Grounding device and physical vapor deposition system

Abstract

The embodiment of the application provides a grounding device and a physical vapor deposition system, and relates to the technical field of physical vapor deposition. The grounding device comprises: a device body, the device body is provided with an accommodating cavity, and the device body is used for being connected with the ground; a conductive wheel assembly, part of the conductive wheel assembly is inserted into the accommodating cavity, and the conductive wheel assembly is configured to move towards the accommodating cavity under the action of gravity of a to-be-transported object; two elastic assemblies, the elastic assemblies are located in the accommodating cavity; and a switching assembly, the switching assembly is located in the accommodating cavity, the switching assembly is in conductive connection with the device body, the elastic assemblies and the conductive wheel assembly are in conductive connection with the switching assembly, and the switching assembly is configured to move relative to the device body under the driving of the conductive wheel assembly, so that one of the two elastic assemblies is separated from the conductive wheel assembly, and the other one is in conductive connection and supports the conductive wheel assembly. The spring assembly of the grounding device is not easy to be elastically failed, and can effectively guide the accumulated electric charge into the ground.

Description

Technical Field

[0001] This application relates to the field of physical vapor deposition technology, and in particular to a grounding device and a physical vapor deposition system. Background Technology

[0002] Physical vapor deposition (PVD) is a key process widely used in battery manufacturing. During PVD, to prevent electrostatic accumulation and ensure coating quality, it is necessary to effectively conduct the accumulated charge to the ground.

[0003] The grounding method employed in this technology involves mounting a conductive wheel assembly on the back of a carrier plate. The conductive wheel assembly is mounted slightly higher than the carrier plate. When the carrier plate contacts the conductive wheel assembly during transport, it applies a downward pressure to the assembly. A spring is installed on the end of the conductive wheel assembly facing away from the carrier plate. Under the action of the spring, the conductive wheel assembly maintains good contact with the carrier plate, thereby ensuring that the charge can be effectively conducted to the ground.

[0004] However, during the production process, the spring is constantly subjected to pressure from the conductive wheel assembly, and after long-term use, it is prone to elastic failure, which results in the inability of the charge to be conducted to the ground. Utility Model Content

[0005] This application provides a grounding device and a physical vapor deposition system to achieve the effect that the spring is not prone to elastic failure and can effectively conduct the accumulated charge into the ground.

[0006] In a first aspect, embodiments of this application provide a grounding device, including:

[0007] The device body has a receiving cavity and is used to connect to the ground.

[0008] The conductive wheel assembly has a portion inserted into the receiving cavity and a portion located outside the receiving cavity for transporting the object to be transported. The conductive wheel assembly is configured to move toward the receiving cavity under the gravity of the object to be transported.

[0009] Two elastic components are located within the receiving cavity;

[0010] The switching component is located within the receiving cavity and is electrically connected to the device body. Both the elastic component and the conductive wheel assembly are electrically connected to the switching component. The switching component is configured to move relative to the device body under the drive of the conductive wheel assembly, so that one of the two elastic components disengages from the conductive wheel assembly, while the other is electrically connected to and supports the conductive wheel assembly.

[0011] In one possible implementation, the switching component includes:

[0012] The base is located inside the receiving cavity and is electrically connected to the device body. The elastic component is electrically connected to the base.

[0013] A trigger element is mounted on the base and connected to the conductive wheel assembly. The conductive wheel assembly drives the base to move relative to the device body through the trigger element.

[0014] In one possible implementation, the trigger includes:

[0015] A first connecting part is disposed on the base, and the first connecting part has a first contact surface, which is inclined.

[0016] The second connecting part has a second contact surface, which is inclined and corresponds to the first contact surface.

[0017] One of the second contact surface and the first contact surface has a sliding part, and the other of the second contact surface and the first contact surface has a guide part, and the sliding part and the guide part are slidably connected.

[0018] The second connecting part is connected to the conductive wheel assembly. The conductive wheel assembly moves and drives the sliding part to slide along the guide part, so that the first connecting part pushes the second connecting part and the base to move relative to the device body.

[0019] In one possible implementation, the guide portion is a convex ridge, the sliding portion is a groove, and the convex ridge and the groove are matched and connected.

