Filtering device, exhaust gas treatment device and processing plant

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to a filtering device, a tail gas treatment device and a processing equipment. The filtering device comprises a shell and a filter element. The shell comprises a cylinder body, a mounting base and a receiving seat. The mounting base is provided with an air inlet, an air outlet and a purge port. The mounting base seals the opening at the top of the cylinder body and is connected with the cylinder body. The receiving seat seals the opening at the bottom of the cylinder body and is detachably connected with the cylinder body. The cylinder body, the mounting base and the receiving seat enclose a filtering cavity. The filter element is arranged in the filtering cavity and separates the filtering cavity into a first channel and a second channel. The first channel is in communication with the air inlet, the second channel is in communication with the air outlet, and the first channel and the second channel can exchange gas through the filter element. The purge port is in communication with the second channel. During the maintenance of the filtering device, only the receiving seat needs to be disassembled and installed, and the filter element does not need to be disassembled and installed, so that the maintenance convenience of the filtering device can be improved, and the maintenance efficiency of the filtering device is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and in particular to a filtration device, an exhaust gas treatment device, and a processing equipment. Background Technology

[0002] Semiconductor or photovoltaic materials often require processing before they can be used, such as boron diffusion and phosphorus diffusion processes. For example, boron diffusion incorporates boron impurities into silicon wafer crystals to alter the original electrical properties of the silicon. Phosphorus diffusion creates surface phosphorus doping on P-type substrate silicon wafers, thereby obtaining the PN junction, a crucial component of solar cells.

[0003] The exhaust gas from processing equipment often contains a significant amount of reaction byproducts, necessitating the use of filtration devices. To ensure the filtration accuracy and prevent pipe blockage, frequent maintenance of the filtration devices is required. However, in related technologies, the ease of maintenance for these filtration devices is relatively poor, resulting in low maintenance efficiency. Utility Model Content

[0004] In view of this, embodiments of this application provide a filtration device, an exhaust gas treatment device, and a processing equipment to improve the ease of maintenance of the filtration device, thereby improving the maintenance efficiency of the filtration device.

[0005] In a first aspect, one embodiment of this application provides a filtration device, which includes a housing and a filter element. The housing includes a cylindrical body, a mounting base, and a receiving base. The mounting base has an air inlet, an air outlet, and a purge port. The mounting base seals the opening at the top of the cylindrical body and is connected to the cylindrical body. The receiving base seals the opening at the bottom of the cylindrical body and is detachably connected to the cylindrical body. The cylindrical body, the mounting base, and the receiving base form a filtration chamber. The filter element is disposed in the filtration chamber and divides the filtration chamber into a first channel and a second channel. The first channel communicates with the air inlet, and the second channel communicates with the air outlet. Gas can be exchanged between the first channel and the second channel through the filter element. The purge port communicates with the second channel.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the receiving seat and the cylinder are connected by clamps.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the bottom of the cylinder is provided with a flange, the opening at the bottom of the cylinder is located inside the flange, the receiving seat includes an annular connecting part, the clamp is provided with a groove facing inward, and both the flange and the connecting part are located in the groove.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the surface of the flange away from the connection portion is a first inclined surface, the first inclined surface gradually slopes towards the connection portion in a direction from the inside out, and the slot includes a first slot sidewall, the first slot sidewall being in contact with the first inclined surface; and / or, the surface of the connection portion away from the flange is a second inclined surface, the second inclined surface gradually slopes towards the flange in a direction from the inside out, and the slot includes a second slot sidewall, the second slot sidewall being in contact with the second inclined surface.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the cylinder includes a reducing section and a connecting section, the filter element is disposed on the side of the reducing section near the mounting base, and the inner diameter of the reducing section gradually decreases in the direction away from the mounting base; the connecting section is disposed on the side of the reducing section away from the mounting base, the maximum inner diameter of the connecting section is less than or equal to the minimum inner diameter of the reducing section, the opening at the bottom of the cylinder is disposed on the connecting section, and the receiving base is detachably connected to the connecting section.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the filter element is closed at one end near the receiving seat to separate the filter chamber into a first channel and a second channel; the filter element is open at one end near the mounting seat to allow the second channel to communicate with the purge port; and / or, the filter element is made of a rigid material.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the filter element is made of metal.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the air inlet and air outlet are located on the radial sides of the mounting base, and the purge port is located on the top of the mounting base.

