A filling device for a gas injection system of a focused ion beam machine

Abstract

The utility model provides a kind of filling device for focusing ion beam machine platform gas injection system.The filling device includes the fixed cover for being seated on the top of granular gas source tank, and rotating filling piece, the fixed cover and the rotating filling piece are detachably connected;The rotating filling piece is equipped with the guide channel from bottom to top through;A plurality of feed holes from bottom to top through are formed on the fixed cover, and the rotating filling piece is rotated to its guide channel and any feed hole is communicated during feeding operation.The filling device provided in the technical scheme is simple in use, easy to operate and easy to start, and the filling of multi-feeding port gas consumables can be completed in a short time by simple rotation.The device is small in structure and low in cost, and is very convenient for large-scale popularization and use.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a filling device for a gas injection system of a focused ion beam machine. Background Technology

[0002] A focused ion beam (FIB) instrument is a cutting-edge device used for precision nanoscale processing, cutting, deposition, and analysis. Its core function is to focus and precisely control a high-energy ion beam to achieve micro- and nano-scale manipulations of materials (such as etching passivation layers or depositing conductive lines). The gas injection system (GIS) is a key module of the FIB instrument, responsible for precisely delivering precursor gases to the area of ​​influence of the ion or electron beam to achieve localized deposition, etching, or functionalization. As experiments progress, the gas consumables in the gas injection system frequently need to be replenished or replaced. Gas consumables refer to solid or liquid gaseous precursors (such as Pt, W, C, SiO2, XeF2, etc.).

[0003] The gas injection system includes a particulate gas source tank (crucible). When the gas consumable needs replenishment or replacement, the operator fills the particulate gas source tank (crucible) with the gas consumable. The particulate gas source tank (crucible) typically has six (or fewer) chambers for storing gas consumables and corresponding feed ports, as well as a vapor chamber and corresponding carrier gas inlet connected to the downstream mass flow controller and nozzles, used to deliver the gaseous precursor into the FIB machine. In actual use, the gas consumable is directly heated to 30–90°C through the particulate gas source tank to vaporize it, and then injected through the gas injection system to ultimately achieve localized deposition, etching, or functionalization of the material.

[0004] When filling the particulate gas source canister (crucible) with gas consumables, the weight of consumables filled in each chamber must be consistent. Otherwise, when the gas is ejected, there is a high probability that the passivation layer of the chip will be etched unevenly due to uneven concentration.

[0005] In existing technology, when filling gas consumables, five of the feeding ports are typically covered with tape or paper. Then, the required amount of gas consumables is filled into the uncovered feeding ports through a funnel made of rolled-up paper. This process is repeated until all six gas consumable storage chambers are filled. This filling method ensures that the weight of consumables filled in all six chambers is consistent.

[0006] However, the repeated application and removal of tape in this method not only leads to instrument contamination due to adhesive residue, but also places high demands on the operator's proficiency. If the operator is not proficient in this operation, it will result in excessive time spent replenishing or replacing gas consumables, leading to consumables evaporation or excessive evaporation during replacement, thus causing waste of consumables, increased replacement frequency, and reduced usage time of gas consumables. In addition, this filling method itself is cumbersome and inefficient.

[0007] Therefore, it is necessary to design a filling device for the gas injection system of a focused ion beam machine, so that the operation of filling the gas consumables of the focused ion beam machine is simple and easy to use, and the process is safe, efficient and free from pollution risks. Utility Model Content

[0008] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a filling device for a gas injection system of a focused ion beam machine, so as to solve the problems in the prior art.

[0009] To achieve the above-mentioned and other related objectives, this utility model is implemented by including the following technical solutions.

[0010] The first aspect of this utility model provides a filling device for a gas injection system of a focused ion beam machine. The gas injection system includes a particulate gas source tank. The filling device includes a fixed cover for sitting on the top of the particulate gas source tank and a rotating filling component. The fixed cover and the rotating filling component are detachably connected. The rotating filling component has a guide channel that runs from bottom to top. The fixed cover has a plurality of feed holes that run from bottom to top. During the feeding operation, the rotating filling component is rotated until its guide channel communicates with any of the feed holes.

[0011] In one embodiment, the center of the fixed cover protrudes downward to form a plug for blocking the gas inlet of the particulate gas source tank.

