A dry adsorption device for exhaust gas

Abstract

The utility model relates to disclose a kind of waste gas dry adsorption device, the waste gas dry adsorption device includes: filter material bucket, the both ends of filter material bucket have air inlet and air outlet;Filter material packed bed, filter material packed bed is set in filter material bucket and is located between air inlet and air outlet, filter material packed bed is used to adsorb target gas in waste gas;Waste gas detection unit, waste gas detection unit is used to detect the concentration of target gas at two preset detection positions on air inlet and filter material packed bed, the distance of two preset detection positions from air inlet is different;Transmission interface, located outside filter material bucket, transmission interface is signal connected with waste gas detection unit, transmission interface is used to the concentration of target gas detected by waste gas detection unit to processing unit output, to make processing unit according to the concentration of received target gas, determine the use state of filter material packed bed in filter material bucket.The waste gas dry adsorption device can make processing unit more accurately predict the use state of filter material packed bed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a dry adsorption device for waste gas. Background Technology

[0002] Arsine / phosphine are essential process gases in the manufacture of N-type doped silicon-based chips, gallium arsenide (GaAs) chips, gallium arsenide phosphide (GaAsP) chips, and compound semiconductor chips. These chip types utilize arsine during manufacturing processes, forming the desired N-type doped regions through epitaxial growth, ion implantation, and diffusion. The arsenic-containing waste gas generated in these processes is typically treated using a local scrubber. Dry adsorption with filter media efficiently removes the target gas from the waste gas, ensuring emissions meet environmental standards, protecting the environment and human health, and improving process safety and stability. However, dry adsorption filter media have a limited lifespan. Due to uncertainties in the production process and filter media performance, the actual lifespan of the filter media is highly uncertain. Currently, there is no good way to predict the lifespan of dry adsorption equipment filter media; the only method is to install sensors or color-changing balls at the outlet to display and notify when the equipment is nearing the end of its lifespan. This can, to some extent, affect normal production or negatively impact production costs and environmental protection. Utility Model Content

[0003] This invention provides a dry adsorption device for waste gas, which enables the treatment unit to more accurately predict the usage status of the filter media bed, thereby improving the operational efficiency of the normal production process and benefiting environmental protection.

[0004] To achieve the above objectives, this utility model provides the following technical solution: A dry adsorption device for waste gas includes: A filter media container, wherein the filter media container has an air inlet and an air outlet at both ends; A filter media packed bed is disposed inside the filter media tank and located between the air inlet and the air outlet. The filter media packed bed is used to adsorb the target gas in the waste gas. An exhaust gas detection unit is used to detect the concentration of the target gas at the air inlet and the concentration of the target gas at two preset detection positions on the filter media bed. The two preset detection positions are at different distances from the air inlet. A transmission interface is located outside the filter media tank. The transmission interface is signal-connected to the exhaust gas detection unit. The transmission interface is used to output the concentration of the target gas detected by the exhaust gas to the processing unit, so that the processing unit can determine the usage status of the filter media packing bed in the filter media tank based on the received concentration of the target gas.

[0005] Optionally, it includes three gas detection sensors, the three gas detection sensors including a first gas detection sensor and two second gas detection sensors; The first gas detection sensor is located at the air inlet and is used to detect the concentration of the target gas at the air inlet; The two second gas detection sensors are respectively located at the two preset detection positions, and the second gas detection sensors are used to detect the concentration of the target gas at the preset detection position where they are located; The first gas detection sensor and the second gas detection sensor are signal connected to the transmission interface.

[0006] Optionally, it includes two breathable containers, which are respectively located at two preset detection positions, and the breathable containers have vents. The two second gas detection sensors are located inside the two permeable containers, respectively.

