Bit capacitors, superconducting quantum bits, quantum chips, and quantum computers

Abstract

The application discloses a bit capacitor, a superconducting quantum bit, a quantum chip and a quantum computer, and belongs to the field of superconducting quantum chip manufacturing. The bit capacitor comprises a first conductor film and a second conductor film. The first conductor film has a body and a protruding part; the second conductor film has an adjacent part and a remote part which are away from each other; and the adjacent part is adjacent to the body but not in contact with the body. The bit capacitor with the above structure allows the chip layout to be designed in a more flexible manner and additionally increases the operation difficulty in the manufacturing process.

Description

Technical Field

[0001] This application belongs to the field of quantum information, especially the field of superconducting quantum chip manufacturing. In particular, this application relates to a bit capacitor, a superconducting quantum bit, a quantum chip, and a quantum computer. Background Technology

[0002] Superconducting quantum chips are one of the core components of superconducting quantum computers; they carry the key functions for realizing quantum information processing and computation.

[0003] Typically, superconducting quantum chips include superconducting qubits and related superconducting quantum components, as well as various circuits; these structures are integrated on a substrate in a variety of ways.

[0004] Superconducting quantum chips contain multiple superconducting qubits, and currently typical superconducting qubits mainly include devices such as bit capacitors and Josephson junctions.

[0005] In this context, bit capacitors are typically implemented as spaced-apart metal films that are coplanar with the ground plane. Currently, cross-shaped or star-shaped metal films are commonly used for front bit capacitors.

[0006] As the number of qubits in superconducting quantum chips continues to increase, while the chip size is not expected to increase without limitation, and the physical requirements of inter-qubit coupling and qubit control and readout operations place higher demands on the structural design of various components in the chip. Utility Model Content

[0007] Examples of this application provide a bit capacitor, a superconducting quantum bit, a quantum chip, and a quantum computer to provide greater flexibility for current chip layout design, thereby reducing layout design and optimizing subsequent manufacturing processes.

[0008] The solution presented in this application is implemented through the following steps.

[0009] In a first aspect, the bit capacitors disclosed in the examples of this application include: A first conductor film has a body and a protrusion. The body has a first edge and a second edge. The first edge has a first arc-shaped edge. The protrusion is provided protruding from the second edge. The second conductor film has a neighboring portion and a distant portion that are far apart from each other, and the neighboring portion is integrally connected to the distant portion through a neck; The adjacent portion has a second arc-shaped edge, which is adjacent to but does not contact the first arc-shaped edge, while the distant portion is far from the body.

[0010] Based on some examples in this application, the body is an arc-shaped structure; And / or, the protrusion is a strip-shaped structure.

[0011] According to some examples of this application, the adjacent portion is a fan-ring structure; And / or, the part away from the center is a rectangular structure.

[0012] According to some examples in this application, the neck is a long, narrow, band-like structure; And / or, the protrusion is a strip-shaped structure.

[0013] According to some examples of this application, the first arcuate edge and the second arcuate edge are concentric.

[0014] According to some examples of this application, in a bit capacitor, the number of second conductor films is at least two.

[0015] In a second aspect, an example of this application discloses a superconducting quantum bit constructed based on the aforementioned bit capacitance.

[0016] In a third aspect, the superconducting qubit disclosed in the example of this application includes: a superconducting quantum interference device having two Josephson junctions connected in parallel in a conductive loop; and two bit capacitors as described above; wherein one end of the superconducting quantum interference device is electrically connected to a protrusion of one of the bit capacitors, and the other end of the superconducting quantum interference device is electrically connected to a protrusion of the other bit capacitor.

[0017] In a fourth aspect, the superconducting quantum chip disclosed in the examples of this application includes any of the bit capacitors described above.

[0018] In a fifth aspect, the quantum computer disclosed in the examples of this application includes the superconducting quantum chip described above.

[0019] Beneficial effects: The above example is applied to the bit capacitor structure constituting a superconducting quantum bit, by configuring a first conductive film and a second conductive film. The first conductive film has a body and a protrusion; the body has a first edge and a second edge; the first edge has a first arcuate edge; and the protrusion extends from the second edge. The second conductive film has a neighboring portion and a distant portion that are far apart from each other; the neighboring portion is integrally connected to the distant portion via a neck. Further, the neighboring portion has a second arcuate edge, which is adjacent to but does not contact the first arcuate edge; the distant portion is far from the body.

