Semiconductor workpiece storage container position detection module and semiconductor tank processing apparatus

Abstract

The application relates to the technical field of semiconductor manufacturing equipment, in particular to a semiconductor workpiece storage container position detection module and a semiconductor tank type processing equipment, which comprises a mounting seat, a balance lever and a position sensor; a rotating shaft is arranged on the mounting seat, the extending direction of the rotating shaft is perpendicular to the axial direction of the balance lever; the balance lever comprises a triggering part, a mounting part and an abutting part; the mounting part is movably connected with the rotating shaft; the triggering part and the abutting part are located on the two sides of the rotating shaft, the center of mass of the balance lever is located on the rotating axis of the rotating shaft, and the balance lever keeps a horizontal state; a detected object abuts against the abutting part and pushes the balance lever to move around the rotating shaft, and the position sensor detects the position of the triggering part. The application adopts a mechanical balance structure to cooperate with a position sensor to realize state judgment, and can accurately detect whether a semiconductor workpiece storage container is placed in place.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, and more specifically, to a semiconductor workpiece storage container position detection module and a semiconductor tank processing device. Background Technology

[0002] In semiconductor manufacturing, after wafers are diced, their surfaces retain a large amount of dicing debris and fluid. These contaminants must be removed through a cleaning process before they can proceed to subsequent testing or packaging. Currently, industrial applications commonly use tank-type cleaning equipment for batch wafer processing. A typical configuration can clean four wafer-loaded semiconductor workpiece storage containers simultaneously. In this process, a robotic arm places the wafer-loaded storage container into a designated station within the processing tank. After cleaning, the robotic arm removes it. However, in actual operation, if a semiconductor workpiece storage container is not accurately positioned (e.g., tilted, offset, or not fully seated), the robotic arm is prone to misalignment during the final gripping after cleaning, causing wafers to collide or rub against the basket structure. In severe cases, this can lead to wafer breakage, resulting not only in costly material loss but also potential equipment damage, impacting production line yield and stability.

[0003] To avoid the aforementioned risks, existing technologies typically employ diffuse reflection photoelectric sensors in the positioning area of ​​the semiconductor workpiece storage container to detect whether the container is correctly positioned. However, in the case of a wafer immediately after dicing, its surface carries a large amount of micron-sized dicing powder and organic / inorganic dicing fluid. Once immersed in the processing tank, this rapidly leads to highly turbid liquid within the tank. Suspended particles in the turbid liquid can still scatter or block the light path, causing false triggers or missed detections, significantly reducing reliability. Furthermore, some solutions have attempted to introduce machine vision systems for position recognition, but limitations include the large size of the processing tank, severe fluctuations in the liquid surface due to circulation or mechanical disturbances, and the inherent turbidity and opacity of the liquid itself, making it difficult for the camera to clearly acquire the actual posture and position information of the semiconductor workpiece storage container at the bottom of the tank. Simultaneously, vision systems are costly to manufacture, have complex algorithms, and are difficult to maintain, making long-term stable operation in harsh wet cleaning environments challenging. Utility Model Content

[0004] The purpose of this application is to provide a semiconductor workpiece storage container position detection module and a semiconductor tank-type processing device, which adopts a mechanical balance structure in conjunction with a position sensor to realize state judgment, and can accurately detect whether the semiconductor workpiece storage container is placed in place.

[0005] This application is implemented as follows: In a first aspect, this application provides a semiconductor workpiece storage container position detection module, including a mounting base, a balance bar, and a position sensor for arrangement in a semiconductor tank processing device; a rotating shaft is provided on the mounting base, the extension direction of the rotating shaft being perpendicular to the axial direction of the balance bar; the balance bar includes a trigger part, a mounting part, and an abutment part; the mounting part is movably connected to the rotating shaft; the trigger part and the abutment part are located on opposite sides of the rotating shaft, the center of mass of the balance bar is located on the rotation axis of the rotating shaft, and the balance bar remains horizontal; the object to be detected abuts against the abutment part and pushes the balance bar to move around the rotating shaft, and the position sensor detects the position of the trigger part.

