A processing apparatus with metal strips
Patent Information
- Application Number
- CN202522316880.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-31
- Publication Date
- 2026-10-23
- Estimated Expiration
- 2035-10-31
AI Technical Summary
[0008]本实用新型的目的在于,提供一种带金属条的处理设备,解决传统微波隧道炉中存在的加热不均匀性问题、加热能效太低和微波源容易被烧毁的问题
一种现有的微波处理设备通常采用在处理腔内设置二维周期结构,通过在XZ平面上的任意两个互相垂直方式上等周期地排列某一相同形状的周期单元的结构,如凹坑,凹坑通过其自身的四个侧面就可以对微波能量实现全吸收,则对凹坑进行周期排列布局,实现周期性阻挡,使微波不随通道在水平面内传播。
Smart Images

Figure CN224890824U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of uniform and efficient microwave heating or drying, specifically to a processing device with metal strips. Background Technology
[0002] Microwave heating can replace various traditional heating methods. Microwave equipment uses microwave energy to heat various materials, including but not limited to wood, grains, medicinal herbs, seasonings, and dairy products. In the field of microwave chemistry, microwave energy is used to accelerate various chemical reactions. Microwave energy is also used in the production of various new materials such as nanomaterials and synthetic diamonds.
[0003] Microwave processing equipment employs a holistic heating method, replacing traditional electric or gas-fired conductive heating methods. This can increase production speed by several to tens of times, demonstrating promising application prospects. A microwave processing chamber is a production device used to heat or dry materials. A microwave processing chamber generally includes a processing chamber, at least one microwave feed port and a microwave source connected to the feed port, and at least one platform for supporting and moving the object to be heated. Each microwave source inputs microwave energy into the feed port through a microwave feed port.
[0004] Microwave tunnel furnaces utilize a holistic heating method, replacing traditional electric or gas-fired conductive heating, which can increase production speed by several to tens of times, demonstrating promising application prospects. A microwave tunnel furnace generally includes a processing chamber, at least one microwave feed port and a microwave source connected to the feed port, and at least one conveyor belt for carrying and moving the heated material. The conveyor belt passes through the reaction chamber. Each microwave source inputs microwave energy into the feed port through a microwave feed port. Unlike the enclosed processing chamber used in microwave processing boxes, the processing chamber of a tunnel furnace typically has inlet and outlet ports at both ends for convenient loading and unloading of the processed material.
[0005] Despite its inherent advantages, the application of microwave processing equipment is still in its early stages both internationally and domestically. Two key technical problems severely limit the application of microwave energy: uneven heating and mutual interference between microwave sources.
[0006] In traditional microwave tunnel furnaces, the reaction cavity is often rectangular, with dimensions in three directions much larger than the operating wavelength of the microwave source. The length and width of the reaction cavity are large, necessary to increase production capacity. The height of the reaction cavity is also significant, partly for ease of cleaning. Within any cavity like this reaction cavity, electromagnetic waves will resonate in various inherent modes of that cavity, with multiple modes being excited simultaneously. The electric field amplitude is large at some locations and small at others. At a typical microwave energy application frequency of 2450 MHz, the distance between these concentrated electric fields is about half the operating wavelength, approximately 62 mm, leading to non-uniformity of the heated material on the corresponding scale.