[0013] Secondly, one embodiment of this application provides an exhaust gas treatment device, which includes a filter device and an extraction device. The filter device is any of the filter devices mentioned above; the extraction device is connected to the filter device and is used to extract exhaust gas.

[0014] Thirdly, one embodiment of this application provides a processing apparatus, which includes a process chamber and an exhaust gas treatment device. The process chamber has a process cavity, and the exhaust gas treatment device is the exhaust gas treatment device described above, with the air inlet communicating with the process cavity.

[0015] When the filtration device of this application filters exhaust gas, the exhaust gas enters the filter chamber through the air inlet of the housing. After being filtered by the filter element in the filter chamber, the particulate matter in the exhaust gas remains in the filter element to form filter material, while the remainder flows out through the air outlet of the housing. When maintenance of the filtration device is required, the supply of exhaust gas to the filtration device is stopped, and purge gas is introduced into the filter chamber through the purge port. The purge gas blows away the filter material from the filter element, which falls onto the receiving seat by its own weight. Then, the receiving seat is removed from the bottom of the cylinder to clean the filter material out of the filter chamber. Finally, the receiving seat is reconnected to the bottom of the cylinder, thus completing the maintenance of the filtration device. During the maintenance of the filtration device, only the receiving seat needs to be disassembled and installed, without the need to disassemble and install the filter element, which improves the convenience of maintenance and thus improves the maintenance efficiency of the filtration device. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of a filtration device in related technologies.

[0018] Figure 2 The diagram shown is a structural schematic of a filtration device provided in an embodiment of this application in its use state.

[0019] Figure 3 The diagram shown is a structural schematic of a filtration device provided in an embodiment of this application in a maintenance state.

[0020] Figure 4 As shown Figure 3 A magnified view of a portion of point A in the middle.

[0021] Figure 5 The diagram shown is a schematic diagram of the filter device of the exhaust gas treatment device provided in an embodiment of this application in the state of use.

[0022] Figure 6 The diagram shown is a structural schematic of the filter device of the exhaust gas treatment device provided in an embodiment of this application in a maintenance state.

[0023] Figure label: 100. Exhaust gas treatment device; 10. Filtration device; 1. Shell; 11. Cylinder; 111. Flange; 1111. First inclined surface; 112. Variable diameter section; 113. Connecting section; 12. Mounting base; 121. Air inlet; 122. Air outlet; 123. Purge port; 13. Receiver; 131. Connecting part; 1311. Second inclined surface; 14. Filter chamber; 141. First channel; 142. Second channel; 2. Filter element; 3. Clamp; 31. Slot; 311. First slot sidewall; 312. Second slot sidewall; 4. Connecting nuts; 5. First sealing ring; 6. Second sealing ring; 20. Air extraction device; 30. Condensation device; 40. Switch valve; 50. Exhaust pipe. Detailed Implementation

[0024] Figure 1 The diagram shown is a structural schematic of a filtration device in related technologies.

[0025] like Figure 1 As shown, in the related technology, the filter device 10 includes a housing 1 and a filter element 2. The housing 1 includes a cylindrical body 11 and a mounting base 12. The top of the cylindrical body 11 has an opening, and the mounting base 12 seals the opening at the top of the cylindrical body 11. The mounting base 12 is detachably connected to the cylindrical body 11, so that the cylindrical body 11 and the mounting base 12 form a filter chamber 14, and the filter element 2 is disposed in the filter chamber 14. The mounting base 12 has an air inlet 121 and an air outlet 122. The exhaust gas enters the filter chamber 14 through the air inlet 121, is filtered by the filter element 2 in the filter chamber 14, and the remaining exhaust gas flows out of the filter chamber 14 through the air outlet 122. The flow path of the exhaust gas is as follows: Figure 1 As indicated by the middle arrow.

