A read structure, a superconducting quantum chip and a superconducting quantum computer

Abstract

The application discloses a reading structure, a superconducting quantum chip and a superconducting quantum computer, and belongs to the field of superconducting quantum chip manufacturing. The reading structure for reading operation of a superconducting quantum bit comprises a reading bus and a reading resonant cavity. The first coupling section of the reading bus and the second coupling section of the reading resonant cavity are coupled, and the reading bus and the reading resonant cavity have a ground plane which is not shared. The reading structure can provide high-quality coupling of the reading bus and the reading resonant cavity, thereby providing good reading operation quality.

Description

Technical Field

[0001] This application belongs to the field of quantum information, especially the field of superconducting quantum chip manufacturing. In particular, this application relates to a readout structure, a superconducting quantum chip, and a superconducting quantum computer. Background Technology

[0002] In superconducting quantum chips, superconducting qubits are equipped with readout resonant cavities, readout buses, XY control lines, Z control lines, and other components. Furthermore, some of these structures need to work together to achieve specific functions. For example, the readout bus is coupled to the readout resonant cavity to enable operation via the readout bus, thereby reading the superconducting qubits. Therefore, the coupling quality between the readout bus and the readout resonant cavity directly affects the signal transmission between the readout buses and the readout resonant cavity, thus influencing the reading performance of the superconducting qubits—including the input of the readout signal (e.g., readout in) and the output of the readout result (e.g., readout out).

[0003] Therefore, it is necessary to achieve effective coupling between the read bus and the read resonant cavity through effective design. Utility Model Content

[0004] The examples in this application provide a readout structure, a superconducting quantum chip, and a superconducting quantum computer, which enable better coupling between the readout bus and the readout resonant cavity in the readout structure used for reading superconducting qubit operations in the superconducting quantum chip, thereby achieving good readout performance.

[0005] The solution presented in this application example is implemented through the following steps.

[0006] In a first aspect, the readout structure for reading out superconducting qubits disclosed in the examples of this application includes: Read the bus, which has a first coupling segment; and The resonant cavity is read out, which has a second coupling segment, and the first coupling segment is coupled to the second coupling segment; The read bus and the read resonant cavity are coplanar waveguide transmission lines, and their center conductor strips are separated by gaps.

[0007] According to some examples of this application, the coupling method between the first coupling segment and the second coupling segment is parallel line coupling.

[0008] According to some examples in this application, the read bus is a linear structure.

[0009] According to some examples in this application, the second coupling segment is a linear structure.

[0010] According to some examples in this application, the reading resonant cavity also includes a curved section.

[0011] According to some examples of this application, at least one straight segment is included between the second coupling segment and the curved segment.

[0012] In a second aspect, the readout structure for reading out superconducting qubits disclosed in the examples of this application includes: A substrate has a metal layer formed on its surface to serve as a ground plane. The metal layer has windows that expose the substrate. A first coplanar waveguide transmission line, wherein the central conductor of the first coplanar waveguide transmission line includes a first coupling segment located within a window; And a second coplanar waveguide transmission line, the center conductor of which includes a second coupling segment coupled to the first coupling segment and located within a window.

[0013] According to some examples of this application, a first coplanar waveguide transmission line extends linearly along a first direction, and a second coupling segment extends parallel to the first direction.

[0014] According to some examples of this application, the second coplanar waveguide transmission line is composed of a curved section and a second coupling section, with the curved section extending along a second direction perpendicular to the first direction.

[0015] According to some examples of this application, the readout structure includes at least two second coplanar waveguide transmission lines.

[0016] Beneficial effects: In the example of this application, the readout structure includes a readout bus and a readout resonant cavity, both constructed as coplanar waveguide transmission lines and cooperating with each other. Specifically, the center conductor strips of the two are separated by a gap. The readout bus has a first coupling segment, and the readout resonant cavity has a second coupling segment. The readout bus and the readout resonant cavity are coupled through the first and second coupling segments, thereby allowing the readout operation of superconducting qubits to be performed through this readout structure. This readout structure allows for better coupling between the readout bus and the readout resonant cavity, thereby improving the readout performance of superconducting qubits. Attached Figure Description

[0017] To illustrate this more clearly, the accompanying drawings used in the description will be briefly introduced below.

