An exercise device

Abstract

The application provides a motion device, and relates to the technical field of semiconductor device manufacturing. The motion device provided by the application comprises a crossbeam configured to be capable of moving in a first direction, a first guiding mechanism for guiding the movement of the crossbeam in the first direction, and a first driving mechanism for driving the crossbeam to move in the first direction. The first driving mechanism comprises a stator and a mover, and the crossbeam is connected to the mover through one or more flexible members. The mover is configured to be capable of moving the crossbeam in the first direction based on the stator, and the mover is capable of moving in a second direction and / or rotating around a third direction relative to the crossbeam during the movement in the first direction. The second direction intersects the first direction, and the third direction is perpendicular to the first direction and the second direction.

Description

Technical Field

[0001] This specification relates to the field of semiconductor device manufacturing, and in particular to a motion device. Background Technology

[0002] The motion device may include a drive mechanism and a guide mechanism. The drive mechanism drives the workpiece to move, and the guide mechanism guides the movement of the workpiece. The workpiece may include a crossbeam. Since the crossbeam has a certain length, it may have some deformation along its axial direction. Single-sided or central drive can easily amplify this deformation. To synchronize the movement of both ends of the crossbeam, or to increase the acceleration of the crossbeam, a set of drive mechanisms and guide mechanisms can be arranged at each end of the crossbeam. However, the two drive mechanisms at both ends of the crossbeam may have a problem of asynchronous driving. In some application scenarios, the mover of the drive mechanism is suspended in the stator, and the mover may have displacement along the axial direction of the crossbeam or deflection around the vertical direction, which can easily lead to motion jamming or even deformation of the crossbeam, thus affecting the motion accuracy of the entire motion device. Utility Model Content

[0003] This specification provides one or more embodiments of a motion device, including: a crossbeam configured to move along a first direction; a first guide mechanism for guiding the movement of the crossbeam in the first direction; and a first drive mechanism for driving the crossbeam to move along the first direction; the first drive mechanism includes: a stator and a mover, the crossbeam and the mover being connected by one or more flexible members; the mover is configured to: carry the crossbeam along the first direction based on the stator, and during the movement along the first direction, the mover is capable of moving relative to the crossbeam in a second direction and / or rotating about a third direction; wherein the second direction intersects the first direction, and the third direction is perpendicular to the first direction and the second direction.

[0004] In some embodiments, the flexible member includes: a first flexible member, the first flexible member including: a first mover fixed end connected to the mover, a first crossbeam fixed end connected to the crossbeam, and at least two first flexible hinges connecting the first mover fixed end and the first crossbeam fixed end; both first flexible hinges are configured to be rotatable relative to the first mover fixed end about a third direction, rotatable relative to the first crossbeam fixed end about a third direction, and / or be able to bend about a third direction; the two first flexible hinges have an angle with the second direction; the two first flexible hinges have an angle between them.

[0005] In some embodiments, in an initial state, one of the first flexible hinges extends in the first direction; a trapezoidal deformation space is formed between the two first flexible hinges.

[0006] In some embodiments, the flexible member further includes: a second flexible member, the second flexible member including: a second mover fixed end connected to the mover, a second crossbeam fixed end connected to the crossbeam, and at least one second flexible hinge connecting the second mover fixed end and the second crossbeam fixed end; the second flexible hinge is configured to be rotatable relative to the second mover fixed end about the third direction, rotatable relative to the second crossbeam fixed end about the third direction, and / or be able to bend about the third direction; the second flexible hinge has an angle with the second direction.

[0007] In some embodiments, the second flexible hinge has an included angle with each of the two first flexible hinges.

[0008] In some embodiments, the flexible element includes: two first flexible elements, the two first flexible elements being arranged in a mirror-symmetric manner with respect to the second direction, and the first moving part fixed ends of the two first flexible elements being connected together.

[0009] In some embodiments, the motion device further includes: an air flotation assembly disposed on the crossbeam and configured to move along the second direction, and a second drive mechanism for driving the air flotation assembly to move along the second direction; the crossbeam has an accommodating space for accommodating the second drive mechanism.

[0010] In some embodiments, the air flotation assembly includes: a top plate, two lateral air flotation blocks respectively disposed on both sides of the top plate, and one or more bottom air flotation blocks respectively disposed on both sides of the top plate; each of the two lateral air flotation blocks has one or more first lateral positive pressure zones for providing positive pressure gas to the two sides of the crossbeam; each of the bottom air flotation blocks has a first bottom positive pressure zone for providing positive pressure gas to the base of the motion device and / or a first bottom negative pressure zone for providing negative pressure to the base of the motion device.

