Ozone water concentration adjusting device and ozone water circulation system

Abstract

The application provides an ozone water concentration adjusting device and an ozone water circulating system, and relates to the technical field of semiconductor manufacturing. The device comprises a first gas-liquid mixing module, an ozone generating module, a second gas-liquid mixing module, a liquid storage barrel and a control module. The ozone generating module is provided with a first gas branch and a second gas branch. The first gas-liquid mixing module is communicated with the first gas branch at an air inlet end, and the liquid outlet end of the first gas-liquid mixing module is communicated with the liquid storage barrel. The liquid inlet end of the second gas-liquid mixing module is communicated with the liquid storage barrel, the air inlet end of the second gas-liquid mixing module is communicated with the second gas branch, and the liquid outlet end of the second gas-liquid mixing module is communicated with the liquid storage barrel. The control module is connected with the ozone generating module, the first gas-liquid mixing module, the second gas-liquid mixing module and the liquid storage barrel, and is used for feedback closed loop according to the ozone water concentration in the liquid storage barrel, so as to improve and stabilize the ozone water concentration in the liquid storage barrel. The application realizes continuous and stable ozone water concentration in the liquid storage barrel.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to an ozone water concentration regulating device and an ozone water circulation system. Background Technology

[0002] In the field of semiconductor manufacturing technology, especially in the wafer cleaning process of advanced processes, the stability of ozone water concentration directly affects the cleaning effect and product yield. Current technology uses oxygen to generate ozone via an ozone generator, which is then mixed with pure water in an ejector or static mixer before entering a storage defoaming tank and finally exiting at the process point. When switching between different flow rates or concentrations, the power of the ozone generator and the pure water proportioning valve need to be readjusted. The long PID feedback adjustment time results in significant fluctuations in the stability of the ozone water concentration within the production cycle. Utility Model Content

[0003] The technical problem to be solved by this application is to provide an ozone water concentration regulating device and an ozone water circulation system that can avoid large fluctuations in the stability of ozone water concentration within the production cycle due to the long adjustment time of PID feedback.

[0004] The technical solution adopted by this application to solve the above-mentioned technical problems is as follows: This application provides an ozone water concentration regulating device for semiconductor cleaning processes, comprising: a first gas-liquid mixing module, an ozone generating module, a second gas-liquid mixing module, a storage tank, and a control module; the ozone generating module is provided with a first gas branch and a second gas branch, and the ozone generated by the ozone generating module is supplied from the first gas branch and the second gas branch respectively; the liquid inlet of the first gas-liquid mixing module is used to replenish pure water, the gas inlet of the first gas-liquid mixing module is connected to the first gas branch for mixing ozone and pure water to form ozone water, and the liquid outlet of the first gas-liquid mixing module is connected to the storage tank. The system is configured to connect the ozone generator module, the first gas-liquid mixing module, the second gas-liquid mixing module, and the second gas branch, for mixing ozone with ozone to increase and stabilize the ozone concentration. The system is configured to connect the ozone generator module, the first gas-liquid mixing module, the second gas-liquid mixing module, and the storage tank, for introducing ozone into the storage tank. The control module is connected to the ozone generator module, the first gas-liquid mixing module, the second gas-liquid mixing module, and the storage tank, for using a feedback loop based on the ozone concentration in the storage tank to increase and stabilize the ozone concentration in the storage tank.

[0005] Optionally, the storage tank further includes a supply pipe, one end of which is connected to the storage tank, and the other end of which is connected to an external process machine. Along the liquid flow direction of the supply pipe, an ozone water concentration detector, a pump, a first flow meter, a supply valve, a flow controller, and a second flow meter are sequentially installed on the supply pipe. The control module is connected to the ozone water concentration detector, the pump, the first flow meter, the supply valve, the flow controller, and the second flow meter.

[0006] Optionally, the ozone generating module includes an inlet pipe, an ozone generator, and an outlet pipe; the inlet pipe is connected to the ozone generator and is used to introduce oxygen into the ozone generator, and a main gas valve is provided on the inlet pipe; one end of the outlet pipe is connected to the ozone generator, and the other end of the outlet pipe is connected to the first gas branch and the second gas branch, so that the first gas branch and the second gas branch are connected in parallel; a first gas valve is provided on the first gas branch, and a second gas valve is provided on the second gas branch; the outlet pipe is used to introduce ozone generated by the ozone generator into the first gas branch and the second gas branch; the control module is connected to the main gas valve, the first gas valve, and the second gas valve.

[0007] Optionally, the first gas-liquid mixing module includes a first inlet pipe and a first ejector; the first inlet pipe is connected to the inlet of the first ejector for introducing pure water into the first ejector, and a first liquid valve is provided on the first inlet pipe; the air inlet of the first ejector is connected to the first gas branch for mixing pure water and ozone, and the liquid outlet of the first ejector is connected to the storage tank for introducing the mixed ozone water into the storage tank; the control module is connected to the first liquid valve.

