] Optionally, the upper positioning component includes: an upper positioning body and an upper positioning body mirror, wherein the upper positioning body and the upper positioning body mirror are respectively used to fix the two sides of the upper end of the monitoring board; The upper positioning body includes an upper cover plate and an upper base plate; The upper base plate includes a first upper plate and a second upper plate that is vertically and fixedly connected to the first upper plate; the upper cover plate is fitted and fixedly connected to the outer side of the first upper plate, and a positioning groove that runs vertically through the first upper plate and the upper cover plate is provided between them, with the upper side of the monitoring plate located in the positioning groove; the second upper plate is fixedly connected to the support frame.
[0008] Optionally, the lower positioning component includes: a lower support body and a mirror image of the lower support body, the lower support body and the mirror image of the lower support body being used to fix the two sides of the lower end of the monitoring plate respectively; the lower support body and the upper positioning body are vertically corresponding to each other, and the mirror image of the upper positioning body and the mirror image of the lower support body are vertically corresponding to each other. The lower support body includes a lower cover plate and a lower bottom plate; The lower base plate includes a first lower plate and a second lower plate that is vertically and fixedly connected to the first lower plate; the lower cover plate is fitted and fixedly connected to the outer side of the first lower plate, and a solid fixing groove is provided between the first lower plate and the lower cover plate; the lower side of the monitoring plate is located in the fixing groove; and the second lower plate is fixedly connected to the support frame.
[0009] Optionally, the protective plate is fixedly mounted at the second end of the support frame by a plurality of U-shaped fixing blocks.
[0010] Optionally, two first U-shaped fixing blocks are fixedly installed on the lower side of the second end of the support frame, and the lower end of the protective plate is located in the two first U-shaped fixing blocks on the lower side of the second end; A second U-shaped fixing block is fixedly installed on each of the two sides of the second end of the support frame, and the two sides of the protective plate are respectively located in the second U-shaped fixing blocks on the two sides of the second end.
[0011] Optionally, the support frame is composed of multiple strip plates fixedly connected together, each strip plate having a thickness greater than 5mm and a width of 18-25mm.
[0012] Optionally, the testing device further includes: a sub-frame integrally connected to the support frame, the sub-frame being located below the support frame, and the bottom of the sub-frame being a base plate with a positioning hole in the middle.
[0013] Optionally, the spacing between two adjacent monitoring plates is 10-50 mm.
[0014] Optionally, the thickness of the monitoring plate is less than or equal to 1 mm, and / or the thickness of the protection plate is greater than 12 mm.
[0015] The above-described solution of this utility model has at least the following beneficial effects: The above-described solution of this utility model involves setting a monitoring plate along the electron beam transmission path. When the high-energy electron beam passes through, it melts and penetrates the monitoring plate, leaving an imprint. By measuring the imprints of all the monitoring plates, the transmission trajectory of the electron beam can be fitted. Furthermore, the monitoring plates in this testing device are installed in positioning and fixing slots, which facilitates disassembly and assembly and allows for repeated measurements. Compared with observation through an observation window or simulation methods, this testing device provides a more intuitive and accurate test trajectory for the electron beam. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the electron beam transmission trajectory testing device of this utility model; Figure 2 This is a schematic diagram of the support frame of this utility model; Figure 3 This is a schematic diagram of the upper positioning body of this utility model; Figure 4 This is a schematic diagram of the upper positioning body of this utility model; Figure 5 This is a schematic diagram of the lower support body of this utility model; Figure 6 This is a schematic diagram of the lower support body of this utility model; Figure 7 This is a schematic diagram of the U-shaped fixing block of this utility model.
[0017] Figure label: 1-Support frame; 11-Threaded hole; 2-Monitoring plate; 3-Protective plate; 4-Upper positioning body; 41-Upper cover plate; 42-Upper base plate; 421-First upper plate; 422-Second upper plate; 43-Positioning groove; 5-Lower support body; 51-Lower cover plate; 52-Lower base plate; 521-First lower plate; 522-Second lower plate; 53-Fixing groove; 6-Mirror image of upper positioning body; 7-Mirror image of lower support body; 8-U-shaped fixing block; 81-First U-shaped fixing block; 82-Second U-shaped fixing block; 9-Sub-frame; 91-Support foot. Detailed Implementation
[0018] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art.
