Bond head drive mechanism and die bonder

Abstract

The utility model is suitable for the technical field of semiconductor processing, provides a kind of bonding head driving mechanism and die bonder, above-mentioned bonding head driving mechanism includes installation base, sliding adjustment seat and bonding head mounting piece, still slidingly arranged with the knob piece on installation base, second drive assembly is arranged between installation base and knob piece, second drive assembly is used to drive knob piece reciprocating sliding along second direction, knob piece and bonding head mounting piece are slidably connected along first direction. Can under the premise that not influence bonding head mounting piece along first direction sliding, make second drive assembly can indirectly drive bonding head mounting piece movement along second direction by knob piece. Under the premise that bonding head mounting piece and bonding head mechanism can be freely adjusted, make the overall structure of bonding head mounting piece and bonding head mechanism more simple and the space occupied is smaller, make the movement of bonding head mounting piece more flexible, reduce the risk that bonding head mounting piece and bonding head mechanism and other components interfere, improve the flexibility of equipment.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing technology, and in particular relates to a die bonding head driving mechanism and a die bonding machine. Background Technology

[0002] A die bonder is a piece of equipment used in semiconductor device manufacturing, its function being to connect semiconductor wafers to other components. During die bonding, a die-feeding platform typically supports the die ring, and then a nozzle on the bonding head picks up the chip from the die ring, firmly connecting the chip to the solder joints of the packaging substrate to achieve die bonding. During die bonding, a bonding head drive mechanism is usually required to move the bonding head mechanism, cooperating with the die ring support device to facilitate chip pickup from the die ring. However, most existing bonding head drive mechanisms suffer from the problem of interference with other components during operation. Utility Model Content

[0003] The purpose of this utility model is to provide a die bonding drive mechanism and a die bonder, which aims to solve the technical problem that the die bonding drive mechanism in the prior art is prone to interference with other components during operation.

[0004] This utility model is implemented as follows: Firstly, a head-mounting drive mechanism is provided for driving the head-mounting mechanism to move. The head-mounting drive mechanism includes a mounting base, a sliding adjustment seat, and a head-mounting mounting component. The sliding adjustment seat is slidably disposed on the mounting base along a first direction. A first drive component is disposed between the mounting base and the sliding adjustment seat. The head-mounting mounting component is slidably disposed on the sliding adjustment seat along a second direction. The first direction and the second direction are arranged at an angle. A toggle element is slidably disposed on the mounting base, and a second driving component is disposed between the mounting base and the toggle element. The second driving component is used to drive the toggle element to slide back and forth along the second direction, and the toggle element and the mounting head are slidably connected along the first direction.

[0005] In an alternative embodiment, the sliding adjustment seat has a clearance cavity for receiving the toggle member, the toggle member being movably inserted into the clearance cavity, and at least a portion of the shank mounting member extending into the clearance cavity and slidably connected to the toggle member.

[0006] In one optional embodiment, the actuating member includes a rod portion and a mounting portion, the mounting portion being slidably connected to the mounting base, a first end of the rod portion being connected to the mounting portion, and the rod portion being movably inserted into the clearance cavity along the first direction.

[0007] In an optional embodiment, the first driving assembly includes a magnetic rod and a coil assembly. The magnetic rod is disposed on the mounting base along a first direction, and the coil assembly is movably sleeved outside the magnetic rod. The coil assembly is used to generate a magnetic field when energized and interact with the magnetic field of the magnetic rod to push the coil assembly to slide along the magnetic rod.

[0008] In one optional embodiment, the magnetic rod includes a main cylinder and a plurality of magnetic blocks. The main cylinder has a channel arranged along the length of the main cylinder, and the plurality of magnetic blocks are arranged in the channel along the length of the channel.

[0009] In one alternative embodiment, the coil assembly includes a coil portion and a coil support. The coil portion is arranged in a cylindrical structure and is disposed on the coil support and electrically connected to an external circuit. The coil support is mounted on the sliding adjustment seat.