[0020] In one possible implementation, the resilient component includes:

[0021] The sliding sleeve is electrically connected to the switching component.

[0022] The first sliding member, part of which is inserted into the sliding sleeve, moves relative to the sliding sleeve, and is used to electrically connect the conductive wheel assembly.

[0023] An elastic element is sleeved around the periphery of the sliding sleeve, and the elastic element connects the first sliding element and the sliding sleeve.

[0024] In one possible implementation, the first slider includes:

[0025] The sliding section, at least a portion of which is inserted into the sliding sleeve;

[0026] The abutment section is connected to the sliding section and is located outside the sliding sleeve. An elastic element connects the abutment section and the sliding sleeve. The abutment section is used to electrically connect the conductive wheel assembly.

[0027] In one possible implementation, the abutting section is a curved surface that bulges out in a direction away from the sliding section.

[0028] In one possible implementation, the conductive wheel assembly includes:

[0029] The second slider, at least a portion of which is inserted into the receiving cavity;

[0030] A limiting member is connected to a second sliding member. The limiting member is located within the receiving cavity and is used for conductive connection with the elastic component.

[0031] A connector is attached to the second sliding member and is located outside the receiving cavity;

[0032] Roller, the roller is rotatably connected to the connector.

[0033] In one possible implementation, the grounding device further includes:

[0034] The maintenance door is slidably connected to the device body and closes the receiving cavity.

[0035] The locking component is detachably connected to the maintenance door and the device body.

[0036] Secondly, embodiments of this application provide a physical vapor deposition system, including a magnetron sputtering apparatus and any of the grounding devices provided in the first aspect disposed within the magnetron sputtering apparatus.

[0037] The grounding device and physical vapor deposition system provided in this application embodiment use the device body as the carrier of the overall structure. The direct connection between the device body and the ground ensures the reliability and low impedance of the charge release path, avoiding arcing caused by potential accumulation. The grounding device incorporates conductive wheel assemblies. These assemblies adaptively adjust their contact pressure with the carrier plate based on gravity, ensuring close contact between the carrier plate and the conductive wheel assemblies during movement and preventing interruption of charge release due to poor contact. Furthermore, the insertion of a portion of the conductive wheel assembly into the receiving cavity allows the switching assembly to directly respond to the displacement changes of the conductive wheel assembly, achieving dynamic switching of the support elastic component. The grounding device uses a switching assembly and two elastic components. The switching assembly, through mechanical linkage, converts the displacement of the conductive wheel assembly into a switching action of the elastic components. When the conductive wheel assembly moves downward due to the gravity of the carrier plate, the switching assembly triggers another elastic component to take over the support, temporarily releasing the original elastic component from the stress state and allowing its elastic deformation to recover, thereby delaying elastic failure. Simultaneously, the conductively connected switching assembly ensures that the charge is always conducted to the ground through the currently supported elastic component, maintaining the continuity of the grounding loop and preventing interruption of charge release due to the switching action. Attached Figure Description

[0038] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0039] Figure 1 This is a schematic diagram of the grounding device provided in the embodiments of this application;

[0040] Figure 2 for Figure 1 Internal structure diagram;

[0041] Figure 3 for Figure 2 A schematic diagram of the connection between the intermediate elastic component and the switching component;

[0042] Figure 4 for Figure 2 Schematic diagram of the structure of the central conductive wheel assembly;

[0043] Figure 5 for Figure 1 A schematic diagram of the connection between the locking component and the maintenance door.

[0044] Explanation of reference numerals in the attached figures:

[0045] 100 - Device body; 110 - Receiving cavity;

[0046] 200 - Conductive wheel assembly; 210 - Second sliding member; 220 - Limiting member; 230 - Connecting member; 240 - Roller;

[0047] 300 - Elastic component; 310 - Sliding sleeve; 320 - First sliding member; 321 - Sliding section; 322 - Abutting section; 330 - Elastic component;

[0048] 400 - Switching component; 410 - Base; 420 - Trigger; 421 - First connecting part; 422 - First contact surface; 423 - Guide part; 424 - Second connecting part; 425 - Second contact surface; 426 - Sliding part;

[0049] 500 - Maintenance door; 510 - Door body; 520 - Sliding strip;

[0050] 600 - Locking assembly; 610 - Pull plate; 620 - Locking element;

[0051] 700 - Connecting component; 710 - Connecting arm; 720 - Support base.