[0012] In one embodiment, there are at least two feed holes, the centers of all the feed holes are on the same circle, and the center of the circle is located at the center of the fixed cover.

[0013] In one embodiment, during the feeding operation, the rotating filler is rotated so that the guide channels can communicate with a feed port respectively.

[0014] In one embodiment, the guide channel is trumpet-shaped; and the guide channel has a small diameter end near the fixed cover end and a large diameter end at the other end.

[0015] In one embodiment, the small diameter of the guide channel matches the diameter of any of the feed holes.

[0016] In one embodiment, the fixed cover and the rotating filler are respectively provided with matching snap-fit ​​limiting structures at their mating ends. When the fixed cover and the rotating filler are snapped together, the snap-fit ​​limiting structures allow the rotating filler to be axially snapped together but to rotate in place.

[0017] In one embodiment, the snap-fit ​​limiting structure consists of a protrusion and a groove respectively disposed at the mating ends of the fixed cap and the rotating filler, wherein the groove matches the protrusion; after snap-fit, the matching groove and protrusion allow the rotating filler to rotate only around the protrusion in its original position.

[0018] In one embodiment, the protrusion is a protrusion made of rubber.

[0019] In one embodiment, the larger diameter of the flared structure is at least twice the smaller diameter.

[0020] In one embodiment, the snap-fit ​​limiting structure is misaligned with the guide channel.

[0021] The second aspect of this utility model provides a gas injection system for a focused ion beam machine, the gas injection system including at least a particulate gas source tank, characterized in that it further includes a filling device as described above, the fixing cover of the filling device being detachably connected to the particulate gas source tank via a threaded screw structure.

[0022] In one embodiment, the particulate gas source tank is provided with a feeding port and its corresponding particulate gas source storage chamber, a carrier gas inlet and its corresponding carrier gas chamber, a heating device and a gas tank outlet.

[0023] The particulate gas source storage chamber and the carrier gas chamber are connected through a feed port and a carrier gas inlet; the carrier gas chamber is connected to the gas tank outlet airflow.

[0024] When subsequent operations are carried out after filling, the heating device is used to provide energy for the movement of the gas consumable until it enters the carrier gas chamber and passes through the gas tank outlet.

[0025] In one embodiment, the shape of any of the feed holes matches the shape of any of the feeding ports on the particulate gas source tank.

[0026] In one embodiment, the position of any of the feed holes corresponds to the position of the feeding port on the particulate gas source tank.

[0027] In one embodiment, the number of feed holes is the same as the number of feeding ports on the particulate gas source tank. Preferably, there are 1 to 10, more preferably 1 to 6.

[0028] As described above, this utility model provides a filling device for a gas injection system of a focused ion beam machine. The filling device includes a fixed cover and a rotating filling component, which are used together to complete the filling of gas consumables.

[0029] The filling device provided by this invention requires no tape or paper, and eliminates the risk of adhesive residue from repeated tape use contaminating instruments or gas consumables. The device is simple to use, easy to operate, and quick to learn; a simple rotation is all it takes to fill gas consumables at multiple feeding ports in a short time. This avoids problems such as prolonged operation due to operator unfamiliarity, consumable leakage or evaporation, leading to waste, increased replacement frequency, and reduced gas consumable lifespan. It effectively improves filling efficiency and accelerates the experimental process. Furthermore, the device is compact, low-cost, and very suitable for large-scale deployment. Attached Figure Description

[0030] Figure 1 The image shown is a cross-sectional view of the filling device of this utility model.

[0031] Figure 2 The diagram shown is a schematic representation of the overall structure of the fixed cover in the filling device of this utility model.

[0032] Figure 3 The image shown is a cross-sectional view of the fixed cover in the filling device of this utility model.

[0033] Figure 4 The image shown is a front view of the rotating filler in the filling device of this utility model.

[0034] Figure 5 The image shown is a top view of the rotating filler in the filling device of this utility model.

[0035] Figure 6 The image shown is a cross-sectional view of the rotating filler in the filling device of this utility model.

[0036] Figure 7 This is a front view of the particulate gas source tank of the gas injection system for a focused ion beam machine.

[0037] Figure 8 The image shown is a top view of the particulate gas source tank of the gas injection system for a focused ion beam machine.

[0038] Figure 9 The image shown is a cross-sectional view of the gas injection system of this utility model.

