A flat sheet cleaning device

Abstract

The utility model discloses a kind of flat piece cleaning devices, comprising: operation platform, the top of the operation platform is provided with adsorption structure, the top of the adsorption structure is provided with cleaning structure, and the cleaning structure includes brush head, one end of the brush head is rotatably connected with driving element, the driving element is used to drive the rotation of the brush head, the end of the driving element away from the brush head is provided with support arm, the end of the support arm away from the driving element is arranged on the operation platform, and the brush head includes rotating head, brush plate, one side of the rotating head is provided with first bolt hole, the first bolt hole is screwed with first screw rod, the end of the first screw rod away from the rotating head is connected with brush plate, one side of the rotating head is provided with locking assembly, and the locking assembly is used to fix the brush plate. The utility model can solve the problem that driving element cannot realize fine adjustment of brush head height in prior art.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, and specifically relates to a flat wafer cleaning device. Background Technology

[0002] Existing wafers, such as sapphire wafers, typically require processing steps during manufacturing, including cleaning and mounting. The initial cleaning process is crucial; if the wafer surface contains particles or impurities, it will affect subsequent processes and significantly impact the quality of the final product.

[0003] Existing cleaning devices use a drive unit to raise and lower the support arm so that the brush head reaches a preset position and height. However, the friction generated between the brush head and the flat plate during cleaning causes wear on the brush head, resulting in gaps between the brush head and the flat plate. The drive unit cannot achieve precise height adjustment of the brush head and cannot ensure that the brush head is always in contact with the flat plate. When the brush head fails to clean the flat plate, it needs to be replaced, which increases production costs. Utility Model Content

[0004] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a flat plate cleaning device, which aims to solve the problem that the driving component in the prior art cannot achieve precise adjustment of the brush head height.

[0005] To achieve the above objectives, the embodiments of this utility model are implemented through the following technical solution: a flat plate cleaning device, comprising: an operating platform, an adsorption structure disposed on the top of the operating platform, a cleaning structure disposed on the top of the adsorption structure, the cleaning structure comprising a brush head, the brush head comprising a rotating head and a brush plate, one end of the rotating head being connected to a first driving member, the first driving member being used to drive the rotating head to rotate, a support arm disposed on the end of the first driving member facing away from the brush head, a second driving member disposed on the end of the support arm facing away from the first driving member, the end of the second driving member facing away from the support arm being disposed on the operating platform, the second driving member being used to control the lifting and lowering of the support arm, a first bolt hole being opened on the side of the rotating head facing away from the first driving member, a first screw being screwed into the first bolt hole, the end of the first screw facing away from the rotating head being connected to the brush plate, a locking component being disposed on one side of the rotating head, the locking component being used to fix the first screw.

[0006] Compared with the prior art, the beneficial effects of this utility model are as follows: by opening a first bolt hole on one side of the rotating head, and screwing a first screw rod into the first bolt hole, when the brush head is worn by friction, a gap is generated between the brush head and the flat plate. The locking component is then loosened to fix the first bolt, the brush plate is rotated to adjust the distance between the brush plate and the rotating head, so that the brush plate abuts against the flat plate, and then the locking component is rotated to fix the first screw rod. This solves the problem that the drive component cannot achieve precise adjustment of the brush head height.

[0007] Furthermore, a liquid supply unit is provided inside the support arm, the first driving component is a hollow shaft motor, a first through hole is opened at one end of the first screw, a cavity is provided inside the brush plate, the first through hole is connected to the cavity, a plurality of bristles are connected to the end of the brush plate facing away from the first screw, a second through hole is opened on the bristle, the second through hole is connected to the cavity, and the liquid supply unit passes through the hollow shaft motor and is connected to the first through hole.

[0008] Furthermore, the locking assembly includes a second screw, and a second bolt hole is formed on one side of the rotating head. The second bolt hole communicates with the first bolt hole, and the second screw abuts against the first screw.

[0009] Furthermore, a waterproof cover is provided on the operating platform, and the adsorption structure is disposed inside the waterproof cover.

[0010] Furthermore, a sewage pipe is installed at the bottom of the waterproof cover.

[0011] Furthermore, the diameter of the brush head is larger than the diameter of the flat plate.

[0012] Furthermore, a micrometer is provided at the end of the rotating head facing away from the bristles.

[0013] Furthermore, the adsorption structure includes a support column, an air intake pipe, and a negative pressure unit. A through hole is formed in the support column, and the air intake pipe is connected inside the through hole. The end of the air intake pipe facing away from the support column is connected to the negative pressure unit.

[0014] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0015] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the flat plate cleaning device according to an embodiment of the present invention.

[0016] Figure 2 This is a schematic diagram of the brush head structure in the flat cleaning device of this utility model embodiment.