[0026] After a period of use, the filter device 10 needs to be cleaned. Specifically, the cylinder 11 and the mounting base 12 are disassembled, the filter element 2 is removed and the filtered material on the filter element 2 is cleaned, and then the filter element 2 is installed back into the housing 1. Because the filter element 2 needs to be disassembled and installed, the maintenance of the filter device 10 is not convenient and the maintenance efficiency of the filter device 10 is low.

[0027] To address the aforementioned issues, this application provides a purge port 123 for the purge gas to enter the housing 1, and a receiving seat 13 for receiving the filtered material is provided at the bottom of the cylinder 11. This allows the filter device 10 to be easily maintained by simply introducing purge gas into the filter chamber 14 through the purge port 123. The purge gas blows away the filtered material from the filter element 2, which then falls onto the receiving seat 13 by its own weight. Afterward, the receiving seat 13 at the bottom of the cylinder 11 can be removed, making it easy to clean the filtered material out of the filter chamber 14 without the need for disassembly and installation of the filter element 2, thus improving the ease of maintenance of the filter device 10.

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] Figure 2 The diagram shown is a structural schematic of a filtration device provided in an embodiment of this application in its use state. Figure 3 The diagram shown is a structural schematic of a filtration device provided in an embodiment of this application in a maintenance state. Figure 4 As shown Figure 3 A magnified view of a portion of point A in the middle.

[0030] like Figures 2 to 4 As shown, the filtration device 10 of this embodiment includes a housing 1 and a filter element 2. The housing 1 includes a cylindrical body 11, a mounting base 12, and a receiving base 13. The mounting base 12 is provided with an air inlet 121, an air outlet 122, and a purge port 123. The mounting base 12 blocks the opening at the top of the cylindrical body 11 and is connected to the cylindrical body 11. The receiving base 13 blocks the opening at the bottom of the cylindrical body 11 and is detachably connected to the cylindrical body 11. The cylindrical body 11, the mounting base 12, and the receiving base 13 form a filtration chamber 14. The filter element 2 is disposed in the filtration chamber 14 and divides the filtration chamber 14 into a first channel 141 and a second channel 142. The first channel 141 communicates with the air inlet 121, and the second channel 142 communicates with the air outlet 122. Gas can be exchanged between the first channel 141 and the second channel 142 through the filter element 2. The purge port 123 communicates with the second channel 142.

[0031] When the filtration device 10 of this embodiment filters exhaust gas, the exhaust gas enters the first channel 141 of the filter chamber 14 through the air inlet 121 of the housing 1. After being filtered by the filter element 2 in the filter chamber 14, it flows into the second channel 142 of the filter chamber 14. The particulate matter in the exhaust gas remains in the filter element 2 to form filter material, and the rest flows out through the air outlet 122 of the housing 1 (the flow path of the exhaust gas is as follows). Figure 2(As shown by the arrow in the image). When maintenance of the filter device 10 is required, stop supplying exhaust gas into the filter device 10 and supply purge gas through the purge port 123 to the second channel 142 of the filter chamber 14 (the flow path of the purge gas is as shown in the image). Figure 3 As indicated by the arrow in the diagram, the filter material from filter element 2 is blown into the first channel 141 of filter chamber 14 using purge gas. The filter material from filter element 2 is then blown away by reverse purge of filter chamber 14. The filter material in the first channel 141 falls onto the receiving seat 13 by its own weight. The receiving seat 13 is then removed from the bottom of cylinder 11 to remove the filter material from filter chamber 14. Afterwards, the receiving seat 13 is reconnected to the bottom of cylinder 11, thus completing the maintenance of filter device 10. During the maintenance of filter device 10, only the receiving seat 13 needs to be disassembled and installed, without disassembling and installing filter element 2, which improves the convenience and efficiency of filter device 10 maintenance.

[0032] For example, the purging gas is nitrogen.

[0033] For example, the purging gas is pulsed into the filter chamber 14, causing the filter element 2 to vibrate so that the filtered material on the filter element 2 falls off to the receiving seat 13 due to the vibration.