[0039] Figures 1-9 Explanation of the symbols in the attached icons

[0040] 100 Fixed Cover

[0041] 101 Feed port

[0042] 102 protrusions

[0043] 103 Plug

[0044] 104 Locking Holes

[0045] 200 Rotary Filler

[0046] 201 Guide Channel

[0047] 202 Small Diameter End

[0048] 203 Large Diameter End

[0049] 204 Groove

[0050] 300 particulate gas source tank

[0051] 301 Feeding Port

[0052] 302 Carrier Gas Inlet

[0053] 303 threaded hole

[0054] 304 gas cylinder outlet

[0055] 400 gas consumables

[0056] 500 locking parts Detailed Implementation

[0057] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0058] Please see Figures 1 to 9 It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the scope of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of this invention, should still fall within the scope of the disclosed technical content. Furthermore, the terms "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of this invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.

[0059] like Figures 1-9 As shown, this embodiment provides a specific filling device for a gas injection system of a focused ion beam machine. The gas injection system includes a particulate gas source tank 300, and the filling device includes a fixed cover 100 for sitting on the top of the particulate gas source tank 300, and a rotating filling component 200.

[0060] The fixed cover 100 and the rotating filler 200 are detachably connected;

[0061] The rotating filler 200 is provided with a guide channel 201 that runs from bottom to top;

[0062] The fixed cover 100 has several through-holes 101 extending from bottom to top. During feeding, the rotating filler 200 is rotated until its guide channel 201 connects with any of the through-holes 101. The fixed cover 100 and the rotating filler 200 work together to complete the filling of the gas consumable 400.

[0063] Specifically, during the feeding operation, the rotating filler 200 is rotated so that the guide channel 201 can communicate with a feed hole 101.

[0064] In this application, gas consumables refer to solid or liquid gas precursors (such as Pt, W, C, SiO2, XeF2, etc.).

[0065] In practical use, the fixed cover 100 is first placed on top of the particulate gas source tank 300 of the gas consumable 400 to be filled, and the fixed cover 100 is detachably connected to the rotating filling component 200. Then, the gas consumable 400 to be filled is selected according to actual needs. When feeding, the rotating filling component 200 is rotated until its guide channel 201 is connected to a feed hole 101. After the feed hole is filled, the rotating filling component 200 is rotated again so that it is connected to the feed hole 101 of the next gas consumable 400 to be filled. After filling is completed, the rotating filling component 200 is rotated again until all feed holes 101 are filled.

[0066] Specifically, there are at least two feed holes 101, and the centers of all feed holes 101 are located on the same circle, with the center of this circle located at the center of the fixing cover 100. As an example, in a... Figures 2-3 In the specific embodiment shown, the number of feed holes 101 is 6.

[0067] In this application, there are no particular restrictions on the outer contour of the fixing cover 100, as long as it can completely cover the top of the particulate gas source tank 300. It can be a circle with the same diameter as the top of the particulate gas source tank 300, a circle with a diameter larger than the diameter of the particulate gas source tank 300, or a square, etc. Preferably, the outer contour of the fixing cover 100 is a circle with the same diameter as the top of the particulate gas source tank 300.

[0068] In a like Figures 2-3 In the specific embodiment shown, a plug 103 protrudes downward from the center of the fixed cover 100 to block the carrier gas inlet 302 of the particulate gas source tank 300. Specifically, the plug 103 is a cylindrical plug.

[0069] In a like Figure 6 and 9 In the specific embodiment shown, the guide channel 201 is trumpet-shaped, and the end of the guide channel 201 near the fixed cover 100 is a small diameter end 202, and the other end is a large diameter end 203.

[0070] In actual use, the plug 103 of the fixed cover 100 is inserted into the carrier gas inlet 302, so that the fixed cover 100 is placed on top of the particulate gas source tank 300 of the gas consumable 400 to be filled, and each feed hole 101 on the fixed cover 100 is vertically aligned with each feed port 301 on the top of the particulate gas source tank 300, and the fixed cover 100 and the rotating filler 200 are engaged vertically.