[0007] To address the issue of uniformity in microwave heating, international and domestic researchers have made tireless efforts. However, due to the high complexity of the problem, the microwave community still lacks clear theoretical guidance, and three-dimensional electromagnetic simulation is difficult to complete due to the enormous computational demands. Simultaneously, controlling the electric field distribution within the reaction cavity and measuring the internal temperature distribution of the heated object are also challenging. Therefore, researchers worldwide are seeking answers to the problem along a path fraught with uncertainty. By increasing the number of microwave sources to several, dozens, or even hundreds, researchers have employed microwave feed ports of different shapes, arranging the microwave sources on the inner top, bottom, and even left and right sides of the reaction cavity, altering the polarization direction of the electric field at the rectangular waveguide microwave feed port, and using microwave sources of different frequencies, such as those with the widest possible frequency spectrum. They have also attempted to improve heating uniformity by increasing the complexity of the design. This approach lacks theoretical guidance and relies primarily on continuous trial and error. In particular, the key technical problems in large microwave tunnel furnaces, namely the uneven heating and the mutual interference between microwave sources, have led to uneven heating of the equipment, difficulty in matching microwave sources to work, uncontrolled electromagnetic field peak distribution in the processing cavity that burns the conveyor belt and mica sheet, and damage or even burns the microwave source due to reflected energy. These problems have not been well solved. Summary of the Invention
[0008] The purpose of this invention is to provide a processing device with metal strips, which solves the problems of uneven heating, low heating efficiency, and easy burnout of microwave sources in traditional microwave tunnel ovens.
[0009] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A processing apparatus with metal strips, comprising at least one microwave source and a processing chamber having a material to be processed disposed therein; the processing chamber comprises two inner walls: an upper inner wall along the Y direction and a lower inner wall along the -Y direction, and the maximum distance between the upper inner wall and the lower inner wall is less than one wavelength; further comprising at least one microwave feed port located at the upper inner wall or the lower inner wall of the processing chamber, through which microwaves can be transmitted into the processing chamber; when the microwave feed port is in operation, the electric field at its center point is parallel to the X direction or the included angle therebetween is less than 30 degrees; further comprising a Z direction and an X direction, and the X, Y and Z directions form a rectangular coordinate system. Inside the processing chamber, within a range of two wavelengths from the at least one microwave feed port, at least two metal strips are provided, the length direction of the metal strips is along the Z direction and the length thereof is less than the wavelength. The so-called wavelength herein refers to the operating wavelength of the microwave source, which is equal to the speed of light divided by its operating frequency.
[0010] In order to prevent the microwaves from the rectangular microwave feed port from propagating in the direction parallel to the long side of the microwave feed port, the maximum distance between the upper inner wall and the lower inner wall is less than 0.7 times the wavelength. In a preferred design, the maximum distance between the upper inner wall and the lower inner wall is less than 0.5 times the wavelength.
[0011] The cross section of the metal strip may be of any shape, such as rectangle, circle, ellipse, "T" shape, "E" shape and the like. In order to prevent the microwaves from the rectangular microwave feed port from propagating in the direction parallel to the short side of the microwave feed port, in a preferred design, the metal strip is a cuboid, the cross section of which is rectangular, the side length dimension in a certain direction is greater than or equal to the side length in any other direction, and the direction of this long side is parallel to the Z direction, that is, the axial direction of the metal plate is parallel to the long side of the microwave feed port, and the axial direction of the metal strip is perpendicular to the electric field direction of the microwave feed port.
[0012] In a preferred design, the microwave feed port operates in its fundamental mode. For a rectangular waveguide, a single-ridge rectangular waveguide and a double-ridge rectangular waveguide, the electric field direction at the center point thereof is perpendicular to one side of the waveguide.
[0013] The distance between the microwave feed port and any metal strip refers to the length of the projection, in the horizontal plane, of the connecting line between the center point of the microwave feed port and the center point of the metal strip.
[0014] On this basis, any transmission line is arranged on the outer shell of the processing chamber and penetrates through the outer shell of the processing chamber, for the purpose of transmitting microwave energy into the processing chamber through the microwave feed port arranged on the inner wall of the processing chamber. The term "microwave" in the microwave source and the microwave feed port is only used for the convenience of expression, and should be broadly understood as any electromagnetic wave. In the field of energy application, the frequency of the electromagnetic wave is generally in the range of 100 MHz to 300 GHz, and can also be extended to the range of 1 MHz to 1 THz.
[0015] The microwave feed ports can be located on the upper inner wall of the processing cavity, on the lower inner wall of the processing cavity, or partially on both the upper and lower inner walls of the processing cavity. A preferred design is that all microwave feed ports are located on the lower inner wall of the processing cavity.