[0018] Figure 1 A schematic diagram of the Transmon superconducting quantum bit structure is disclosed; Figure 2 It was made public. Figure 1 A magnified schematic diagram of the localized coupling region; Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure of the intermediate coupling region; Figure 4 A cross-sectional structural schematic diagram of a coplanar waveguide transmission line is disclosed. Figure 5 A schematic diagram of a reading structure in this application is disclosed; Figure 6 It was made public. Figure 5 A magnified schematic diagram of the readout structure in the coupling region; Figure 7 for Figure 5 A schematic diagram of the cross-sectional structure of the coupling region in the diagram; Figure 8 A schematic diagram of another reading structure in this application example is disclosed. Detailed Implementation

[0019] Superconducting quantum chips are the core components of superconducting quantum computers that perform quantum computing. A superconducting quantum chip contains core units called superconducting qubits, or quantum bits, which are essentially quantum processors.

[0020] Superconducting quantum chips are constructed and realized through the physical structure of superconducting quantum circuits. The energy level structure of superconducting circuits can be controlled by external electromagnetic signals, and the circuit design offers strong controllability. Furthermore, thanks to existing mature integrated circuit processes and micro / nano fabrication technologies, superconducting quantum circuits possess scalability and advantages unmatched by other quantum bit physical systems.

[0021] A superconducting quantum chip based on superconducting quantum circuits includes superconducting qubits and microwave resonant cavities, among other superconducting circuit structures. The superconducting qubits are two-level systems composed of a capacitor and a Josephson junction with nonlinear inductive properties. As a two-level system obeying the laws of quantum mechanics, a superconducting qubit can exist in a superposition of 0, 1, or any other state.

[0022] By designing superconducting qubits of different shapes, it is possible to achieve different electrical parameter states such as capacitance and inductance.

[0023] Figure 1 A schematic diagram of the Transmon superconducting quantum bit structure is disclosed. (See also...) Figure 1 The Transmon superconducting quantum bit is shaped like a "+". It consists of a cross-shaped capacitor and a superconducting quantum interference device (squid) connecting one branch of the capacitor.

[0024] The superconducting quantum interference device (Squid) includes one or more Josephson junctions. A Josephson junction is a device consisting of two electrodes and a thin insulating barrier layer separating the two electrodes, and the materials of the two electrodes can exhibit superconductivity at their critical temperature or below that critical temperature.

[0025] In the aforementioned superconducting quantum bit system, various circuit structures with different functions exist around the superconducting quantum bits, such as a readout bus, a readout resonant cavity, and couplers for inter-superconducting quantum bit coupling connections. Figure 1 (Not shown). The read bus and read resonant cavity are coupled to each other in a parallel manner, and the coupling region is described as the coupling region.

[0026] The circuit structure may also include a drive control signal line (XY-Control Line, also known as xy control line, pulse modulation signal line, or transition control line) for performing XY rotation operations on the superconducting quantum bit. By applying a driving voltage signal in the circuit, the superconducting quantum bit can be excited to transition; it is associated with the superconducting quantum bit through capacitive coupling.

[0027] The circuit structure can also include a circuit structure for Z-rotation operation of the superconducting quantum bits, which can be accomplished by a control signal line near the superconducting quantum interference device (squid); this is called the flux control line (Z-Control Line, also known as the z-control line, frequency control line, or frequency control line). As mentioned above, the flux control line is arranged near the superconducting quantum interference device (squid), and its excitation current is inductively coupled to the superconducting quantum interference device (squid) through a magnetic field.

[0028] It should be noted that both flux control signal lines and drive control circuits can be used to control superconducting qubits, but their control methods and purposes differ.

[0029] In this process, the drive control signal line applies a pulse to the superconducting quantum bit in the form of an electric field, which causes the energy level of the superconducting quantum bit to transition.

[0030] In this system, the signal transmitted via the flux-controlled signal line generates a magnetic field, which is applied to the squid region of the superconducting quantum interference device (SQID). Simultaneously, the magnetic flux passing through the squid region causes a change in the squid's critical current. This change in critical current leads to a change in the frequency of the tunable superconducting quantum bit; that is, the frequency of the superconducting quantum bit can be controlled by the signal transmitted via the flux-controlled signal line.

[0031] In the structure described above, efficient readout operations of superconducting qubits are a crucial prerequisite for ensuring effective quantum computing and quantum information processing. Previous studies have primarily relied on high-quality fabrication of the readout bus, the readout resonant cavity, and appropriate physical structural parameters to guarantee readout quality.

