A fast return linear motor structure

Abstract

The utility model relates to the technical field of semiconductor, specifically relates to a linear motor structure of quick return, include: guide structure, its inside is equipped with guide channel along first direction, motion part is slidably arranged in the guide channel, wherein, motion part is configured as, when electrifying, can slide along the guide channel, when power failure, under the repulsion of guide structure and exerted to one end along first direction, remove to initial position to avoid the impact of motion part and guide structure due to inertia or gravity, in the utility model, when the coil of motion part electrifies, the magnetic field of magnetic circuit system produces makes motion part receive magnetic field force drive, does linear motion along the guide channel, can respond to control signal quickly, when power failure, the repulsion between second magnetic member and first magnetic member makes motion part return to initial position automatically, can avoid the gravity or inertia of motion part itself and lead to continue to move forward, realized the quick to and fro movement.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a linear motor structure with fast return. Background Technology

[0002] In many cutting-edge high-tech industries such as semiconductor manufacturing and microelectronics processing, wafers play a fundamental and crucial material role, and their surface treatment quality is a key factor affecting the performance and reliability of the final product. Specifically, applying a coating process to the wafer surface is undoubtedly a decisive step. The uniformity of the coating has a fundamental impact on subsequent wafer processing and many aspects of the final chip's electrical and mechanical properties.

[0003] Film coating uniformity refers to the consistency of the thickness, composition, and properties of the thin film across all locations on the wafer surface. Uniform coating ensures that devices in different areas of the wafer possess similar electrical and mechanical properties, thereby effectively improving overall chip performance and yield. Conversely, uneven coating results in significant differences in film thickness across different locations on the wafer. These thickness differences further lead to inconsistencies in key electrical parameters such as resistance and capacitance, ultimately causing serious problems such as performance instability and signal interference during chip operation. In extreme cases, it can even directly cause chip failure.

[0004] In traditional wafer coating processes, when the coating process is paused, the colloid cannot immediately stop flowing due to inertia and gravity, which directly leads to uneven coating.

[0005] Therefore, this application develops a fast-return linear motor structure to solve the problems existing in the prior art. Utility Model Content

[0006] The purpose of this invention is to provide a linear motor structure that returns quickly, in order to solve the problem of poor uniformity in the wafer coating process in the prior art.

[0007] The technical solution of this utility model is: a linear motor structure with fast return, comprising:

[0008] A guide structure, the interior of which has a guide channel along a first direction;

[0009] The moving part is slidably disposed within the guide channel;

[0010] The moving part is configured to slide along the guide channel when energized; and when de-energized, it moves to its initial position under the repulsive force applied by the guide structure at one end along the first direction, thereby avoiding collision between the moving part and the guide structure due to inertia or gravity.

[0011] Preferably, a first magnetic element is provided at both ends of the moving part, and a second magnetic element is provided on the inner side of both ends of the guide structure; when the moving part is de-energized and approaches either end, the repulsive force between the first magnetic element and the second magnetic element at the corresponding position drives the moving part back to the initial position.

[0012] Preferably, after the moving part is de-energized, the direction of the repulsive force always points to the initial position.

[0013] Preferably, the moving part includes a coil core and a coil wound thereon; wherein, a fixed guide rod is provided in the guide channel, and the coil core passes through the guide rod and slides along it.

[0014] Preferably, both the first magnetic component and the second magnetic component are magnets.

[0015] Preferably, the guide structure includes a guide portion having the guide channel inside, and a pair of fixing portions respectively connected to both ends of the guide portion, wherein the second magnetic element is fixedly disposed on the inner side of the pair of fixing portions facing the guide channel.

[0016] Preferably, the guide structure further includes a pair of third magnetic elements, which are symmetrically arranged along a direction perpendicular to the first direction, thereby forming a magnetic circuit and motion mechanism of a linear motor structure together with the guide part and the motion part.

[0017] Compared with the prior art, the advantages of this utility model are:

[0018] (1) When the coil on the moving part is energized, the magnetic field generated by the magnetic circuit system drives the moving part to move in a straight line along the guide channel. It can respond quickly to the control signal. When the power is off, the repulsive force between the second magnetic component and the first magnetic component causes the moving part to automatically return to the initial position. It can avoid the moving part from continuing to move forward due to its own gravity or inertia, and realizes rapid reciprocating motion.

[0019] (2) The moving part consists of a coil core and a tightly wound coil. The guide structure is equipped with a fixed guide rod. The coil core passes through the guide rod and can slide freely, so that the moving part slides strictly according to the straight trajectory defined by the guide rod when it is energized. This greatly improves the motion accuracy and reduces the error caused by trajectory deviation. In processes with extremely high precision requirements, such as wafer coating, it can ensure coating accuracy and meet the strict requirements of the production process.

[0020] (3) The guide structure includes a guide part, a pair of fixed parts and a pair of third magnetic parts. The guide channel is opened in the guide part. The fixed part is connected to both ends of the guide part and the second magnetic part is provided on the inner side. The third magnetic part is symmetrically arranged along the first direction perpendicular to it. It works with the guide part and the motion part to construct a magnetic circuit and motion mechanism similar to a linear motor. Attached Figure Description

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0022] Figure 1 This is a schematic diagram of the structure of a fast-return linear motor according to the present invention;

[0023] Figure 2 This is a side sectional view of a linear motor structure with rapid return according to the present invention;

[0024] Figure 3 This is a right-side sectional view of the linear motor structure with rapid return described in this utility model.