[0008] Optionally, the top of the liquid storage tank is provided with a pressure relief pipe, and a pressure sensor and an electronic back pressure valve are arranged sequentially from bottom to top on the pressure relief pipe. The control module is connected to the pressure sensor and the electronic back pressure valve for closed-loop regulation of the pressure inside the liquid storage tank.

[0009] Optionally, a liquid level pipe is connected to the side of the liquid storage tank. The liquid level pipe is provided with an upper limit liquid level sensor, an upper liquid level sensor, a lower liquid level sensor, and a lower limit liquid level sensor in sequence from top to bottom. The control module is connected to the upper limit liquid level sensor, the upper liquid level sensor, the lower liquid level sensor, and the lower limit liquid level sensor, and is used to control water replenishment and water stoppage between the lower liquid level and the upper liquid level.

[0010] Optionally, the height of the connection between the liquid supply pipe and the liquid storage tank is less than the height of the lower limit liquid level sensor.

[0011] Optionally, the second gas-liquid mixing module includes a second inlet pipe and a second ejector; the inlet of the second ejector is connected to the supply pipe through the second inlet pipe, and is connected between the first flow meter and the supply valve on the inlet pipe, for introducing ozone water from the storage tank into the second ejector; a second liquid valve is provided on the second inlet pipe; the air inlet of the second ejector is connected to the second gas branch, for mixing the ozone water with ozone again; the outlet of the second ejector is connected to the storage tank, for introducing the mixed ozone water into the storage tank; the control module is connected to the second liquid valve.

[0012] This application also provides an ozone water circulation system, including the ozone water concentration regulating device as described above; a main unit process component connected to the storage tank, the main unit process component being connected to a control module and transmitting process parameters to the control module; and a plant terminal for supplying oxygen to the ozone generating module and pure water to the first gas-liquid mixing module.

[0013] Optionally, the control module is configured to control the ozone water concentration regulating device according to the process parameters required by the main unit's process components.

[0014] This application provides an ozone water concentration regulating device and an ozone water circulation system. The first gas-liquid mixing module completes the initial ozone dissolution, and the second gas-liquid mixing module uses ozone provided by the second gas branch to perform secondary mixing on the ozone-containing liquid, forming an in-tank circulation concentration loop. The control module adjusts the ozone generating module and the second gas branch in real time through concentration feedback, so that ozone is added in small amounts multiple times in the loop to quickly offset disturbances. The circulation flow rate is greater than the process flow rate, the system has large inertia, and the concentration fluctuations are quickly diluted and compensated, thereby continuously stabilizing the ozone water concentration in the storage tank. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is one of the structural schematic diagrams of the ozone water concentration stabilization device of this application; Figure 2 This is the second schematic diagram of the ozone water concentration stabilization device in this application; Figure 3 This is the third schematic diagram of the ozone water concentration stabilization device in this application.

[0017] Icons: 10-First gas-liquid mixing module; 11-First ejector; 12-First liquid valve; 20-Ozone generating module; 21-Inlet pipe; 22-Ozone generator; 23-First gas branch; 231-First gas valve; 24-Second gas branch; 241-Second gas valve; 30-Second gas-liquid mixing module; 31-Second ejector; 32-Second liquid inlet valve; 40-Storage tank; 41-Supply pipe; 411-Ozone water concentration detector; 412-Pump; 413-First flow meter; 414-Supply valve; 415-Flow controller; 416-Second flow meter; 42-Pressure relief pipe; 421-Pressure sensor; 422-Electronic back pressure valve; 430-Level pipe; 431-Upper limit level sensor; 432-Upper level sensor; 433-Lower level sensor; 434-Lower limit level sensor; 50-Control module.

[0018] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in this application embodiment are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0021] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0022] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0023] In existing technologies, ozone is generated from oxygen using an ozone generator, then mixed once with pure water in an ejector or static mixer before entering a storage defoaming tank and finally exiting at the process point. When switching between different flow rates or concentrations, the ozone generator power and the pure water proportioning valve need to be readjusted. The PID feedback adjustment time is long, resulting in significant fluctuations in the stability of the ozone water concentration within the production cycle. To address these issues, the embodiments of this application refer to... Figure 1 To address the aforementioned problems, the following technical solutions are provided.

