A manual wafer unloading tool for maintaining wafer transfer cleanliness

Abstract

The utility model discloses a manual wafer film reversing tool for keeping wafer transmission cleanliness, which comprises a bracket (1-1) and a pair of grips (1-2). The bracket (1-1) is used for supporting a quartz boat. The grips (1-2) are installed at both ends of the bracket (1-1) and are used for fixing the bracket (1-1) for two-handed gripping. The utility model can realize efficient transfer of a batch of wafers between a film box, a quartz boat and other bearing devices, improve the efficiency of the film reversing process, and effectively reduce the pollution probability of the wafer transfer process. In the wafer transfer process, the wafer does not come into contact with any object other than the wafer film box and the quartz boat, effectively reducing the damage of the wafer caused by external force. The wafer transfer is completed by relying on the self-gravity of the wafer without the need for external force, effectively avoiding the damage of the wafer caused by external force. The utility model is not limited by the size of the wafer and the shape of the quartz boat, has high flexibility and compatibility, and has the characteristics of simple and efficient operation and low cost.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor wafer manufacturing and processing technology, and relates to a manual wafer flipping fixture for maintaining wafer transfer cleanliness, used for transferring semiconductor wafers between carrier devices such as wafer cassettes and quartz boats. Background Technology

[0002] In the semiconductor chip manufacturing process, the cleanliness of the wafer is crucial to the performance and quality of the final product, especially in high-temperature processes. If the wafer or carrier entering the furnace tube is contaminated, it will not only affect the performance of the wafer in that process, but may also cause a decline in the quality of subsequent processes.

[0003] Before high-temperature processing, a wafer flipping device is needed to transfer the wafer from the wafer cassette to the quartz boat. However, existing wafer flipping devices have the following problems during operation: 1. The wafer is in direct contact with the wafer jig of the flipping device, making the wafer surface susceptible to contamination; 2. After flipping, the fully loaded quartz boat still needs to be transferred into the furnace tube, which also increases the risk of contamination of the wafer surface and the quartz boat; 3. Existing wafer flipping devices have poor adaptability, requiring different specifications of flipping devices for different wafer sizes; 4. The flipping process relies on external pushing force, and if the quartz boat and the wafer cassette are not aligned, it may damage the wafer. Utility Model Content

[0004] (I) Purpose of the utility model

[0005] The purpose of this invention is to provide a manual wafer flipping fixture that maintains the cleanliness of wafer transfer, thereby reducing the risk of contamination during the wafer flipping process and maintaining the cleanliness and flexibility of wafer transfer.

[0006] (II) Technical Solution

[0007] To solve the above-mentioned technical problems, this utility model provides a manual wafer flipping fixture for maintaining the cleanliness of wafer transfer, which includes: a bracket 1-1 and a pair of handles 1-2. The bracket 1-1 is used to support the quartz boat; there are two handles 1-2, which are installed at both ends of the bracket 1-1 for fixing the bracket 1-1 and for gripping with both hands.

[0008] The support surface of the bracket 1-1 is arc-shaped to conform to the bottom contour of the quartz boat 4. An anti-slip groove is provided in the middle area of ​​the bracket 1-1, and the quartz boat 4 is placed in the anti-slip groove area. Limiting slots are provided at both ends of the bracket 1-1 for connecting the handle 1-2 and limiting the depth to which the handle 1-2 is inserted into the bracket 1-1. The bracket 1-1 is made of polytetrafluoroethylene (PTFE).

[0009] The handle 1-2 has an arc-shaped through hole at its bottom, into which the bracket 1-1 is inserted to connect the handle 1-2 to the bracket 1-1. A cylindrical handle is located on the outer top of the handle 1-2. The handle 1-2 is fan-shaped. The handle 1-2 is made of polytetrafluoroethylene (PTFE).

[0010] (III) Beneficial Effects

[0011] The manual wafer flipping fixture for maintaining wafer transfer cleanliness provided by the above technical solution has the following beneficial effects:

[0012] 1. This utility model can realize the efficient transfer of a batch of wafers between carrier devices such as wafer cassettes and quartz boats, thereby improving the efficiency of the wafer flipping process.

[0013] 2. In the process of transferring wafers, the wafer does not come into contact with any object other than the wafer cassette and quartz boat, effectively reducing the probability of contamination during the wafer transfer process.

[0014] 3. This utility model relies on the wafer's own gravity to complete the transfer, without the need to apply external force, effectively avoiding wafer damage caused by external force.

[0015] 4. This utility model is not limited by wafer size and quartz boat shape, and has high flexibility and compatibility.

[0016] 5. This utility model has the characteristics of simple and efficient operation and low cost. Attached Figure Description

[0017] Figure 1 An isometric view of the manual wafer flipping fixture provided in this embodiment.

[0018] Figure 2 for Figure 1 Isometric view of the central bracket.