[0034] In some embodiments, the air inlet 121, the air outlet 122, and the purge port 123 are all provided with connectors for connecting to pipelines.

[0035] In related technologies, the filter element 2 is typically made of wound cotton or polypropylene pleated cotton, and it needs to be replaced when maintaining the filter device 10. Furthermore, even if the wound cotton or polypropylene pleated cotton filter element 2 is purged with purging gas, its structure will be damaged, leading to abnormal filtration accuracy and a short service life.

[0036] In some embodiments, the filter element 2 is made of a rigid material.

[0037] For example, the material of filter element 2 is alumina ceramic.

[0038] By making the material of filter element 2 a rigid material, filter element 2 has sufficient rigidity, which prevents filter element 2 from being deformed or damaged after being blown by the purging gas, thus affecting the filtration accuracy of filter element 2, thereby extending the service life of filter element 2 and making filter element 2 reusable.

[0039] In some embodiments, such as Figure 2 and Figure 3As shown, the filter element 2 is closed at one end near the receiving seat 13 to divide the filter chamber 14 into a first channel 141 and a second channel 142. The filter element 2 is open at one end near the mounting seat 12 so that the second channel 142 communicates with the purge port 123.

[0040] By setting the filter element 2 to the above structure, the overall structure of the filter element 2 is simple, which facilitates the processing and manufacturing of the filter element 2 and helps to reduce the manufacturing cost of the filtration device 10.

[0041] In some embodiments, such as Figures 2 to 4 As shown, the receiving seat 13 is a receiving plate.

[0042] By setting the receiving seat 13 as a receiving plate, the structure of the receiving seat 13 is simple, easy to process and manufacture, and helps to reduce the cost of the filter device 10.

[0043] In other embodiments, the receiving seat 13 may also be cylindrical to hold more filter material.

[0044] In some embodiments, such as Figures 2 to 4 As shown, the receiving seat 13 is connected to the cylinder 11 by a clamp 3.

[0045] For example, the clamp 3 includes two semi-rings, one end of which is connected by a pin, and the other end of which is connected by a bolt and a nut.

[0046] The receiving seat 13 is connected to the cylinder 11 by a clamp 3, which facilitates the disassembly and installation of the receiving seat 13, and helps to further improve the ease of maintenance of the filter device 10 and improve the maintenance efficiency of the filter device 10.

[0047] In some embodiments, such as Figure 4 As shown, the bottom of the cylinder 11 is provided with a flange 111, and the opening at the bottom of the cylinder 11 is located inside the flange 111. The receiving seat 13 includes an annular connecting part 131, and the clamp 3 is provided with a groove 31 with the slot facing inward. Both the flange 111 and the connecting part 131 are located in the groove 31.

[0048] For example, the edge portion of the receiving seat 13 forms a connecting portion 131.

[0049] By setting a groove 31 in the clamp 3, the flange 111 of the cylinder 11 and the connection part 131 of the receiving seat 13 are both set in the groove 31, which can improve the connection reliability between the cylinder 11 and the receiving seat 13 and improve the reliability of the filter device 10.

[0050] To make the technical solution of this application easier to understand, the following description further illustrates the technical solution of this application, taking the example that the height direction of the filter device 10 is consistent with the vertical direction. Wherein, the vertical direction is as follows... Figures 2 to 4As shown.

[0051] For example, such as Figures 2 to 4 As shown, the cylinder 11 has openings at both its upper and lower ends, and a flange 111 is located at the lower end of the cylinder 11. A mounting base 12 is located on the upper side of the cylinder 11, sealing the opening at the upper end of the cylinder 11. A receiving base 13 is located on the lower side of the cylinder 11, sealing the opening at the lower end of the cylinder 11. The filter element 2 is generally cylindrical, extending vertically, with its lower end closed and its upper end open. Both the first channel 141 and the second channel 142 extend vertically.

