A filtering device for a semi-conductive organic base

Abstract

The utility model discloses a kind of filtering devices of semiconductor organic base, belong to the field of semiconductor production, including single-row straight-line filter, the single-row straight-line filter includes filter box, linear shunt pipe located above filter box, unit regulating valve connected on linear shunt pipe support rod and filter screen located below unit regulating valve.The utility model is compared with prior art's advantage is in: the bracket plate of filter screen in the device is designed ear plate, and high-strength screw tail pin can be detached is worn on ear plate, high-strength screw tail pin is used as the handle of convenient hand, to facilitate the force of staff, guarantee normal filter screen normal capture.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, specifically to a filtration device for semiconductor organic bases. Background Technology

[0002] In the current semiconductor manufacturing field, organic bases used for wafer cleaning and photoresist development (such as N-methylpyrrolidone NMP, choline, TMAH, etc.) have extremely stringent requirements on the content of metallic impurities. After use, in order to recycle these organic bases, they are usually filtered by a special semiconductor organic base filtration device. In the initial filtration process, a single-row linear filter is usually selected. The main structure of the single-row linear filter consists of a filter box, a linear diversion pipe located above the filter box, a unit regulating valve connected to the support rod of the linear diversion pipe, and a filter screen located below the unit regulating valve. In order to ensure the synchronization of the flow rate of each branch pipe, the number of branches is generally between 2 and 4.

[0003] In this method, the filter units are installed side by side in a straight line, sharing a single inlet and outlet manifold. The piping layout is simple and easy to see. However, this also means that larger filter screens are selected, and the screens become heavy when filled with impurities. The traditional structure makes it difficult for workers to remove them properly (the traditional filter screen structure can be referenced from the filter screens of baghouse dust collectors. Since there are no corresponding handles on the filter screen support plate, it is difficult to grasp them when taking them out). Utility Model Content

[0004] The technical problem to be solved by this invention is that the filter screen used in the existing semiconductor organic base filtration device is relatively heavy after filtration, and the filter screen is difficult to remove and place due to its structure.

[0005] To solve the above-mentioned technical problems, the technical solution provided by this utility model is as follows: a filtration device for semiconductor organic bases, including a single-row linear filter, wherein the single-row linear filter includes a filter box, a linear diversion pipe located above the filter box, a unit regulating valve connected to the support rod of the linear diversion pipe, and a filter screen located below the unit regulating valve. The filter screen has a detachable structure. The filter screen support is provided with ear plates located on the left and right sides of the filter screen support plate above the support plate, and the filter screen support plate is rectangular. A high-strength screw pin passing through the ear plate is provided on one side of the ear plate.

[0006] The filter support plate is provided with a slide rail frame that is slidably connected to the filter screen below, and the tail end of the slide rail frame is provided with a sliding plate hole for storing high-strength screw pins.

[0007] As an improvement, the bottom and sides of the slide rail frame are provided with reinforcing ribs.

[0008] As an improvement, the front and rear sides of the slide rail are connected to the filter box by bolts.

[0009] As an improvement, the bottom slide rail of the slide rail frame is provided with a limiting pin for limiting the filter support plate, and the limiting pin passes through the bottom surface of the slide rail frame.

[0010] As an improvement, the top of the high-strength screw pin is provided with a rotating knob for easy rotation.

[0011] As an improvement, the front and rear top surfaces of the filter support plate are provided with flow-limiting grooves to restrict the filtrate from contaminating the sides of the filter support plate.

[0012] As an improvement, a pull-out groove is provided at the bottom of the filter support plate to facilitate the sliding of the filter support plate.

[0013] The advantages of this invention compared with the prior art are as follows: This device has ear plates designed on the filter screen support plate, and detachable high-strength screw pins are inserted on the ear plates. The high-strength screw pins serve as handles that are easy to grip, thereby facilitating the force exerted by the operator and ensuring the normal gripping of the filter screen. Attached Figure Description

[0014] Figure 1 This is a general structural diagram of a semiconductor organic base filtration device according to the present invention.

[0015] Figure 2 This is a cross-sectional view of the overall structure of a semiconductor organic base filtration device according to this utility model.

[0016] Figure 3 This utility model relates to a filtration device for semiconductor organic bases. Figure 2 The sectional view corresponding to the section line at point AA.

[0017] Figure 4 This utility model relates to a filtration device for semiconductor organic bases. Figure 3 Enlarged view of point A in the middle.

[0018] Figure 5 This is an exploded view of the connection between the slide rail frame and the filter screen of a semiconductor organic base filtration device according to this utility model.

[0019] Figure 6 This utility model relates to a filtration device for semiconductor organic bases. Figure 5 Enlarged view of section B in the middle.

[0020] Figure 7 This is a bottom view of the filter screen of a semiconductor organic base filtration device according to this utility model.

[0021] As shown in the figure: 1. Single-row linear filter; 11. Filter box; 12. Linear diverter pipe; 13. Unit regulating valve; 14. Filter screen; 141. Ear plate; 142. High-strength screw pin; 1421. Slide plate hole; 143. Flow limiting groove; 144. Pull-out groove; 2. Slide rail frame; 3. Limiting pin. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings.