[0032] Unlike previous technologies, this application improves the read quality by controlling the quality factor of the read resonant cavity. More importantly, the quality factor is adjusted by modifying its ground plane.

[0033] The quality factor (Q factor) is a dimensionless parameter used to describe the specific performance of a system or component. It is defined as the ratio of the energy stored in a system or component to the energy lost per cycle. It reflects the rate of energy loss and the stability of the resonant frequency. In other words, the Q factor measures the energy loss characteristics of a system or component, and therefore a high Q factor means a slower rate of energy loss, allowing vibrations or resonances to persist for longer periods, thus allowing such a system to exhibit more stable performance.

[0034] In a resonant circuit, the quality factor can be described as the ratio of characteristic impedance to loss resistance, or the ratio of reactive power to active power. Therefore, the quality factor in a resonant circuit directly reflects the damping properties of the system or component, as well as the magnitude of the resonant frequency relative to the bandwidth. Furthermore, the quality factor directly affects the circuit's bandwidth, frequency response characteristics, stability, and noise performance.

[0035] Unlike the optimization methods described above, this application's example focuses on optimizing the quality factor of the read resonant cavity. In the scenario involving the read bus and the read resonant cavity, the quality factor of the read resonant cavity includes the internal quality factor (Q). i ) and coupling quality factor (Q) c (or described as an external quality factor).

[0036] Among them, Q i It can be used to describe the energy loss of a harmonic oscillator due to its internal resistance, hence the quality factor Q. i This can be referred to as the internal quality factor. For example, it can be primarily determined by the material of the readout resonant cavity and the micro / nano fabrication process.

[0037] Q c It can be used to describe the coupling strength between the read bus and the read resonant cavity, and Q cIt primarily determines the source of energy dissipation in the readout resonant cavity and is also used to measure the energy dissipation rate of the readout resonant cavity. Its specific value is mainly determined by the circuit parameters.

[0038] In this application, the main selection is to adjust the ground plane of the read bus and the ground plane of the read resonant cavity to achieve Q. c The adjustment is as follows. Furthermore, this application primarily addresses this by making the ground plane of the read bus and the ground plane of the read resonant cavity non-shared ground planes. That is, they do not share a common ground plane. In other words, the read bus and the read resonant cavity are exemplified by coplanar waveguide transmission lines, and their center conductor strips are separated by a gap / are separated by a gap.

[0039] Based on this design, this application discloses a readout structure for reading superconducting qubits. The readout structure includes a readout bus and a readout resonant cavity. To implement the readout operation, the readout bus has a first coupling segment, and the readout resonant cavity has a second coupling segment. The readout bus and the readout resonant cavity are coupled through the first coupling segment and the second coupling segment. That is, the transmission of the readout operation input signal and the readout operation output signal is achieved through this coupling method. Specifically, the readout bus and the readout resonant cavity do not share a ground plane, at least in the coupled region.

[0040] The applicant's practice has shown that having a non-shared ground plane between the read bus and the read resonant cavity, at least in the coupling region, can adjust the external quality factor Q of the read resonant cavity. c This helps improve and optimize reading performance. For example, a higher Q... c It can delay the energy dissipation of a two-level superconducting quantum bit system, thereby affecting the relaxation time and coherence time of the superconducting quantum bit, and thus also having a positive impact on the readout operation, such as allowing for potentially longer operation times or obtaining more accurate bit states.

[0041] Therefore, it can be understood that the example scheme of this application proposes another alternative improvement scheme for readout operations in superconducting quantum chips. For example, previous schemes may have mainly focused on adjusting the structural parameters of the readout bus and readout resonant cavity (the length, width, etc. of the center conductor in the coplanar waveguide transmission line), and adjusting the manufacturing materials of the bus and resonant cavity. In contrast, this application chooses to adjust the ground plane of the readout bus and readout resonant cavity. In this way, it can be implemented independently or in combination with other schemes to optimize and improve the performance of the readout operation.

[0042] For ease of understanding, the non-shared ground plane described in the examples of this application indicates that there is no additional ground plane configured between the two circuit elements; or, in other words, no other components are configured between the two circuit elements, thus forming a blank area between them. A more specific and detailed explanation will follow with examples.

[0043] In the above readout structure, the readout bus and the readout resonant cavity cooperate to achieve signal transmission through the coupling of the first coupling segment and the second coupling segment. For transmission lines, the coupling methods between two transmission lines can include electrical coupling, magnetic coupling, coupler coupling, mode coupling, hole or slot coupling, cross coupling, etc.