[0071] Then, rotate the rotating filler 200 so that the small-diameter end 202 of its internal guide channel 201 is aligned with the feed port 301 / inlet hole 101 to be filled. The operator places the gas consumable 400 to be filled into the rotating filler 200 according to actual needs. The gas consumable 400 travels along the guide channel 201 through the feed hole 101 and the feed port 301 into the particulate gas source tank 300, completing the filling of one particulate gas source storage chamber. Then, continue rotating the rotating filler 200 so that the small-diameter end 202 of its internal guide channel 201 is aligned with the next feed port 301 / inlet hole 101 to be filled. Repeat the above operation until all particulate gas source storage chambers of the particulate gas source tank 300 are filled with gas consumable 400.

[0072] like Figure 1 As shown, the fixed cover 100 and the rotating filler 200 are respectively formed with matching snap-fit ​​limiting structures at their docking ends. When the fixed cover 100 and the rotating filler 200 are snapped together, the snap-fit ​​limiting structure makes the rotating filler 200 only able to rotate in its original position.

[0073] In this application, "can only rotate in situ" means that after the fixed cover 100 and the rotating filler 200 are engaged, the rotating filler 200 can only rotate around the engagement limiting structure as the axis of rotation, and cannot move in any other way.

[0074] In a like Figure 1 In the specific embodiment shown, the snap-fit ​​limiting structure is as follows: a protrusion 102 and a groove 204 are respectively provided at the docking ends of the fixed cover 100 and the rotating filler 200, and the groove 204 matches the protrusion 102; after snap-fit, the matching groove 204 and the protrusion 102 make the rotating filler (200) only able to rotate around the protrusion 102 in its original position.

[0075] Specifically, the protrusion 102 is made of rubber, allowing it to have a certain deformation space for snap-fitting.

[0076] As an example, such as Figures 1-3 As shown in Figure 6, a protrusion 102 is provided upward at the center of the fixed cover 100, and a groove 204 is formed inward on the lower surface of the rotating filler 200. The groove 204 matches the shape and size of the protrusion 102. More specifically, the protrusion 102 is an annular shoulder structure, that is, the protrusion consists of a columnar body and a hemispherical structure formed on the top of the columnar body. The diameter of the hemispherical structure is slightly larger than the diameter of the columnar body, so that the overall shape of the protrusion 102 is "mushroom". The function of the hemispherical structure (shoulder) is to act as an axial stop surface. When the protrusion 102 and the groove 204 are engaged, the corresponding structure inside the rotating filler 200 will be engaged below the hemispherical structure (shoulder) of the fixed cover 100, thereby fixing the fixed cover 100 and the rotating filler 200 axially, but allowing them to rotate in place at the same time. Specifically, the small diameter of the guide channel 201 matches the diameter of any of the feed holes 101. This further ensures that all gas consumables 400 can enter the feed port 101 during filling.

[0077] Specifically, the larger diameter of the guide channel 201 is at least twice the smaller diameter. The larger diameter facilitates the filling operation by the operator and reduces the risk of spillage of consumables. In a... Figure 6 and 9 In the specific embodiment shown, the large diameter of the guide channel 201 is three times the small diameter.

[0078] Specifically, such as Figure 6 As shown, the snap-fit ​​limiting structure is offset from the guide channel 201. This ensures that the snap-fit ​​limiting structure does not affect the movement of the gas consumable 400, thus ensuring smooth filling of the gas consumable 400.

[0079] When filling the gas consumable 400 using the filling device of this application, simply rotate the filling member 200 so that the small-diameter end 202 completely overlaps with the feed port 301 / feed hole 101 to be filled, and then fill. This filling method is simple to operate and easy to learn. It can not only fill a fixed amount of gas consumable 400 into the corresponding particulate gas source storage chamber, which helps to ensure that the amount of gas consumable 400 in all particulate gas source storage chambers is equal, but also reduces the risk of spillage and excessive operation time, effectively improves operating efficiency, and avoids the escape of gas consumable 400. In addition, there is no need to reuse tape when using this filling device, avoiding adhesive residue contamination of the instrument or gas consumable 400.

[0080] like Figure 9 As shown, this utility model embodiment also provides a specific gas injection system for a focused ion beam machine. The gas injection system includes at least a particulate gas source tank 300 and a filling device as described above. The fixing cover 100 of the filling device is detachably connected to the particulate gas source tank 300 via a threaded screw structure.