[0052] In some embodiments, such as Figure 4 As shown, the surface of the flange 111 away from the connecting part 131 is a first inclined surface 1111, which gradually slopes towards the connecting part 131 from the inside out. The slot 31 includes a first slot sidewall 311, which fits against the first inclined surface 1111. Specifically, in a plane perpendicular to the axis of the flange 111, the side closer to the axis of the flange 111 is the inner side, and the side farther from the axis of the flange 111 is the outer side.

[0053] For example, the connecting part 131 is disposed on the lower side of the flange 111, and the upper surface of the flange 111 is a first inclined surface 1111, which gradually slopes downward from the inside to the outside. The upper groove wall of the slot 31 is a first groove sidewall 311, which gradually slopes downward from the inside to the outside.

[0054] By providing a first inclined surface 1111 on the flange 111 and a first groove sidewall 311 that fits against the first inclined surface 1111 on the clamp 3, the first inclined surface 1111 and the first groove sidewall 311 gradually come into contact when the clamp 3 is tightened in the direction from the outside to the inside, so as to press the flange 111 against the connection part 131 of the receiving seat 13, improve the sealing performance of the connection between the cylinder 11 and the receiving seat 13, prevent exhaust gas from leaking from the connection between the cylinder 11 and the receiving seat 13, and help improve the reliability of the filter device 10.

[0055] In some embodiments, such as Figure 4 As shown, the surface of the connecting part 131 away from the flange 111 is a second inclined surface 1311, which gradually slopes towards the flange 111 from the inside out. The slot 31 includes a second slot sidewall 312, which fits against the second inclined surface 1311.

[0056] For example, the flange 111 is disposed on the upper side of the connecting part 131, and the lower surface of the connecting part 131 is a second inclined surface 1311, which gradually slopes upward from the inside to the outside. The lower groove wall of the slot 31 is a second groove sidewall 312, which gradually slopes upward from the inside to the outside.

[0057] By providing a second inclined surface 1311 in the connecting part 131 and a second groove sidewall 312 that fits against the second inclined surface 1311 in the clamp 3, the second inclined surface 1311 and the second groove sidewall 312 gradually come into contact when the clamp 3 is clamped in the direction from the outside to the inside, so as to press the connecting part 131 of the receiving seat 13 against the flange 111, improve the sealing performance of the connection between the cylinder 11 and the receiving seat 13, prevent exhaust gas from leaking from the connection between the cylinder 11 and the receiving seat 13, and help improve the reliability of the filter device 10.

[0058] For example, clamp 3 is KF clamp 3.

[0059] In some embodiments, the cylinder 11 includes a reducing section 112 and a connecting section 113. The filter element 2 is disposed on the side of the reducing section 112 near the mounting base 12, and the inner diameter of the reducing section 112 gradually decreases in the direction away from the mounting base 12. The connecting section 113 is disposed on the side of the reducing section 112 away from the mounting base 12, and the maximum inner diameter of the connecting section 113 is less than or equal to the minimum inner diameter of the reducing section 112. An opening at the bottom of the cylinder 11 is disposed in the connecting section 113, and the receiving base 13 is detachably connected to the connecting section 113.

[0060] Wherein, the maximum inner diameter of the connecting section 113 is less than or equal to the minimum inner diameter of the reducing section 112, means that: when the inner diameters of all parts of the connecting section 113 are the same, the inner diameter of each part of the connecting section 113 is less than or equal to the inner diameter of the reducing section 112; when the inner diameters of all parts of the connecting section 113 are not the same, the inner diameter of the part with the smallest inner diameter of the connecting section 113 is less than or equal to the inner diameter of the reducing section 112.

[0061] For example, the connecting section 113 is disposed below the variable diameter section 112, and the filter element 2 is disposed above the variable diameter section 112. The inner diameter of the variable diameter section 112 gradually decreases from top to bottom, and the inner diameter at the lower end of the variable diameter section 112 is the minimum inner diameter of the variable diameter section 112. The inner diameter of the connecting section 113 is the same at all points, and the inner diameter of the connecting section 113 is equal to the minimum inner diameter of the variable diameter section 112. This allows the filtered material of the filter element 2 to fall under its own weight and, guided by the variable diameter section 112, converge towards the center, so as to fall onto the receiving seat 13 through the smaller diameter connecting section 113.