[0044] In the example of this application, the read bus and the read resonant cavity can be capacitively coupled. More specifically, in the example, they are coupled in a parallel-line manner. Based on the aforementioned example of coupling segments, the parallel-line coupling of the read bus and the read resonant cavity can be achieved through parallel-line coupling of a first coupling segment and a second coupling segment. Furthermore, it can be understood that the first coupling segment and the second coupling segment are configured in parallel with each other.

[0045] Furthermore, the second coupling segment can also have a designed length—a length measured in the parallel direction. This length can be described as the coupling length in a superconducting quantum chip. The coupling length is designed to achieve a specific coupling strength, either independently or in combination with other means, and can have a substantial impact on readout bandwidth, crosstalk, etc.

[0046] In addition, in terms of the layout of the readout bus and the readout resonant cavity in the superconducting quantum chip, the readout bus can be a linear structure.

[0047] Since superconducting quantum chips may contain hundreds, thousands, or even more superconducting qubits, and each superconducting qubit requires different control and readout circuits, the readout bus can be configured as a curved structure in some examples for ease of circuit configuration. This curved structure can be curved over most of the extended trajectory of the readout bus, or it can be at intentionally placed corners.

[0048] Understandably, in the region of the read bus used to couple with the read resonant cavity through their respective coupling ends parallel lines, this region of the read bus is a straight structure or can be described as a straight line segment. Correspondingly, in the region of the read resonant cavity used to couple with the read bus through their respective coupling ends parallel lines, this region of the read resonant cavity is a straight structure or can be described as a straight line segment.

[0049] Furthermore, some intrinsic performance parameters of the readout resonator can be correlated with its length. Considering the relative size of the superconducting quantum chip and the length of the readout resonator, the readout resonator can also include curved sections, allowing for the efficient arrangement of longer readout resonators within a chip of limited size. For example, in addition to the second coupling section, the readout resonator can also include curved sections (which in some examples can be described as serpentine structures).

[0050] In the example where the readout resonant cavity has a curved section, the readout resonant cavity may also include a straight section, and in this example, at least one straight section is included between the second coupling section and the curved section of the readout resonant cavity. The number of straight sections can be one, two, three, or even more. These straight sections can have different layout orientations or orientations. For example, some straight sections may be distributed parallel to the first and second coupling sections, or others may be arranged perpendicular to the first and second coupling sections.

[0051] To illustrate this more clearly, the following description, in conjunction with the accompanying drawings, explains the scheme in the example of this application.

[0052] In such Figure 1 The structural diagram of the coupling region in the existing parallel-line coupling method of the read bus and read resonant cavity shown can be found in... Figure 2 It was clearly made public in China.

[0053] Figure 2 It was made public. Figure 1 A magnified schematic diagram of the coupling region within the image. (See attached image.) Figure 2 The example is a superconducting quantum chip in which both the readout bus and the readout are coplanar waveguide transmission lines.

[0054] In superconducting quantum chips, the coplanar waveguide (CPW) transmission line is one of the core components for realizing the manipulation, readout, and signal transmission of superconducting qubits. Its design directly affects the transmission efficiency of microwave signals, the coupling strength between the qubits and the environment, and the overall integration density of the superconducting quantum chip.

[0055] Figure 2 This refers to the coupling region of parallel-line coupling between two coplanar waveguide transmission lines. Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure of the intermediate coupling region. (See also...) Figure 2 and Figure 3 In this process, a metal layer is formed on the surface of the substrate, two coplanar waveguide transmission lines are manufactured using this metal layer, and the metal layer is also manufactured to provide a ground plane for the coplanar waveguide transmission lines.

[0056] The two coplanar waveguide transmission lines include a readout bus and a readout resonant cavity. Slots 104 (i.e., without metal layers) exposing the substrate are disposed on both sides of the central conductor strip 102 of the readout bus, and slots 104 (i.e., without metal layers) exposing the substrate are also disposed on both sides of the central conductor strip 103 of the readout bus. Ground planes are formed extending from the slots 104 to both sides. Specifically, a shared ground plane (described as a shared ground plane) exists between the central conductor strip 102 and the central conductor strip 103.