[0020] The bit capacitor designed above can flexibly adjust its structural parameters according to the performance and functional parameters of the superconducting quantum bit—such as the protrusion length of the protrusion in the first conductor film, adjusting the distance between the adjacent and distant parts in the second conductor film, and the distance between the adjacent part and the second arc-shaped edge part, thereby reducing the difficulty of superconducting quantum bit layout structure design and manufacturing process. Attached Figure Description

[0021] To illustrate this more clearly, the accompanying drawings used in the description will be briefly introduced below.

[0022] Figure 1 A schematic diagram of a superconducting quantum bit with a cross-shaped bit capacitor is shown. Figure 2 A schematic diagram of the bit capacitor structure in the example of this application is disclosed; Figure 3 A schematic diagram of the structure of the first conductor film in the bit capacitor of the present application is disclosed; Figure 4 A schematic diagram of the structure of the second conductor film in the bit capacitor of the present application is disclosed; Figure 5 A schematic diagram of a structure with two second conductor films in an example of this application is disclosed; Figure 6 A schematic diagram of the structure of a superconducting quantum bit is disclosed in this application example; Figure 7 A schematic diagram of a dual-island bit structure with two bit capacitors is disclosed. Detailed Implementation

[0023] Superconducting quantum chips are one of the core components of superconducting quantum computers. Typically, a superconducting quantum chip includes superconducting quantum bits, control devices, and readout devices. The superconducting quantum bits are mainly composed of Josephson junctions and bit capacitors. In practice, the bit capacitors are generally formed from a thin metal superconducting film independent of the chip's ground plane. Currently, the metal superconducting film for bit capacitors typically uses cross-shaped or star-shaped metal sheets to increase the facing area of ​​the bit capacitors, thereby increasing the capacitance value.

[0024] Figure 1 A schematic diagram of a superconducting quantum bit with a cross-shaped bit capacitor is shown.

[0025] See Figure 1 As shown, a superconducting quantum bit consists of a cross-shaped capacitor and a superconducting quantum interference device (squid) connected to the end of one branch of the capacitor.

[0026] Among them, the superconducting quantum interference device (squid) includes one or more Josephson junctions; a Josephson junction is a device that includes two electrodes and a thin insulating barrier layer separating the two electrodes.

[0027] The cross-shaped capacitor plate Cq (i.e., bit capacitor) is surrounded by the ground plane (GND), and there is a gap (usually an air gap, for insulation) between the cross-shaped capacitor plate Cq and the ground plane (GND).

[0028] In the aforementioned quantum bit system, there are various circuit structures with different functions around the quantum bits, such as readout resonant cavities and couplers for inter-quantum bit coupling connections.

[0029] The circuit structure may also include a drive control signal line (XY-Control Line, also known as xy control line, pulse modulation signal line, or transition control line) for performing XY rotation operations on the qubit. By applying a driving voltage signal in the circuit, the qubit can be excited to transition; it is associated with the qubit through capacitive coupling.

[0030] The circuit structure can also include a circuit structure for Z-rotation operations on the qubits, which can be accomplished by a control signal line near the superconducting quantum interference device (squid); this is called the flux control line (Z-Control Line, also known as the z-control line, frequency control line, or frequency control line). As mentioned above, the flux control line is arranged near the superconducting quantum interference device (squid), and its excitation current is inductively coupled to the superconducting quantum interference device (squid) through a magnetic field.

[0031] It should be noted that both flux control signal lines and drive control circuits can be used to control qubits, but their control methods and purposes are different.

[0032] The drive control signal line applies pulses to the quantum bit in the form of an electric field, causing energy level transitions in the quantum bit. The signal transmitted through the flux control signal line generates a magnetic field, which is applied to the squid region of the superconducting quantum interference device (SQI). Simultaneously, the magnetic flux passing through the squid region causes a change in the squid's critical current. This change in critical current leads to a change in the frequency of the tunable quantum bit; that is, the frequency of the quantum bit can be controlled by the signal transmitted through the flux control signal line.