[0062] By designing the cylinder 11 as described above, the opening size at the bottom of the cylinder 11 can be set to be relatively small, and the filtered material of the filter element 2 can still fall into the receiving seat 13 under the guidance of the variable diameter section 112. Setting the opening size at the bottom of the cylinder 11 to be smaller can reduce the sealing area between the cylinder 11 and the receiving seat 13, reduce the risk of leakage at the connection between the cylinder 11 and the receiving seat 13, and further improve the reliability of the filter device 10.

[0063] In other embodiments, the cylinder 11 may also be designed as a straight cylinder, that is, the inner diameter of the cylinder 11 is the same everywhere.

[0064] In some embodiments, a first sealing ring 5 is provided between the cylinder 11 and the receiving seat 13.

[0065] For example, the first sealing ring 5 is clamped between the flange 111 and the connection portion 131.

[0066] By setting a first sealing ring 5 between the cylinder 11 and the receiving seat 13, the sealing performance at the connection between the cylinder 11 and the receiving seat 13 can be further improved, the risk of leakage at the connection between the cylinder 11 and the receiving seat 13 can be reduced, and the reliability of the filter device 10 can be further improved.

[0067] In some embodiments, the air inlet 121 and the air outlet 122 are disposed on the radial sides of the mounting base 12, and the purge port 123 is disposed on the top of the mounting base 12.

[0068] By setting the purge port 123 on the top of the mounting base 12, the purge gas entering through the purge port 123 can be directed towards the center of the filter element 2, so as to purge the filtered material from the filter element 2 and improve the maintenance effect of the filter element 2.

[0069] In some embodiments, the cylinder 11 and the mounting base 12 are connected by a connecting nut 4.

[0070] For example, the top of the cylinder 11 is provided with a flange, the mounting base 12 is provided with an external thread, and the connecting nut 4 is provided with a retaining edge. The retaining edge and the flange are engaged to stop and cooperate, and the connecting nut 4 is connected to the external thread to realize the connection between the mounting base 12 and the cylinder 11.

[0071] When the filter element 2 needs to be replaced, remove the mounting base 12 from the cylinder 11 and take the filter element 2 out from the opening at the top of the cylinder 11.

[0072] In some embodiments, a second sealing ring 6 is provided between the cylinder 11 and the mounting base 12.

[0073] For example, the second sealing ring 6 is held between the flange and the stop.

[0074] By providing a second sealing ring 6 between the cylinder 11 and the mounting base 12, the sealing performance at the connection between the cylinder 11 and the mounting base 12 can be further improved, the risk of leakage at the connection between the cylinder 11 and the mounting base 12 can be reduced, and the reliability of the filter device 10 can be further improved.

[0075] Figure 5 The diagram shown is a schematic diagram of the filter device of the exhaust gas treatment device provided in an embodiment of this application in the state of use. Figure 6 The diagram shown is a structural schematic of the filter device of the exhaust gas treatment device provided in an embodiment of this application in a maintenance state.

[0076] The embodiments of the filter device 10 of this application have been described in detail above. The embodiments of the exhaust gas treatment device 100 of this application are described in detail below. It should be understood that the description of the embodiments of the filter device 10 corresponds to the description of the embodiments of the exhaust gas treatment device 100. Therefore, for any parts not described in detail, please refer to the previous embodiments of the filter device 10.

[0077] like Figure 5 and Figure 6 As shown, the exhaust gas treatment device 100 of this application embodiment includes a filter device 10 and an extraction device 20. The filter device 10 is any of the filter devices mentioned above. The extraction device 20 is connected to the filter device 10 and is used to extract exhaust gas.

[0078] For example, the pumping device 20 can be a diaphragm pump.

[0079] For example, the exhaust gas treatment device 100 can be used for exhaust gas treatment of boron diffusion furnaces and phosphorus diffusion furnaces.