[0052] To facilitate understanding of the embodiments of this application, the spline curves and arrows used in the reference numerals in the accompanying drawings are explained below: the components indicated by spline curves without arrows can be solid components, that is, components with solid structures; the components indicated by spline curves with arrows can be virtual components, that is, components without solid structures; in some cases, the components indicated by spline curves with arrows can also be assemblies with solid structures or virtual structures.

[0053] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0054] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0055] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. In the description of the embodiments of this application, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships (if present), are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this application. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Where there is no conflict, embodiments of this application and the various features thereof can be combined with each other, all of which are within the scope of protection of this application.

[0056] Physical vapor deposition (PVD) is a key process widely used in battery manufacturing. During PVD, to prevent electrostatic accumulation and ensure coating quality, it is necessary to effectively conduct the accumulated charge to the ground.

[0057] This application provides a physical vapor deposition system (not shown in the figures of this embodiment), including a magnetron sputtering device and a grounding device disposed within the magnetron sputtering device.

[0058] As a core component of physical vapor deposition (PVD) processes, magnetron sputtering enhances sputtering efficiency and film uniformity by confining plasma with a magnetic field. By incorporating a grounding device within the magnetron sputtering unit, the charge on the carrier plate and the solar cells used to generate the cells is conducted to the ground, preventing static electricity buildup and ensuring coating quality.

[0059] It should be noted that this embodiment does not limit the specific application field of the physical vapor deposition system, and can be adjusted according to specific needs. For example, the physical vapor deposition system can be applied to the photovoltaic field, the semiconductor field, etc.

[0060] The grounding method employed in this technology involves mounting a conductive wheel assembly on the back of a carrier plate. The conductive wheel assembly is mounted slightly higher than the carrier plate. When the carrier plate contacts the conductive wheel assembly during transport, it applies a downward pressure to the assembly. A spring is installed on the end of the conductive wheel assembly facing away from the carrier plate. Under the action of the spring, the conductive wheel assembly maintains good contact with the carrier plate, thereby ensuring that the charge can be effectively conducted to the ground.

[0061] However, during the production process, the spring is constantly subjected to pressure from the conductive wheel assembly, and after long-term use, it is prone to elastic failure, which results in the inability of the charge to be conducted to the ground.

[0062] To address the aforementioned technical problems, embodiments of this application provide a grounding device. Figure 1 This is a schematic diagram of the grounding device. Figure 2 for Figure 1 A schematic diagram of the internal structure.

[0063] Specifically, please refer to Figure 1 and Figure 2 The grounding device includes: a device body 100, which has a receiving cavity 110 for connecting to the ground; a conductive wheel assembly 200, part of which is inserted into the receiving cavity 110, and the part of which is located outside the receiving cavity 110 for transporting the object to be transported, and is configured to move toward the receiving cavity 110 under the gravity of the object to be transported; two elastic components 300, which are located in the receiving cavity 110; and a switching component 400, which is located in the receiving cavity 110 and is electrically connected to the device body 100. Both the elastic components 300 and the conductive wheel assembly 200 are electrically connected to the switching component 400. The switching component 400 is configured to move relative to the device body 100 under the drive of the conductive wheel assembly 200, so that one of the two elastic components 300 is disengaged from the conductive wheel assembly 200, and the other is electrically connected and supports the conductive wheel assembly 200.

[0064] The grounding device provided in this embodiment uses the device body 100 as the carrier of the overall structure. The direct connection between the device body 100 and the ground ensures the reliability and low impedance of the charge release path, and can avoid arcing caused by potential accumulation. The design of the housing cavity 110 integrates internal components (such as the elastic component 300 and the switching component 400) in a closed space, reducing the interference of the external environment (such as dust and humidity) on the conductivity performance. At the same time, physical isolation reduces the possibility of mechanical wear and improves the long-term stability of the grounding device.