[0024] Please refer to Figures 1 to 3This application provides an ozone water concentration regulating device for semiconductor cleaning processes, comprising: a first gas-liquid mixing module 10, an ozone generating module 20, a second gas-liquid mixing module 30, a storage tank 40, and a control module 50; the ozone generating module 20 is provided with a first gas branch 23 and a second gas branch 24, and the ozone generated by the ozone generating module 20 is supplied from the first gas branch 23 and the second gas branch 24 respectively; the liquid inlet of the first gas-liquid mixing module 10 is used to replenish pure water, the gas inlet of the first gas-liquid mixing module 10 is connected to the first gas branch 23 for mixing ozone and pure water to form ozone water, and the liquid outlet of the first gas-liquid mixing module 10 is connected to the storage tank 40. The first gas-liquid mixing module 20 is connected to the ozone generator module 20, the first gas-liquid mixing module 10, the second gas-liquid mixing module 30, and the storage tank 40. The second gas-liquid mixing module 30 is connected to the second gas branch 24 for mixing ozone with ozone water to increase and stabilize the ozone water concentration. The second gas-liquid mixing module 30 is connected to the storage tank 40 for introducing ozone water into the storage tank 40. The control module 50 (not shown in the figure) is connected to the ozone generator module 20, the first gas-liquid mixing module 10, the second gas-liquid mixing module 30, and the storage tank 40 for feedback closed-loop based on the ozone water concentration in the storage tank 40 to increase and stabilize the ozone water concentration in the storage tank 40.

[0025] Specifically, the ozone water concentration regulating device includes a first gas-liquid mixing module 10, an ozone generating module 20, a second gas-liquid mixing module 30, a storage tank 40, and a control module 50. The ozone generating module 20 has a first gas branch 23 and a second gas branch 24. The ozone generated by the ozone generating module 20 is supplied from the first gas branch 23 and the second gas branch 24, respectively. The liquid inlet of the first gas-liquid mixing module 10 is used to replenish pure water. The gas inlet of the first gas-liquid mixing module 10 is connected to the first gas branch 23. After the ozone and pure water are mixed into ozone water in the first gas-liquid mixing module 10, it is sent out from the liquid outlet. The ozone is fed into the storage tank 40. The inlet of the second gas-liquid mixing module 30 is connected to the storage tank 40, and the gas inlet of the second gas-liquid mixing module 30 is connected to the second gas branch 24. The ozone and the ozone water from the storage tank 40 are mixed again in the second gas-liquid mixing module 30. The mixed ozone water is returned to the storage tank 40 from the outlet of the second gas-liquid mixing module 30. The control module 50 is connected to the ozone generating module 20, the first gas-liquid mixing module 10, the second gas-liquid mixing module 30 and the storage tank 40. It performs closed-loop regulation based on the ozone water concentration feedback in the storage tank 40 to improve and stabilize the ozone water concentration in the storage tank 40.

[0026] During operation, the control module 50 opens the inlet of the first gas-liquid mixing module 10 and the first gas branch 23. Ozone output from the ozone generator 20 mixes initially with pure water in the first gas-liquid mixing module 10, forming ozone water that enters the storage tank 40 to establish an initial concentration. During operation, the ozone water in the storage tank 40 is introduced into the inlet of the second gas-liquid mixing module 30. The control module 50 opens the second gas branch 24, allowing ozone output from the ozone generator 20 to enter the second gas-liquid mixing module 30. At the gas end, ozone and ozone water are mixed again in the second gas-liquid mixing module 30, and the ozone water with increased concentration returns to the storage tank 40. When demand changes, the control module 50 adjusts the power of the ozone generating module 20 and the on / off state of the second gas branch 24 in real time. The second gas-liquid mixing module 30 quickly completes the concentration or deconcentration in the circulation loop. When external water use is suspended, liquid discharge stops, and only the second gas-liquid mixing module 30 continues to circulate. The ozone water in the tank continues to flow back and mix with ozone again. The concentration is locked in a closed loop and the liquid is not discharged.

[0027] This application provides an ozone water concentration regulating device. The first gas-liquid mixing module 10 completes the initial ozone dissolution, and the second gas-liquid mixing module 30 uses the ozone provided by the second gas branch 24 to perform secondary mixing on the ozone-containing liquid, forming an in-tank circulation concentration loop. The control module 50 adjusts the ozone generating module 20 and the second gas branch 24 in real time through concentration feedback, so that ozone is added in small amounts multiple times in the loop to quickly offset disturbances. The circulation flow rate is greater than the process flow rate, the system inertia is large, and the concentration fluctuations are quickly diluted and compensated, thereby continuously stabilizing the ozone water concentration in the storage tank 40.

[0028] In one embodiment, the storage tank 40 further includes a supply pipe 41, one end of which is connected to the storage tank 40, and the other end of which is connected to an external process machine. Along the liquid flow direction of the supply pipe 41, an ozone water concentration detector 411, a pump 412, a first flow meter 413, a supply valve 414, a flow controller 415, and a second flow meter 416 are sequentially installed on the supply pipe 41. The control module 50 is connected to the ozone water concentration detector 411, the pump 412, the first flow meter 413, the supply valve 414, the flow controller 415, and the second flow meter 416.