[0023] As per the instruction manual Figure 1 , 2 As shown in Figure 3, in order to purify the cleaned organic alkali and make it reusable, precision membrane filtration technology, special purification technology or particle filtration system are usually used to purify the organic alkali waste liquid. In order to remove the impurities inside the organic alkali, a single-row linear filter 1 is installed at the first end of the wastewater treatment. The single-row linear filter 1 includes a filter box 11, a linear diversion pipe 12 located above the filter box 11, a unit regulating valve 13 connected to the support rod of the linear diversion pipe 12, and a filter screen 14 located below the unit regulating valve 13. The unit regulating valve 13 is used to balance the flow rate of each support rod of the linear diversion pipe 12 to ensure the uniformity of the purification rate.

[0024] As per the instruction manual Figure 2 , 3 As shown in Figures 4, 5, 6, and 7, in order to facilitate the placement and removal of the filter screen 14, the filter screen 14 is designed as a detachable structure, and a slide rail 2 is provided below the filter screen 14 support plate and is slidably connected to the filter screen 14. The front and rear sides of the slide rail 2 are connected to the filter box 11 by bolts. In order to improve the load-bearing strength of the slide rail 2, the bottom and sides of the slide rail 2 are provided with reinforcing ribs.

[0025] To facilitate the loading and unloading of the filter screen 14 after it is filled with impurities, the support of the filter screen 14 is provided with ear plates 141 located on the left and right sides of the support plate of the filter screen 14. The support plate of the filter screen 14 is rectangular. One side of the ear plate 141 is provided with a high-strength screw pin 142 that passes through the ear plate 141. In order to facilitate the rotation of the high-strength screw pin 142, the top of the high-strength screw pin 142 is provided with a rotating knob for easy rotation.

[0026] To ensure that the high-strength screw pin 142 does not affect the normal operation of the filter screen 14, a slide plate hole 1421 for storing the high-strength screw pin 142 is provided at the tail end of the slide rail frame 2.

[0027] In order to prevent the filter screen 14 from sliding outward along the slide rail 2 during normal operation, the bottom slide rail of the slide rail 2 is provided with a limiting pin 3 to limit the support plate of the filter screen 14, and the limiting pin 3 passes through the bottom surface of the slide rail 2.

[0028] To prevent wastewater from wetting the sidewalls along the top surface of the filter screen 14 support plate and thus affecting the normal sliding of the filter screen 14 on the slide rail 2, the front and rear top surfaces of the filter screen 14 support plate are provided with flow-limiting grooves 143 to restrict the filtrate from contaminating the side of the filter screen 14 support plate. This changes the direction of the splashed liquid flow to the inlet of the filter screen 14. Similarly, to facilitate the sliding of the filter screen 14 on the slide rail 2, the bottom of the filter screen 14 support plate is provided with a pull-out groove 144 to facilitate the sliding of the filter screen 14 support plate.

[0029] In specific implementation of this utility model, a clean new filter screen 14 is placed at the outermost end of the slide rail frame 2 and slid along the track to directly below the unit regulating valve 13. Then, the limiting pin 3 is inserted into the pin hole on the slide rail frame 2 for fixation, thereby preventing the filter screen 14 from shifting position during use. When the filter screen 14 is full of impurities, the unit regulating valve 13 above is closed. Then, the limiting pin 3 is removed, and the pull groove 144 is grasped and slid outward. After sliding out of the influence range of the unit regulating valve 13, the high-strength screw pin 142 in the slide plate hole 1421 is removed, and then it is passed through the through hole on one side of the ear plate 141 and screwed into the screw hole on the other side for fixation. Finally, the high-strength screw pin 142 is removed by hand, the full filter screen 14 is removed, and then placed in the replacement area. A new filter screen 14 is taken out and placed below the unit regulating valve 13. Finally, the unit regulating valve 13 is opened again for filtration.

[0030] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A filtration device for semiconductor organic bases, comprising a single-row linear filter (1), the single-row linear filter (1) comprising a filter box (11), a linear diverter pipe (12) located above the filter box (11), a unit regulating valve (13) connected to a support rod of the linear diverter pipe (12), and a filter screen (14) located below the unit regulating valve (13), characterized in that: The filter screen (14) is a detachable structure. The filter screen (14) has ear plates (141) located on the left and right sides of the filter screen (14) support plate above the support plate. The filter screen (14) support plate is rectangular. A high-strength screw pin (142) passing through the ear plate (141) is provided on one side of the ear plate (141). The filter screen (14) support plate is provided with a slide rail frame (2) that is slidably connected to the filter screen (14), and the tail end of the slide rail frame (2) is provided with a slide plate hole (1421) for storing a high-strength screw pin (142).

2. The filtration device for a semiconductor organic base according to claim 1, characterized in that: The bottom and sides of the slide rail frame (2) are provided with reinforcing ribs.

3. The filtration device for a semiconductor organic base according to claim 1, characterized in that: The front and rear sides of the slide rail frame (2) are connected to the filter box (11) by bolts.

4. The filtration device for a semiconductor organic base according to claim 1, characterized in that: The slide rail (2) has a limiting pin (3) on the bottom slide rail that limits the filter screen (14) support plate, and the limiting pin (3) passes through the bottom surface of the slide rail (2).

5. The filtration device for a semiconductor organic base according to claim 1, characterized in that: The high-strength screw pin (142) has a convenient rotating knob at its top.

6. The filtration device for a semiconductor organic base according to claim 1, characterized in that: The filter screen (14) support plate has flow-limiting grooves (143) on the top surface of the front and rear ends to limit the filtrate from contaminating the side of the filter screen (14) support plate.

7. The filtration device for a semiconductor organic base according to claim 1, characterized in that: The filter screen (14) support plate is provided with a pull groove (144) below it to facilitate the sliding of the filter screen (14) support plate.

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