[0011] In some embodiments, a plurality of bottom air flotation blocks are provided on each side of the top plate, and the number of bottom air flotation blocks on both sides of the top plate may be equal or unequal.

[0012] In some embodiments, the air flotation assembly includes: a top plate and two integrated air flotation blocks respectively disposed on both sides of the top plate; each of the two integrated air flotation blocks has a second lateral positive pressure zone for providing positive pressure gas to the two sides of the crossbeam; each of the two integrated air flotation blocks has a second bottom positive pressure zone for providing positive pressure gas to the base of the motion device and / or a second bottom negative pressure zone for providing negative pressure to the base of the motion device.

[0013] The beneficial effects that the embodiments of this specification may bring include, but are not limited to: (1) providing a layout for flexible connection between the crossbeam and the mover of the first drive mechanism, avoiding jamming caused by asynchronous driving on both sides of the crossbeam, and avoiding problems such as deformation of guide components and / or crossbeam deformation caused by asynchronous driving on both sides of the crossbeam; (2) the flexible component reduces the transmission link between the mover of the first drive mechanism and the crossbeam, avoiding the crossbeam from twisting and affecting the air bearing accuracy of the air bearing component on the crossbeam; (3) allowing the arrangement of multiple first drive mechanisms to improve the acceleration of the crossbeam; (4) decoupling the crossbeam and the mover of the first drive mechanism through the flexible component, reducing the requirements of the crossbeam drive over-positioning on the control algorithm; (5) providing a variety of flexible component structures to adapt to a variety of different needs; (6) the second drive mechanism is arranged in the accommodating space of the crossbeam, reducing the overall height of the equipment; (7) the lateral air bearing block and the bottom air bearing block are both connected to the top plate, reducing the overall height of the equipment; (8) providing two different air bearing component structures to adapt to a variety of different needs. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects may be any one or a combination of the above, or any other possible beneficial effects. Attached Figure Description

[0014] This specification will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings denote the same structures or steps.

[0015] Figure 1 This is a schematic diagram of a motion device according to some embodiments of this specification.

[0016] Figure 2 yes Figure 1 A magnified view of a portion of the image.

[0017] Figure 3 This is a schematic diagram of the first flexible member of the motion device according to some embodiments of this specification.

[0018] Figure 4 This is a schematic diagram of the second flexible member of the motion device according to some embodiments of this specification.

[0019] Figure 5 This is a schematic diagram of two first flexible members that are mirror-symmetrical to the motion device shown in some embodiments of this specification.

[0020] Figure 6 This is a schematic diagram of two first flexible members that are mirror-symmetric to the motion device shown in other embodiments of this specification.

[0021] Figure 7This is a schematic diagram of the air flotation component of a motion device according to some embodiments of this specification.

[0022] Figure 8 This is a schematic diagram of the air flotation component of a motion device according to other embodiments of this specification.

[0023] Figure 9 This is a schematic diagram of the air flotation component of a motion device according to some embodiments of this specification.

[0024] In the diagram, the markings are: 1. Crossbeam; 2. First guide mechanism; 3. First drive mechanism; 31. Stator; 32. Mover; 32a. Clearance area; 4. Flexible component; 41. First flexible component; 411. Fixed end of first mover; 412. Fixed end of first crossbeam; 413. First flexible hinge; 413a. Groove; 42. Second flexible component; 421. Fixed end of second mover; 422. Fixed end of second crossbeam; 423. Second flexible hinge; 423a. Groove; 5. Air flotation assembly; 51. Top plate; 52. Lateral air flotation block; 521. First lateral positive pressure zone; 53. Bottom air flotation block; 531. First bottom positive pressure zone; 532. First bottom negative pressure zone; 54. Integrated air flotation block; 541. Second lateral positive pressure zone; 542. Second bottom positive pressure zone; 543. Second bottom negative pressure zone; 6. Second drive mechanism; 71. First grating ruler; 72. Second grating ruler; 100. Base. Detailed Implementation

[0025] To more clearly illustrate the technical solutions of the embodiments in this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the content described below are some examples or embodiments of this specification. For those skilled in the art, without creative effort, the technical solutions or means disclosed in this specification can be applied to other scenarios based on this technical content.

[0026] It should be understood that the terms "system," "device," "equipment," "part" and / or "component," "unit" and / or "module" used in this specification are a method of distinguishing different components, elements, parts, sections, or assemblies at different levels. However, if other words can achieve the same purpose, they may be replaced by other expressions.

[0027] Unless otherwise specified, the technical terms used to describe components, elements, etc. in this specification are not singular but may include plural. Generally speaking, terms such as "comprising" or "including" only indicate that explicitly identified steps, elements, or components are included, and these steps, elements, and components do not constitute an exclusive list, as the described method or apparatus may also include other steps or components.