[0016] Furthermore, in order to further prevent the propagation of microwaves in the processing cavity in the horizontal plane, at least two rows and two columns of metal strips are arranged in the processing cavity within a range of two wavelengths from at least one microwave feed port. Each row has at least two metal strips arranged along the X direction, and the two rows of metal strips are arranged along the Z direction.
[0017] On the upper or lower surface of the processing cavity, as many rows and columns of metal strips as possible should be arranged, such as 5 rows and 5 columns or 9 rows and 9 columns of metal strips. A preferred design is to cover the upper or lower surface of the processing cavity with metal strips as much as possible. These metal strips are arranged in a two-dimensional array: the distance between the center points of adjacent metal strips in each row is equal, and the distance between the center points of adjacent metal strips in each column is also equal.
[0018] Furthermore, in order to further prevent microwaves from propagating horizontally in the processing cavity, adjacent rows of metal strips belonging to the same column can be staggered in the X direction within a range of two wavelengths from at least one microwave feed port in the processing cavity; the staggered distance between adjacent rows of metal strips belonging to the same column is 10% to 50% of the wavelength.
[0019] The upper and lower inner walls of the processing cavity can be surfaces of any shape and are not necessarily flat. Preferably, the upper and lower inner walls of the processing cavity are both part of a plane.
[0020] The microwave feed port can be of any shape. A preferred design is a rectangular shape, which may also have a single or double ridge inside, making the shape of the microwave feed port the same as the cross-sectional shape of the single-ridge rectangular waveguide or the double-ridge rectangular waveguide. Specifically, a rectangular waveguide, a single-ridge rectangular waveguide, or a double-ridge rectangular waveguide is generally used to transmit microwave energy to the processing cavity through the microwave feed port.
[0021] Within the processing cavity, at least two metal strips are connected to the inner wall near at least one microwave feed port, within a distance of two wavelengths from the microwave feed port. In a preferred design, all microwave feed ports are located on one inner wall of the processing cavity, and all metal strips are connected to the other inner wall of the processing cavity.
[0022] For example, all microwave feed ports are located on the lower inner wall of the processing cavity, and all metal strips are connected to the upper inner wall of the processing cavity; or all microwave feed ports are located on the upper inner wall of the processing cavity, and all metal strips are connected to the lower inner wall of the processing cavity.
[0023] At least three metal strips have parallel axes, with the distance between the center points of any adjacent metal strips differing by less than 10%. In a preferred design, all metal strips have parallel axes, with the distance between the center points of any adjacent metal strips being equal along a horizontal direction.
[0024] The upper and lower inner walls are both part of a plane. The metal strips are columnar, with the axes of at least three columnar metal strips parallel to the horizontal plane. The angle between their axes and the electric field direction at the center point of the microwave feed port is 60 to 120 degrees, with 90 degrees being the preferred design. By making the axis of the metal strips perpendicular or as perpendicular as possible to the electric field direction of the rectangular microwave feed port, microwaves from the microwave feed port cannot propagate along the electric field direction of the rectangular microwave feed port.
[0025] The distance between the center points of adjacent metal strips in the same row is less than 0.7 times the wavelength.
[0026] The dimension of the metal strip in the Y direction is 5% to 50% of the wavelength. Sometimes, both the upper and lower inner walls can be inclined, in which case the Y direction forms a certain angle with the vertical direction. A preferred design is that both the upper and lower inner walls are parallel to the horizontal plane.
[0027] Typically, processing equipment with metal strips uses microwaves to process the material. A conveyor belt is also installed within the processing chamber, on which the material to be processed moves. The conveyor belt can move in either the Z-direction or the X-direction.
[0028] The beneficial effects of this utility model are: An existing microwave processing device typically employs a two-dimensional periodic structure within the processing cavity. This structure, such as pits, arranges periodic units of the same shape at equal intervals on any two mutually perpendicular sides of the XZ plane. These pits can absorb microwave energy through their four sides. By periodically arranging these pits, periodic blocking is achieved, preventing microwaves from propagating horizontally along the channel.