[0065] The grounding device is equipped with a conductive wheel assembly 200. The conductive wheel assembly 200 adaptively adjusts the contact pressure with the carrier plate by gravity, ensuring that the carrier plate is always in close contact with the conductive wheel assembly 200 during movement, thus avoiding interruption of charge release due to poor contact. Furthermore, the insertion of part of the conductive wheel assembly 200 into the receiving cavity 110 allows the switching assembly 400 to directly respond to the displacement changes of the conductive wheel assembly 200, thereby realizing the function of dynamically switching the support elastic assembly 300.

[0066] The grounding device uses two elastic components 300 to alternately support the conductive wheel assembly 200. By sharing the continuous load of the spring on one side, it significantly reduces the metal fatigue rate of the individual spring and extends the overall service life. At the same time, the alternating mechanism avoids a certain spring assembly from being in a compressed or relaxed state for a long time, ensuring the long-term stability of elastic performance.

[0067] The grounding device incorporates a switching component 400. This component, through mechanical linkage, converts the displacement of the conductive wheel assembly 200 into a switching action of the elastic component 300. When the conductive wheel assembly 200 moves downward due to the weight of the carrier plate, the switching component 400 triggers another elastic component 300 to take over the support. The original elastic component 300 temporarily escapes the stress state, allowing its elastic deformation to recover, thereby delaying elastic failure. Simultaneously, the conductively connected switching component 400 ensures that charge is always conducted to the ground through the currently supported elastic component 300, maintaining the continuity of the grounding loop and preventing interruption of charge release due to the switching action.

[0068] It should be noted that the embodiments of this application do not limit the specific type of the object to be transmitted, and can be selected according to the specific scenario. For example, the object to be transmitted is a carrier plate, which can be used to transmit battery cells, etc.

[0069] It should be noted that the embodiments of this application do not limit the specific connection method between the various components of the grounding device, as long as a stable connection can be achieved and conductive connection is satisfied under special circumstances. For example, the various components can be welded, screwed, or riveted.

[0070] The preferred technical solution of the grounding device according to the embodiments of this application is described below with reference to the accompanying drawings. Figure 3 for Figure 2 A schematic diagram of the connection between the intermediate flexible component 300 and the switching component 400; Figure 4 for Figure 2 Schematic diagram of the structure of the central conductive wheel assembly 200; Figure 5 for Figure 1 A schematic diagram showing the connection between the locking component 600 and the maintenance door 500.

[0071] In some embodiments, please refer to Figure 3 The switching component 400 includes: a base 410, which is located inside the receiving cavity 110 and is electrically connected to the device body 100; an elastic component 300 is electrically connected to the base 410; and a trigger 420, which is disposed on the base 410 and is connected to the conductive wheel assembly 200. The conductive wheel assembly 200 drives the base 410 to move relative to the device body 100 through the trigger 420.

[0072] In this embodiment, the base 410 serves as the core support structure of the switching component 400, and its conductive connection with the device body 100 ensures that charge is introduced to the ground through a low-impedance path.

[0073] By setting a trigger 420, when the conductive wheel assembly 200 moves downward under the pressure of the carrier plate, the trigger 420 converts the movement of the conductive wheel assembly 200 into the displacement of the base 410, forcing the currently compressed elastic component 300 to disengage, while simultaneously activating the backup elastic component 300 to take over. This switching mechanism ensures the forced alternation of the elastic components 300 each time the carrier plate contacts, making the stress duration of the dual elastic components 300 periodic, significantly extending the fatigue life of the single elastic component 300.

[0074] For some specific implementation methods, please refer to [link / reference]. Figure 3 The trigger 420 includes: a first connecting portion 421, which is disposed on the base 410 and has a first contact surface 422, which is inclined; a second connecting portion 424, which has a second contact surface 425, which is inclined and corresponds to the first contact surface 422; a sliding portion 426 on one of the second contact surface 425 and the first contact surface 422, and a guide portion 423 on the other of the second contact surface 425 and the first contact surface 422, wherein the sliding portion 426 is slidably connected to the guide portion 423; the second connecting portion 424 is connected to the conductive wheel assembly 200, and the conductive wheel assembly 200 moves and drives the sliding portion 426 to slide along the guide portion 423, so that the first connecting portion 421 pushes the second connecting portion 424 and the base 410 to move relative to the device body 100.