[0028] In the description of this specification, it should be understood that the directional descriptions, such as up, down, front, back, left, and right, indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. These descriptions are for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In the description of this specification, unless otherwise expressly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of the above terms in this specification in conjunction with the specific content of the technical solution.

[0029] The motion device may include a drive mechanism and a guide mechanism. The drive mechanism drives the workpiece to move, and the guide mechanism guides the movement of the workpiece. The workpiece may include a crossbeam. Since the crossbeam has a certain length, it may deform along its axial direction. Single-sided or central drive can easily amplify this deformation. In some applications, to ensure synchronous movement at both ends of the crossbeam, a drive mechanism and a guide mechanism can be arranged at each end of the crossbeam.

[0030] Furthermore, the purpose of arranging crossbeams is often to increase the load that the equipment can carry. The crossbeams themselves also have a significant weight, and a single drive mechanism driving a crossbeam with a large load can only achieve a relatively slow acceleration. In some applications, to increase the acceleration of the crossbeam, a set of drive mechanisms and guide mechanisms can be arranged at each end of the crossbeam.

[0031] However, the two drive mechanisms at both ends of the crossbeam may have a problem of asynchronous drive. In some application scenarios, the mover of the drive mechanism is suspended in the stator. The mover may have displacement along the axial direction of the crossbeam or deflection around the vertical direction, which can easily lead to motion jamming or even deformation of the crossbeam, thereby affecting the motion accuracy of the entire motion device.

[0032] Based on this, one or more embodiments of this specification provide a motion device in which the displacement of the crossbeam is precisely guided by a first guide mechanism and driven by two first drive mechanisms on both sides. The crossbeam and the mover of the first drive mechanism are connected by a flexible member. The differential motion, displacement and deflection of the movers of the two first drive mechanisms can be absorbed by the flexible member, thus achieving high motion accuracy.

[0033] Figure 1 These are schematic diagrams of the motion device shown in some embodiments of this specification. Figure 2 yes Figure 1 A magnified view of a portion of the image. See also... Figure 1 , Figure 2As shown, in one or more embodiments of this specification, the motion device may include: a crossbeam 1, a first guide mechanism 2, and a first drive mechanism 3. The crossbeam 1 is configured to extend in a second direction Y and be movable in a first direction X. The first guide mechanism 2 is used to guide the movement of the crossbeam 1 in the first direction X. The first drive mechanism 3 is used to drive the crossbeam 1 to move in the first direction X.

[0034] In some embodiments, the number of first guide mechanisms 2 is two or more. Two first guide mechanisms 2 are located at the left and right ends of the crossbeam 1, respectively. In some embodiments, the number of first drive mechanisms 3 is two or more. Two first drive mechanisms 3 are located at the left and right ends of the crossbeam 1, respectively. In some embodiments, both first guide mechanisms 2 may be located between the two first drive mechanisms 3. Multiple first drive mechanisms 3 can increase the acceleration of the crossbeam 1, solving the problem of limited acceleration of the motion platform.

[0035] In some embodiments, the first guide mechanism 2 is a rigid guide mechanism (e.g., a mechanical guide rail). In some embodiments, the connection between the first guide mechanism 2 and the crossbeam 1 is a rigid connection.

[0036] For example, the first guide mechanism 2 may include: a first guide rail extending in the first direction X and a first guide slider matching the first guide rail, wherein the first guide slider is fixedly connected to the crossbeam 1.

[0037] In some embodiments, the first drive mechanism 3 includes a stator 31 and a mover 32, with the crossbeam 1 connected to the mover 32 via one or more flexible members 4. The stator 31 can be fixedly connected to the base 100 of the motion device. The flexible members 4 can be used to decouple the motion between the crossbeam 1 and the mover 32, for example, to decouple the asynchronous driving of the movers 32 of the two first drive mechanisms 3 (in some applications, although a 2A current signal can be applied to the two drive mechanisms, such as motors, the actual output force may be different due to the nature of the drive mechanisms themselves; for example, one drive mechanism outputs 100N and the other outputs 99N, which may cause fluctuations / differences). In some embodiments, the mover 32 is configured to be able to move along a first direction X based on the stator 31 carrying the crossbeam 1, and during the movement along the first direction X, the mover 32 can move relative to the crossbeam 1 along a second direction Y and / or rotate around a third direction Z. Wherein, the first direction X and the second direction Y intersect or the first direction X is perpendicular to the second direction Y, and the third direction Z is perpendicular to the first direction X and the second direction Y.