[0029] Specifically, a supply pipe 41 is added to the storage tank 40, with one end connected to the storage tank 40 and the other end connected to an external process machine. An ozone water concentration detector 411, a pump 412, a first flow meter 413, a supply valve 414, a flow controller 415, and a second flow meter 416 are arranged sequentially along the liquid flow direction. The control module 50 is connected to all the above components to form a complete output channel from sampling, pressurization, metering, adjustment to re-metering in the tank, which can monitor and accurately control the concentration and flow rate of ozone water sent to the process machine in real time.

[0030] During operation, after pump 412 starts, the ozone water in storage tank 40 first obtains the real-time concentration value through ozone water concentration detector 411; then the liquid passes through first flow meter 413 to record the initial flow rate; supply valve 414 opens according to the needs of the main unit; flow controller 415 adjusts the opening degree according to the set value, and second flow meter 416 verifies the adjusted flow rate; control module 50 compares the concentration and flow signals with the set values ​​and corrects the speed of pump 412 or the opening degree of flow controller 415 in real time so that the output ozone water always meets the process setting.

[0031] Understandably, the dual flow meters on the supply pipe 41 form a closed loop, the flow controller 415 acts as the actuator, and the ozone water concentration detector 411 provides concentration feedback; the control module 50 uses concentration and flow rate as controlled variables, and the pump speed 412 and the opening of the flow controller 415 as adjustable variables to achieve parallel dual closed loops; any disturbance is first captured instantly by the second flow meter 416, and then the control module 50 quickly calculates and drives the actuator to ensure that the ozone water concentration and flow rate sent to the process equipment are stable at the same time, eliminating the lag and deviation caused by traditional single-point metering.

[0032] In one embodiment, the ozone generating module 20 includes an inlet pipe 21, an ozone generator 22, and an outlet pipe. The inlet pipe 21 is connected to the ozone generator 22 and is used to introduce oxygen into the ozone generator 22. A main gas valve is provided on the inlet pipe 21. One end of the outlet pipe is connected to the ozone generator 22, and the other end of the outlet pipe is connected to the first gas branch 23 and the second gas branch 24, so that the first gas branch 23 and the second gas branch 24 are connected in parallel. A first gas valve 231 is provided on the first gas branch 23, and a second gas valve 241 is provided on the second gas branch 24. The outlet pipe is used to introduce the ozone generated by the ozone generator 22 into the first gas branch 23 and the second gas branch 24. The control module 50 is connected to the main gas valve, the first gas valve 231, and the second gas valve 241.

[0033] Specifically, the ozone generating module 20 is equipped with an inlet pipe 21, an ozone generator 22, and an outlet pipe. The inlet pipe 21 is connected to the ozone generator 22 and introduces oxygen into the ozone generator 22. A main gas valve is installed on the inlet pipe 21. One end of the outlet pipe is connected to the ozone generator 22, and the other end is connected to the first gas branch 23 and the second gas branch 24, so that the first gas branch 23 and the second gas branch 24 are connected in parallel. A first gas valve 231 is installed on the first gas branch 23, and a second gas valve 241 is installed on the second gas branch 24. The outlet pipe delivers the ozone generated by the ozone generator 22 into the first gas branch 23 and the second gas branch 24 respectively. The control module 50 is connected to the main gas valve, the first gas valve 231, and the second gas valve 241, and is used to independently control the total oxygen supply and the ozone on / off of the two branches.

[0034] During operation, the control module 50 opens the main gas valve, and oxygen enters the ozone generator 22 through the inlet pipe 21. The ozone generated by the ozone generator 22 simultaneously enters the parallel first gas branch 23 and second gas branch 24 through the outlet pipe. When initial mixing is required, the control module 50 opens the first gas valve 231, and ozone enters the first gas-liquid mixing module 10 through the first gas branch 23. When cyclic enrichment is required, the control module 50 opens the second gas valve 241, and ozone enters the second gas-liquid mixing module 30 through the second gas branch 24. When the concentration requirement changes, the control module 50 adjusts the opening and closing of the second gas valve 241 to instantly change the amount of ozone entering the second gas-liquid mixing module 30, thereby achieving rapid enrichment or enrichment.

[0035] Understandably, the outlet pipe distributes the output of ozone generator 22 in parallel to the first gas branch 23 and the second gas branch 24. The control module 50 controls the overall oxygen supply through the main gas valve and controls the ozone flow of the two branches through the first gas valve 231 and the second gas valve 241 respectively. This allows the first gas branch 23 to establish the initial concentration, while the second gas branch 24 is responsible for cyclic enrichment and rapid adjustment. The two branches do not interfere with each other, achieving both rapid concentration establishment and sensitive concentration adjustment.

[0036] In one embodiment, the first gas-liquid mixing module 10 includes a first inlet pipe and a first ejector 11; the first inlet pipe is connected to the inlet of the first ejector 11 for introducing pure water into the first ejector 11, and a first liquid valve 12 is provided on the first inlet pipe; the air inlet of the first ejector 11 is connected to the first gas branch 23 for mixing pure water and ozone, and the liquid outlet of the first ejector 11 is connected to the storage tank 40 for introducing the mixed ozone water into the storage tank 40; the control module 50 is connected to the first liquid valve 12.