[0010] In an optional embodiment, the second drive assembly includes a first screw and a first drive unit. The first screw is rotatably mounted on the mounting base in the second direction. The first screw is threadedly connected to at least a portion of the actuating member. The first drive unit is mounted on the mounting base and is used to drive the first screw to rotate.

[0011] In an optional embodiment, the mounting base driving mechanism further includes a fixed base, the mounting base being slidably disposed on the fixed base, and a third driving component being disposed between the fixed base and the mounting base. The third driving component is used to drive the mounting base to move along a third direction, the third direction being set at an angle to the second direction.

[0012] In an optional embodiment, the mounting base is slidably disposed above the fixed base, the top surface of the fixed base is disposed abutting the bottom surface of the sliding adjustment seat, and two slide rail structures are further disposed between the mounting base and the fixed base, the two slide rail structures being spaced apart along the first direction to form a space for accommodating the sliding adjustment seat.

[0013] In a second aspect, a die bonder is provided, comprising the die bonder drive mechanism described in any of the preceding claims.

[0014] The technical effect of the first aspect of this utility model is as follows: A sliding adjustment seat is slidably mounted on a mounting base along a first direction, and a head-mounting component is slidably mounted on the sliding adjustment seat along a second direction. A first driving assembly is provided between the mounting base and the sliding adjustment seat. Simultaneously, a toggle member is slidably mounted on the mounting base, and a second driving assembly is provided between the mounting base and the toggle member. The second driving assembly drives the toggle member to reciprocate along the second direction, and the toggle member and the head-mounting component are slidably connected along the first direction. When the head-mounting drive mechanism is working, the head-mounting mechanism can be mounted on the head-mounting component. The sliding adjustment seat is driven to move along the first direction by the first driving assembly, thereby realizing the movement of the head-mounting mechanism in the first direction. Simultaneously, the toggle member can be driven to move along the second direction by the second driving assembly. Since the toggle member and the head-mounting component are slidably connected along the first direction, they only have a degree of freedom of relative movement along the first direction. Therefore, when the toggle member moves, it also drives the head-mounting component to move along the second direction, thereby realizing the movement of the head-mounting mechanism in the second direction, without hindering the movement of the sliding adjustment seat and the head-mounting component along the first direction. Compared to existing head-mounting drive mechanisms, the second drive assembly can be positioned on the mounting base away from the sliding adjustment seat, while the actuating member is slidably mounted on the mounting base along a second direction, and simultaneously slidably connected to the head-mounting component along a first direction. This allows the second drive assembly to indirectly drive the head-mounting component to move along the second direction via the actuating member without affecting its sliding motion along the first direction. By enabling free adjustment of the head-mounting component and mechanism, the overall structure of the head-mounting component and mechanism is simpler and occupies less space, making the movement of the head-mounting component more flexible, reducing the risk of interference between the head-mounting component and mechanism and other components, and greatly improving the flexibility of the equipment.

[0015] It is understandable that the beneficial effects of the second aspect mentioned above can be found in the relevant descriptions in the first aspect mentioned above, and will not be repeated here. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of the head drive mechanism provided in this embodiment of the utility model; Figure 2 yes Figure 1 Enlarged structural diagram at point A; Figure 3 This is a cross-sectional view of the first driving component used in an embodiment of the present invention.

[0018] Explanation of reference numerals in the attached figures: 1. Mounting base; 2. Sliding adjustment seat; 21. Clearance cavity; 3. Head mounting component; 4. Actuating component; 41. Rod body; 42. Mounting part; 5. First drive assembly; 51. Magnetic rod; 511. Main cylinder; 512. Magnetic block; 52. Coil assembly; 521. Coil part; 522. Coil bracket; 6. Second drive assembly; 61. First screw; 62. First drive unit; 7. Fixed base; 71. Clearance space; 8. Third drive assembly; 9. Sliding structure; 10. First detection assembly; 11. Second detection assembly. Detailed Implementation

[0019] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model. In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In this embodiment, according to Figure 1 The XYZ Cartesian coordinate system established in the diagram is defined as follows: the Y-axis can be the first direction, the Z-axis can be the second direction, and the X-axis can be the third direction. The side located in the positive direction of the X-axis is defined as front, and the side located in the negative direction of the X-axis is defined as back; the side located in the positive direction of the Y-axis is defined as left, and the side located in the negative direction of the Y-axis is defined as right; the side located in the positive direction of the Z-axis is defined as up, and the side located in the negative direction of the Z-axis is defined as down.