[0075] In this embodiment, by tilting the first contact surface 422 and the second contact surface 425 and aligning the first contact surface 422 with the second contact surface 425, when the conductive wheel assembly 200 is moved downward by the pressure of the carrier plate (moving toward the receiving cavity 110), the tilted surface decomposes the pressure in the vertical direction into a component force in the horizontal direction, which forms a driving force that pushes the base 410 to translate.

[0076] Furthermore, one of the second contact surface 425 and the first contact surface 422 has a sliding portion 426, and the other has a guide portion 423. The sliding portion 426 and the guide portion 423 are slidably connected. The sliding portion 426 sliding along the guide portion 423 can linearly convert the vertical displacement of the conductive wheel assembly 200 into the horizontal displacement of the base 410. The guide portion 423 rigidly constrains the movement trajectory of the sliding portion 426. When the carrier plate detaches from the conductive wheel assembly 200, the conductive wheel assembly 200 moves upward (moves away from the receiving cavity 110) under the action of the elastic restoring force of the elastic component 300. During this process, because the guide portion 423 forms a rigid constraint on the sliding portion 426, the inclined surface can still decompose the vertical pressure into a horizontal component force, and this component force forms a driving force to pull the base 410 to translate. Thus, during the production process, the two elastic components 300 can automatically switch working states under the pressure of the carrier plate to reduce the metal fatigue rate of a single spring and extend the overall service life.

[0077] It should be noted that this embodiment does not limit the shape of the first connecting part 421 and the second connecting part 424, and they can be block-shaped, plate-shaped, column-shaped, etc.

[0078] It should also be noted that this embodiment does not limit the tilt angle of the first contact surface 422 and the second contact surface 425, as long as the switching of the two elastic components 300 can be achieved. For example, the tilt angle of the first contact surface 422 and the second contact surface 425 is 30°~60°. Specifically, the tilt angle of the first contact surface 422 and the second contact surface 425 can be 30°, 45° or 60°.

[0079] For further information, please refer to [link / reference]. Figure 3 The guide part 423 is a protruding ridge, and the sliding part 426 is a sliding groove. The protruding ridge and the sliding groove are matched and connected.

[0080] By setting the guide part 423 as a convex ridge and the sliding part 426 as a groove conforming to it, a high-precision sliding pair constraint is formed, which is smooth and reliable, simple in structure and low in manufacturing cost.

[0081] In practice, the groove can be T-shaped, and correspondingly, the ridge can also be T-shaped.

[0082] In some other specific embodiments (not shown in the figures of this embodiment), the trigger 420 includes a driver and a switch, both of which are mounted on the base 410. The switch is communicatively connected to the driver. When the conductive wheel assembly 200 moves, the conductive wheel assembly 200 can press the switch, and the switch can control the driver to operate so that the driver controls the base 410 to move relative to the device body 100.

[0083] Furthermore, the driver is a lead screw drive mechanism or a roller mechanism.

[0084] It should be noted that the lead screw drive mechanism, roller mechanism and switch are all existing structural designs in this field, and will not be described in detail here.

[0085] In some other embodiments (not shown in the figures of this embodiment), the trigger 420 includes a rack connected to the conductive wheel assembly 200 and a gear disposed on the base 410, with the rack meshing with the gear. When the conductive wheel assembly 200 is pressed down, the linear motion of the rack drives the gear to rotate, and drives the base 410 to translate via a chain or belt.

[0086] In other embodiments, please continue to refer to Figure 3 The elastic component 300 includes: a sliding sleeve 310, which is electrically connected to the switching component 400; a first sliding member 320, a portion of which is inserted into the sliding sleeve 310 and moves relative to the sliding sleeve 310; the first sliding member 320 is used to electrically connect to the conductive wheel assembly 200; and an elastic member 330, which is sleeved on the periphery of the sliding sleeve 310 and connects the first sliding member 320 and the sliding sleeve 310.