[0038] For example, the first drive mechanism 3 may include a linear motor (e.g., a coreless linear motor). The first drive mechanism 3 may include a stator and a mover based on the movement of the stator. The mover may be suspended relative to the stator by magnetic force to achieve contactless support and eliminate mechanical friction. In some embodiments, one of the stator and the mover may include a coil, and the other of the stator and the mover may include a magnet.

[0039] Since the mover 32 of the first drive mechanism 3 may produce displacement in the second direction Y, or rotation around the third direction Z, if the mover 32 is rigidly connected to the crossbeam 1 and the first guide mechanism 2 is rigidly connected to the crossbeam 1, the crossbeam 1 may get stuck. If the mover 32 is rigidly connected to the crossbeam 1 and the first guide mechanism 2 is flexibly connected to the crossbeam 1, although the problem of the crossbeam 1 getting stuck can be eliminated to a certain extent, it allows the crossbeam 1 to move relative to the first guide mechanism 2 in the second direction Y, and the accuracy of the crossbeam 1 in the second direction Y is difficult to guarantee. Furthermore, if the mover 32 is rigidly connected to the crossbeam 1 and the first guide mechanism 2 is flexibly connected to the crossbeam 1, when there is a difference in the output of the movers 32 on both sides, the crossbeam 1 itself will twist, affecting the displacement accuracy or other accuracy of the components on the crossbeam 1 (for example, the air buoyancy accuracy between the air buoyancy component 5 and the side of the crossbeam 1 or the air buoyancy stiffness between the air buoyancy component 5 and the upper surface of the base 100).

[0040] In one or more embodiments of this specification, the mover 32 and the crossbeam 1 are flexibly connected via a flexible member 4, and the first guide mechanism 2 is rigidly connected to the crossbeam 1. Once the position of the first guide mechanism 2 is determined, the crossbeam 1 in the second direction Y is also determined, and the accuracy of the crossbeam 1 in the second direction Y is strictly determined based on the arrangement accuracy of the first guide mechanism 2. When the crossbeam 1 performs movement in the first direction X, its position in the second direction Y is not affected by the drive. The relative movement between the end of the crossbeam 1 and the mover 32 is absorbed by the flexible member 4, thereby avoiding problems such as jamming, jamming, or deformation of the crossbeam, guide mechanism, and other components caused by the inconsistency between the drive direction and the guide direction.

[0041] In one or more embodiments of this specification, the movers 32 of the two first drive mechanisms 3 on both sides are flexibly connected to each end of the crossbeam 1 through a flexible member 4. When the crossbeam 1 performs movement in the first direction X, the differential movement of the two movers 32 of the two first drive mechanisms 3 can be absorbed by the flexible member 4, thereby avoiding problems such as jamming, jamming, or deformation of the crossbeam, guide mechanism, and other components caused by different positioning positions at both ends of the crossbeam 1.

[0042] In one or more embodiments of this specification, the moving parts 32 of the two first drive mechanisms 3 on both sides are flexibly connected to each end of the crossbeam 1 through a flexible member 4. This allows the moving parts 32 of the two first drive mechanisms 3 on both sides to move without complete synchronization or precise positioning. The precise position of the crossbeam 1 in the first direction X can be obtained by a displacement sensor (e.g., a grating ruler). The position and / or stroke of the moving parts 32 of the two first drive mechanisms 3 on both sides can be adjusted based on the values ​​fed back by the displacement sensor, thereby reducing the requirements of the algorithm control for over-positioning of the two first drive mechanisms 3 on both sides.

[0043] In one or more embodiments of this specification, see Figure 3 As shown, the flexible member 4 includes: a first flexible member 41, which includes: a first mover fixed end 411 connected to the mover 32, a first crossbeam fixed end 412 connected to the crossbeam 1, and at least two first flexible hinges 413 connecting the first mover fixed end 411 and the first crossbeam fixed end 412.

[0044] In some embodiments, both first flexible hinges 413 are configured to be able to rotate about a third direction Z relative to the first moving end 411, to rotate about a third direction Z relative to the first beam end 412, and / or to be able to bend about a third direction Z themselves.

[0045] In some embodiments, the first flexible hinge 413 may be plate-shaped, and one or both ends of the first flexible hinge 413 may have grooves 413a to reduce the thickness of the first flexible hinge 413 at that location, so that the first flexible hinge 413 can deform to achieve the aforementioned rotation and / or bending. In some embodiments, the number of grooves 413a may be one or more.

[0046] In some embodiments, the two first flexible hinges 413 have an included angle with the second direction Y.

[0047] For example, see Figure 3 As shown, in the initial state, one of the first flexible hinges 413 can extend in the first direction X, and the other first flexible hinge 413 can have an angle with both the first direction X and the second direction Y.