[0081] Specifically, such as Figure 2 , 8 As shown in Figure 9, the gas injection system further includes a locking element 500. The edge of the fixed cover 100 is provided with multiple locking holes 104; the edge of the top surface of the particulate gas source tank 300 is provided with multiple threaded holes 303; any of the locking holes 104 and threaded holes 303 are correspondingly arranged. As an example, such as... Figure 2 As shown, the fixed cover 100 has two locking holes 104 symmetrically arranged on its edge, which are used to cooperate with the locking member 500 and the threaded hole 303.

[0082] Specifically, the locking element 500 includes threaded locking elements. It is detachable and tightens by torque. Examples include screws, self-locking nuts, etc. Figure 9 In the specific embodiment shown, the locking element 500 is a screw.

[0083] In a specific embodiment, such as Figures 7-9 As shown, the particulate gas source tank 300 is provided with a feeding port 301 and its corresponding particulate gas source storage chamber, a carrier gas inlet 302 and its corresponding carrier gas chamber, a heating device and a gas tank outlet 304.

[0084] The particulate gas source storage chamber and the carrier gas chamber are connected through the feed port 301 and the carrier gas inlet 302; the carrier gas chamber is in airflow communication with the gas tank outlet 304;

[0085] When subsequent operations are carried out after filling, the heating device is used to provide energy for the movement of the gas consumable 400 until it enters the carrier gas chamber and passes through the gas tank outlet 304.

[0086] In a like Figures 2-3 In the specific embodiment shown, the shape of any of the feed holes 101 matches the shape of any of the feeding ports 301 on the particulate gas source tank 300.

[0087] Specifically, the position of any of the feed holes 101 is set vertically corresponding to the position of the feed port 301 on the particulate gas source tank 300.

[0088] Specifically, the number of feed holes 101 is the same as the number of feed inlets 301 on the particulate gas source tank 300. For example, there can be 1 to 10, more preferably 1 to 6.

[0089] As an example, in a... Figures 2-3 In the specific embodiment shown, there are six feed holes 101. These holes are identical in shape to the six feeding ports 301 on the particulate gas source tank 300 of the gas consumable 400 to be filled, and are positioned vertically correspondingly. This ensures that the gas consumable 400 can completely enter the feeding ports 301 during the filling process, preventing waste and loss of the gas consumable 400.

[0090] When actually fixing the fixed cover 100 and the particulate gas source tank 300, the operator inserts the plug 103 of the fixed cover 100 into the carrier gas inlet 302, so that the fixed cover 100 sits on the top of the particulate gas source tank 300 of the gas consumable 400 to be filled, and ensures that each feed hole 101 on the fixed cover 100 is vertically aligned with each feeding port 301 on the top of the particulate gas source tank 300, and that the locking hole 104 is vertically aligned with the threaded hole 303, then the locking member 500 is used to pass through the locking hole 104 and the threaded hole 303 and lock it, so as to achieve the purpose of fixing the fixed cover 100 and the particulate gas source tank 300.

[0091] In this application, the diameter of the plug 103 matches the diameter of the carrier gas inlet 302, so that the plug 103 can enter the carrier gas inlet 302 and fit completely against the carrier gas inlet 302; the design of the plug 103 not only helps to fix the cover 100 on the top of the particulate gas source tank 300, but also seals the carrier gas chamber, further avoiding contamination of the carrier gas chamber during the filling of the gas consumable 400.

[0092] This application does not specify the material of the plug 103. It can be a metal material, such as stainless steel or carbon steel, or a rubber material, as long as the diameter of the plug 103 matches the diameter of the air inlet 302 and can be completely inserted into and fit the air inlet 302. In a specific embodiment, the plug 103 is a stainless steel plug.

[0093] In actual use, the plug 103 of the fixed cover 100 is inserted into the carrier gas inlet 302, so that the fixed cover 100 is placed on top of the particulate gas source tank 300 of the gas consumable 400 to be filled, and each feed hole 101 on the fixed cover 100 is vertically aligned with each feed port 301 on the top of the particulate gas source tank 300, and the fixed cover 100 and the rotating filler 200 are engaged vertically.