[0020] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified. In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0022] Please refer to Figures 1 to 3 As shown, in a first aspect of this utility model embodiment, a head-mounting mechanism is provided. The head-mounting mechanism includes a mounting base 1, a sliding adjustment seat 2, and a head-mounting component 3. The sliding adjustment seat 2 is slidably disposed on the mounting base 1 along a first direction. A first driving assembly 5 is disposed between the mounting base 1 and the sliding adjustment seat 2. The head-mounting component 3 is slidably disposed on the sliding adjustment seat 2 along a second direction, with the first and second directions forming an angle. A toggle member 4 is also slidably disposed on the mounting base 1. A second driving assembly 6 is disposed between the mounting base 1 and the toggle member 4. The second driving assembly 6 drives the toggle member 4 to reciprocate along the second direction. The toggle member 4 and the head-mounting component 3 are slidably connected along the first direction.

[0023] Specifically, mounting base 1 refers to a component with a certain volume. Mounting base 1 can be fixedly mounted on other components, or it can be movably connected to other components and can move in a certain direction (e.g., a third direction) under the action of a driving component. Sliding adjustment seat 2 refers to a component with a certain volume. Sliding adjustment seat 2 can be block-shaped, plate-shaped, or a combination of various shapes. Sliding adjustment seat 2 can be slidably connected to mounting base 1 through a slider-rail structure or a slider-roller structure. Bond mounting component 3 also refers to a component with a certain volume. Bond mounting component 3 can be block-shaped, plate-shaped, or a combination of various shapes. The angle between the first direction and the second direction can be a right angle, where the first direction can be a direction in the horizontal plane, and the second direction can be a vertical direction. Mounting base 1 can also move in other directions, such as a third direction, which is also a direction in the horizontal plane, thus allowing the bond mounting component 3 to move in all three directions, thereby enabling the bond mechanism to move in three-dimensional space.

[0024] The actuating component 4 also refers to a component with a certain volume. The actuating component 4 can be rod-shaped, plate-shaped, or a combination of various shapes. To reduce the space occupied by the actuating component 4, the actuating component 4 can be rod-shaped or plate-shaped as a whole. The actuating component 4 and the mounting head 3 are slidably connected along the first direction. This can be achieved by making the actuating component 4 and the mounting head 3 slidably connected, with the actuating component 4 having only the degree of freedom to slide along the first direction relative to the mounting head 3. A slider-rail structure or a rail-roller structure can be provided between the actuating component 4 and the mounting head 3 to achieve the slidable connection between them.

[0025] Both the first drive assembly 5 and the second drive assembly 6 refer to components or parts that can drive an object to reciprocate along a straight line. The first drive assembly 5 and the second drive assembly 6 can be cylinders, hydraulic cylinders, electric push rods or linear motors, etc., and can also be lead screw slider structures or cam slider structures, etc.

[0026] The head-mounting mechanism provided in this embodiment of the utility model involves sliding an adjusting seat 2 on a mounting base 1 along a first direction, and sliding a head-mounting component 3 on the adjusting seat 2 along a second direction. A first driving assembly 5 is provided between the mounting base 1 and the adjusting seat 2. A toggle member 4 is also slidably mounted on the mounting base 1, and a second driving assembly 6 is provided between the mounting base 1 and the toggle member 4. The second driving assembly 6 drives the toggle member 4 to reciprocate along the second direction, and the toggle member 4 and the head-mounting component 3 are slidably connected along the first direction. When the head-mounting mechanism is working, the head-mounting mechanism can be mounted on the head-mounting component 3, and the adjusting seat 2 can be driven to move along the first direction by the first driving assembly 5 to achieve movement of the head-mounting mechanism in the first direction. Simultaneously, the toggle member 4 can be driven to move along the second direction by the second driving assembly 6. Since the toggle member 4 and the head-mounting component 3 are slidably connected along the first direction, they only have a degree of freedom of relative movement along the first direction. Therefore, when the actuating member 4 moves, it will also drive the head mounting member 3 to move along the second direction, thereby realizing the movement of the head mechanism in the second direction, and will not hinder the movement of the sliding adjustment seat 2 and the head mounting member 3 along the first direction.