[0029] This invention replaces the two-dimensional periodic structure with a two-dimensional metal strip structure. It employs parallel two-dimensional metal strips arranged on the inner wall opposite a rectangular microwave feed port, providing a processing device with metal strips. First, by setting the maximum distance between the upper and lower inner walls to less than 0.7 times the wavelength, microwaves from the rectangular microwave feed port are prevented from propagating in a direction parallel to the long side of the feed port, achieving microwave cutoff, i.e., preventing microwaves from the rectangular microwave feed port from propagating in a direction perpendicular to the electric field of the feed port. Then, by setting the axial direction of the metal strips to be parallel to the long side of the rectangular microwave feed port, and by setting the lateral dimension of the metal strips, the distance between adjacent metal strips, and the distance between the side of the metal strip facing the processing cavity and the microwave feed port, microwaves from the microwave feed port are prevented from propagating in the direction of the short side of the rectangular microwave feed port, i.e., preventing microwaves from the microwave feed port from propagating in the direction of the electric field of the feed port. Ultimately, the purpose of preventing microwaves from the microwave feed port from propagating in all horizontal directions is achieved.
[0030] Furthermore, to further block the propagation of microwaves from the microwave feed port along the electric field direction of the microwave feed port, a two-dimensional array of multiple metal strips is arranged in rows and columns within the processing cavity at a distance of at least two wavelengths from the microwave feed port. The layout of the two-dimensional array can be either neatly arranged or staggered. In a neat arrangement, the distance between the center points of adjacent metal strips in each row is equal, and the center points of adjacent metal strips in each column are aligned in the X-direction. In a staggered arrangement, the metal strips in adjacent rows are staggered along the X-direction, with a staggered distance between adjacent metal strips of 10% to 50% of the wavelength. Both of these layout methods are used to arrange as many rows and columns of metal strips as possible on the upper or lower surface of the processing cavity. A preferred design is that the staggered distance between adjacent metal strips in a row is half the distance between the center points of adjacent metal strips in the same row.
[0031] In summary, this invention not only prevents microwaves from propagating horizontally in all directions from the microwave feed port, but also confines the microwaves from the feed port to its vicinity, making it suitable for heating and treating materials. When multiple microwave feed ports are arranged at a certain distance, they are isolated from each other. The conveyor belt carries the material through different microwave feed ports sequentially, achieving uniform treatment of the material at different locations through a "stitching" effect.
[0032] This invention can be used to construct a microwave tunnel oven or a microwave drying oven, using microwaves to process various materials, including heating, drying, enzyme inactivation, sterilization, deodorization, and ripening of food or medicinal materials. It can also be used in chemical, new material production, ceramic sintering, and microwave powder metallurgy fields. Attached Figure Description
[0033] Figure 1 This is a side view of the processing device in Embodiment 1 of this utility model.
[0034] Figure 2 This is a top view of the processing device in Embodiment 1 of this utility model.
[0035] Figure 3 This is a top view of the processing device in Embodiment 2 of this utility model.
[0036] Figure 4 The energy leakage coefficients (dB) of the four sides of the processing device in Embodiment 2 of this utility model are given.
[0037] Explanation of reference numerals in the attached diagram: 1-processing cavity, 2-microwave source, 3-upper inner wall, 4-lower inner wall, 5-material to be processed, 6-microwave feed port, 7-metal strip, 8-conveyor belt. Detailed Implementation
[0038] Example 1 In Example 1, as Figures 1-2 As shown, a processing device with metal strips is provided. The processing device with metal strips includes a processing cavity 1, at least one microwave source 2, and a material 5 to be processed located in the processing cavity 1. The processing cavity 1 includes two inner walls: an upper inner wall 3 along the Y direction and a lower inner wall 4 along the -Y direction. It also includes at least one microwave feed port 6 located on the upper inner wall 3 or the lower inner wall 4 of the processing cavity 1, through which microwaves are transmitted into the processing cavity 1. It also includes the Z direction, and the XYZ directions form a rectangular coordinate system. The characteristic is that the maximum distance between the upper inner wall 3 and the lower inner wall 4 is less than 0.7 times the wavelength, and at least two metal strips 7 with a length less than the wavelength are provided in the processing cavity 1 within a range of two wavelengths from at least one microwave feed port 6.