[0007] Optionally, it also includes a first connection channel and two second connection channels; The first end of the first connecting channel is located at the air inlet, and the second end of the first connecting channel extends out of the filter media barrel; The two second connecting channels correspond one-to-one with the two breathable containers. The first end of the second connecting channel is connected to the corresponding breathable container, and the second end of the second connecting channel extends out of the filter media barrel. The first gas detection sensor is connected to a first connecting line, which is connected to the transmission interface by passing through the first connecting line channel. The second gas detection sensor is connected to a second connecting line, which is connected to the transmission interface by passing through the second connecting channel.

[0008] Optionally, the exhaust gas detection unit includes a gas detection sensor; It also includes three external sampling chambers located outside the filter media tank. One of the external sampling chambers is connected to the air inlet, and the other two external sampling chambers are respectively connected to two preset detection positions. The gas detection sensor is used to detect the concentration of the target gas in the three external sampling chambers respectively.

[0009] Optionally, the gas detection sensor is a photoionization sensor.

[0010] Optionally, the processing unit is used for: Based on the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the previous moment, the processing efficiency of the target gas at the preset detection position at the previous moment is determined. Based on the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the current moment, the processing efficiency of the target gas at the preset detection position at the current moment is determined. Based on the processing efficiency of target gas at different preset detection locations at the same time and the processing efficiency of target gas at the same preset detection location at different times, the ratio of the usage time of the filter media bed at the current time to the total usage time of the filter media bed is determined.

[0011] Optionally, the processing unit is used for: The processing efficiency of the target gas at the preset detection position is determined according to the following formula; ; in, The concentration of the target gas at the air inlet. The concentration of the target gas at a specific location in the filter media packed bed. This refers to the processing efficiency at this location in the filter media packed bed.

[0012] Optionally, the two preset detection positions include a first detection position and a second detection position. The thickness of the filter bed between the first detection position and the first end of the filter bed is the first bed thickness, and the thickness of the filter bed between the second detection position and the first end of the filter bed is the second bed thickness. The first end of the filter bed is adjacent to the air inlet, and the process of the filter bed adsorbing the target gas conforms to the Bohart-Adams model. The processing unit is used for: The current usage time of the filter media bed and the total usage time of the filter media bed are determined according to the following formulas;

[0013] in, For the parameters in the Bohart-Adams model set, This represents the maximum adsorption capacity of adsorbent per unit volume in a filter media packed bed. The velocity of the exhaust gas at the air inlet is [value missing]. The first bed is the thickest. For the second thickest bed, For the thickness of the filter media bed, This represents the processing efficiency of the target gas at the first detection location at the current moment. This represents the processing efficiency of the target gas at the second detection position at the current moment. This represents the processing efficiency of the target gas at the first detection position at the previous moment. To achieve the minimum processing efficiency of the filter media packed bed, This represents the current usage time of the filter media bed. This represents the usage time of the filter media bed mentioned in the previous moment. The time difference between the current moment and the previous moment. This refers to the total service life of the filter media packed bed.

[0014] This utility model also provides a method for monitoring filter media lifespan, using any of the waste gas dry adsorption devices provided in the above technical solutions, the method comprising: The concentration of the target gas at the air inlet and the concentration of the target gas at the two preset detection positions are obtained; The usage status of the filter media packing bed in the filter media tank is determined based on the concentration of the target gas at the air inlet and the concentration of the target gas at the two preset detection positions.

[0015] Optionally, it includes: Based on the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the previous moment, the processing efficiency of the target gas at the preset detection position at the previous moment is determined. Based on the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the current moment, the processing efficiency of the target gas at the preset detection position at the current moment is determined. Based on the processing efficiency of target gas at different preset detection locations at the same time and the processing efficiency of target gas at the same preset detection location at different times, the ratio of the usage time of the filter media bed at the current time to the total usage time of the filter media bed is determined.

[0016] Optionally, it includes: The processing efficiency of the target gas at the preset detection position is determined according to the following formula; ; in, The concentration of the target gas at the air inlet. The concentration of the target gas at a specific location in the filter media packed bed. This refers to the processing efficiency at this location in the filter media packed bed.