[0048] For example, a first flexible hinge 413 extending in the first direction X is arranged near the crossbeam 1, and a first flexible hinge 413 having an angle with both the first direction X and the second direction Y is arranged near the mover 32, so that the flexibility of the flexible member 4 near the mover 32 is greater than its flexibility near the crossbeam 1. When the flexible member 4 deforms, the portion of the flexible member 4 near the mover 32 with the first flexible hinge 413 is more prone to deformation, thereby reducing the impact of the deformation of the flexible member 4 on the crossbeam 1.

[0049] For example, refer to Figure 6 As shown ( Figure 6 In the initial state, each of the two first flexible hinges 413 has an angle with the first direction X and the second direction Y. For example, in the initial state, both first flexible hinges 413 are arranged at an angle relative to both the first direction X and the second direction Y. For example, in the initial state, the two first flexible hinges 413 are arranged radially symmetrically with respect to the first direction X.

[0050] In some embodiments, a trapezoidal deformation space is formed between the two first flexible hinges 413. See also: Figure 3 As shown, the deformation space can be a right trapezoid. In some embodiments, reference is made to... Figure 6 As shown, the deformation space can be an isosceles trapezoid.

[0051] In one or more embodiments of this specification, see Figure 4 As shown, the flexible member 4 may further include a second flexible member 42, which includes a second mover fixed end 421 connected to the mover 32, a second crossbeam fixed end 422 connected to the crossbeam 1, and at least one second flexible hinge 423 connecting the second mover fixed end 421 and the second crossbeam fixed end 422.

[0052] In some embodiments, the second flexible hinge 423 is configured to be able to rotate about a third direction Z relative to the second moving end 421, to rotate about a third direction Z relative to the second beam end 422, and / or to be able to bend about a third direction Z itself.

[0053] In some embodiments, the second flexible hinge 423 may be plate-shaped, and one or both ends of the second flexible hinge 423 may have grooves 423a to reduce the thickness of the second flexible hinge 423 at that location, so that the second flexible hinge 423 can deform to achieve the aforementioned rotation and / or bending. In some embodiments, the number of grooves 423a may be one or more.

[0054] In some embodiments, the second flexible hinge 423 has an angle with the second direction Y. In some embodiments, the second flexible hinge 423 has an angle with both first flexible hinges 413.

[0055] For example, see Figure 2 As shown, in the initial state, one of the first flexible hinges 413 can extend in the first direction X, and the other first flexible hinge 413 can have an angle with both the first direction X and the second direction Y. At the same time, the second flexible hinge 423 has an angle with both the first direction X and the second direction Y.

[0056] For example, a first flexible hinge 413 extending in the first direction X is arranged near the crossbeam 1, and a first flexible hinge 413 having an angle with both the first direction X and the second direction Y is arranged near the mover 32. Simultaneously, a second flexible hinge 423 is also arranged near the mover 32, so that the flexibility of the flexible member 4 near the mover 32 is greater than its flexibility near the crossbeam 1. When the flexible member 4 deforms, the portion of the flexible member 4 near the mover 32 with the first flexible hinge 413 is more prone to deformation, thereby reducing the impact of the deformation of the flexible member 4 on the crossbeam 1.

[0057] For example, a first flexible hinge 413 and a second flexible hinge 423, both having angles with both the first direction X and the second direction Y, are arranged mirror-symmetrically with respect to the second direction Y. This arrangement makes the total width (width in the first direction X) at the connection between the flexible member 4 and the mover 32 smaller than the total width at the connection between the flexible member 4 and the crossbeam 1, thus making the portion of the flexible member 4 near the mover 32 where the first flexible hinge 413 is located more prone to deformation. Furthermore, see... Figure 2 As shown, this arrangement also creates a roughly triangular clearance area 32a between the mover 32 and the flexible member 4 to provide space for the mover 32 to rotate around a third direction Z.

[0058] In one or more embodiments of this specification, see Figure 5 , Figure 6 As shown, the flexible member 4 includes two first flexible members 41, which are arranged symmetrically with respect to the second direction Y. In some embodiments, the two first flexible members 41 may be separate structures. In other embodiments, the two first flexible members 41 may be integral structures, with the first moving part fixed ends 411 of the two first flexible members 41 connected together.

[0059] For example, see Figure 5 As shown, the flexible component 4 may include two first flexible hinges 413 extending in the first direction X and two other first flexible hinges 413 having angles with both the first direction X and the second direction Y. (Combined) Figure 2 As shown, the other two first flexible hinges 413, which have angles with both the first direction X and the second direction Y, are arranged close to the mover 32.