[0027] Compared to the existing head-mounting drive mechanism, the second drive assembly 6 can be positioned on the mounting base 1 away from the sliding adjustment seat 2, while the actuating member 4 is slidably mounted on the mounting base 1 along the second direction, and simultaneously slidably connected to the head-mounting member 3 along the first direction. This allows the second drive assembly 6 to indirectly drive the head-mounting member 3 to move along the second direction via the actuating member 4 without affecting its sliding motion along the first direction. By enabling free adjustment of the head-mounting member 3 and the head-mounting mechanism, the overall structure of the head-mounting member 3 and the head-mounting mechanism is simplified, the space occupied by the head-mounting member 3 and the head-mounting mechanism is reduced, and the movement of the head-mounting member 3 is made more flexible. This reduces the risk of interference between the head-mounting member 3 and the head-mounting mechanism and other components, greatly improving the flexibility of the equipment.

[0028] In an optional embodiment, please refer to Figure 1 The mounting base 1 may include a main body plate arranged along a first direction and a support portion arranged along a second direction. During installation, the sliding adjustment seat 2 can be slidably connected to the main body plate, while the end of the toggle member 4 can be slidably connected to the support portion. The second drive assembly 6 is also arranged on the support portion, making the structural layout of the entire head drive mechanism more reasonable and robust.

[0029] In one embodiment, see Figure 1 and Figure 2 The sliding adjustment seat 2 has a relief cavity 21 for accommodating the toggle member 4. The toggle member 4 is movably inserted into the relief cavity 21. At least a portion of the head mounting member 3 extends into the relief cavity 21 and is slidably connected to the toggle member 4.

[0030] Specifically, the clearance cavity 21 refers to a cavity structure with a certain accommodating space. The clearance cavity 21 may have two openings that are arranged opposite each other along the first direction. The clearance cavity 21 can be integrally formed onto the sliding adjustment seat 2 by means of machining, casting, or injection molding. The sliding adjustment seat 2 may also be composed of multiple components, which are combined to form the clearance cavity 21.

[0031] In this embodiment, by providing a clearance cavity 21 on the sliding adjustment seat 2, at least a portion of the head-mounting component 3 extends into the clearance cavity 21, while the actuating component 4 is movably inserted into the clearance cavity 21. The head-mounting component 3 and the actuating component 4 are slidably connected inside the clearance cavity 21. When the head-mounting mechanism is installed on the head-mounting component 3, the overall space occupied by the components around the head-mounting mechanism is reduced, making the position adjustment of the head-mounting mechanism more flexible and convenient, and further reducing the risk of interference between the head-mounting mechanism and other components.

[0032] In one embodiment, see Figure 1 and Figure 2 The actuating component 4 includes a rod portion 41 and a mounting portion 42. The mounting portion 42 is slidably connected to the mounting base 1. The first end of the rod portion 41 is connected to the mounting portion 42, and the rod portion 41 is movably inserted into the clearance cavity 21 along a first direction. Specifically, the rod portion 41 refers to a rod-shaped component with a certain length, and the mounting portion 42 refers to a plate-shaped structure with a certain thickness. The rod portion 41 and the mounting portion 42 can be integrally formed, or they can be two independent parts connected together by welding, snap-fitting, or fasteners. In this embodiment, by dividing the actuating member 4 into two parts, a rod part 41 and a mounting part 42, the mounting part 42 is slidably connected to the mounting base 1, the first end of the rod part 41 is connected to the mounting part 42, and the rod part 41 is movably inserted into the clearance cavity 21 along the first direction and slidably connected to the head mounting member 3, the volume of the part of the actuating member 4 inserted into the clearance cavity 21 can be made smaller while ensuring a more stable sliding connection between the actuating member 4 and the mounting base 1. This reduces the volume of the clearance cavity 21 and, consequently, the overall volume of the sliding adjustment seat 2, making the position adjustment more flexible.