[0080] By improving the ease of maintenance of the filter device 10 and increasing the maintenance efficiency of the filter device 10, the ease of maintenance and maintenance efficiency of the exhaust gas treatment device 100 can be improved.

[0081] In some embodiments, a switching valve 40 is provided between the filter device 10 and the air extraction device 20, and the switching valve 40 is used to control the on / off connection between the filter device 10 and the air extraction device 20.

[0082] In some embodiments, the exhaust gas treatment device 100 further includes a condenser 30 and an exhaust pipe 50. The condenser 30 includes a container and a coolant disposed within the container. The inlet of the condenser 30 is for the exhaust gas to enter, and the outlet of the condenser 30 is connected to the air inlet 121 of the filter device 10. The inlet of the extraction device 20 is connected to the filter device 10, and the outlet of the extraction device 20 is connected to the exhaust pipe 50.

[0083] For example, the condensation device 30 includes a container and a solution disposed within the container, wherein the solution may be water.

[0084] When exhaust gas treatment is required, the switch valve 40 is opened, and the exhaust gas is extracted through the extraction device 20, allowing it to first enter the condenser 30. The reaction byproducts in the exhaust gas are cooled and formed into solids and / or liquids within the condenser 30, which remain inside. Then, the exhaust gas passing through the condenser 30 enters the filter 10, where it is cooled and filtered. Solids and liquids in the exhaust gas are filtered by the filter element 2, forming filter media, which remain inside the filter 10. Afterward, the exhaust gas passing through the filter 10 enters the exhaust pipe 50 through the extraction device 20, undergoes secondary treatment by the factory, and is then discharged into the external environment. The flow path of the exhaust gas is as follows: Figure 5 As indicated by the arrows in the diagram. In the filter device 10, the exhaust gas enters the first channel 141 of the filter chamber 14 through the air inlet 121 of the housing 1. After being filtered by the filter element 2 in the filter chamber 14, it flows into the second channel 142 of the filter chamber 14. The particulate matter in the exhaust gas remains in the filter element 2 to form filter material, and the rest flows out through the air outlet 122 of the housing 1.

[0085] When maintenance is required on the filter device 10, the switch valve 40 is closed, and purge gas is introduced into the second channel 142 of the filter chamber 14 through the purge port 123. This causes the filter material from the filter element 2 to be blown into the first channel 141 of the filter chamber 14, where the filter material falls onto the receiving seat 13 by its own weight. The flow path of the purge gas is as follows: Figure 6 As shown. The filter material in the filter element 2 is blown away by back-blowing the filter chamber 14, and the filter material is cleaned out of the filter chamber 14 at the bottom of the cylinder 11.

[0086] In some embodiments, the condenser 30 and the filter 10, and the filter 10 and the air extraction device 20 are connected by flexible pipes, wherein the flexible pipes can be corrugated pipes.

[0087] The embodiments of the exhaust gas treatment device 100 of this application have been described in detail above. The embodiments of the processing equipment of this application are described in detail below. It should be understood that the description of the embodiments of the exhaust gas treatment device 100 corresponds to the description of the embodiments of the processing equipment. Therefore, any parts not described in detail can be referred to the previous embodiments of the exhaust gas treatment device 100.

[0088] The processing equipment in this application embodiment includes a process chamber and an exhaust gas treatment device 100. The process chamber has a process cavity, and the exhaust gas treatment device 100 is any of the exhaust gas treatment devices 100 described above. The air inlet 121 is connected to the process cavity.

[0089] For example, the processing equipment is a boron diffusion equipment, a phosphorus diffusion equipment, etc. The process chamber includes a furnace body, which is a boron diffusion furnace, a phosphorus diffusion furnace, etc. The furnace body has a process chamber, and a tailpipe is provided inside the furnace body. One end of the tailpipe is connected to the process chamber, and the other end of the tailpipe is connected to the inlet of the condensation device 30. The tail gas treatment device 100 is used to treat the tail gas discharged from the process chamber.