[0025] The components are: 1. Guide structure; 11. Guide channel; 12. Guide part; 13. Fixing part; 14. Third magnetic component; 15. Guide rod; 2. Moving part; 21. Coil core; 22. Coil; 3. First magnetic component; 4. Second magnetic component. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to specific embodiments:

[0027] like Figures 1-3 As shown, a linear motor structure for rapid return includes a guide structure 1 and a moving part 2. The guide structure 1 has a guide channel 11 along a first direction, and a moving part 2 is slidably disposed within the guide channel 11. Both ends of the moving part 2 are provided with first magnetic elements 3. On the inner sides of both ends of the guide structure 1, corresponding to the positions of the first magnetic elements 3, second magnetic elements 4 are respectively disposed. In practical application, the moving part 2 is located in the center position, and a repulsive force is generated between the first magnetic elements 3 and the second magnetic elements 4. When the moving part 2 is energized, it overcomes the repulsive force between the first magnetic elements 3 and the second magnetic elements 4 under the action of electromagnetic force, and can slide quickly and accurately along the guide channel 11. When the motor is de-energized and a reverse current is applied, the moving part 2 does not need to overcome the repulsive force and will generate an opposite force. Combined with the repulsive force, the moving part 2 can smoothly and quickly return to its initial position, avoiding collision with the guide structure 1 due to inertia or gravity. During coating, after coating is completed, the moving part 2 will immediately return under the action of the repulsive force, thus preventing the adhesive from continuing to flow out and ensuring the uniformity of the coating.

[0028] Specifically, both the first magnetic component 3 and the second magnetic component 4 are magnets, which possess strong magnetism and stable magnetic properties, maintaining magnetic stability over a long period of use. In practical applications, the moving part 2 is located at the center of the guide structure 1. When the motor is energized, the moving part 2 moves along the channel inside the guide structure 1 under the action of electromagnetic force. Once the moving part 2 is de-energized and a reverse current is applied, the repulsive force is in the same direction as the magnetic field force of the energized moving part 2. The repulsive force generated between the closely spaced first magnetic component 3 and the second magnetic component 4 will not be canceled out by the magnetic field force of the moving part 2, and the direction of this repulsive force always precisely points to the initial position of the moving part 2, pushing the moving part 2 back to its initial position. This effectively prevents the moving part 2 from violently colliding with the guide structure 1 due to inertia or gravity.

[0029] In this embodiment, the moving part 2 includes a coil core 21 and a coil 22 tightly wound around it. A fixed guide rod 15 is provided inside the guide structure 1. The coil core 21 is cleverly inserted through the guide rod 15 and can slide freely along it, thus avoiding wear during the sliding process. Furthermore, during energized movement, the moving part 2 can slide strictly along the straight trajectory defined by the guide rod 15, greatly improving the accuracy and stability of the movement and reducing errors caused by deviations in the movement trajectory, ensuring the accuracy requirements during wafer lamination.

[0030] Furthermore, the guide structure 1 includes a guide portion 12, a pair of fixing portions 13, and a pair of third magnetic elements 14. A guide channel 11 is formed within the guide portion 12. The pair of fixing portions 13 are respectively fixedly connected to both ends of the guide portion 12. A second magnetic element 4 is provided on the inner side of each of the pair of fixing portions 13 facing the guide channel 11. The pair of third magnetic elements 14 are symmetrically arranged perpendicular to the first direction. Together with the guide portion 12 and the moving portion 2, they form the magnetic circuit and motion mechanism of the linear motor structure.

[0031] During operation, when the coil 22 on the moving part 2 is energized, under the influence of the magnetic field generated by the magnetic circuit system, the moving part 2 is driven by the magnetic force to overcome the repulsive force between the second magnetic component 4 and the first magnetic component 3, and moves in a straight line along the guide channel 11. When the moving part 2 is de-energized and a reverse current is applied, the repulsive force between the second magnetic component 4 and the first magnetic component 3 on the moving part 2 causes the moving part 2 to tend to return to its initial position.

[0032] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A linear motor structure for rapid return, characterized in that, include: The guide structure (1) has a guide channel (11) inside along the first direction. The moving part (2) is slidably disposed within the guide channel (11); The moving part (2) is configured to slide along the guide channel (11) when energized; and to move to the initial position when de-energized by the repulsive force applied by the guide structure (1) at one end along the first direction, thereby avoiding collision between the moving part (2) and the guide structure (1) due to inertia or gravity.

2. The linear motor structure for rapid return according to claim 1, characterized in that: Both ends of the moving part (2) are provided with a first magnetic element (3), and the inner sides of both ends of the guide structure (1) are provided with a second magnetic element (4); when the moving part (2) is de-energized and approaches either end, the repulsive force between the first magnetic element (3) and the second magnetic element (4) at the corresponding position drives the moving part (2) back to the initial position.

3. The linear motor structure for rapid return according to claim 2, characterized in that: After the power is cut off to the moving part (2), the direction of the repulsive force always points to the initial position.

4. The linear motor structure for rapid return according to claim 2, characterized in that: The moving part (2) includes a coil core (21) and a coil (22) wound thereon; wherein, a fixed guide rod (15) is provided in the guide channel (11), and the coil core (21) passes through the guide rod (15) and slides along it.

5. The linear motor structure for rapid return according to claim 2, characterized in that: Both the first magnetic component (3) and the second magnetic component (4) are magnets.

6. The linear motor structure for rapid return according to claim 2, characterized in that: The guide structure (1) includes a guide part (12) with the guide channel (11) inside, and a pair of fixing parts (13) respectively connected to both ends of the guide part (12). The pair of fixing parts (13) are fixed with the second magnetic element (4) on the inner side facing the guide channel (11).

7. The linear motor structure for rapid return according to claim 6, characterized in that: The guide structure (1) further includes a pair of third magnetic elements (14), which are symmetrically arranged along a direction perpendicular to the first direction, thereby forming a magnetic circuit and motion mechanism of a linear motor structure together with the guide part (12) and the motion part (2).

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