[0033] In an optional embodiment, please refer to Figure 2 A sliding guide rail is provided on the rod body 41 along the first direction, and a slider is also slidably provided on the sliding guide rail. The slider is connected to the part of the end mount 3 that extends into the relief cavity 21, making the sliding connection between the toggle member 4 and the end mount 3 more convenient.

[0034] In one embodiment, see Figure 3 The first driving component 5 includes a magnetic rod 51 and a coil assembly 52. ​​The magnetic rod 51 is disposed on the mounting base 1 along a first direction. The coil assembly 52 is movably sleeved outside the magnetic rod 51. The coil assembly 52 is used to generate a magnetic field when energized and interact with the magnetic field of the magnetic rod 51 to push the coil assembly 52 to slide along the magnetic rod 51.

[0035] Specifically, the magnetic rod 51 refers to a magnetic component of a certain length, and its cross-section can be circular. For example, the magnetic rod 51 can be a column composed of multiple magnetic materials arranged inside the cylinder. Alternatively, the magnetic rod 51 can be a rigid rod penetrating a column composed of multiple magnetic materials. The coil assembly 52 refers to a component that can generate a magnetic field based on the principle of electromagnetic induction when a power source is connected. At least a portion of the coil assembly 52 can be a coil structure with a receiving hole formed by winding wire, and the coil assembly 52 can slide along the magnetic rod 51 by inserting the magnetic rod 51 into the receiving hole. The coil assembly 52 is also connected to the sliding adjustment seat 2.

[0036] In this embodiment, the magnetic rod 51 can be mounted on the mounting base 1 along the first direction, while the coil assembly 52 is movably sleeved on the outside of the magnetic rod 51. The coil assembly 52 generates a magnetic field when energized and interacts with the magnetic field of the magnetic rod 51 to push the coil assembly 52 to slide along the length of the magnetic rod 51. Simultaneously, the sliding adjustment seat 2 can be slid. Through the cooperation of the magnetic rod 51 and the coil assembly 52, the position adjustment of the sliding adjustment seat 2 can be made more stable and smooth, improving the stability of the movement of the sliding adjustment seat 2. Furthermore, the direction and magnitude of the magnetic field generated by the coil assembly 52 can be controlled by controlling the direction and magnitude of the current on the coil assembly 52, thereby achieving adjustment of the movement direction and speed of the sliding adjustment seat 2.

[0037] In one embodiment, see Figure 3 The magnetic rod 51 includes a main cylinder 511 and magnetic blocks 512. There are multiple magnetic blocks 512. The main cylinder 511 has a channel arranged along the length of the main cylinder 511. Multiple magnetic blocks 512 are arranged in the channel along the length of the channel.

[0038] Specifically, the magnetic block 512 refers to a magnetic component with a certain volume, which can generate a magnetic field. The shape of the magnetic block 512 can be block-shaped, columnar, or plate-shaped, etc. The main cylinder 511 refers to a cylindrical structure with a certain length. Inside the main cylinder 511, there is a channel arranged along the length of the main cylinder 511. Both ends of the main cylinder 511 can be open structures, or only one end of the main cylinder 511 can be open. The magnetic block 512 can be placed into the channel through the open end of the main cylinder 511.

[0039] In this embodiment, multiple magnetic blocks 512 can be arranged along the length of the main cylinder 511 within the channel, and then the opening at the end of the main cylinder 511 can be sealed. The main cylinder 511 can be made of a material with good strength and high wear resistance, such as high-strength steel. By forming a magnetic rod 51 with the magnetic blocks 512 and the main cylinder 511, the overall strength of the magnetic rod 51 can be improved while ensuring that the magnetic rod 51 has magnetism.