[0087] In this embodiment, the sliding sleeve 310 is conductively connected to the switching component 400, the first sliding member 320 is conductively connected to the conductive wheel assembly 200, and the elastic member 330 connects the first sliding member 320 and the sliding sleeve 310, so that the conductive wheel assembly 200 can be connected to the ground through the switching component 400, thereby ensuring that the charge on the conductive wheel assembly 200 can be normally conducted to the ground.

[0088] By inserting a portion of the first sliding member 320 into the sliding sleeve 310, and allowing the first sliding member 320 to move relative to the sliding sleeve 310, the first sliding member 320 and the sliding sleeve 310 together form an axial guide mechanism, restricting the movement trajectory of the first sliding member 320 to axial translation, so as to avoid radial displacement during the compression and extension of the elastic member 330, thereby avoiding poor contact between the elastic component 300 and the conductive wheel assembly 200.

[0089] In practice, the sliding sleeve 310 can be connected to the base 410 of the switching assembly 400. The elastic element 330 can be a spring, rubber, etc.

[0090] For some specific implementation methods, please refer to [link / reference]. Figure 3 The first sliding member 320 includes: a sliding section 321, at least a portion of which is inserted into the sliding sleeve 310; an abutting section 322 connected to the sliding section 321 and located outside the sliding sleeve 310; and an elastic member 330 connecting the abutting section 322 and the sliding sleeve 310. The abutting section 322 is used for conductively connecting the conductive wheel assembly 200.

[0091] In this embodiment, by setting the first sliding member 320 as a sliding section 321 and an abutment section 322, the sliding section 321 can form an axial guide mechanism together with the sliding sleeve 310. The axial guide mechanism can restrict the movement of the first sliding member 320 to axial translation to avoid radial displacement during the compression and extension of the elastic member 330. The abutment section 322 serves as the force transmission interface between the elastic member 330 and the conductive wheel assembly 200. Its external design allows the elastic force of the elastic member 330 to act directly on the conductive wheel assembly 200 to form a short-path force transmission chain.

[0092] For other specific implementations, please refer to [link / reference]. Figure 3 The abutting section 322 has a curved surface that protrudes in the direction away from the sliding section 321.

[0093] In this embodiment, the abutment section 322 has a raised curved surface, a design that provides an ideal contact point when in contact with the conductive wheel assembly 200. When the abutment section 322 contacts the conductive wheel assembly 200, the raised curved surface ensures that the contact point is concentrated at the top of the curved surface. This concentrated contact not only improves conductivity but also reduces wear on the contact surface. Over time, even with slight wear, the curved surface design maintains good contact, thereby extending the service life of the abutment section 322.

[0094] Furthermore, the curved surface design gives the contact segment 322 a certain degree of self-adaptability. When the elastic component 300 switches between a state of contact with the conductive wheel assembly 200 and a state of disengagement from the conductive wheel assembly 200, the contact segment 322 needs to move from the surface of the conductive wheel assembly 200 to the inner surface of the device body 100, or vice versa. There is a certain height difference between the inner surface of the device body 100 and the surface of the conductive wheel assembly 200, making it inconvenient for the contact segment 322 to change the contact surface. However, by setting the contact segment 322 as a raised curved surface, the position of the contact point can be automatically adjusted, so that the contact segment 322 can smoothly transition from one surface to another without easily causing jamming.

[0095] In other embodiments, please refer to Figure 4The conductive wheel assembly 200 includes: a second sliding member 210, at least a portion of which is inserted into the receiving cavity 110; a limiting member 220 connected to the second sliding member 210 and located within the receiving cavity 110, which is used for conductive connection with the elastic component 300; a connecting member 230 connected to the second sliding member 210 and located outside the receiving cavity 110; and a roller 240 rotatably connected to the connecting member 230.

[0096] In this embodiment, a limiting member 220 is provided, which forms a mechanical stop structure to prevent the conductive wheel assembly 200 from detaching from the device body 100. A roller 240 is provided, which is used to contact the object to be transferred. The rotational movement of the roller 240 can reduce friction between the roller and the object to be transferred.

[0097] In practice, the limiting member 220 can be used to make a conductive connection with the abutment section 322 of the elastic component 300.