[0037] Specifically, the first gas-liquid mixing module 10 consists of a first liquid inlet pipe and a first ejector 11. The first liquid inlet pipe is connected to the liquid inlet of the first ejector 11 and introduces pure water into the first ejector 11. A first liquid valve 12 is installed on the first liquid inlet pipe. The air inlet of the first ejector 11 is connected to the first gas branch 23 to allow ozone to enter the interior of the first ejector 11. Pure water and ozone are mixed in the first ejector 11 to form ozone water. The liquid outlet of the first ejector 11 is connected to the liquid storage tank 40 to send the mixed ozone water into the liquid storage tank 40. The control module 50 is connected to the first liquid valve 12 to control the on / off state or flow rate of pure water.

[0038] Understandably, the control module 50 opens the first liquid valve 12, and pure water enters the inlet of the first ejector 11 through the first inlet pipe; at the same time, ozone in the first gas branch 23 is drawn in through the air inlet of the first ejector 11; inside the first ejector 11, the high-speed water flow creates negative pressure to disperse and dissolve the ozone, forming preliminary ozone water; the ozone water flows directly into the storage tank 40 through the outlet of the first ejector 11, quickly establishing the initial liquid level and initial concentration; when the liquid level or concentration reaches the set value, the control module 50 can reduce or close the first liquid valve 12 to reduce or stop the initial water replenishment.

[0039] It should be noted that the first ejector 11 uses the negative pressure generated by the high-speed jet of pure water to draw in the ozone delivered by the first gas branch 23 and instantly disperse it into tiny bubbles, thereby increasing the contact area between ozone and water and improving the dissolution efficiency. The control module 50 can adjust the pure water flow rate in real time through the first liquid valve 12, thereby changing the magnitude of the negative pressure inside the first ejector 11 and thus simultaneously adjusting the ozone intake, achieving rapid matching of concentration and flow rate in the initial mixing stage, and providing a stable initial liquid for the subsequent cyclic enrichment of the second gas-liquid mixing module 30.

[0040] In one embodiment, the top of the liquid storage tank 40 is provided with a pressure relief pipe 42, and the pressure relief pipe 42 is provided with a pressure sensor 421 and an electronic back pressure valve 422 from bottom to top. The control module 50 is connected to the pressure sensor 421 and the electronic back pressure valve 422 for closed-loop regulation of the pressure inside the liquid storage tank 40.

[0041] Specifically, a pressure relief pipe 42 is connected to the top of the storage tank 40. Inside the pressure relief pipe 42, a pressure sensor 421 and an electronic back pressure valve 422 are arranged sequentially from bottom to top. The pressure sensor 421 is used to detect the gas pressure inside the storage tank 40 in real time, and the electronic back pressure valve 422 is used to adjust the venting opening. The control module 50 is connected to the pressure sensor 421 and the electronic back pressure valve 422 to form a pressure closed loop. The pressure inside the storage tank 40 is stabilized by changing the opening of the electronic back pressure valve 422.

[0042] Furthermore, when the pressure sensor 421 detects that the pressure inside the storage tank 40 is higher than the set value, the control module 50 increases the opening of the electronic back pressure valve 422 to accelerate the venting and reduce the pressure inside the tank; when the pressure is lower than the set value, the control module 50 decreases the opening of the electronic back pressure valve 422 to reduce the venting and increase the pressure inside the tank. Through continuous adjustment, the pressure inside the storage tank 40 is kept within the set range to prevent pressure fluctuations from affecting the solubility and concentration stability of ozone.

[0043] Understandably, the pressure sensor 421 converts the pressure inside the tank into an electrical signal in real time and sends it to the control module 50. After comparing the measured value with the set value, the control module 50 outputs an adjustment signal to the electronic back pressure valve 422. The electronic back pressure valve 422 changes the valve opening to adjust the exhaust flow rate, forming a pressure negative feedback closed loop. The change in exhaust volume directly changes the gas volume inside the tank, thereby quickly balancing the pressure fluctuations caused by temperature changes, ozone decomposition, or liquid entry and exit, maintaining a constant pressure inside the tank, and providing a constant gas phase environment for a stable ozone water concentration.

[0044] In one embodiment, a liquid level pipe 430 is connected to the side of the liquid storage tank 40. The liquid level pipe 430 is provided with an upper limit liquid level sensor 431, an upper liquid level sensor 432, a lower liquid level sensor 433, and a lower limit liquid level sensor 434 from top to bottom. The control module 50 is connected to the upper limit liquid level sensor 431, the upper liquid level sensor 432, the lower liquid level sensor 433, and the lower limit liquid level sensor 434, and is used to control water replenishment and water stoppage between the lower liquid level and the upper liquid level.