[0060] Combination Figure 2 , Figure 5 As shown, the ends of the other two flexible hinges 413, which have an angle between the first direction X and the second direction Y, and the fixed end 411 of the first mover are located close to the mover 32. The ends of the other two flexible hinges 413, which have an angle between the first direction X and the second direction Y, and the fixed end 412 of the first crossbeam are located away from the mover 32, so that the flexible member 4 forms a convex structure at the mover 32, thereby providing the aforementioned avoidance area 32a.

[0061] For example, see Figure 6 As shown, the flexible component 4 may include four first flexible hinges 413 that form an angle with both the first direction X and the second direction Y. These four first flexible hinges 413 that form an angle with both the first direction X and the second direction Y are arranged in a mirror-symmetrical manner in both the first direction X and the second direction Y.

[0062] Combination Figure 2 , Figure 6 As shown, the four first flexible hinges 413, which have angles with the first direction X and the second direction Y, make the flexible member 4 form a convex structure at the mover 32 and the crossbeam 1 to provide a clearance area.

[0063] In some embodiments, connecting the first moving part fixed ends 411 of the two first flexible members 41 may include integrally connecting the first moving part fixed ends 411 of the two first flexible members 41. In other words, in some embodiments, the two first flexible members 41 may share the same first moving part fixed end 411.

[0064] In other embodiments of this specification, the flexible member 4 includes two first flexible members 41, which are arranged symmetrically with respect to the second direction Y, and their first beam fixing ends 412 are connected. In some embodiments, connecting the first beam fixing ends 412 of the two first flexible members 41 may include integrally connecting the first beam fixing ends 412 of the two first flexible members 41. In other words, in some embodiments, the two first flexible members 41 may share the same first beam fixing end 412.

[0065] In one or more embodiments of this specification, see Figure 1 , Figure 2 , combined Figures 7 to 9As shown, the motion device may further include: an air flotation assembly 5 disposed on the crossbeam 1 and configured to move along the second direction Y, and a second drive mechanism 6 for driving the air flotation assembly 5 to move along the second direction Y. In some embodiments, the air flotation assembly 5 is used to carry the driven member. In some embodiments, the air flotation assembly 5 is configured to be air-supported on the base 100 of the motion device to prevent the crossbeam 1 from deforming due to the weight of the air flotation assembly 5 and the driven member located on the air flotation assembly 5 being entirely borne by the crossbeam 1. In some embodiments, the air flotation assembly 5 is also configured to be negatively attracted to the base 100 of the motion device to lock the current position of the air flotation assembly 5 and avoid the influence of servo jitter on the position.

[0066] In some embodiments, the longitudinal section of the air flotation component 5 may be "n"-shaped, and the air flotation component 5 may cover two sides of the crossbeam 1. In some embodiments, the air flotation component 5 may provide positive pressure gas (which may be provided by an external gas source) to the two sides of the crossbeam 1, thereby forming an air film between the air flotation component 5 and the surface of the crossbeam 1. In some embodiments, the positive pressure gas provided by the air flotation component 5 to one side of the crossbeam 1 causes the air flotation component 5 to move to one side of the crossbeam 1, while the positive pressure gas provided by the air flotation component 5 to the other side of the crossbeam 1 causes the air flotation component 5 to move to the other side of the crossbeam 1. The two movements are in opposite directions, so that the air flotation component 5 is centered relative to the crossbeam 1, thereby reducing or even avoiding friction between the air flotation component 5 and the crossbeam 1.

[0067] In some embodiments, a receiving space is provided on the crossbeam 1 to accommodate the second drive mechanism 6. The second drive mechanism 6 is arranged inside the receiving space of the crossbeam 1 to reduce the overall height of the device in the third direction Z. In some embodiments, the second drive mechanism 6 includes a stator and a mover. The stator of the second drive mechanism 6 is fixed inside the receiving space, and the mover of the second drive mechanism 6 is capable of moving based on its stator. The mover of the second drive mechanism 6 is fixedly connected to the air flotation assembly 5. Exemplarily, the second drive mechanism 6 may also include a linear motor, which will not be described in detail here.

[0068] In some further embodiments, the motion device may also include a second guide mechanism for guiding the movement of the air flotation assembly 5 in the second direction Y. In some embodiments, the second guide mechanism is also arranged inside the receiving space of the crossbeam 1.

[0069] In some embodiments, the air flotation component 5 is flexibly connected to the mover of the second drive mechanism 6. In some embodiments, the second guide mechanism is a rigid guide mechanism (e.g., a mechanical guide rail), and the air flotation component 5 is rigidly connected to the second guide mechanism. In some embodiments, the second guide mechanism includes a second guide rail and a second guide slider that matches the second guide rail.