[0040] In one embodiment, see Figure 3The coil assembly 52 includes a coil portion 521 and a coil support 522. The coil portion 521 is arranged in a cylindrical structure and is mounted on the coil support 522 and electrically connected to an external circuit. The coil support 522 is mounted on a sliding adjustment seat 2. Specifically, the coil portion 521 refers to a structure formed by winding wires in a certain order. The coil support 522 refers to a support component with a certain volume, which can be block-shaped, plate-shaped, or a combination of various shapes. The coil portion 521 can be connected to the coil support 522 by snap-fit, welding, or fasteners. In this embodiment, by dividing the coil assembly 52 into two parts, the coil portion 521 and the coil support 522, and connecting the coil portion 521 to an external circuit, the installation of the coil assembly 52 is made more convenient while ensuring that the coil portion 521 can generate a stable magnetic field.

[0041] In an optional embodiment, please refer to Figure 1 and Figure 2 A first detection component 10 is provided between the mounting base 1 and the sliding adjustment seat 2. The first detection component 10 is used to detect the displacement of the sliding adjustment seat 2 relative to the mounting base 1 along a first direction. Specifically, the first detection component 10 refers to a part or component that can measure the displacement of an object. The first detection component 10 can be a physical measuring structure, such as a ruler and an indicator, or it can be a sensor, such as a reader and a grating. In this embodiment, by providing the first detection component 10 between the mounting base 1 and the sliding adjustment seat 2, the displacement of the sliding adjustment seat 2 relative to the mounting base 1 along the first direction can be measured, making the position control and movement distance of the sliding adjustment seat 2 more accurate when the first drive component 5 drives the sliding adjustment seat 2 to move.

[0042] In an optional embodiment, please refer to Figure 2 The first detection component 10 may include a grating ruler and a grating reader. The grating ruler can be set on the mounting base 1, and the grating reader can be set on the sliding adjustment seat 2. Through the cooperation of the grating ruler and the grating reader, the displacement detection of the sliding adjustment seat 2 can be made more accurate.

[0043] Furthermore, by connecting the grating reader (i.e., the data transmission end of the first detection component 10) and the control end of the coil component 52 to the controller, the first detection component 10, the coil component 52, and the controller can form a high-response linear control closed loop, reducing the dot phenomenon of the sliding adjustment seat 2 during the position adjustment process, and making the position adjustment of the sliding adjustment seat 2 more accurate.

[0044] In one embodiment, see Figure 1The second drive assembly 6 includes a first screw 61 and a first drive unit 62. The first screw 61 is rotatably mounted on the mounting base 1 in a second direction and is threadedly connected to at least a portion of the actuating member 4. The first drive unit 62 is mounted on the mounting base 1 and is used to drive the first screw 61 to rotate. Specifically, the first screw 61 refers to a rod-shaped component of a certain length, and its outer circumference is threaded. The first drive unit 62 refers to a component capable of outputting torque, and can be a servo motor or a hydraulic motor, etc. In this embodiment, by rotatably mounting the first screw 61 on the mounting base 1 and threadedly connecting it to at least a portion of the actuating member 4, when the actuating member 4 needs to move in the second direction, the first drive unit 62 can drive the first screw 61 to rotate, thereby achieving the purpose of sliding the actuating member 4 along the length direction of the first screw 61, making the movement of the actuating member 4 more convenient.

[0045] In an optional embodiment, please refer to Figure 1 A second detection component 11 is provided between the mounting base 1 and the actuating member 4. The second detection component 11 is used to detect the displacement of the actuating member 4 relative to the mounting base 1 along a second direction. Specifically, the second detection component 11 refers to a part or assembly capable of measuring the displacement of an object. The second detection component 11 can be a physical measuring structure, such as a ruler and indicator working together, or it can be a sensor, such as a reader and grating working together. In this embodiment, by providing the second detection component 11 between the mounting base 1 and the actuating member 4, the displacement of the actuating member 4 relative to the mounting base 1 along the second direction can be measured, making the position control and movement distance of the actuating member 4 more precise when the second drive component 6 drives the actuating member 4 to move.