[0006] As an optional implementation, the balance bar has a mounting lug at one end near the abutment portion, and the abutment portion includes a rolling wheel movably mounted on the mounting lug, with the rotation axis of the rolling wheel aligned with the rotation axis direction.

[0007] As an optional implementation, a counterweight is installed at the end of the balance bar away from the abutment portion, so as to position the center of mass of the balance bar on the rotation axis.

[0008] As an optional implementation, the end of the balance bar is provided with a threaded hole extending axially; the counterweight includes an adjustment part and a threaded rod, the threaded rod being connected to the threaded hole; the adjustment part is rotated around the axis of the threaded rod under force, which can drive the counterweight closer to or away from the axis of rotation of the rotating shaft.

[0009] As an optional implementation, the position sensor includes a proximity switch disposed on the mounting base; in a horizontal state, the trigger portion approaches the proximity switch and causes the proximity switch to output a sensing signal; in a non-horizontal state, the trigger portion moves out of the sensing range of the proximity switch, causing the sensing signal to change.

[0010] As an optional implementation, the rotating shaft is provided with an elastic element; in an unbalanced state, the elastic element compresses and stores elastic potential energy; when the object being detected separates from the contact part, the elastic element releases its elastic potential energy to bring the balance bar to a horizontal state.

[0011] As an optional implementation, a bushing is provided between the mounting part and the mounting base, the bushing being used to reduce the contact area between the mounting part and the mounting base.

[0012] As an optional implementation, it includes a bottom base; the bottom base divides a rectangular positioning area for placing a semiconductor workpiece storage container; at least two of the mounting seats are arranged diagonally in the rectangular positioning area.

[0013] As an optional implementation, the mounting base is provided with a positioning groove; the positioning groove is used to engage with a protrusion provided on the semiconductor workpiece storage container.

[0014] Secondly, this application provides a semiconductor tank-type processing device, including a processing tank, a semiconductor workpiece storage container, and the aforementioned semiconductor workpiece storage container position detection module; the semiconductor workpiece storage container position detection module is installed in the processing tank and is used to detect the position of the semiconductor workpiece storage container.

[0015] The beneficial effects of this application include: The semiconductor workpiece storage container position detection module and semiconductor tank processing equipment provided in this application effectively overcome the problems of traditional photoelectric or visual detection being susceptible to interference and having low reliability in turbid or turbulent liquid environments by adopting a detection structure that combines a mechanical balance bar and a position sensor. The solution in this application does not rely on optical paths or image recognition; it accurately determines whether the workpiece is in place simply by triggering a lever action through physical contact between the semiconductor workpiece storage container and the contact part, significantly improving the stability and anti-interference capability of the detection. At the same time, it has a simple structure, low cost, and convenient maintenance, making it suitable for harsh industrial scenarios such as semiconductor wet cleaning. It effectively avoids wafer breakage and equipment damage caused by misplacement of the semiconductor workpiece storage container, ensuring production line yield and operational safety. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is one of the structural schematic diagrams of the semiconductor workpiece storage container position detection module according to an embodiment of this application; Figure 2 This is a second schematic diagram of the semiconductor workpiece storage container position detection module according to an embodiment of this application; Figure 3 This is the third schematic diagram of the semiconductor workpiece storage container position detection module according to an embodiment of this application; Figure 4 This is the fourth schematic diagram of the semiconductor workpiece storage container position detection module in this application.