[0094] Then, rotate the rotating filler 200 so that the small-diameter end 202 of its internal guide channel 201 is aligned with the feed port 301 / inlet hole 101 to be filled. The operator places the gas consumable 400 to be filled into the rotating filler 200 according to actual needs. The gas consumable 400 travels along the guide channel 201 through the feed hole 101 and the feed port 301 into the particulate gas source tank 300, completing the filling of one particulate gas source storage chamber. Then, continue rotating the rotating filler 200 so that the small-diameter end 202 of its internal guide channel 201 is aligned with the next feed port 301 / inlet hole 101 to be filled. Repeat the above operation until all particulate gas source storage chambers of the particulate gas source tank 300 are filled with gas consumable 400.

[0095] In summary, the filling device for the gas injection system of a focused ion beam apparatus provided by this utility model is simple to use, easy to operate and learn, can effectively improve filling efficiency, accelerate the experimental process, has no pollution risk, and the device is compact and low in cost, making it very convenient for large-scale promotion and use.

[0096] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A filling device for a gas injection system of a focused ion beam apparatus, the gas injection system comprising a particulate gas source tank (300), characterized in that, The filling device includes a fixed cover (100) for sitting on the top of the particulate gas source tank (300), and a rotating filling component (200); The fixed cover (100) and the rotating filler (200) are detachably connected; The rotating filler (200) is provided with a guide channel (201) that runs from bottom to top; The fixed cover (100) has a plurality of feed holes (101) that run from bottom to top. During the feeding operation, the rotating filler (200) is rotated until its guide channel (201) is connected to any feed hole (101).

2. The filling device according to claim 1, characterized in that, The fixed cover (100) has a plug (103) protruding downward at its center to block the carrier gas inlet (302) of the particulate gas source tank (300); and / or, there are at least two feed holes (101), the centers of all feed holes (101) are on the same circle, and the center of the circle is located at the center of the fixed cover (100).

3. The filling device according to claim 1, characterized in that, During the feeding operation, the rotating filler (200) is rotated so that the guide channel (201) can communicate with a feed hole (101).

4. The filling device according to claim 1, characterized in that, The guide channel (201) is trumpet-shaped; and the end of the guide channel (201) near the fixed cover (100) is a small diameter end (202), and the other end is a large diameter end (203); And / or, the fixing cover (100) and the rotating filler (200) are respectively formed with matching snap-fit ​​limiting structures at their docking ends. When the fixing cover (100) and the rotating filler (200) are snapped together, the snap-fit ​​limiting structure makes the rotating filler (200) axially snapped but able to rotate in place.

5. The filling device according to claim 4, characterized in that, The snap-fit ​​limiting structure consists of a protrusion (102) and a groove (204) respectively provided at the mating ends of the fixed cover (100) and the rotating filler (200), wherein the groove (204) matches the protrusion (102); after snap-fit, the matching groove (204) and protrusion (102) ensure that the rotating filler (200) can only rotate around the protrusion (102) in its original position.

6. The filling device according to claim 4, characterized in that, The small diameter of the guide channel (201) matches the diameter of any of the feed holes (101); And / or, the snap-fit ​​limiting structure is misaligned with the guide channel (201).

7. The filling device according to claim 5, characterized in that, The protrusion (102) is made of rubber.

8. A gas injection system for a focused ion beam apparatus, the gas injection system comprising at least a particulate gas source tank (300), characterized in that, It also includes a filling device as described in any one of claims 1 to 7, wherein the fixing cover (100) of the filling device is detachably connected to the particulate gas source tank (300) via a threaded screw structure.

9. The injection system according to claim 8, characterized in that, The particulate gas source tank (300) is provided with a feeding port (301) and its corresponding particulate gas source storage chamber, a carrier gas inlet (302) and its corresponding carrier gas chamber, a heating device and a gas tank outlet (304); The particulate gas source storage chamber and the carrier gas chamber are connected through the feed port (301) and the carrier gas inlet (302); the carrier gas chamber is in airflow communication with the gas tank outlet (304); When subsequent operations are carried out after filling, the heating device is used to provide energy for the movement of the gas consumable (400) until it enters the carrier gas chamber and passes through the gas tank outlet (304).

10. The gas injection system according to claim 9, characterized in that, The shape of any of the feed holes (101) matches the shape of any of the feed ports (301) on the particulate gas source tank (300); And / or, the position of any of the feed holes (101) is set to correspond to the position of the feed port (301) on the particulate gas source tank (300); And / or, the number of feed holes (101) is the same as the number of feed ports (301) on the particulate gas source tank (300).

Images