[0017] Figure 3 This is a cross-sectional structural diagram of the brush head in the flat cleaning device of this utility model embodiment.

[0018] Explanation of key component symbols in the diagram: 1. Operating platform; 2. Adsorption structure; 21. Suction pipe; 22. Wastewater pipe; 23. Waterproof cover; 24. Support column; 25. Negative pressure unit; 3. Cleaning structure; 31. Brush head; 311. Rotary head; 312. Brush plate; 313. First screw; 314. First through hole; 315. Second screw; 316. Brush bristles; 317. First bolt hole; 318. Second bolt hole; 32. Micrometer; 33. First driving component; 34. Liquid supply unit; 35. Support arm; 36. Second driving component; 4. Flat plate. Detailed Implementation

[0019] To make the objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described in detail below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of this utility model more thorough and complete.

[0020] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," "upper," "lower," and similar expressions used herein are for illustrative purposes only and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0021] In this utility model, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items.

[0022] Please see Figures 1 to 3 This utility model provides a flat cleaning device, including an operating platform 1. An adsorption structure 2 is provided on the top of the operating platform 1. The adsorption structure 2 includes a support column 24, an air suction pipe 21, and a negative pressure unit 25. A through hole is formed in the support column 24, and the air suction pipe 21 is connected inside the through hole. One end of the air suction pipe 21 facing away from the support column 24 is connected to the negative pressure unit 25, which is a negative pressure machine. A cleaning structure 3 is provided on the top of the support column 24. The cleaning structure 3 includes a brush head 31, which includes a rotating head 311 and a brush plate 312. One end of the rotating head 311 is rotatably connected to a first driving member 33, which drives the rotating head 311 to rotate. 3 can be a hollow shaft motor. The first drive member 33 has a support arm 35 at one end facing away from the brush head 31. The support arm 35 has a second drive member 36 at one end facing away from the first drive member 33. The second drive member 36 is a hydraulic cylinder. The second drive member 36 is used to control the lifting and lowering of the support arm 35. The end of the second drive member 36 facing away from the support arm 35 is set on the operating platform 1. The rotating head 311 has a first bolt hole 317 on the side facing away from the first drive member 33. The first bolt hole 317 is screwed with a first screw 313. The end of the first screw 313 facing away from the rotating head 311 is connected to the brush plate 312. A locking component is set on one side of the rotating head 311. The locking component is used to fix the first screw 313.

[0023] The support arm 35 is internally equipped with a liquid supply unit 34 to provide cleaning fluid for cleaning the flat sheet 5. A first through hole 314 is formed at one end of the first screw 313. The brush plate 312 has an internal cavity, and the first through hole 314 connects to the cavity. A plurality of brush bristles 316 are connected to the end of the brush plate 312 facing away from the first screw 313. A second through hole is formed on each brush bristle 316, connecting to the cavity. The liquid supply unit 34 passes through the hollow shaft motor and connects to the first through hole 314. In the prior art, when cleaning the flat sheet, a water spray pipe installed on the equipment must first be directed to the flat sheet. The flat plate 5 is sprayed with water, and the brush head 31 then scrubs the flat plate 5. However, when the water spray pipe is damaged, the brush head 31 can easily scratch the surface of the flat plate 5 by brushing it hard. Whether the water spray pipe is replaced or other methods are used to clean the flat plate 5, the cleaning efficiency will be affected. The liquid supply unit 34 passes through the hollow shaft motor and is connected to the first through hole 314. It passes through the cavity and the second through hole in sequence to wet the flat plate 5, saving water spraying time. By setting the liquid supply unit 34 inside the support arm 35, the probability of damage to the liquid supply unit 34 is reduced, and the problem of reduced production efficiency caused by the failure of the liquid supply unit 34 is avoided.

[0024] The locking assembly includes a second screw 315, and a second bolt hole 318 is provided on one side of the rotating head 31. The second bolt hole 318 is connected to the first bolt hole 317, and the second screw 315 abuts against the first screw 313.

[0025] In this embodiment, when the bristles 316 wear down due to friction with the flat plate 5, gaps will form between the bristles 316 and the flat plate 5, affecting cleaning efficiency. By rotating the second screw 315, the fixation of the first screw 313 is released. A micrometer 36 is provided at one end of the brush head 31. By observing the micrometer 36 and rotating the brush head 312, the bristles 316 can abut against the flat plate 5. Then, the second screw 318 is rotated to abut against the first screw 313, thus completing the fixation of the first screw 313. This solves the problem that the drive component cannot achieve precise adjustment of the brush head height.