[0098] It should be noted that this embodiment does not limit the specific structure of the limiting member 220, as long as it can achieve the fiber. For example, the limiting member 220 can be a limiting plate, a limiting block, a limiting post, etc.

[0099] It should also be noted that the rotatable connection between the roller 240 and the connector 230 is a structural design method that is already available in the field, and will not be described in detail here.

[0100] In some embodiments, please refer to Figure 1 and Figure 5 The grounding device also includes: a maintenance door 500, which is slidably connected to the device body 100 and closes the receiving cavity 110; and a locking component 600, which is detachably connected to the maintenance door 500 and the device body 100.

[0101] In this embodiment, by providing a maintenance door 500, which is slidably connected to the device body 100, the movement trajectory of the maintenance door 500 is in a single linear direction, reducing the space required when the maintenance door 500 is opened. Furthermore, the maintenance door 500 seals the receiving cavity 110, forming a continuous sealed interface with the device body 100 when closed, preventing particulate matter and moisture from the external environment from entering the receiving cavity 110, thereby protecting the devices inside the receiving cavity 110.

[0102] By setting a locking component 600, the locking component 600 can lock the maintenance door 500 and the device body 100 after the maintenance door 500 is closed, preventing the maintenance door 500 from being opened unexpectedly. At the same time, when it is necessary to maintain the components inside the device body 100, the locking component 600 can be used to release the lock between the maintenance door 500 and the device body 100, making the operation convenient.

[0103] For some specific implementation methods, please refer to [link / reference]. Figure 5 The maintenance door 500 includes a door body 510, with raised sliding strips 520 on both sides of the door body 510. The device body 100 has a receiving opening, and grooves on both sides of the receiving opening. The door body 510 is located in the receiving opening, and the sliding strips 520 are embedded in the grooves to achieve a sliding connection between the maintenance door 500 and the device body 100.

[0104] For other specific implementations, please refer to [link / reference]. Figure 5 The locking assembly 600 includes a pull plate 610 and a locking member 620. The pull plate 610 is connected to the maintenance door 500, and the locking member 620 is disposed on the pull plate 610. The locking member 620 is used to detachably connect the pull plate 610 to the device body 100.

[0105] In this embodiment, by setting a pull plate 610, when it is necessary to close the maintenance door 500, the door body 510 can be pulled by the pull plate 610 to move in a preset direction until the door body 510 closes the receiving cavity 110; when it is necessary to open the maintenance door 500, the door body 510 can be pulled by the pull plate 610 to move in the opposite direction of the preset direction until the door body 510 opens the receiving cavity 110.

[0106] It should be noted that this embodiment does not limit the specific structure of the locking member 620, as long as it enables a detachable connection between the pull plate 610 and the device body 100. For example, the locking member 620 is a screw.

[0107] In other embodiments, please refer to Figure 1 and Figure 2 The grounding device also includes a connection assembly 700, which includes a connection arm 710 and a support base 720. The connection arm 710 is electrically connected to and supports the support base 720, and the support base 720 is electrically connected to and supports the device body 100. The connection arm 710 is used to connect to the ground.

[0108] In this embodiment, by providing a support base 720, the support base 720 can provide a stable support foundation for other components of the grounding device (such as the device body 100, the elastic component 300, the switching component 400, and the conductive wheel assembly 200), so that the conductive wheel assembly 200 can smoothly transport the object to be transported.

[0109] By providing a connecting arm 710, the connecting arm 710 can be connected to the ground via the target object, allowing the grounding device to be mounted on the target object via its connecting arm 710, thus achieving the desired positioning of the grounding device. Furthermore, the device body 100 is electrically connected to the support base 720, and the connecting arm 710 is electrically connected to the support base 720 and also connected to the ground, effectively conducting the charge on the object to be transferred to the ground.

[0110] It should be noted that this embodiment does not limit the target connection object, as long as it can realize the connection of the grounding device and the transmission of the object to be transmitted. For example, the target connection object is the magnetron sputtering device of a physical vapor deposition system.