[0033] In multi-qubit superconducting quantum bit chips, the rational design of the qubit capacitor has become a challenge and a key area requiring attention. Because changes in the capacitance value of a qubit capacitor typically mean changes in its size and shape, the superconducting quantum chip needs to be redesigned, thus increasing its design cost.

[0034] In practice, when constructing superconducting qubits, a key issue is how to design the size of the qubits to meet the desired capacitance value, so as to satisfy the required bit frequency and anharmonicity.

[0035] As a typical engineering approach, the approximate geometric dimensions and shape can be given based on historical experience. Then, the capacitance value can be obtained through electromagnetic simulation. The process of continuously optimizing the geometric dimensions and obtaining the capacitance value through electromagnetic simulation can be repeated to gradually approach the required capacitance value.

[0036] In view of this, in this application, the applicant proposes a method that differs from... Figure 1 The new bit capacitor structure shown is a cross-shaped structure.

[0037] In the example, this new bit capacitor is composed of two parts. In contrast, in... Figure 1 The cross capacitor in the middle is composed of a part.

[0038] As mentioned above, the bit capacitor in this application mainly consists of two parts. One part can be connected to a superconducting quantum interference device, and the other part can cooperate with the first part to adjust the parameters of the bit—which can be achieved by changing the capacitance value of the bit capacitor.

[0039] Specifically, in the example, Figure 2 A schematic diagram of the bit capacitor in the example of this application is disclosed. Figure 3 A schematic diagram of the structure of the first conductor film in the bit capacitor of the present application is disclosed. Figure 4 A schematic diagram of the structure of the second conductor film in the bit capacitor of the present application is disclosed.

[0040] Please see Figure 2 As shown, the bit capacitor 100 includes a first conductive thin film 101 and a second conductive thin film 102. The first conductive thin film 101 and the second conductive thin film 102 are constructed independently so that they can be more conveniently implemented through the bit capacitor when it is necessary to adjust the superconducting qubit.

[0041] The first conductor film 101 has a body 1011 and a protrusion 1012.

[0042] The body 1011 has a first edge 301 and a second edge 303. The first edge 301 has a first arcuate edge 302, and the protrusion 1012 is provided protruding from the second edge 303.

[0043] The second conductor film 102 has a neighboring portion 202 and a distant portion 201 that are far apart from each other. The neighboring portion 202 is integrally connected to the distant portion 201 through a neck 203. The neighboring portion and the distant portion are separated by the neck; they are located at both ends of the neck and are distinguished and named according to their distance from the body 1011.

[0044] Specifically, the adjacent portion 202 has a second arcuate edge 2021, and in the bit capacitor 100, the second arcuate edge 2021 is adjacent to but does not contact the first arcuate edge 302. The first and second arcuate edges can be designed as arcs, and furthermore, they can be concentric.

[0045] Furthermore, the distanced portions 201 in the first and second conductor films are also far from the body 1011, so that there is no electrical contact between them. In the above structure of the bit capacitor 100, the protrusions 1012 of the first conductor film 101 can be connected to a superconducting quantum interference device when constructing superconducting qubits. The second conductor film 102 is arranged in a direction away from the protrusions 1012 of the first conductor film 101, and is distributed in a roughly linear manner starting from the first arc-shaped edge 302 in the order of adjacent portion 202, neck 203, and distanced portion 201.

[0046] In different examples, the various parts of the bit capacitor can be selected according to actual needs.

[0047] For example, in some examples, the body in the first conductor film 101 can be configured as an arc-shaped structure, that is, from the perspective of the outline shape of the orthographic projection pattern of the first conductor film perpendicular to the surface direction when the first conductor film is manufactured on a substrate / wafer surface, the outline has straight edges and arc edges (which may be rounded edges). The arc edges can be used to provide the aforementioned first arc edge 302.

[0048] In addition, the shape of the aforementioned outline of the body in the first conductive film 101 can also be approximately rectangular, and locally constructed with curved or rounded edges. Alternatively, the body in the first conductive film 101 can also have other shapes, limited to the fact that the body in the first conductive film as a whole consists of two parts. For example, the shape of the body can be a structure of a circle cut by any chord.