[0019] like Figures 1 to 6 As shown, an embodiment of this utility model provides a testing device for electron beam transmission trajectory, comprising: A support frame 1 having a first end for electron beam incidence and a second end opposite to the first end; Multiple monitoring plates 2 are fixedly installed inside the support frame 1, and the multiple monitoring plates 2 are arranged face to face and parallel between the first end and the second end of the support frame 1; the electron beam enters from the first end of the support frame 1, passes through the multiple monitoring plates 2 in sequence, and is transmitted to the second end. The upper end of the monitoring plate 2 is fixedly connected to the support frame 1 through an upper positioning component, and the lower end of the monitoring plate 2 is fixedly connected to the support frame 1 through a lower positioning component. The upper positioning component is provided with a positioning groove 43 that runs vertically through the upper and lower parts, and the lower positioning component is provided with a fixing groove 53 with a solid bottom. The monitoring plate 2 is inserted into the positioning groove 43 and the fixing groove 53.
[0020] In this utility model, the monitoring plate 2 is fixed inside the support frame 1, and the monitoring plate 2 should be easy to disassemble and assemble for repeated measurements.
[0021] Figure 1 The number of monitoring boards 2 in the diagram is 7, for illustrative purposes only. In actual implementation, the number of monitoring boards 2 can be adjusted according to the transmission distance of the electron beam. For example, the number of monitoring boards 2 is at least more than 3.
[0022] This invention mainly obtains the transmission path of the electron beam by fitting the electron beam breakdown mark on the monitoring plate 2. The more monitoring plates 2 there are, the more accurate the fitted electron beam transmission path will be. Therefore, as many monitoring plates 2 as possible should be set up under the condition of meeting the installation space constraints.
[0023] For example, the distance between two adjacent monitoring plates 2 is 10-50 mm. If the distance between adjacent monitoring plates 2 is too small, the monitoring plates 2 will stick together after being affected by the electron beam; if the distance is too large, it will lead to inaccurate test results.
[0024] In order for the monitoring plate to be penetrated by the electron beam, the thickness of the monitoring plate 2 is, for example, less than or equal to 1 mm.
[0025] To prevent the monitoring plate from deforming, the monitoring plate 1 is, for example, made of molybdenum.
[0026] For example, such as Figure 2 As shown, the support frame 1 is composed of multiple strip-shaped plates fixedly connected together. Each strip-shaped plate has a thickness greater than 5mm and a width of 18-25mm. The size of the support frame 1 should ensure that it meets the position requirements of the monitoring plate 2.
[0027] For example, each strip plate is connected by screws or welded to form a support frame 1. Threaded holes 11 are provided on the strip plates for mounting the fixing structure of the monitoring plate 2. The number and position of the threaded holes 11 can be determined according to the number of monitoring plates 2 designed.
[0028] For example, such as Figure 3 and Figure 4 As shown, the upper positioning component includes an upper positioning body 4 and an upper positioning body mirror body 6, wherein the upper positioning body 4 and the upper positioning body mirror body 6 are respectively used to fix the two sides of the upper end of the monitoring plate 2; The upper positioning body 4 includes an upper cover plate 41 and an upper bottom plate 42; The upper base plate 42 includes a first upper plate 421 and a second upper plate 422 that is vertically fixedly connected to the first upper plate 421; the upper cover plate 41 is fitted and fixedly connected to the outer side of the first upper plate 421, and a vertically penetrating positioning groove 43 is provided between the first upper plate 421 and the upper cover plate 41, with the upper side of the monitoring plate 2 located in the positioning groove 43; the second upper plate 422 is fixedly connected to the support frame 1.
[0029] The structure of the upper positioning body mirror body 6 is a mirror structure of the upper positioning body 4.
[0030] For example, the upper cover plate 41 is fixedly connected to the first upper plate 421 by screws.
[0031] For example, the positioning groove 43 is a through groove, and the width of the positioning groove 43 is 0.8-1.5mm larger than the thickness of the monitoring plate 2, so as to facilitate the placement and disassembly of the monitoring plate 2, and at the same time to prevent the monitoring plate 2 from getting stuck with the upper positioning body 4 after being deformed by heat.
[0032] For example, the upper base plate 42 can be formed by bending sheet metal or by direct machining.
[0033] For example, such as Figure 5 and Figure 6 As shown, the lower positioning component includes: a lower support body 5 and a lower support body mirror body 7, the lower support body 5 and the lower support body mirror body 7 being used to fix the two sides of the lower end of the monitoring plate 2 respectively; the lower support body 5 is vertically corresponding to the upper positioning body 4, and the upper positioning body mirror body 6 is vertically corresponding to the lower support body mirror body 7. The lower support 5 includes a lower cover plate 51 and a lower bottom plate 52; The lower base plate 52 includes a first lower plate 521 and a second lower plate 522 that is vertically and fixedly connected to the first lower plate 521; the lower cover plate 51 is fitted and fixedly connected to the outer side of the first lower plate 521, and a solid fixing groove 53 is provided between the first lower plate 521 and the lower cover plate 51; the lower side of the monitoring plate 2 is located in the fixing groove 53; the second lower plate 522 is fixedly connected to the support frame 1.