[0018] icon: 100-Mounting base; 101-Balance bar; 102-Position sensor; 103-Rotating shaft; 104-Trigger part; 105-Mounting part; 106-Abutting part; 107-Rolling wheel; 108-Counterweight; 109-Bottom base; 110-Semiconductor workpiece storage container; 111-Rectangular positioning area; 112-Positioning groove. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0021] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0023] In semiconductor manufacturing, after wafers are diced, their surfaces retain a large amount of dicing debris and fluid. These contaminants must be removed through a cleaning process before they can proceed to subsequent testing or packaging. Currently, industrial applications commonly use tank-type cleaning equipment for batch wafer processing. A typical configuration can clean four wafer-loaded semiconductor workpiece storage containers simultaneously. In this process, a robotic arm places the wafer-loaded storage container into a designated station within the processing tank. After cleaning, the robotic arm removes it. However, in actual operation, if a semiconductor workpiece storage container is not accurately positioned (e.g., tilted, offset, or not fully seated), the robotic arm is prone to misalignment during the final gripping after cleaning, causing wafers to collide or rub against the basket structure. In severe cases, this can lead to wafer breakage, resulting not only in costly material loss but also potential equipment damage, impacting production line yield and stability.

[0024] To avoid the aforementioned risks, existing technologies typically employ diffuse reflection photoelectric sensors in the positioning area of ​​the semiconductor workpiece storage container to detect whether the container is correctly positioned. However, in the case of a wafer immediately after dicing, its surface carries a large amount of micron-sized dicing powder and organic / inorganic dicing fluid. Once immersed in the processing tank, this rapidly leads to highly turbid liquid within the tank. Suspended particles in the turbid liquid can still scatter or block the light path, causing false triggers or missed detections, significantly reducing reliability. Furthermore, some solutions have attempted to introduce machine vision systems for position recognition, but limitations include the large size of the processing tank, severe fluctuations in the liquid surface due to circulation or mechanical disturbances, and the inherent turbidity and opacity of the liquid itself, making it difficult for the camera to clearly acquire the actual posture and position information of the semiconductor workpiece storage container at the bottom of the tank. Simultaneously, vision systems are costly to manufacture, have complex algorithms, and are difficult to maintain, making long-term stable operation in harsh wet cleaning environments challenging.

[0025] To address the aforementioned technical problems, embodiments of this application provide a semiconductor workpiece storage container position detection module and a semiconductor tank-type processing device.

[0026] Reference Figure 1 , Figure 2As shown, the semiconductor workpiece storage container position detection module provided in this application embodiment includes a mounting base 100, a balance bar 101, and a position sensor 102 for arrangement in a semiconductor tank processing equipment; a rotating shaft 103 is provided on the mounting base 100, and the extension direction of the rotating shaft 103 is perpendicular to the axial direction of the balance bar 101; the balance bar 101 includes a trigger part 104, a mounting part 105, and an abutment part 106; the mounting part 105 is movably connected to the rotating shaft 103; the trigger part 104 and the abutment part 106 are located on both sides of the rotating shaft 103, the center of mass of the balance bar 101 is located on the rotation axis of the rotating shaft 103, and the balance bar 101 is kept in a horizontal state; the object to be detected abuts against the abutment part 106 and pushes the balance bar 101 to move around the rotating shaft 103, and the position sensor 102 detects the position of the trigger part 104.

[0027] It should be noted that this application provides a semiconductor workpiece storage container position detection module based on the mechanical lever principle, used to reliably determine whether the semiconductor workpiece storage container 110 is accurately positioned in a turbid liquid environment. This module supports a balance bar 101 with its center of mass located on the axis of the shaft 103 on the mounting base 100, keeping it naturally horizontal. One end of the balance bar 101 is an abutment part 106 for contacting the semiconductor workpiece storage container 110, and the other end is a trigger part 104, with a corresponding position sensor 102. When the semiconductor workpiece storage container 110 is correctly positioned, it pushes the abutment part 106, causing the balance bar 101 to rotate around the shaft 103, thereby displacing the trigger part 104, which is detected by the position sensor 102. If the semiconductor workpiece storage container 110 is not in position, the abutment part 106 cannot be effectively pushed, the trigger part 104 remains unchanged, and the system determines an anomaly accordingly. Since this solution does not rely on optical or visual means, but uses pure mechanical contact sensing, it is not affected by harsh working conditions such as turbid cleaning fluid or liquid surface fluctuations. It has the advantages of simple structure, reliable response, low cost and easy maintenance.