[0045] Specifically, the liquid storage tank 40 is connected to the liquid level pipe 430 on its side. The liquid level pipe 430 is equipped with an upper limit liquid level sensor 431, an upper liquid level sensor 432, a lower liquid level sensor 433, and a lower limit liquid level sensor 434 from top to bottom. The control module 50 is connected to the upper limit liquid level sensor 431, the upper liquid level sensor 432, the lower liquid level sensor 433, and the lower limit liquid level sensor 434, and is used to control water replenishment and water stoppage between the lower liquid level and the upper liquid level.

[0046] Furthermore, when the liquid level drops to the position of the lower liquid level sensor 433, the control module 50 receives a signal and starts water replenishment, opens the first liquid valve 12, and pure water enters the first ejector 11 through the first liquid inlet pipe and is then sent into the storage tank 40; when the liquid level rises to the position of the upper liquid level sensor 432, the control module 50 closes the first liquid valve 12 and stops water replenishment; if the liquid level continues to rise to the upper limit, the upper limit liquid level sensor 431 triggers an alarm or emergency shutdown; if the liquid level drops to the position of the lower limit liquid level sensor 434, the control module 50 triggers low liquid level protection, stops the pump 412 from running, and prevents it from running dry.

[0047] It should be noted that each liquid level sensor in the liquid level tube 430 detects the liquid level height in real time and outputs a signal. The control module 50 controls the opening and closing of the first liquid valve 12 based on the signal difference between the lower liquid level sensor and the upper liquid level sensor 432, forming a liquid level negative feedback. The upper limit liquid level sensor 431 and the lower limit liquid level sensor 434 provide over-limit protection to ensure that the liquid level is always in a safe range, avoid overflow or dry burning, and maintain the continuous and stable operation of the device.

[0048] In one embodiment, the height of the connection between the liquid supply pipe 41 and the liquid storage tank 40 is less than the height of the lower limit liquid level sensor 434.

[0049] Specifically, the connection between the supply pipe 41 and the storage tank 40 is located on the side wall of the storage tank 40, and its height is lower than that of the lower limit liquid level sensor 434, ensuring that the connection port is always below the liquid surface. During normal operation, regardless of how the liquid level fluctuates between the lower and upper liquid levels, the connection between the supply pipe 41 and the storage tank 40 is always submerged in the liquid, and the pump 412 will not draw in gas from the upper part of the tank when it draws ozone water through the supply pipe 41. When the liquid level unexpectedly drops to the position of the lower limit liquid level sensor 434, the control module 50 has triggered the low liquid level protection to stop the pump 412 from running. At this time, the connection port is still below the liquid surface, preventing air from entering the supply pipe 41 and preventing cavitation and flow fluctuations.

[0050] In one embodiment, the second gas-liquid mixing module 30 includes a second inlet pipe and a second ejector 31; the inlet of the second ejector 31 is connected to the supply pipe 41 through the second inlet pipe, and is connected between the first flow meter 413 and the supply valve 414 on the inlet pipe, for introducing ozone water from the storage tank 40 into the second ejector 31; a second liquid valve is provided on the second inlet pipe; the air inlet of the second ejector 31 is connected to the second gas branch 24, for mixing the ozone water with ozone again; the outlet of the second ejector 31 is connected to the storage tank 40, for introducing the mixed ozone water into the storage tank 40; the control module 50 is connected to the second liquid valve.

[0051] Specifically, the second gas-liquid mixing module 30 consists of a second inlet pipe and a second ejector 31. The second inlet pipe connects the section of the supply pipe 41 located between the first flow meter 413 and the supply valve 414 to the inlet of the second ejector 31, so that the ozone water in the storage tank 40 enters the second ejector 31 through the second inlet pipe. A second liquid valve is provided on the second inlet pipe. The air inlet of the second ejector 31 is connected to the second gas branch 24. The ozone water and ozone are mixed again in the second ejector 31. The mixed ozone water returns to the storage tank 40 through the outlet of the second ejector 31. The control module 50 is connected to the pump 412 to control the on / off state or flow rate of the ozone water entering the second ejector 31.

[0052] When the device is running, the ozone water in the supply pipe 41 is diverted between the first flow meter 413 and the supply valve 414. The control module 50 opens the second liquid valve, and part of the ozone water enters the inlet of the second ejector 31 through the second inlet pipe. At the same time, the ozone in the second gas branch 24 enters the gas inlet of the second ejector 31. The high-speed water flow in the second ejector 31 generates negative pressure, which draws in the ozone and disperses and dissolves it, forming ozone water with a higher concentration. Then, it flows back to the storage tank 40 through the outlet of the second ejector 31. When it is necessary to reduce the concentration or stop the concentration, the control module 50 increases or decreases the speed of the pump 412, reduces or cuts off the liquid entering the second ejector 31, and the circulation concentration process is weakened or stopped.