[0057] The coplanar waveguide transmission line discussed above is a planar microwave transmission line. Figure 4 A cross-sectional schematic diagram of a coplanar waveguide transmission line is disclosed. Please refer to [link / reference]. Figure 4 A typical structure of a coplanar waveguide transmission line includes: a central conductor strip and ground planes on both sides of the extended trajectory of the central conductor strip.

[0058] The central conductor strip is located at the center of the ground planes on both sides of the substrate surface. The width of the central conductor strip is W, and it is used to carry microwave signals. The two ground planes are coplanar with the central conductor strip on the substrate surface, and the two are isolated by gaps with a spacing of S to form electromagnetic confinement. The substrate can be sapphire, silicon, silicon nitride, etc., or an insulating thin film (such as a SiO2 thin film) deposited / reacted on the surface of the aforementioned substrate as a dielectric layer.

[0059] above Figure 1 , Figure 2 , Figure 3 as well as Figure 4 A conventional circuit structure for reading the state of superconducting qubits in a superconducting quantum chip is disclosed; namely, a combination structure of a readout bus in the form of a coplanar waveguide transmission line and a readout resonant cavity. The central conductor strip of the readout bus (simplified as central conductor A) and the central conductor strip of the readout resonant cavity (simplified as central conductor B) share a ground plane. That is, there is a circuit element—a shared ground plane—between central conductor A and central conductor B.

[0060] In the example of this application, as one implementation scheme, the above structure is improved to form a readout structure for reading superconducting qubits.

[0061] Figure 5 A schematic diagram of the read structure in the example of this application is disclosed. Figure 6 It was made public. Figure 5 A magnified schematic diagram of the read structure in the coupling region. Figure 7 for Figure 5 A schematic diagram of the cross-sectional structure of the coupling region.

[0062] Please see Figure 5 , Figure 6 ,and Figure 7 The readout structure 300 includes: a substrate, a first coplanar waveguide transmission line 301, and a second coplanar waveguide transmission line 302.

[0063] like Figure 6 As shown, the substrate has a metal layer 203 formed on its surface as a ground plane, and the metal layer also has a window 204 exposing the substrate. The metal layer 203 can be a ground plane of electronic components formed by patterning, and a center conductor strip of a coplanar waveguide transmission line.

[0064] In this configuration, the center conductor of the first coplanar waveguide transmission line includes a first coupling segment 201 located within a window; the center conductor of the second coplanar waveguide transmission line includes a second coupling segment 202 located within a window. In this structure, the first and second coupling segments are separated by a gap. Therefore, it can be understood that in the coupling region, there is no shared ground plane between the center conductors of the first and second coplanar waveguide transmission lines; nor are there any other components.

[0065] In the example of this application, when the first coplanar waveguide transmission line 301 and the second coplanar waveguide transmission line 302 are coupled in a parallel-line manner, the first coplanar waveguide transmission line can be arranged to extend linearly along a first direction. Correspondingly, the second coupling segment extends parallel to the first direction. This first direction can, for example, be the direction of extension of one side of the substrate of the rectangular structure of the superconducting quantum chip.

[0066] Based on the first direction determined above, in some examples, the second coplanar waveguide transmission line can be configured to consist of a curved section and the aforementioned second coupling section, and the curved section can be arranged to extend substantially along the second direction perpendicular to the first direction. That is, in the example where the substrate is a rectangular structure, the first direction can be the length direction of the rectangle, while the second direction can be the width direction of the rectangle.

[0067] In addition, the number of readout resonant cavities in the readout structure can be adjusted. Therefore, the readout structure can include at least two second coplanar waveguide transmission lines. These readout resonant cavities can have the same structural configuration, for example, arranged at intervals along a first direction, and each extended in a second direction according to a designed bending pattern, trajectory length, etc. Figure 8 A schematic diagram of another reading structure in this application example is disclosed. (See attached diagram.) Figure 8 In the reading structure 400, a reading bus (first coplanar waveguide transmission line 301) is configured with two corresponding reading resonant cavities (second coplanar waveguide transmission line 302 and second coplanar waveguide transmission line 303).

[0068] From the perspective of realizing the structure physics, micro- and nano-fabrication techniques can be employed. Furthermore, this can involve the fabrication of thin films and the patterning manipulation of those films.

[0069] Thin film fabrication can be achieved, for example, through deposition. And depending on the material to be deposited, deposition processes such as chemical vapor deposition, physical vapor deposition (e.g., evaporation or sputtering), epitaxial techniques, and other deposition processes can be used.