[0028] This application embodiment, by employing a detection structure combining a mechanical balance bar 101 and a position sensor 102, effectively overcomes the problems of traditional photoelectric or visual detection being susceptible to interference and having low reliability in turbid or turbulent liquid environments. The solution in this application embodiment does not rely on optical paths or image recognition; it accurately determines whether the semiconductor workpiece storage container 110 is in position simply by triggering a lever action through physical contact between the semiconductor workpiece storage container 110 and the contact portion 106. This significantly improves the stability and anti-interference capability of the detection. Simultaneously, the structure is simple, low-cost, and easy to maintain, making it suitable for harsh industrial scenarios such as semiconductor wet cleaning. It effectively avoids wafer breakage and equipment damage caused by misplacement of the semiconductor workpiece storage container 110, ensuring production line yield and operational safety.

[0029] Reference Figure 2As shown, as an optional implementation, the balance bar 101 is provided with a mounting lug at one end near the abutment portion 106. The abutment portion 106 includes a rolling wheel 107 movably mounted on the mounting lug, and the rotation axis of the rolling wheel 107 is in the same direction as the rotation axis 103.

[0030] It should be noted that the balance bar 101 has a mounting lug at one end near the abutment portion 106, and a rolling wheel 107 is movably mounted on the lug, with its rotation axis aligned with the rotation axis 103 of the balance bar 101. When the semiconductor workpiece storage container 110 pushes against the rolling wheel 107, the rolling wheel 107 can rotate smoothly around its own axis, converting the original sliding friction into rolling friction, significantly reducing contact resistance, and making the balance bar 101 respond more sensitively and smoothly to the positioning action of the semiconductor workpiece storage container 110. This design not only reduces the risk of misjudgment caused by friction jamming, but also reduces wear on the surface or structure of the semiconductor workpiece storage container 110, improving the reliability and mechanical durability of the detection process, and is especially suitable for semiconductor manufacturing environments with frequent insertion and removal and high cleanliness requirements.

[0031] Reference Figure 2 As shown, in one optional implementation, a counterweight 108 is installed at the end of the balance bar 101 away from the abutment portion 106, which is used to keep the center of mass of the balance bar 101 on the axis of rotation.

[0032] It should be noted that, in this embodiment, by installing a counterweight 108 at the end of the balance bar 101 away from the contact portion 106, the overall mass distribution is precisely adjusted to ensure that the center of mass of the balance bar 101 is accurately located on the rotation axis of the rotating shaft 103. This design allows the balance bar 101 to naturally maintain a horizontal and static state when no external force is applied, improving the stability and repeatability of the initial position. When the semiconductor workpiece storage container 110 pushes the contact portion 106, the lever response is more sensitive and linear, and is not affected by its own weight imbalance, thereby improving the accuracy and reliability of position detection. At the same time, the counterweight 108 facilitates flexible adjustment of the balance state according to actual working conditions, enhancing the adaptability of the structure and the assembly tolerance.

[0033] The trigger part 104 can be set on the counterweight block 108.

[0034] It should be noted that the triggering part 104 is integrated into the counterweight 108. This counterweight 108 serves two purposes: aligning the center of mass of the balance bar 101 with the rotating shaft 103 to ensure lever stability, and also acting as the carrier for sensor triggering, simplifying the structural layout. When the semiconductor workpiece storage container 110 pushes the abutment part 106 to rotate the balance bar 101 around the rotating shaft 103, the counterweight 108, along with its triggering part 104, moves synchronously, directly detected by the position sensor 102, thus accurately reflecting the positioning status of the semiconductor workpiece storage container 110. This design organically combines functional integration with mechanical balance, reducing the number of parts while ensuring detection sensitivity and reliability, thereby improving the overall compactness, assembly convenience, and long-term operational stability of the device.