[0039] The processing equipment uses microwave to process the material being processed. A conveyor belt 8 is installed inside the processing chamber 1, and the material being processed 5 is located on the conveyor belt 8 and moves with the conveyor belt 8.
[0040] The wavelength refers to the operating wavelength, that is, the wavelength in air corresponding to the center operating frequency of the microwave source 2. The microwave aperture 6 refers to the interface between the transmission line from the microwave source 2 of the heating device to the processing cavity 1 and the inner surface of the processing cavity 1.
[0041] Further explanation based on the above processing equipment: In this invention, the upper inner wall 3 and the lower inner wall 4 of the processing cavity 1 are both part of a plane. First, the maximum distance between the upper inner wall 3 and the lower inner wall 4 is set to be less than 0.7 times the wavelength, and the optimal distance is 0.5 times the wavelength. By limiting the distance between the upper inner wall 3 and the lower inner wall 4, microwaves from the rectangular microwave feed port 6 are prevented from propagating in a direction parallel to the long side of the microwave feed port 6, thus achieving microwave cutoff. In this way, microwaves cannot propagate along the y-axis on the horizontal plane of the processing cavity 1.
[0042] Under this premise, the present invention adopts at least two metal strips 7 with a length less than the wavelength arranged in a direction parallel to the long side of the microwave aperture 6. The axial direction of the metal strips 7 is perpendicular to the electric field direction of the rectangular microwave aperture 6, that is, the axial direction of the metal strips 7 is arranged parallel to the long side of the rectangular microwave aperture 6. By setting the lateral dimension of the metal strips 7, the distance between adjacent metal strips 7 and the distance between the side of the metal strips 7 facing the inside of the processing cavity 1 and the microwave feed port 6, the microwaves from the microwave feed port 6 are prevented from propagating along the short side of the rectangular microwave feed port 6, that is, the microwaves from the microwave feed port 6 are prevented from propagating along the electric field direction of the microwave feed port 6.
[0043] At this point, the layout of the metal strips 7 is designed by arranging multiple metal strips 7 in rows and columns into a two-dimensional array, forming a two-dimensional metal strip structure. The layout of the two-dimensional array can be either neatly arranged or staggered. In a neat arrangement, the distance between the center points of adjacent metal strips 7 in each row is equal, and the distance between the center points of adjacent metal strips 7 in each column is also equal. In a staggered arrangement, the metal strips 7 in adjacent rows are staggered along the X-direction, with a stagger distance of 10% to 50% of the wavelength. Multiple rows and columns of metal strips 7 are arranged on the upper or lower surface of the processing cavity using these two layout methods. This two-dimensional metal strip structure layout prevents microwaves from the microwave feed port 6 from propagating along the electric field direction of the microwave feed port, thus preventing microwaves from propagating along the X-axis on the horizontal plane of the processing cavity 1, achieving microwave blocking. The microwave feed port 6 operates in its fundamental mode. For rectangular waveguides, single-ridge rectangular waveguides, and double-ridge rectangular waveguides, the electric field direction at its center point is perpendicular to one side of the waveguide. At this point, in Figures 1-2 A rectangular waveguide is used in the process.
[0044] The metal strip 7 can be of any shape. Figures 1-2 The metal strip 7 in the figure is a rectangular metal strip 7, and its length direction is the direction with the largest dimension among its three directions.
[0045] The distance between the microwave feed port 6 and any metal strip 7 refers to the length of the projection of the line connecting the center point of the microwave feed port 6 and the center point of the metal strip 7 onto the horizontal plane.