[0046] In an optional embodiment, please refer to Figure 1 The second detection component 11 may include a grating ruler and a grating reader. In use, the grating ruler can be set on the mounting base 1 and the grating reader can be set on the actuating member 4. Through the cooperation of the grating ruler and the grating reader, the displacement detection of the actuating member 4 is more accurate.

[0047] In one specific embodiment, please refer to Figure 1 The first screw 61 can be a ball screw, and the first drive unit 62 can be a servo motor. By electrically connecting the control end of the servo motor and the data end (i.e., the grating read head) of the second detection component 11, which is used to receive and send data, to the controller, a closed-loop control system for adjusting the position of the toggle component 4 is formed, making the position adjustment of the toggle component 4 more precise.

[0048] In one embodiment, see Figure 1The drive mechanism also includes a fixed base 7, and a mounting base 1 is slidably disposed on the fixed base 7. A third drive component 8 is disposed between the fixed base 7 and the mounting base 1. The third drive component 8 is used to drive the mounting base 1 to move along a third direction. The third direction is set at an angle with both the first direction and the second direction.

[0049] Specifically, the fixed base 7 refers to a component with a certain volume, which can be plate-shaped, block-shaped, or a combination of various shapes. The mounting base 1 can be slidably connected to the fixed base 7 via a slide rail slider structure or a slide rail roller structure. The third drive component 8 refers to a component or assembly that can drive an object to move in a straight line. The third drive component 8 can be a cylinder, hydraulic cylinder, electric push rod, or linear motor, or it can be a lead screw slider structure or a cam slider structure that works in conjunction with a motor for drive.

[0050] In this embodiment, a fixed base 7 is provided, and the mounting base 1 is slidably mounted on the fixed base 7. At the same time, a third driving component 8 is provided between the fixed base 7 and the mounting base 1. The third driving component 8 can drive the mounting base 1 to move in a third direction, which further increases the direction of adjustment of the head-binding mechanism position, making the adjustment of the head-binding mechanism position more flexible and convenient, and improving the convenience of using the equipment.

[0051] In one embodiment, see Figure 1 The mounting base 1 is slidably disposed above the fixed base 7. The top surface of the fixed base 7 is disposed in a third direction to avoid the bottom surface of the head mounting piece 3. Two sliding structures 9 are also disposed between the mounting base 1 and the fixed base 7. The two sliding structures 9 are spaced apart in a first direction to form an avoidance space 71 for accommodating the head mounting piece 3.

[0052] Specifically, the top surface of the fixed base 7 is positioned to avoid the bottom surface of the connector mounting part 3 in a third-direction upward direction. This can be achieved by ensuring that, after the connector mounting part 3 is installed, the bottom surface of the connector mounting part 3 is higher than the top surface of the fixed base 7 in a third-direction upward direction. In this case, when the connector mounting part 3 slides together with the mounting base 1 in a third-direction direction, the bottom surface of the connector mounting part 3 will not collide with the top surface of the fixed base 7. The sliding structure 9 refers to a structure that can movably connect two components and allow them to slide relative to each other. The sliding structure 9 can adopt a slide rail slider structure or a slide rail roller structure.

[0053] In this embodiment, the mounting base 1 is slidably positioned above the fixed base 7, with the top surface of the fixed base 7 abutting against the bottom surface of the head-mounting component 3 in a third-direction upward direction. Furthermore, two slide rail structures are provided between the mounting base 1 and the fixed base 7, spaced apart along a first direction to form a clearance space 71 for accommodating the head-mounting component 3. When the head-mounting mechanism is not in operation, the mounting base 1 can be driven by the third drive component 8 to slide to the area above the fixed base 7. Simultaneously, the sliding adjustment seat 2 can move to a suitable position under the action of the first drive component 5 and, along with the movement of the mounting base 1, enter the clearance space 71 between the two slide rail structures. This achieves the purpose of storing the head-mounting mechanism, allowing it to occupy less space.