[0053] Understandably, the second jet injector 31 uses the negative pressure formed by the high-speed water flow to re-mix the ozone provided by the second gas branch 24 into the ozone-containing liquid. By adjusting the speed of the pump 412 through the control module 50, the water flow rate of the second jet injector 31 can be changed, thereby simultaneously changing the magnitude of the negative pressure and the amount of ozone absorbed, realizing multiple micro-additions of ozone, so that the ozone water concentration in the storage tank 40 is continuously increased and quickly stabilized during the circulation process, while avoiding the concentration fluctuations caused by traditional single mixing.

[0054] This application embodiment also provides an ozone water circulation system, including the ozone water concentration regulating device as described above; a main unit process component connected to the liquid storage tank 40, the main unit process component being connected to the control module 50 and transmitting process parameters to the control module 50; and a plant terminal for supplying oxygen to the ozone generating module 20 and pure water to the first gas-liquid mixing module 10.

[0055] Specifically, the ozone water circulation system consists of an ozone water concentration regulating device, a main unit process component, and a plant terminal. The main unit process component is connected to the liquid storage tank 40 and the control module 50, transmitting process parameters to the control module 50. The plant terminal supplies oxygen to the ozone generating module 20 and pure water to the first gas-liquid mixing module 10.

[0056] Understandably, the plant continuously supplies oxygen to the ozone generating module 20 and pure water to the first gas-liquid mixing module 10. The ozone water concentration regulating device generates and stabilizes the concentration of ozone water according to the instructions of the control module 50. The main unit process components send the required concentration and flow rate as process parameters to the control module 50. The control module 50 adjusts the operating status of the ozone generating module 20, the first gas-liquid mixing module 10, and the second gas-liquid mixing module 30 accordingly, so that the storage tank 40 outputs ozone water that meets the parameters to the main unit process components. When the process parameters change, the main unit process components update the parameters in real time, and the control module 50 adjusts immediately. The circulation system completes the concentration and flow rate switching without stopping the machine.

[0057] It should be noted that the main unit's process components, acting as the demand side, input process parameters into the control module 50 to form a demand signal. The control module 50 uses this demand signal as a set value to adjust the power of the ozone generating module 20, the first liquid valve 12, the second liquid valve, the liquid supply valve 414, and the speed of the pump 412 in a coordinated manner, thereby achieving a closed-loop match between demand and supply. The plant continuously supplies raw materials to ensure uninterrupted circulation, thus maintaining a stable output of ozone water concentration and flow rate throughout the entire semiconductor cleaning process.

[0058] In one embodiment, the control module 50 is configured to control the ozone water concentration regulating device according to the process parameters required by the main unit's process components.

[0059] Specifically, the control module 50 is configured to control the ozone water concentration regulating device according to the process parameters required by the main unit's process components. This means that the control module 50 receives the process parameters sent by the main unit's process components and performs linkage control on each component in the ozone water concentration regulating device based on these parameters to achieve precise matching of concentration and flow rate.

[0060] Furthermore, the main unit's process components send the required concentration and flow rate as process parameters to the control module 50. The control module 50 sets the received process parameters as set values ​​and compares them with the real-time signals from the ozone water concentration detector 411, the first flow meter 413, and the second flow meter 416. When the measured value deviates from the set value, the control module 50 sequentially adjusts the power of the ozone generating module 20, the opening of the first liquid valve 12, the second liquid valve, the liquid supply valve 414, and the electronic back pressure valve 422 to ensure that the ozone water concentration in the storage tank 40 and the output flow rate of the liquid supply pipe 41 simultaneously meet the process requirements. If the process parameters change, the main unit's process components immediately update the parameters, and the control module 50 then recalculates and adjusts to continuously maintain consistency between the output and the demand.

[0061] Understandably, based on the process parameters of the main unit's process components, the control module 50 forms a dual closed loop: the concentration closed loop uses the ozone water concentration detector 411 as feedback, and the flow closed loop uses the first flow meter 413 and the second flow meter 416 as feedback. The ozone output is controlled by adjusting the power of the ozone generating module 20, the circulation concentration is controlled by adjusting the speed of the pump 412, the output flow is controlled by adjusting the liquid supply valve 414 and the flow controller 415, and the pressure of the storage tank 40 is stabilized by adjusting the electronic back pressure valve 422, so as to achieve rapid response and continuous stability when demand changes.