[0049] Furthermore, the body and the protrusion have a significant dimensional difference. This is because the protrusion mates with the Josephson knot, and the Josephson knot is relatively small. For example, in... Figure 1 The cross-shaped capacitor shown is also significantly larger than the Josephson junction. The protrusion has an elongated shape; typically, the protrusion can be a rectangular strip; or, in other words, the protrusion is a strip-shaped structure.

[0050] The above describes the structure of the first conductive thin film; the second conductive thin film will be described subsequently. Similar to the first conductive thin film, the second conductive thin film also mainly consists of two parts, which are interconnected by a limited connection. Specifically, in this example, the two main parts of the second conductive thin film are the adjacent part and the distant part, and the neck connects them. By adjusting the neck, the distance between the adjacent and distant parts can be adjusted, thereby adjusting the capacitance value of the bit capacitor, and consequently, the performance parameters of the superconducting qubit constructed based on it.

[0051] The adjacent portion in the second conductor film can be designed as a fan ring structure, and thus the second arcuate edge 2021 is provided by the adjacent portion and by the inner arc edge of the fan ring, which can be understood as being used for bonding with the neck.

[0052] Alternatively, the adjacent portion can be designed with a shape similar to the body portion in the first conductor film. The distant portion in the second conductor film can also be designed in various ways. For example, it can be circular or rectangular—and may be further chamfered. As a structure connecting the distant and adjacent portions, the neck can be an elongated strip structure. That is, the neck primarily serves to electrically connect the distant and adjacent portions, thereby giving them the same potential.

[0053] Therefore, the neck can be designed to be smaller in size, i.e., it does not occupy a larger area compared to the distal and adjacent portions. Thus, when both the distal portion and the neck are rectangular structures, the width of the neck can be smaller than the width of the distal portion, and the length of the neck can be greater than the length of the distal portion.

[0054] In such Figure 2 , Figure 3 and Figure 4 In the structure shown, there is one second conductor film in the bit capacitor, but in other examples, the number of second conductor films in the bit capacitor may be at least two.

[0055] As an example, Figure 5 A schematic diagram of a structure with two second conductor films, as shown in the example of this application, is disclosed. Figure 5 As shown, the bit capacitor 100a has two second conductor films 102.

[0056] And in Figure 5 In this configuration, the adjacent portions of the two second conductor films are concentrically fitted with rounded edge profiles and do not contact each other. Specifically, they are distributed at approximately a 30-degree angle in space. Alternatively, in other examples, the number of second conductor films in the bit capacitor may be greater, and the distribution of each second conductor film may be equally spaced (with equal central angles).

[0057] It is understandable that when a bit capacitor has more second conductor films, the structure of the adjacent portions of the second conductor films can be adjusted in order to cooperate with the body of the first conductor film. For example, when the adjacent portion is arc-shaped, its arc length can be shortened.

[0058] Furthermore, when the remote portions may interfere with each other, the length of the neck can be increased, or the width of the remote portion can be reduced (taking a rectangular remote portion as an example), or both can be combined to modify the second conductor film so that the remote portions of different second conductor films form sufficient space between each other.

[0059] Based on the bit capacitor described above, a superconducting quantum bit can be constructed by combining it with a Josephson junction. Accordingly, in the example of this application, a superconducting quantum bit constructed based on the bit capacitor described above is disclosed.

[0060] It is known that the circuit configuration of a superconducting quantum bit consists of a capacitor and a nonlinear inductor (represented by a Josephson junction).

[0061] Therefore, in some examples, the superconducting qubit of this application may include the bit capacitor described above and a superconducting circuit with a Josephson junction. One end of the superconducting circuit is connected to the bit capacitor, and the other end is electrically connected to the ground plane. The superconducting circuit with a Josephson junction can also be represented as a single-junction superconducting quantum interference device (SQUID), more specifically, a radio-frequency superconducting quantum interference device (RF SQUID); structurally, the RF SQUID is formed by embedding a Josephson junction into a superconducting loop.