[0111] It should be understood that the embodiments of this application are not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A grounding device, characterized in that, include: The device body (100) has a receiving cavity (110) inside, and the device body (100) is used for connection to the ground; A conductive wheel assembly (200), a portion of which is inserted into the receiving cavity (110), and the portion of which is located outside the receiving cavity (110) is used to transport the object to be transported. The conductive wheel assembly (200) is configured to move toward the receiving cavity (110) under the gravity of the object to be transported. Two elastic components (300) are located within the receiving cavity (110); A switching assembly (400) is located within the receiving cavity (110). The switching assembly (400) is electrically connected to the device body (100). The elastic component (300) and the conductive wheel assembly (200) are both electrically connected to the switching assembly (400). The switching assembly (400) is configured to move relative to the device body (100) under the drive of the conductive wheel assembly (200), so that one of the two elastic components (300) disengages from the conductive wheel assembly (200), while the other is electrically connected to and supports the conductive wheel assembly (200).

2. The grounding device according to claim 1, characterized in that, The switching component (400) includes: The base (410) is located inside the receiving cavity (110), and the base (410) is electrically connected to the device body (100). The elastic component (300) is electrically connected to the base (410). A trigger (420) is disposed on the base (410) and connected to the conductive wheel assembly (200). The conductive wheel assembly (200) drives the base (410) to move relative to the device body (100) through the trigger (420).

3. The grounding device according to claim 2, characterized in that, The trigger (420) includes: A first connecting part (421) is disposed on the base (410), and the first connecting part (421) has a first contact surface (422), which is inclined. The second connecting part (424) has a second contact surface (425), which is inclined and corresponds to the first contact surface (422); One of the second contact surface (425) and the first contact surface (422) has a sliding portion (426), and the other of the second contact surface (425) and the first contact surface (422) has a guide portion (423), wherein the sliding portion (426) and the guide portion (423) are slidably connected; The second connecting part (424) is connected to the conductive wheel assembly (200). The conductive wheel assembly (200) moves and drives the sliding part (426) to slide along the guide part (423), so that the first connecting part (421) pushes the second connecting part (424) and the base (410) to move relative to the device body (100).

4. The grounding device according to claim 3, characterized in that, The guide part (423) is a convex ridge, and the sliding part (426) is a sliding groove. The convex ridge and the sliding groove are matched and connected.

5. The grounding device according to any one of claims 1-4, characterized in that, The elastic component (300) includes: A sliding sleeve (310) is electrically connected to the switching assembly (400); A first slider (320) is partially inserted into the sleeve (310). The first slider (320) moves relative to the sleeve (310) and is used to electrically connect the conductive wheel assembly (200). An elastic element (330) is sleeved on the periphery of the sliding sleeve (310), and the elastic element (330) connects the first sliding element (320) and the sliding sleeve (310).

6. The grounding device according to claim 5, characterized in that, The first slider (320) includes: The sliding segment (321), at least a portion of which is inserted into the sliding sleeve (310); An abutment section (322) is connected to the sliding section (321) and is located outside the sliding sleeve (310). An elastic element (330) connects the abutment section (322) to the sliding sleeve (310). The abutment section (322) is used to electrically connect the conductive wheel assembly (200).

7. The grounding device according to claim 6, characterized in that, The abutting section (322) has a curved surface that protrudes in a direction away from the sliding section (321).

8. The grounding device according to any one of claims 1-4, characterized in that, The conductive wheel assembly (200) includes: The second slider (210) is at least partially inserted into the receiving cavity (110); A limiting member (220) is connected to the second sliding member (210), the limiting member (220) is located in the receiving cavity (110), and the limiting member (220) is used to electrically connect with the elastic component (300); A connector (230) is connected to the second sliding member (210) and is located outside the receiving cavity (110); Roller (240), which is rotatably connected to the connector (230).

9. The grounding device according to any one of claims 1-4, characterized in that, Also includes: Maintenance door (500) is slidably connected to the device body (100) and the maintenance door (500) closes the receiving cavity (110). A locking assembly (600) is provided, which is detachably connected to the maintenance door (500) and the device body (100).

10. A physical vapor deposition system, characterized in that, It includes a magnetron sputtering apparatus and a grounding device as described in any one of claims 1-9 disposed within the magnetron sputtering apparatus.

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