[0062] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. An ozone water concentration regulating device for semiconductor cleaning processes, characterized in that, include: The system comprises a first gas-liquid mixing module, an ozone generating module, a second gas-liquid mixing module, a liquid storage tank, and a control module. The ozone generating module is provided with a first gas branch and a second gas branch, and the ozone generated by the ozone generating module is supplied from the first gas branch and the second gas branch respectively; The liquid inlet of the first gas-liquid mixing module is used to replenish pure water. The gas inlet of the first gas-liquid mixing module is connected to the first gas branch for mixing ozone and pure water into ozone water. The liquid outlet of the first gas-liquid mixing module is connected to the storage tank for introducing the ozone water into the storage tank. The liquid inlet of the second gas-liquid mixing module is connected to the liquid storage tank, and the gas inlet of the second gas-liquid mixing module is connected to the second gas branch, which is used to mix ozone with ozone water to increase and stabilize the ozone water concentration. The liquid outlet of the second gas-liquid mixing module is connected to the liquid storage tank, which is used to introduce the ozone water into the liquid storage tank. The control module is connected to the ozone generating module, the first gas-liquid mixing module, the second gas-liquid mixing module and the storage tank, and is used to improve and stabilize the ozone concentration in the storage tank based on the feedback closed loop of the ozone water concentration in the storage tank.

2. The ozone water concentration regulating device according to claim 1, characterized in that, The liquid storage tank also includes a liquid supply pipe. One end of the liquid supply pipe is connected to the liquid storage tank, and the other end of the liquid supply pipe is used to connect to an external process machine. Along the liquid flow direction of the liquid supply pipe, an ozone water concentration detector, a pump, a first flow meter, a liquid supply valve, a flow controller, and a second flow meter are sequentially installed on the liquid supply pipe. The control module is connected to the ozone water concentration detector, the pump, the first flow meter, the liquid supply valve, the flow controller, and the second flow meter.

3. The ozone water concentration regulating device according to claim 1, characterized in that, The ozone generating module includes an air inlet pipe, an ozone generator, and an air outlet pipe; The air inlet pipe is connected to the ozone generator and is used to introduce oxygen into the ozone generator. A main air valve is provided on the air inlet pipe. One end of the gas outlet pipe is connected to the ozone generator, and the other end of the gas outlet pipe is connected to the first gas branch and the second gas branch, so that the first gas branch and the second gas branch are connected in parallel. A first gas valve is provided on the first gas branch, and a second gas valve is provided on the second gas branch. The gas outlet pipe is used to pass the ozone generated by the ozone generator into the first gas branch and the second gas branch. The control module is connected to the main air valve, the first air valve, and the second air valve.

4. The ozone water concentration regulating device according to claim 1, characterized in that, The first gas-liquid mixing module includes a first liquid inlet pipe and a first ejector; The first liquid inlet pipe is connected to the liquid inlet of the first ejector and is used to introduce pure water into the first ejector. A first liquid valve is provided on the first liquid inlet pipe. The air inlet of the first jet injector is connected to the first gas branch for mixing pure water and ozone, and the liquid outlet of the first jet injector is connected to the liquid storage tank for introducing the mixed ozone water into the liquid storage tank. The control module is connected to the first liquid valve.

5. The ozone water concentration regulating device according to claim 1, characterized in that, The top of the liquid storage tank is equipped with a pressure relief pipe, and a pressure sensor and an electronic back pressure valve are arranged sequentially from bottom to top on the pressure relief pipe. The control module is connected to the pressure sensor and the electronic back pressure valve for closed-loop regulation of the pressure inside the liquid storage tank.

6. The ozone water concentration regulating device according to claim 2, characterized in that, The liquid storage tank is connected to a liquid level pipe on its side. The liquid level pipe is equipped with an upper limit liquid level sensor, an upper liquid level sensor, a lower liquid level sensor, and a lower limit liquid level sensor in sequence from top to bottom. The control module is connected to the upper limit liquid level sensor, the upper liquid level sensor, the lower liquid level sensor, and the lower limit liquid level sensor, and is used to control water replenishment and water stoppage between the lower liquid level and the upper liquid level.

7. The ozone water concentration regulating device according to claim 6, characterized in that, The height of the connection between the liquid supply pipe and the liquid storage tank is less than the height of the lower limit liquid level sensor.

8. The ozone water concentration regulating device according to claim 2, characterized in that, The second gas-liquid mixing module includes a second inlet pipe and a second ejector; The inlet of the second jet injector is connected to the supply pipe through the second inlet pipe, and is connected between the first flow meter and the supply valve on the inlet pipe, for passing ozone water in the storage tank into the second jet injector. A second liquid valve is provided on the second inlet pipe. The air inlet of the second jet nozzle is connected to the second gas branch for mixing ozone water with ozone again, and the liquid outlet of the second jet nozzle is connected to the liquid storage tank for introducing the mixed ozone water into the liquid storage tank. The control module is connected to the second liquid valve.

9. An ozone water circulation system, characterized in that, Includes the ozone water concentration regulating device as described in any one of claims 1-8; The main unit process component is connected to the liquid storage tank, and the main unit process component is connected to the control module and transmits process parameters to the control module; The plant terminal is used to supply oxygen to the ozone generating module and pure water to the first gas-liquid mixing module.

10. The ozone water circulation system according to claim 9, characterized in that, The control module is configured to control the ozone water concentration regulating device according to the process parameters required by the main unit's process components.

Images