[0034] The lower support body mirror 7 is a mirror structure of the lower support body 5.
[0035] For example, the lower cover plate 51 is fixedly connected to the first lower plate 521 by screws.
[0036] For example, the bottom of the fixing groove 53 is solid, that is, the bottom is not through, and it is used to support the lower end of the monitoring plate 2. The width of the fixing groove 53 is 0.8-1.5mm larger than the thickness of the monitoring plate 2, so as to facilitate the placement and disassembly of the monitoring plate 2, and at the same time, to prevent the monitoring plate 2 from getting stuck with the lower support body 5 after being deformed by heat.
[0037] For example, the lower base plate 52 can be formed by bending sheet metal or by direct machining.
[0038] In this utility model, the number of upper positioning body 4, lower support body 5, upper positioning body mirror body 6, and lower support body mirror body 7 must meet the placement requirements of monitoring plate 2. One upper positioning body 4, one upper positioning body mirror body 6, one lower support body 5, and one support body mirror body 7 are combined to form a set of fixing structures for monitoring plate 2, which fix the four corners of monitoring plate 2 respectively. The fixing structures are all fixedly connected to the support frame 1 by screws. One monitoring plate 2 is placed in one set of monitoring plate fixing structures, and the monitoring plate 2 can be pulled out or inserted from the top of the support frame 1.
[0039] To prevent the electron beam from damaging the surrounding environment, the testing device, by way of example, further includes a protective plate 3, which is fixedly disposed at the second end of the support frame 1.
[0040] For example, such as Figure 7 As shown, the protective plate 3 is fixedly mounted on the second end of the support frame 1 by a plurality of U-shaped fixing blocks 8. The U-shaped fixing blocks 8 are connected to the support frame 1 by screws.
[0041] To facilitate the disassembly of the protective plate 3, for example, two first U-shaped fixing blocks 81 are fixedly provided on the lower side of the second end of the support frame 1, and the lower end of the protective plate 3 is located in the two first U-shaped fixing blocks 81 on the lower side of the second end; A second U-shaped fixing block 82 is fixedly installed on each of the two sides of the second end of the support frame 1, and the two sides of the protective plate 3 are respectively located in the two second U-shaped fixing blocks 83 on the two sides of the second end. The four U-shaped fixing blocks can restrict the freedom of the protective plate 3 in three directions, and realize the removal and insertion of the protective plate 3 into the U-shaped fixing blocks.
[0042] For example, the opening width of the U-shaped fixing block 8 is 1-2 mm larger than the thickness of the protective plate 3, which facilitates the installation of the protective plate 3.
[0043] For example, the protective plate 3 is made of graphite and has a thickness greater than 12mm.
[0044] This invention enables quick installation and removal of the monitoring plate 2 through the positioning groove 43 and fixing groove 53 for fixing the monitoring plate 2; the graphite protective plate 3 placed on the U-shaped fixing block 8 prevents the electron beam from damaging the surrounding environment and ensures the safety of the test.
[0045] For example, the testing device further includes a sub-frame 9 integrally connected to the support frame 1, the sub-frame 9 being located below the support frame 1, and the bottom of the sub-frame 9 being a base plate with a positioning hole in the center. The sub-frame 9 can be used to fix the testing device to other equipment, for example, by fixing the device to other equipment through the positioning hole on the base plate.
[0046] To ensure the stable placement of the testing device, for example, the bottom of the sub-frame 9 is provided with multiple supporting feet 91, such as five supporting feet 91.
[0047] In this invention, the support frame 1 and the sub-frame 9 are both made of molybdenum. The pure molybdenum frame provides accurate and reliable support for the monitoring plate 2. The pure molybdenum frame avoids the deformation of the frame caused by the heat generated when the electron beam breaks down the monitoring plate 2 and the impact on the positional accuracy of the monitoring plate 2, thus ensuring the accurate position of the monitoring plate 2.
[0048] The working process of the electron beam transmission trajectory testing device of this utility model is as follows: When conducting electron beam trajectory testing, the testing device is first assembled. This involves installing a corresponding number of monitoring plates 2 on the support frame 1 according to the setup requirements. This includes an upper positioning body 4 and its mirror image 6, a lower support body 5 and its mirror image 7, ensuring the screw connections are secure. The monitoring plates 2 are then inserted through the positioning slots 43. Four U-shaped fixing blocks 8 are installed, and a protective plate 3 is placed. This completes the assembly of the testing device. The testing device is then placed in the electron beam's path. The electron beam is adjusted to an appropriate power until it penetrates all the monitoring plates 2, at which point the electron gun is turned off. After cooling, the monitoring plates 2 are removed, and the relative positions of the markings on the monitoring plates 2 with respect to the same reference are measured. Through data processing, the markings on different monitoring plates 2 are connected to fit the electron beam's transmission path.