[0046] Specifically, any transmission line is installed on and passes through the outer shell of the processing cavity 1 so that microwave energy can be transmitted into the processing cavity 1 through the microwave feed port 6 located on the inner wall of the processing cavity 1. Therefore, the term "microwave" in the microwave source 2 and microwave feed port 6 mentioned in this invention is used for convenience only and should be broadly interpreted as any electromagnetic wave. In the field of energy applications, electromagnetic wave frequencies are generally in the range of 100MHz to 300GHz, but can also be extended to the range of 1MHz to 1THz.
[0047] Within the processing cavity 1, at least two rows of metal strips 7 are arranged within a distance of two wavelengths from at least one microwave feed port 6, with at least two metal strips 7 in each row. The multiple rows of metal strips 7 are arranged along the Z direction.
[0048] Specifically, such as Figure 2 As shown, four rows and six columns of metal strips 7 are arranged on the upper surface of the processing cavity 1. The upper surface of the processing cavity 1 is covered with metal strips 7. These metal strips 7 are arranged in a two-dimensional array: the distance between the center points of adjacent metal strips 7 in each row is equal, and the distance between the center points of adjacent metal strips 7 in each column is also equal.
[0049] The upper inner wall 3 and lower inner wall 4 of the processing cavity 1 are both part of a plane.
[0050] The metal strips 7 are all rectangular in shape.
[0051] The microwave feed port 6 is rectangular in shape and uses a rectangular waveguide to transmit microwave energy to the processing cavity 1.
[0052] The metal strips 7 are all connected to the upper inner wall 3 of the processing cavity 1.
[0053] The axes of the metal strips 7 are parallel to each other, and the distance between the center points of any adjacent metal strips 7 along a certain horizontal direction is equal.
[0054] The axis of the columnar metal strip 7 is parallel to the horizontal plane, and the angle between its axis and the electric field direction of the center point of the microwave feed port 6 is 90 degrees.
[0055] The electric field directions of all microwave feed ports 6 are parallel to each other.
[0056] The distance between the center points of adjacent metal strips 7 in the same row is less than 0.7 times the wavelength.
[0057] The maximum distance between the upper inner wall 3 and the lower inner wall 4 is less than 0.5 times the wavelength. The dimension of the metal strip 7 in the Y direction is 5% to 50% of the wavelength.
[0058] Example 2 Based on the above embodiment 1, as follows Figure 3 and Figure 4 As shown, in Embodiment 2, the metal strips 7 in adjacent rows are staggered along the X direction; the distance between the staggered metal strips 7 in adjacent rows is half the distance between the center points of adjacent metal strips 7 in the same row. A total of 5 rows of metal strips 7 are set. The second and fourth rows of metal strips 7 each have only 5 metal strips 7.
[0059] The specific parameters are as follows: the length of metal strip 7 along the Z direction is 56.45 mm, the thickness along the X direction is 18.91 mm, the height along the Y direction is 13.88 mm, the distance between the center points of adjacent metal strips 7 along the X direction is 64.33 mm, the length of the projection of the line connecting any two center points of adjacent rows of metal strips 7 in the Z direction is 20.54 mm, and the channel height between the lower inner wall 4 and the lower edge of the metal plate is 20 mm. The dielectric constant of the material 5 being processed is 9, the thickness is 5 mm, and its lower surface is 45 mm from the lower inner wall.
[0060] Figure 4 This is a curve showing the energy leakage coefficient (dB) versus frequency for the four sides of Example 2, obtained from a three-dimensional simulation. In the simulation, microwave energy is fed from the rectangular waveguide into the processing cavity 1 from bottom to top through the microwave feed port 6. The sides of the processing cavity 1 along the X, -X, Z, and -Z directions are all configured with matched boundary conditions. Any microwave entering the processing cavity 1 from the microwave feed port 6 and reaching any side in the horizontal direction will be completely absorbed. Figure 4 It can be seen that at many frequency points outside the 2.1GHz~2.85GHz bandwidth, a significant amount of microwave energy can reach the sides. However, within the 2.1GHz~2.85GHz band, only about two ten-thousandths of the microwaves entering processing cavity 1 can propagate horizontally within processing cavity 1 and reach the sides. The vast majority of the microwave energy will concentrate near the microwave feed port 6 and heat the processed material 5, or be reflected along the feed transmission line. The absorption effect of the processed material 5 was not considered in the calculation. After considering this absorption effect, the energy leakage coefficient of the four sides will be further reduced due to the absorption of microwave energy.