[0035] As an optional implementation, the end of the balance bar 101 is provided with a threaded hole extending axially; the counterweight 108 includes an adjustment part and a threaded rod, the threaded rod being connected to the threaded hole; the adjustment part is rotated around the axis of the threaded rod under force, which can drive the counterweight to move closer to or away from the rotation axis of the rotating shaft 103.

[0036] It should be noted that the end of the balance bar 101 is provided with a threaded hole extending along its axial direction, and the counterweight 108 is composed of an adjustment part and a threaded rod integrally or fixedly connected to it, with the threaded rod screwed into the threaded hole. By rotating the adjustment part, the threaded rod can be driven to move forward and backward along the axial direction of the threaded hole, thereby moving the entire counterweight 108 closer to or away from the rotation axis of the rotating shaft 103, realizing fine adjustment of the center of mass position of the balance bar 101.

[0037] The structure of this embodiment allows for precise on-site calibration of the balance state based on manufacturing tolerances, wear variations, or different operating conditions, ensuring that the balance bar 101 is always in an ideal initial horizontal position, thus improving detection sensitivity and repeatability. Simultaneously, this adjustable counterweight design enhances the adaptability and ease of maintenance of the device, making it suitable for semiconductor cleaning processes with stringent stability requirements.

[0038] As an optional implementation, the position sensor 102 includes a proximity switch disposed on the mounting base 100; in a horizontal state, the trigger part 104 approaches the proximity switch and causes the proximity switch to output a sensing signal; in a non-horizontal state, the trigger part 104 moves out of the sensing range of the proximity switch, causing the sensing signal to change.

[0039] In this optional embodiment, the position sensor 102 is a proximity switch mounted on the mounting base 100. When the balance bar 101 is in a horizontal initial state (i.e., the semiconductor workpiece storage container 110 is not in place), the trigger part 104 is exactly within the reaction range of the proximity switch, enabling the proximity switch to output a sensing signal. When the semiconductor workpiece storage container 110 is correctly positioned and pushes the abutment part 106, the balance bar 101 rotates around the rotating shaft 103, causing the trigger part 104 to deviate from its original position, that is, the trigger part 104 moves out of the sensing range of the proximity switch, causing the sensing signal to change into other electrical signals, thereby determining that the semiconductor workpiece storage container 110 is in place.

[0040] It should be noted that the proximity switch in this application embodiment includes any one of inductive proximity switch, capacitive proximity switch and Hall effect proximity switch.

[0041] This design utilizes mechanical displacement to directly modulate the optical path, resulting in a simple structure and rapid response. Furthermore, due to the short optical path and the fact that the components are fixed on the mounting base 100, interference from turbid liquids on the sensing path is avoided, significantly improving the detection reliability and anti-contamination capability in wet cleaning environments.

[0042] The proximity switches in this application embodiment can reliably detect position changes of the trigger 104 without relying on optical paths, making them particularly suitable for harsh working conditions such as turbid liquids, the presence of chemical solutions, or high humidity in the processing tank. By adapting to different types of waterproof sensors, the environmental adaptability, service life, and ease of maintenance of the device can be further improved while ensuring detection accuracy and stability.

[0043] As an optional implementation, the rotating shaft 103 is provided with an elastic element; in an unbalanced state, the elastic element compresses and stores elastic potential energy; when the object being detected separates from the contact part 106, the elastic element releases its elastic potential energy to bring the balance bar 101 to a horizontal state.

[0044] In this optional embodiment, an elastic element (such as a torsion spring or compression spring) is provided on the rotating shaft 103. When the semiconductor workpiece storage container 110 pushes the abutment part 106 to cause the balance bar 101 to deviate from the horizontal position, the elastic element deforms and stores elastic potential energy. Once the semiconductor workpiece storage container 110 is removed and the abutment part 106 is no longer under force, the elastic element releases the stored energy, driving the balance bar 101 to automatically reset to the initial horizontal state. This design not only ensures that the detection mechanism is in a consistent reference position before each detection, improving detection repeatability and reliability, but also avoids false triggering caused by external vibration or residual force. At the same time, the automatic reset function simplifies the system control logic and enhances the stable operation capability of the device in high-frequency, automated production lines, making it particularly suitable for the stringent requirements of precision and reliability in semiconductor manufacturing.