[0062] Figure 6 A schematic diagram of a superconducting quantum bit structure, as illustrated in this application, is disclosed. For example, as described above, based on... Figure 1 As the superconducting qubits shown claim, Figure 6 The superconducting quantum bit 400 shown in this application example mainly includes the aforementioned bit capacitor 100 and a superconducting quantum interference device (SQU) 500. One end of the SQU circuit 500 can be electrically connected to the protrusion in the bit capacitor, and the other end of the SQU is electrically connected to the ground plane. Figure 1 The superconducting quantum interference device in the model has two Josephson junctions, hence it is also called a double-junction superconducting quantum interference device; more specifically, it is a direct current superconducting quantum interference device (dc SQUID). Structurally, the dc SQUID is formed by embedding two Josephson junctions in parallel into a superconducting loop.

[0063] like Figure 6The superconducting qubit shown can be described as a single-island qubit based on the capacitor plates (such as the first conductor film) connected to the DC superconducting quantum interference device.

[0064] In other examples, a two-bit capacitor structure can also be configured in a superconducting quantum bit, thus forming a dual-island qubit. In such a dual-island qubit, one end of the DC superconducting quantum interference device (CQI) is connected to the capacitor plate (such as the first conductive film) of one of the bit capacitors, and the other end of the CQI is connected to the capacitor plate of the other bit capacitor.

[0065] like Figure 7 As shown, Figure 7 A schematic diagram of a dual-island bit 400a with two bit capacitors is disclosed. The dual-conductor bit 400a includes a bit capacitor 100a with two second conductor films and a bit capacitor 100 with one second conductor film. Figure 7 The superconducting quantum interference device (SQI) is configured between the protrusions of the first conductor film of the two bit capacitors. Figure 7 (in the junction region), due to the relative size of the Josephson junction and the bit capacitor, in Figure 7 The illustration of the superconducting quantum interference device is omitted.

[0066] Therefore, some examples of superconducting qubits in this application include: a superconducting quantum interference device having two Josephson junctions connected in parallel in a conductive loop, and Figure 2 and Figure 5 The diagram shows two bit capacitors; one end of the superconducting quantum interference device (SQI) is electrically connected to a protrusion of one of the bit capacitors, and the other end of the SQI is electrically connected to a protrusion of the other bit capacitor.

[0067] In other examples, the number of second conductor films set in each bit capacitor of a dual-island bit can be determined according to needs (e.g., bit parameters, space occupation, layout requirements), and is not fixed. Figure 7 The examples in the text are limited.

[0068] In short, for superconducting qubits formed based on bit capacitance, the form of the bit capacitance... Figure 1 The bits in this application can be described as island bits, while in this application... Figure 7 The bit shown can be described as a double-island bit. The difference between single-island and double-island bits can be distinguished based on the configuration of the bit capacitance in the superbit. Figure 1 The cross-shaped capacitor in the application is part of the whole, while this application Figure 7 The bit capacitor in the middle has two parts.

[0069] Building upon the above, this application also discloses a (superconducting) quantum chip including the bit capacitor shown above. Furthermore, in addition to the bit capacitor, this quantum chip may also include a Josephson junction device for constructing superconducting qubits, or further include a bit control device for operating the bits, a bit readout device for reading the bit state, etc.

[0070] Furthermore, given that a quantum chip can be configured with numerous qubits, and that qubits can have cooperative relationships such as coupling, a coupler can also be configured in the quantum chip to couple adjacent qubits. This coupler can be manufactured according to the configuration of the qubit (composed of bit capacitors and Josephson junction devices); therefore, such a coupler can also be called a coupled bit. The coupling between the coupled bit and two adjacent bits can be achieved by the capacitive portion of the coupled bit cooperating with the bit capacitors of the two adjacent bits.

[0071] Based on the superconducting quantum chip described above, a quantum computer is also disclosed in this example. The quantum computer includes the superconducting quantum chip, and may further include a cooling system to maintain the quantum device in a superconducting state, such as a dilution refrigerator, a signal source device for generating and controlling the superconducting qubits, and a classical computer for manipulating the signal source device and interpreting the read signals to execute quantum programs.

[0072] To facilitate the implementation of the technology of this application by relevant practitioners in the field, the example also briefly describes the bit capacitors mentioned above.

[0073] The substrate is pretreated to provide a defect-free, clean, and flat surface. A superconducting metal film is then deposited onto this surface. Photoresist is then spin-coated onto the surface of the superconducting metal film, followed by exposure and development to achieve patterning. Etching is then performed to form the bit capacitors of the desired structure.