[0070] In some embodiments, the second guide rail can be arranged on the inner wall of the accommodating space on the crossbeam 1, so that the second guide rail can adjust its levelness in the third direction Z, thereby reducing the flatness requirement of the upper surface of the crossbeam 1. In some embodiments, there can be two second guide rails, which are respectively located on both sides of the second drive mechanism 6.

[0071] In some embodiments, see Figure 7 As shown, the air flotation assembly 5 includes: a top plate 51, two lateral air flotation blocks 52 respectively disposed on both sides of the top plate 51, and one or more bottom air flotation blocks 53 respectively disposed on both sides of the top plate 51. The bottom air flotation blocks 53 can increase the stiffness support in the third direction Z. Since both the lateral air flotation blocks 52 and the bottom air flotation blocks 53 are connected to the top plate 51, they can reduce the height of the air flotation assembly 5 in the third direction Z, thereby reducing the overall height of the device in the third direction Z. In some embodiments, the lateral air flotation blocks 52 can be arranged between the bottom air flotation blocks 53, and the bottom air flotation blocks 53 can be arranged on both sides of the lateral air flotation blocks 52. In some embodiments, the two lateral air flotation blocks 52 each have one or more first lateral positive pressure zones 521 for providing positive pressure gas to the two sides of the crossbeam 1 (e.g., Figure 7 Each lateral air flotation block 52 shown in the figure has three first lateral positive pressure zones 521. In some embodiments, each bottom air flotation block 53 has a first bottom positive pressure zone 531 for providing positive pressure gas to the base 100 of the motion device and / or a first bottom negative pressure zone 532 for providing negative pressure to the base 100 of the motion device. In some embodiments, a plurality of bottom air flotation blocks 53 are provided on each side of the top plate 51, and the number of bottom air flotation blocks 53 on both sides of the top plate 51 is equal.

[0072] In some embodiments, see Figure 8 As shown, a plurality of bottom air-floating blocks 53 are provided on each side of the top plate 51, and the number of bottom air-floating blocks 53 on each side of the top plate 51 is unequal. For example, one side of the top plate 51 has two bottom air-floating blocks 53, and the other side of the top plate 51 has one bottom air-floating block 53. Specifically, two lateral air-floating blocks 52 are provided on each side of the top plate 51, one of which has two bottom air-floating blocks 53, and the other has one bottom air-floating block 53. For example, the three bottom air-floating blocks 53 are arranged in a triangle. For example, the projection of one bottom air-floating block 53 in the first direction X is located between the projections of the other two bottom air-floating blocks 53 in the first direction X.

[0073] In some embodiments, see Figure 9As shown, the air flotation assembly 5 includes: a top plate 51 and two integrated air flotation blocks 54 respectively disposed on both sides of the top plate 51. In some embodiments, the two integrated air flotation blocks 54 each have a second lateral positive pressure region 541 for providing positive pressure gas to the two sides of the crossbeam 1. In some embodiments, each of the two integrated air flotation blocks 54 has a second bottom positive pressure region 542 for providing positive pressure gas to the base 100 of the motion device and / or a second bottom negative pressure region 543 for providing negative pressure to the base 100 of the motion device. In some embodiments, the second bottom positive pressure region 542 and the second bottom negative pressure region 543 are arranged alternately. Figure 9 The illustrated embodiments and Figure 7 The embodiments shown are similar, the main difference being that each air passage is integrated inside the integrated air flotation block 54, rather than being arranged separately in each individual air flotation block.

[0074] In one or more embodiments of this specification, see Figure 1 As shown, the motion device further includes a first grating ruler 71 and a first reading head 72. The first grating ruler 71 extends in the first direction X, and the first reading head 72 is fixed to the crossbeam 1 to provide the position of the crossbeam 1 in the first direction X. In some embodiments, each end of the crossbeam 1 is provided with a set of first grating rulers 71 and first reading heads 72, which are respectively used to provide the position of the two ends of the crossbeam 1 in the first direction X, and control the operation of the two first drive mechanisms 3 based on the position. In some embodiments, the first grating ruler 71 can be arranged on the housing of the stator of the first drive mechanism 3, or it can be arranged on the base 100 of the motion device. In some embodiments, the first reading head 72 can be arranged at the end of the crossbeam 1, for example, between the first flexible member 41 and the second flexible member 42, or for example, between the two first flexible members 41 with a split structure, or for example, below the first flexible member 41 and the second flexible member 42 with an integral structure, or for example, below the two first flexible members 41 with an integral structure.

[0075] In one or more embodiments of this specification, the motion device further includes: a second grating ruler and a second reading head, the second grating ruler extending in the second direction Y, and the second reading head fixed to the air flotation assembly 5 for providing the position of the air flotation assembly 5 in the second direction Y and controlling the operation of the second drive mechanism 6 based on the position. In some embodiments, the second grating ruler may be arranged inside the accommodating space of the crossbeam 1.