[0026] A waterproof cover 22 is provided on the operating platform, and the adsorption structure 2 is disposed inside the waterproof cover 22 to prevent cleaning water from splashing onto other areas. A sewage pipe 23 is provided at the bottom of the waterproof cover 22 for the discharge of the cleaning water. The diameter of the brush head 31 is larger than the diameter of the flat plate 5.

[0027] In this embodiment, the conventional circular brush head is changed to a rectangular brush head. The width of the brush head 31 is greater than the diameter of the flat plate 5, ensuring that the entire edge of the flat plate 5 can be brushed, thus ensuring the cleaning efficiency of the brush head 31. After the brush head 31 is changed to a rectangle, the entire surface of the flat plate 5 can be brushed, and the support arm 35 no longer needs to swing to brush, reducing brushing time and increasing machine capacity. In practical applications, the flat surface 5 to be cleaned is placed on the support column 24. The negative pressure unit 25 causes the end of the suction pipe 21 facing away from the negative pressure unit 25 to generate suction to adsorb the flat surface 5. The second driving member 36 drives the support arm 35 to descend, and the first driving member 33 drives the brush head 31 to rotate. At the same time, the liquid supply unit 34 passes through the hollow shaft motor and connects to the first through hole 314. The cleaning liquid passes through the cavity and the second through hole in sequence to wet and clean the flat surface 5. The driving member of the existing cleaning device cannot achieve precise adjustment of the height of the brush head 31. The friction generated between the brush head 31 and the flat surface 5 during cleaning will cause the bristles 316 to wear out, so that gaps are formed between the bristles 316 and the flat surface 5. The brush head 31 needs to be replaced before it can clean the flat plate 5, which reduces cleaning efficiency and increases production costs. Therefore, compared with the existing cleaning device, by opening the first bolt hole 317 on the rotating head 311, and screwing the first screw 313 into the first bolt hole 317, when the brush bristles 316 wear out due to friction with the flat plate 5, the second screw 315 is first released from fixing the first screw 313. By rotating the brush plate 312, the gap between the brush bristles 316 and the flat plate 5 is eliminated, and then the second screw 315 is made to abut against and fix the first screw 313. This improves the utilization rate of the brush head 31. The second screw 315 effectively prevents the brush head 31 from being accidentally rotated between the first bolt 313 and the first bolt hole 317 during cleaning.

[0028] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0029] The above-described embodiments are merely one implementation of this utility model, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A flat-plate cleaning device, characterized in that, include: An operating platform is provided, with an adsorption structure on top and a cleaning structure on top of the adsorption structure. The cleaning structure includes a brush head, which comprises a rotating head and a brush plate. One end of the rotating head is connected to a first driving component, which drives the rotating head to rotate. A support arm is provided at the end of the first driving component facing away from the brush head, and a second driving component is provided at the end of the support arm facing away from the first driving component. The end of the second driving component facing away from the support arm is located on the operating platform, and the second driving component controls the raising and lowering of the support arm. A first bolt hole is opened on the side of the rotating head facing away from the first driving component, and a first screw is screwed into the first bolt hole. The end of the first screw facing away from the rotating head is connected to the brush plate. A locking component is provided on one side of the rotating head, which is used to fix the first screw.

2. The flat plate cleaning device according to claim 1, characterized in that, The support arm is equipped with a liquid supply unit. The first driving component is a hollow shaft motor. One end of the first screw has a first through hole that penetrates the first screw. The brush plate has a cavity inside. The first through hole connects to the cavity. One end of the brush plate facing away from the first screw is connected to several bristles. A second through hole is opened on the bristles and connects to the cavity. The liquid supply unit passes through the hollow shaft motor and connects to the first through hole.

3. The flat-plate cleaning device according to claim 2, characterized in that, The locking assembly includes a second screw, and a second bolt hole is formed on one side of the rotating head. The second bolt hole communicates with the first bolt hole, and the second screw abuts against the first screw.

4. The flat plate cleaning device according to claim 1, characterized in that, A waterproof cover is provided on the operating platform, and the adsorption structure is disposed inside the waterproof cover.

5. The flat sheet cleaning apparatus according to claim 4, characterized in that, A sewage pipe is installed at the bottom of the waterproof cover.

6. The flat plate cleaning device according to claim 1, characterized in that, The diameter of the brush head is larger than the diameter of the flat plate.

7. The flat plate cleaning device according to claim 2, characterized in that, A micrometer is installed at the end of the rotating head facing away from the bristles.

8. The flat-plate cleaning apparatus according to claim 1, characterized in that, The adsorption structure includes a support column, an air intake pipe, and a negative pressure unit. A through hole is formed in the support column, and the air intake pipe is connected inside the through hole. The end of the air intake pipe facing away from the support column is connected to the negative pressure unit.

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