[0049] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.
Claims
1. A testing device for electron beam transmission trajectory, characterized in that, include: A support frame (1) having a first end for electron beam incidence and a second end opposite to the first end; Multiple monitoring plates (2) are fixedly installed inside the support frame (1), and the multiple monitoring plates (2) are arranged face to face and parallel between the first end and the second end of the support frame (1); The upper end of the monitoring plate (2) is fixedly connected to the support frame (1) through the upper positioning component, and the lower end of the monitoring plate (2) is fixedly connected to the support frame (1) through the lower positioning component. The upper positioning component is provided with a positioning groove (43) that runs vertically through the upper part, and the lower positioning component is provided with a fixing groove (53) with a solid bottom. The monitoring plate (2) is inserted into the positioning groove (43) and the fixing groove (53).
2. The testing apparatus for electron beam transmission trajectory according to claim 1, characterized in that, Also includes: The protective plate (3) is fixedly installed at the second end of the support frame (1).
3. The testing apparatus for electron beam transmission trajectory according to claim 1, characterized in that, The upper positioning component includes an upper positioning body (4) and an upper positioning body mirror (6), wherein the upper positioning body (4) and the upper positioning body mirror (6) are respectively used to fix the two sides of the upper end of the monitoring plate (2); The upper positioning body (4) includes an upper cover plate (41) and an upper bottom plate (42). The upper base plate (42) includes a first upper plate (421) and a second upper plate (422) that is vertically and fixedly connected to the first upper plate (421). The upper cover plate (41) is fixedly connected to the outer side of the first upper plate (421), and a positioning groove (43) is provided between the first upper plate (421) and the upper cover plate (41). The upper side of the monitoring plate (2) is located in the positioning groove (43); the second upper plate (422) is fixedly connected to the support frame (1).
4. The electron beam transmission trajectory testing device according to claim 3, characterized in that, The lower positioning component includes: a lower support body (5) and a lower support body mirror body (7), the lower support body (5) and the lower support body mirror body (7) are respectively used to fix the two sides of the lower end of the monitoring plate (2); the lower support body (5) is arranged vertically and vertically corresponding to the upper positioning body (4), and the upper positioning body mirror body (6) is arranged vertically and vertically corresponding to the lower support body mirror body (7); The lower support (5) includes a lower cover plate (51) and a lower bottom plate (52); The lower base plate (52) includes a first lower plate (521) and a second lower plate (522) that is vertically fixed to the first lower plate (521); the lower cover plate (51) is fixedly connected to the outer side of the first lower plate (521), and a solid bottom fixing groove (53) is provided between the first lower plate (521) and the lower cover plate (51); the lower side of the monitoring plate (2) is located in the fixing groove (53); the second lower plate (522) is fixedly connected to the support frame (1).
5. The testing apparatus for electron beam transmission trajectory according to claim 2, characterized in that, The protective plate (3) is fixedly installed at the second end of the support frame (1) by multiple U-shaped fixing blocks (8).
6. The electron beam transmission trajectory testing apparatus according to claim 5, characterized in that, Two first U-shaped fixing blocks (81) are fixedly installed on the lower side of the second end of the support frame (1), and the lower end of the protective plate (3) is located in the two first U-shaped fixing blocks (81) on the lower side of the second end; A second U-shaped fixing block (82) is fixedly installed on each of the two sides of the second end of the support frame (1), and the two sides of the protective plate (3) are respectively located in the second U-shaped fixing block (82) on the two sides of the second end.
7. The testing apparatus for electron beam transmission trajectory according to claim 1, characterized in that, The support frame (1) is composed of multiple strip plates that are fixedly connected. Each strip plate has a thickness of more than 5 mm and a width of 18-25 mm.
8. The apparatus for testing electron beam transmission trajectory according to claim 1, characterized in that, Also includes: A sub-frame (9) is integrally connected to the support frame (1). The sub-frame (9) is located below the support frame (1). The bottom of the sub-frame (9) is a base plate with a positioning hole in the middle.
9. The testing apparatus for electron beam transmission trajectory according to claim 1, characterized in that, The distance between two adjacent monitoring plates (2) is 10-50 mm.
10. The apparatus for testing electron beam transmission trajectory according to claim 2, characterized in that, The thickness of the monitoring plate (2) is less than or equal to 1 mm, and / or the thickness of the protection plate (3) is greater than 12 mm.