[0061] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Based on the technical essence of the present utility model, any simple modifications, equivalent substitutions, and improvements made to the above embodiments within the spirit and principles of the present utility model shall still be within the protection scope of the present utility model's technical solution.
Claims
1. A processing device with a metal strip, comprising at least one microwave source (2) and a processing cavity (1) containing a material to be processed (5), the processing cavity (1) comprising an upper inner wall (3) along the Y direction and a lower inner wall (4) along the -Y direction; further comprising at least one microwave feed port (6) located on the upper inner wall (3) or the lower inner wall (4) of the processing cavity (1), through which microwaves are transmitted into the processing cavity (1); further comprising a Z direction and an X direction, the XYZ directions forming a rectangular coordinate system, characterized in that, The maximum distance between the upper inner wall (3) and the lower inner wall (4) is less than the wavelength. Within the processing cavity (1), at least two metal strips (7) with a length direction along the Z direction and a length less than the wavelength are provided within a range of two wavelengths from at least one microwave feed port (6).
2. The processing device with metal strips according to claim 1, characterized in that, Within the processing cavity (1), at least four metal strips (7) with a length direction along the Z direction and a length less than the wavelength are provided within a distance of two wavelengths from at least one microwave feed port (6).
3. The processing device with metal strips according to claim 1, characterized in that, The maximum distance between the upper inner wall (3) and the lower inner wall (4) is less than 0.7 times the wavelength.
4. The processing device with metal strips according to claim 1, characterized in that, Within the processing cavity (1), at least two rows and two columns of metal strips (7) are arranged within a distance of at least two wavelengths from a microwave feed port (6). At least two metal strips (7) in each row are arranged along the X direction, and at least two metal strips (7) in each column are arranged along the Z direction. The length of the projection of the line connecting the center points of adjacent metal strips (7) in the same column along the Z direction is 20% to 80% of the wavelength. The distance between the center points of adjacent metal strips (7) in the same row is less than 0.7 times the wavelength.
5. The processing device with a metal strip according to claim 4, characterized in that, The metal strips (7) in adjacent rows of the same column are staggered along the X direction, and the staggered distance is 8% to 40% of the wavelength.
6. The processing device with metal strips according to claim 1, characterized in that, Within the processing cavity (1), at least two metal strips (7) are connected to the same inner wall of the processing cavity (1) within a distance of two wavelengths from at least one microwave feed port (6).
7. The processing device with metal strips according to claim 1, characterized in that, The axes of at least three adjacent metal strips (7) are parallel to each other, wherein the distance between the center points of any adjacent metal strips (7) differs by less than 10%.
8. The processing device with metal strips according to claim 1, characterized in that, The upper inner wall (3) and the lower inner wall (4) are both part of a plane. The metal strip (7) is a columnar body. The axial direction of at least three metal strips (7) is parallel to the horizontal plane, and the length direction of the metal strips (7) is at an angle of 60 degrees to 120 degrees with the electric field direction of the center point of at least one microwave feed port (6).
9. The processing device with metal strips according to claim 1, characterized in that, Within the processing cavity (1) at a distance of two wavelengths from at least one microwave feed port (6), at least two metal strips (7) with a length direction along the Z direction and a length less than the wavelength are provided on the inner wall of the processing cavity (1) opposite to the microwave feed port (6).
10. A processing device with a metal strip according to any one of claims 1 to 9, characterized in that, The metal strip (7) has a dimension of 5% to 50% of the wavelength in the Y direction.