[0019] Figure 3 for Figure 1 Isometric view of the center grip.

[0020] Figure 4 This is a flowchart illustrating the operation of the manual wafer flipping fixture provided in this embodiment. Detailed Implementation

[0021] To make the objectives, contents, and advantages of this utility model clearer, the specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples.

[0022] like Figures 1-3As shown, the manual wafer flipping fixture 1 provided in this embodiment includes a bracket 1-1 and a pair of handles 1-2. The bracket 1-1 is used to support the quartz boat, avoiding direct contact between the operator and the quartz boat, and improving the cleanliness of the flipping process. There are two handles 1-2, which are installed at both ends of the bracket 1-1 to fix the bracket 1-1 and facilitate hand gripping, thereby improving the operability of the flipping process.

[0023] The support surface of the bracket 1-1 is arc-shaped, which is used to fit the bottom contour of the quartz boat 4 and reduce the probability of lateral slippage.

[0024] The bracket 1-1 has an anti-slip groove in the middle area to increase the friction between the bracket 1-1 and the quartz boat 4, thereby improving safety during use.

[0025] The bracket 1-1 is provided with limit slots at both ends for connecting the handle 1-2, while limiting the depth of the handle 1-2 inserted into the bracket 1-1 to avoid contact with the surface of the wafer 3 and reduce the probability of wafer contamination.

[0026] The bracket 1-1 is made of polytetrafluoroethylene, which has a certain self-cleaning function and is easy to clean.

[0027] The bottom of the grip 1-2 is provided with an arc-shaped through hole, and the bracket 1-1 is inserted into the arc-shaped through hole to connect the grip 1-2 and the bracket 1-1.

[0028] A cylindrical handle is provided on the top outer side of the grip 1-2 for manual operation by the operator.

[0029] The grips 1-2 are fan-shaped.

[0030] The grips 1-2 are made of polytetrafluoroethylene, which has a certain self-cleaning function and is easy to clean.

[0031] The dimensions of the bracket 1-1 and the pair of handles 1-2 can be adjusted according to the size of the wafer cassette, quartz boat, wafer, and operator's hand. It is necessary to ensure that the distance between the limiting slots at both ends of the bracket 1-1 is appropriate and that the handles do not contact the wafer surface. When the operator holds the pair of handles 1-2 with his index and middle fingers, his thumbs can support the bottom cover 2-2 of the wafer cassette.

[0032] The specific usage process of the manual wafer flipping fixture 1 in this embodiment is as follows: Figure 4 As shown:

[0033] First, remove the top cover 2-1 of the cleaned wafer cassette.

[0034] Then, use tweezers to pick up the quartz boat 4 and place it upside down on top of the wafer; then use tweezers to pick up the manual wafer flipping fixture 1 and place it upside down on the quartz boat 4.

[0035] Finally, the operator holds a pair of handles 1-2 with the index and middle fingers of both hands, and supports the bottom cover 2-2 of the wafer cassette with both thumbs. The wafer cassette containing the wafers, the quartz boat 4, and the manual wafer flipping fixture 1 are rotated 180° as a whole, and the quartz boat is placed on the soft landing frame 5. The bottom cover 2-2 of the wafer cassette and the wafer slot 2-3 are removed from above, one of the handles 1-2 of the manual wafer flipping fixture 1 is removed, and the manual wafer flipping fixture 1 is taken out from both sides to complete the wafer flipping process.

[0036] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A manual wafer flipping fixture for maintaining wafer transfer cleanliness, characterized in that, include: The bracket (1-1) and a pair of handles (1-2) are provided. The bracket (1-1) is used to support the quartz boat. There are two handles (1-2) installed at both ends of the bracket (1-1) to fix the bracket (1-1) and to grip with both hands.

2. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 1, characterized in that, The support surface of the bracket (1-1) is arc-shaped, which is used to fit the bottom contour of the quartz boat (4).

3. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 2, characterized in that, The bracket (1-1) has an anti-slip groove in the middle area, and the quartz boat (4) is placed in the anti-slip groove area.

4. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 3, characterized in that, The bracket (1-1) is provided with limit slots at both ends for connecting the handle (1-2) and limiting the depth of the handle (1-2) inserted into the bracket (1-1).

5. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 4, characterized in that, The bracket (1-1) is made of polytetrafluoroethylene.

6. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 5, characterized in that, The bottom of the grip (1-2) is provided with an arc-shaped through hole, and the bracket (1-1) is inserted into the arc-shaped through hole to connect the grip (1-2) and the bracket (1-1).

7. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 6, characterized in that, A cylindrical handle is provided on the top outer side of the grip (1-2).

8. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 7, characterized in that, The grips (1-2) are fan-shaped.

9. The manual wafer flipping fixture for maintaining wafer transfer cleanliness as described in claim 8, characterized in that, The grips (1-2) are made of polytetrafluoroethylene.

Images