[0076] The basic concepts have been described above. It is obvious that the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and corrections may be made to this specification by those skilled in the art. Such modifications, improvements, and corrections are taught in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. A motion device, characterized in that, include: A crossbeam (1) configured to move along a first direction (X), a first guide mechanism (2) guiding the movement of the crossbeam (1) in the first direction (X), and a first drive mechanism (3) driving the crossbeam (1) to move along the first direction (X). The first drive mechanism (3) includes a stator (31) and a mover (32), and the crossbeam (1) is connected to the mover (32) through one or more flexible members (4); The mover (32) is configured to be able to move along the first direction (X) with the crossbeam (1) based on the stator (31), and the mover (32) is able to move relative to the crossbeam (1) along the second direction (Y) and / or rotate about a third direction (Z) during the movement along the first direction (X); wherein the second direction (Y) intersects the first direction (X), and the third direction (Z) is perpendicular to the first direction (X) and the second direction (Y).

2. The motion device according to claim 1, characterized in that, The flexible component (4) includes: a first flexible component (41), which includes: a first moving part fixed end (411) connected to the moving part (32), a first beam fixed end (412) connected to the beam (1), and at least two first flexible hinges (413) connecting the first moving part fixed end (411) and the first beam fixed end (412). Both of the first flexible hinges (413) are configured to be able to rotate about the third direction (Z) relative to the first moving part fixed end (411), to rotate about the third direction (Z) relative to the first beam fixed end (412), and / or to be able to bend about the third direction (Z). The two first flexible hinges (413) have an angle with the second direction (Y); There is an included angle between the two first flexible hinges (413).

3. The motion device according to claim 2, characterized in that, In the initial state, one of the first flexible hinges (413) extends in the first direction (X); A trapezoidal deformation space is formed between the two first flexible hinges (413).

4. The motion device according to claim 2 or 3, characterized in that, The flexible component (4) further includes: a second flexible component (42), which includes: a second mover fixed end (421) connected to the mover (32), a second crossbeam fixed end (422) connected to the crossbeam (1), and at least one second flexible hinge (423) connecting the second mover fixed end (421) and the second crossbeam fixed end (422). The second flexible hinge (423) is configured to be able to rotate about the third direction (Z) relative to the second moving end (421), to rotate about the third direction (Z) relative to the second beam end (422), and / or to be able to bend about the third direction (Z). The second flexible hinge (423) has an angle with the second direction (Y).

5. The motion device according to claim 4, characterized in that, The second flexible hinge (423) has an included angle with both of the first flexible hinges (413).

6. The motion device according to claim 2 or 3, characterized in that, The flexible element (4) includes two first flexible elements (41), which are arranged in a mirror-symmetric manner with respect to the second direction (Y), and the first moving part fixed ends (411) of the two first flexible elements (41) are connected to each other.

7. The motion device according to claim 1, characterized in that, Also includes: An air flotation assembly (5) is mounted on the crossbeam (1) and configured to move along the second direction (Y), and a second drive mechanism (6) drives the air flotation assembly (5) to move along the second direction (Y). The crossbeam (1) has an accommodating space for accommodating the second drive mechanism (6).

8. The motion device according to claim 7, characterized in that, The air flotation assembly (5) includes: a top plate (51), two lateral air flotation blocks (52) respectively disposed on both sides of the top plate (51), and one or more bottom air flotation blocks (53) respectively disposed on both sides of the top plate (51). The two lateral air flotation blocks (52) each have one or more first lateral positive pressure zones (521) for providing positive pressure gas to the two sides of the crossbeam (1); Each of the bottom air flotation blocks (53) has a first bottom positive pressure zone (531) for providing positive pressure gas to the base (100) of the motion device and / or a first bottom negative pressure zone (532) for providing negative pressure to the base (100) of the motion device.

9. The motion device according to claim 8, characterized in that, The top plate (51) has a plurality of bottom air flotation blocks (53) on each side, and the number of bottom air flotation blocks (53) on both sides of the top plate (51) is equal or unequal.

10. The motion device according to claim 7, characterized in that, The air flotation assembly (5) includes: a top plate (51) and two integrated air flotation blocks (54) respectively disposed on both sides of the top plate (51). The two integrated air flotation blocks (54) each have a second lateral positive pressure zone (541) for providing positive pressure gas to the two sides of the crossbeam (1); Both of the integrated air flotation blocks (54) have a second bottom positive pressure zone (542) for providing positive pressure gas to the base (100) of the motion device and / or a second bottom negative pressure zone (543) for providing negative pressure to the base (100) of the motion device.

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