[0070] For example, deposition processes include, but are not limited to, ion beam assisted deposition (IBAD), vacuum evaporation, molecular beam epitaxy (MBE), pulsed laser deposition (PLD), chemical vapor deposition (CVD), sol-gel deposition, and magnetron sputtering (MS).

[0071] Patterning of thin films can be achieved by removing one or more materials from the deposited film. Depending on the material to be removed, the removal process can include, but is not limited to, wet etching, dry etching, or lift-off processes. The process may also involve lithographic techniques (e.g., ultraviolet light exposure or electron beam exposure).

[0072] Furthermore, the various tasks and process steps described herein may be incorporated into a more comprehensive procedure or process with additional steps or functionality not described in detail herein.

[0073] Overall, for the sake of brevity, this paper may selectively describe or omit the conventional technologies related to semiconductor and / or superconducting devices and integrated circuit (IC) manufacturing in the above description of the readout structure's process implementation.

[0074] In particular, the various steps in the manufacture of semiconductor and / or superconducting devices and semiconductor / superconductor-based ICs are well known, so for the sake of brevity, many routine steps will only be briefly mentioned here or will be omitted entirely without providing well-known process details.

[0075] In addition to describing the fabrication process of the readout structure, this application also discloses a superconducting quantum chip including the aforementioned readout structure. The superconducting quantum chip may also include other circuits and components, such as bit control lines and bit couplers.

[0076] Furthermore, the example also discloses a superconducting quantum computer including the readout structure described above, or the superconducting quantum chip described above.

[0077] The embodiments described above with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0078] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, one or more embodiments have been described above with reference to the accompanying drawings. Throughout the description, similar reference numerals are used to denote similar components. In the foregoing description, numerous specific details have been set forth for illustrative purposes in order to provide a more thorough understanding of one or more embodiments. However, it will be apparent that one or more embodiments may be practiced in various circumstances without these specific details, and the embodiments may be combined with and referenced to each other without contradiction.

[0079] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0080] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or apparatus that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or apparatus.

[0081] The above description of the structure, features and effects of this application is based on the embodiments shown in the drawings. The above are only preferred embodiments of this application. However, this application does not limit the scope of implementation to what is shown in the drawings. Any changes made in accordance with the concept of this application, or modifications to equivalent embodiments, that do not exceed the spirit covered by the specification and drawings, should be within the protection scope of this application.

Claims

1. A readout structure for performing readout operations on superconducting qubits, characterized in that, The read structure includes: Read the bus, which has a first coupling segment; and The resonant cavity is read out, having a second coupling segment, wherein the first coupling segment is coupled to the second coupling segment; The read bus and the read resonant cavity are coplanar waveguide transmission lines, and their center conductor strips are separated by gaps.

2. The reading structure according to claim 1, characterized in that, The coupling method between the first coupling segment and the second coupling segment is parallel line coupling.

3. The reading structure according to claim 1, characterized in that, The read bus has a linear structure; And / or, the second coupling segment is a linear structure.

4. The reading structure according to claim 1 or 3, characterized in that, The reading resonant cavity also includes a curved section; Alternatively, the readout resonant cavity may further include a curved section, with at least one straight section between the second coupling section and the curved section.

5. A readout structure for performing readout operations on superconducting qubits, characterized in that, The read structure includes: A substrate, on which a metal layer serving as a ground plane is formed, the metal layer having a window that exposes the substrate; A first coplanar waveguide transmission line, wherein the central conductor of the first coplanar waveguide transmission line includes a first coupling segment located within a window; And a second coplanar waveguide transmission line, wherein the center conductor of the second coplanar waveguide transmission line includes a second coupling segment coupled to the first coupling segment and located within a window.

6. The reading structure according to claim 5, characterized in that, The first coplanar waveguide transmission line extends linearly along a first direction, and the second coupling segment extends parallel to the first direction.

7. The reading structure according to claim 6, characterized in that, The second coplanar waveguide transmission line is composed of a curved section and a second coupling section, wherein the curved section extends along a second direction perpendicular to the first direction.

8. The reading structure according to claim 5, 6, or 7, characterized in that, The readout structure includes at least two second coplanar waveguide transmission lines.

9. A superconducting quantum chip, characterized in that, Includes the read structure described in any one of claims 1 to 8.

10. A superconducting quantum computer, characterized in that, It includes the readout structure according to any one of claims 1 to 8, or the superconducting quantum chip according to claim 9.

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