[0045] As an optional implementation, a bushing is provided between the mounting part 105 and the mounting base 100, the bushing being used to reduce the contact area between the mounting part 105 and the mounting base 100.

[0046] In this optional embodiment, a bushing is added between the mounting portion 105 of the balance bar 101 and the mounting base 100. By reducing the actual contact area between the two, frictional resistance and wear are effectively reduced, allowing the balance bar 101 to rotate more flexibly and smoothly around the shaft 103. The bushing is typically made of wear-resistant, self-lubricating, or corrosion-resistant materials (such as engineering plastics or oil-impregnated copper bushings), which not only improves the long-term operational stability of the mechanism in humid environments and chemical cleaning solutions, but also reduces the risk of detection delays or failures caused by friction jamming. In addition, the bushing structure facilitates assembly and maintenance, helping to improve the response sensitivity, service life, and reliability of the entire semiconductor workpiece storage container position detection module.

[0047] This application embodiment also provides a semiconductor tank-type processing apparatus, including a processing tank, a semiconductor workpiece storage container 110, and the aforementioned semiconductor workpiece storage container position detection module; the semiconductor workpiece storage container position detection module is installed in the processing tank and is used to detect the position of the semiconductor workpiece storage container 110. Specifically, the semiconductor workpiece storage container position detection module includes a bottom base 109 installed in the processing tank.

[0048] Reference Figure 3 , Figure 4 As shown, in one optional implementation, the bottom base 109 divides a rectangular positioning area 111 for placing the semiconductor workpiece storage container 110; at least two mounting bases 100 are arranged diagonally in the rectangular positioning area 111. As described above, each mounting base 100 is provided with a proximity switch and a trigger part 104.

[0049] It should be noted that this application achieves reliable judgment of the placement posture of the semiconductor workpiece storage container 110 by setting at least two of the aforementioned position detection modules on the bottom base 109 and arranging them diagonally at the rectangular positioning area 111 for placing the semiconductor workpiece storage container 110. Since the diagonal arrangement can simultaneously detect the positioning status of the two far corners of the semiconductor workpiece storage container 110, it can effectively identify abnormalities such as tilting, offset, or one-sided suspension, avoiding misjudgments that may be caused by single-point detection. Combined with the anti-turbidity and anti-interference mechanical sensing characteristics of the semiconductor workpiece storage container position detection module itself, this device can confirm with high precision and high stability whether the semiconductor workpiece storage container 110 is completely and flatly seated in the harsh environment of wet cleaning, thereby significantly reducing the risk of wafer breakage and equipment failure caused by improper loading, and improving the automation level and operational reliability of the semiconductor manufacturing line.

[0050] Reference Figure 3 As shown, as an optional implementation, the mounting base 100 is provided with a positioning groove 112; the positioning groove 112 is used to cooperate with the protrusion provided on the semiconductor workpiece storage container 110.

[0051] In this optional embodiment, the mounting base 100 of the semiconductor workpiece storage container position detection module is provided with a positioning groove 112. The positioning groove 112 is configured to engage with a pre-set protrusion (such as a positioning pin or guide block) on the bottom or side wall of the semiconductor workpiece storage container 110. When the semiconductor workpiece storage container 110 is placed in the processing tank, its protrusion inserts into the corresponding positioning groove 112, which not only provides initial mechanical guidance and limiting for the semiconductor workpiece storage container 110, but also ensures that the contact part 106 can accurately and stably contact the semiconductor workpiece storage container 110, thereby improving the repeatability and reliability of position detection. At the same time, this structure integrates positioning and detection functions into one unit, which simplifies the overall device layout and effectively prevents detection failure caused by slight shaking or displacement of the semiconductor workpiece storage container 110, further enhancing the reliability of the system under complex working conditions such as high vibration and fluid flow disturbance.