[0090] For example, the processing equipment includes a gas supply device for supplying process gas to the process chamber. The purge gas can also be a process gas, and in this case, the purge gas can be supplied through the gas supply device. For example, the process gas includes nitrogen, and the purge gas is nitrogen.

[0091] By improving the ease of maintenance and efficiency of the exhaust gas treatment device 100, the output of the processing equipment can be increased.

[0092] For example, during the processing equipment's operation, the exhaust gas discharged from the process chamber is treated by the exhaust gas treatment device 100. After the processing equipment completes its operation, when the silicon wafer is removed and maintenance of the filter device 10 is required, purge gas is introduced into the filter chamber 14 through the purge port 123 to perform maintenance on the filter device 10. This allows for maintenance without shutting down the machine, and the filter element 2 does not need to be disassembled during maintenance, greatly improving the convenience of maintaining the filter device 10. Furthermore, the filter element 2 is made of metal, allowing for its reuse and reducing the frequency of replacement. The replacement cycle of the filter element 2 can be extended to 30 days.

[0093] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not restrict the application from being implemented using the specific details described above.

[0094] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0095] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0096] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0097] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A filtration device, characterized in that, include: The housing includes a cylindrical body, a mounting base, and a receiving base. The mounting base is provided with an air inlet, an air outlet, and a purge port. The mounting base blocks the opening at the top of the cylindrical body and is connected to the cylindrical body. The receiving base blocks the opening at the bottom of the cylindrical body and is detachably connected to the cylindrical body. The cylindrical body, the mounting base, and the receiving base form a filter chamber. A filter element is disposed in the filter chamber and divides the filter chamber into a first channel and a second channel. The first channel is connected to the air inlet, and the second channel is connected to the air outlet. Gas can be exchanged between the first channel and the second channel through the filter element. The purge port is connected to the second channel.

2. The filtration device according to claim 1, characterized in that, The receiving seat is connected to the cylinder by a clamp.

3. The filtration device according to claim 2, characterized in that, The bottom of the cylinder is provided with a flange, and the opening at the bottom of the cylinder is located inside the flange. The receiving seat includes an annular connecting part, and the clamp is provided with a groove facing inward. Both the flange and the connecting part are located in the groove.

4. The filtration device according to claim 3, characterized in that, The surface of the flange away from the connecting portion is a first inclined surface, which gradually slopes towards the connecting portion from the inside out. The slot includes a first slot sidewall that fits against the first inclined surface; and / or... The surface of the connecting part away from the flange is a second inclined surface, which gradually slopes towards the flange from the inside out. The slot includes a second slot sidewall, which fits against the second inclined surface.

5. The filtration device according to any one of claims 1-4, characterized in that, The cylindrical body includes: The filter element is disposed on the side of the variable diameter section near the mounting base, and the inner diameter of the variable diameter section gradually decreases in the direction away from the mounting base; A connecting section is provided on the side of the variable diameter section away from the mounting base. The maximum inner diameter of the connecting section is less than or equal to the minimum inner diameter of the variable diameter section. An opening at the bottom of the cylinder is provided in the connecting section. The receiving base is detachably connected to the connecting section.

6. The filtration device according to any one of claims 1-4, characterized in that, The support is a support plate.

7. The filtration device according to any one of claims 1-4, characterized in that, The filter element is closed at one end near the receiving seat to separate the filter chamber into the first channel and the second channel; the filter element is open at one end near the mounting seat to allow the second channel to communicate with the purge port; and / or, The filter element is made of a rigid material.

8. The filtration device according to any one of claims 1-4, characterized in that, The air inlet and the air outlet are located on the radial sides of the mounting base, and the purge port is located on the top of the mounting base.

9. A tail gas treatment device, characterized in that, include: The filtration device is the filtration device according to any one of claims 1-8; An exhaust device is provided, which is connected to the filter device, and is used to extract exhaust gas.

10. A processing device, characterized in that, include: A process cavity, wherein the process cavity has a process chamber; An exhaust gas treatment device, wherein the exhaust gas treatment device is the exhaust gas treatment device according to claim 9, and the air inlet is connected to the process chamber.

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