[0074] In the process of achieving the above, depending on the material to be deposited, deposition processes such as chemical vapor deposition, physical vapor deposition (e.g., evaporation or sputtering), epitaxial technology, and other deposition processes can be used.

[0075] For example, deposition processes include, but are not limited to, ion beam assisted deposition (IBAD), vacuum evaporation, molecular beam epitaxy (MBE), pulsed laser deposition (PLD), chemical vapor deposition (CVD), sol-gel deposition, and magnetron sputtering.

[0076] Furthermore, during the fabrication process of the conductive lines described in the embodiments of this application, it may be necessary to remove one or more materials from the deposited thin film. Depending on the material to be removed, the removal process may include, but is not limited to, wet etching techniques, dry etching techniques, etc. During this process, known exposure techniques (lithographic, e.g., ultraviolet light exposure or electron beam exposure) or lift-off processes can be used to pattern the material thin film used to form the circuit elements herein.

[0077] For the sake of brevity, this article may or may not describe in detail the conventional techniques associated with the manufacture of semiconductors and / or superconducting devices and integrated circuits (ICs).

[0078] Furthermore, the various tasks and process steps described herein may be incorporated into more comprehensive procedures or processes with additional steps or functionalities not described in detail herein. In particular, the various steps in the fabrication of semiconductor and / or superconducting devices and semiconductor / superconductor-based ICs are well-known, and therefore, for the sake of brevity, many routine steps will be mentioned only briefly or will be omitted entirely without providing well-known process details.

[0079] The embodiments described above with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0080] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, one or more embodiments have been described above with reference to the accompanying drawings. Throughout the description, similar reference numerals are used to denote similar components. In the foregoing description, numerous specific details have been set forth for illustrative purposes in order to provide a more thorough understanding of one or more embodiments. However, it will be apparent that one or more embodiments may be practiced in various circumstances without these specific details, and the embodiments may be combined with and referenced to each other without contradiction.

[0081] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0082] The above description of the structure, features and effects of this application is based on the embodiments shown in the drawings. The above are only preferred embodiments of this application. However, this application does not limit the scope of implementation to what is shown in the drawings. Any changes made in accordance with the concept of this application, or modifications to equivalent embodiments, that do not exceed the spirit covered by the specification and drawings, should be within the protection scope of this application.

Claims

1. A bit capacitor, characterized in that, include: A first conductive film has a body and a protrusion. The body has a first edge and a second edge. The first edge has a first arcuate edge. The protrusion is provided protruding from the second edge. The second conductor film has a neighboring portion and a distant portion that are far apart from each other, the neighboring portion being integrally connected to the distant portion via a neck; The adjacent portion has a second arc-shaped edge, which is adjacent to but does not contact the first arc-shaped edge, and the distant portion is away from the body.

2. The bit capacitor according to claim 1, characterized in that, The main body has an arc-shaped structure; And / or, the protrusion is a strip-shaped structure.

3. The bit capacitor according to claim 1, characterized in that, The adjacent portion has a fan-ring structure; And / or, the distanced portion is a rectangular structure.

4. The bit capacitor according to claim 1, characterized in that, The neck is a long, thin, band-like structure; And / or, the protrusion is a strip-shaped structure.

5. The bit capacitor according to claim 1, characterized in that, The first arc-shaped edge and the second arc-shaped edge are concentric.

6. The bit capacitor according to claim 1, characterized in that, In a bit capacitor, the number of the second conductor film is at least two.

7. A superconducting quantum bit constructed based on the bit capacitor according to any one of claims 1 to 6.

8. A superconducting quantum bit, characterized in that, include: A superconducting quantum interference device with two Josephson junctions connected in parallel in a conductive loop; Two bit capacitors as described in any one of claims 1 to 6; One end of the superconducting quantum interference device is electrically connected to the protrusion of one of the bit capacitors, and the other end of the superconducting quantum interference device is electrically connected to the protrusion of another bit capacitor.

9. A superconducting quantum chip, characterized in that, Includes the bit capacitor as described in any one of claims 1 to 6, or the superconducting quantum bit as described in claim 7, or the superconducting quantum bit as described in claim 8.

10. A quantum computer, characterized in that, Including the superconducting quantum chip as described in claim 9.

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