[0052] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A semiconductor workpiece storage container position detection module, characterized in that, The system includes a mounting base (100), a balance bar (101), and a position sensor (102). A rotating shaft (103) is mounted on the mounting base (100), the shaft extending perpendicularly to the axial direction of the balance bar (101). The balance bar (101) includes a trigger part (104), a mounting part (105), and an abutment part (106). The mounting part (105) is movably connected to the rotating shaft (103), and the mounting base (100) is used to hold a half-mounted balance bar. A conductor workpiece storage container; the trigger part (104) and the abutment part (106) are located on both sides of the rotating shaft (103), the center of mass of the balance bar (101) is located on the rotation axis of the rotating shaft (103), and the balance bar (101) is kept horizontal; the object being detected abuts against the abutment part (106) and pushes the balance bar (101) to move around the rotating shaft (103), and the position sensor (102) detects the position of the trigger part (104).

2. The semiconductor workpiece storage container position detection module according to claim 1, characterized in that, The balance bar (101) has a mounting lug at one end near the abutment part (106). The abutment part (106) includes a rolling wheel (107) movably mounted on the mounting lug. The rotation axis of the rolling wheel (107) is in the same direction as the rotation axis (103).

3. The semiconductor workpiece storage container position detection module according to claim 1, characterized in that, A counterweight (108) is installed at the end of the balance bar (101) away from the abutment part (106) to make the center of mass of the balance bar (101) located on the rotation axis.

4. The semiconductor workpiece storage container position detection module according to claim 3, characterized in that, The balance bar (101) has a threaded hole extending axially at its end; the counterweight (108) includes an adjustment part and a threaded rod, the threaded rod being connected to the threaded hole; the adjustment part is rotated around the axis of the threaded rod under force, which can drive the counterweight to move closer to or away from the axis of rotation of the rotating shaft (103).

5. The semiconductor workpiece storage container position detection module according to any one of claims 1-4, characterized in that, The position sensor (102) includes a proximity switch disposed on the mounting base (100); in a horizontal state, the trigger part (104) approaches the proximity switch and causes the proximity switch to output a sensing signal; in a non-horizontal state, the trigger part (104) moves out of the sensing range of the proximity switch and causes the sensing signal to change.

6. The semiconductor workpiece storage container position detection module according to any one of claims 1-4, characterized in that, The rotating shaft (103) is provided with an elastic element; in an unbalanced state, the elastic element compresses and stores elastic potential energy; when the object being detected separates from the contact part (106), the elastic element releases elastic potential energy to bring the balance bar (101) to a horizontal state.

7. The semiconductor workpiece storage container position detection module according to any one of claims 1-4, characterized in that, A bushing is provided between the mounting part (105) and the mounting base (100), the bushing being used to reduce the contact area between the mounting part (105) and the mounting base (100).

8. The semiconductor workpiece storage container position detection module according to any one of claims 1-4, characterized in that, Includes a bottom base (109); the bottom base (109) divides a rectangular positioning area (111) for placing a semiconductor workpiece storage container (110); at least two of the mounting bases (100) are arranged diagonally in the rectangular positioning area (111).

9. The semiconductor workpiece storage container position detection module according to any one of claims 1-4, characterized in that, The mounting base (100) is provided with a positioning groove (112); the positioning groove (112) is used to cooperate with the protrusion provided on the semiconductor workpiece storage container (110).

10. A semiconductor tank processing apparatus, characterized in that, It includes a processing tank and a semiconductor workpiece storage container position detection module as described in any one of claims 1-9; the semiconductor workpiece storage container position detection module is installed in the processing tank and is used to detect the position of the semiconductor workpiece storage container (110).

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