[0054] Secondly, a die bonder is provided, including the die bonder drive mechanism of any of the above-mentioned embodiments. It is understood that the beneficial effects of the second aspect can be found in the relevant description in the first aspect above, and will not be repeated here.

[0055] The above description is merely a preferred embodiment of the present utility model, and only specifically describes the technical principles of the present utility model. These descriptions are only for explaining the principles of the present utility model and should not be construed as limiting the scope of protection of the present utility model in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model, as well as other specific embodiments of the present utility model that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of the present utility model.

Claims

1. A head-mounting drive mechanism, characterized in that, The device includes a mounting base, a sliding adjustment seat, and a head mounting component. The sliding adjustment seat is slidably disposed on the mounting base along a first direction. A first driving component is disposed between the mounting base and the sliding adjustment seat. The head mounting component is slidably disposed on the sliding adjustment seat along a second direction. The first direction and the second direction are set at an angle. A toggle element is slidably disposed on the mounting base, and a second driving component is disposed between the mounting base and the toggle element. The second driving component is used to drive the toggle element to slide back and forth along the second direction, and the toggle element and the mounting head are slidably connected along the first direction.

2. The head drive mechanism as described in claim 1, characterized in that, The sliding adjustment seat has a clearance cavity for accommodating the actuating member, the actuating member being movably inserted into the clearance cavity, and at least a portion of the bushing mounting member extending into the clearance cavity and slidably connected to the actuating member.

3. The head drive mechanism as described in claim 2, characterized in that, The actuating component includes a rod body and a mounting part. The mounting part is slidably connected to the mounting base. The first end of the rod body is connected to the mounting part. The rod body is movably inserted into the clearance cavity along the first direction.

4. The head drive mechanism as described in claim 1, characterized in that, The first driving component includes a magnetic rod and a coil assembly. The magnetic rod is disposed on the mounting base along a first direction, and the coil assembly is movably sleeved outside the magnetic rod. The coil assembly is used to generate a magnetic field when energized and interact with the magnetic field generated by the magnetic rod to push the coil assembly to slide along the magnetic rod.

5. The head drive mechanism as described in claim 4, characterized in that, The magnetic rod includes a main cylinder and multiple magnetic blocks. The main cylinder has a channel arranged along the length of the main cylinder, and the multiple magnetic blocks are arranged in the channel along the length of the channel.

6. The head drive mechanism as described in claim 5, characterized in that, The coil assembly includes a coil section and a coil support. The coil section is arranged in a cylindrical structure and is disposed on the coil support and electrically connected to an external circuit. The coil support is mounted on the sliding adjustment seat.

7. The head drive mechanism as described in claim 1, characterized in that, The second drive assembly includes a first screw and a first drive unit. The first screw is rotatably mounted on the mounting base in the second direction. The first screw is threadedly connected to at least a portion of the actuating member. The first drive unit is mounted on the mounting base and is used to drive the first screw to rotate.

8. The head drive mechanism as described in any one of claims 1 to 7, characterized in that, The drive mechanism for the mounting head also includes a fixed base, and the mounting base is slidably disposed on the fixed base. A third drive component is disposed between the fixed base and the mounting base. The third drive component is used to drive the mounting base to move along a third direction, and the third direction is set at an angle to the second direction.

9. The head drive mechanism as described in claim 8, characterized in that, The mounting base is slidably disposed above the fixed base, and the top surface of the fixed base is disposed to avoid the bottom surface of the sliding adjustment seat. Two sliding structures are also disposed between the mounting base and the fixed base, and the two sliding structures are spaced apart along the first direction to form an avoidance space for accommodating the sliding adjustment seat.

10. A die bonder, characterized in that, Includes the head drive mechanism as described in any one of claims 1 to 9.

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