[0017] Optionally, the two preset detection positions include a first detection position and a second detection position, the filter bed thickness between the first detection position and the first end of the filter bed is the first bed thickness, the filter bed thickness between the second detection position and the first end of the filter bed is the second bed thickness, and the first end of the filter bed is adjacent to the air inlet; The filter media life monitoring method includes: The current usage time of the filter media bed and the total usage time of the filter media bed are determined according to the following formulas;

[0018] in, For the parameters in the Bohart-Adams model set, This represents the maximum adsorption capacity of adsorbent per unit volume in a filter media packed bed. The velocity of the exhaust gas at the air inlet is [value missing]. The first bed is the thickest. For the second thickest bed, For the thickness of the filter media bed, This represents the processing efficiency of the target gas at the first detection location at the current moment. This represents the processing efficiency of the target gas at the second detection position at the current moment. This represents the processing efficiency of the target gas at the first detection position at the previous moment. To achieve the minimum processing efficiency of the filter media packed bed, This represents the current usage time of the filter media bed. This represents the usage time of the filter media bed mentioned in the previous moment. The time difference between the current moment and the previous moment. This refers to the total service life of the filter media packed bed.

[0019] This utility model provides a dry adsorption device for waste gas. The device includes a filter media tank, a filter media bed inside the tank, a waste gas detection unit, and a transmission interface outside the tank. The detection unit detects the concentration of the target gas at two preset detection locations on the filter media bed, at the inlet. The transmission interface outputs the detected target gas concentration to a processing unit, enabling the processing unit to determine the usage status of the filter media bed based on the received target gas concentration. In this dry adsorption device, the concentration of the target gas in the waste gas is detected at multiple locations, including the inlet of the filter media tank and the preset detection locations on the filter media bed. Based on the concentration values ​​of the target gas at these multiple locations within the filter media tank, the processing unit can more accurately predict the usage status of the filter media bed, which is beneficial for improving the operational efficiency of normal production processes and for environmental protection. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a dry adsorption device for waste gas provided in an embodiment of the present invention; Figure 2 A diagram illustrating the working state of a dry adsorption device for waste gas provided in this embodiment of the present invention; Figure 3 This is a flowchart illustrating a method for monitoring the lifespan of filter media provided in an embodiment of the present invention.

[0021] icon: 1-Filter media tank; 11-Air inlet; 12-Air outlet; 2-Filter media packing bed; 3-Exhaust gas detection unit; 31-First gas detection sensor; 32-Second gas detection sensor; 4-Permeable container; 51-First wiring channel; 52-Second wiring channel. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please refer to Figure 1 This utility model provides a dry adsorption device for waste gas, comprising: The filter media container 1 has an air inlet 11 and an air outlet 12 at both ends; The filter media packing bed 2 is set inside the filter media tank 1 and located between the air inlet 11 and the air outlet 12. The filter media packing bed 2 is used to adsorb the target gas in the waste gas. The exhaust gas detection unit 3 is used to detect the concentration of the target gas at the air inlet 11 and the concentration of the target gas at two preset detection positions on the filter media bed 2. The two preset detection positions are at different distances from the air inlet 11. The transmission interface is located outside the filter media tank 1. The transmission interface is connected to the exhaust gas detection unit 3 for signal transmission. The transmission interface is used to output the concentration of the target gas detected by the exhaust gas detection unit 3 to the processing unit, so that the processing unit can determine the usage status of the filter media filling bed 2 in the filter media tank 1 based on the concentration of the target gas received.

[0024] The waste gas dry adsorption device provided in this embodiment includes a filter media tank 1, a filter media bed 2 located inside the filter media tank 1, a waste gas detection unit 3, and a transmission interface located outside the filter media tank 1. The waste gas detection unit 3 can detect the concentration of the target gas at the air inlet and two preset detection positions on the filter media bed 2. The transmission interface is used to output the concentration of the target gas detected by the waste gas detection unit to the processing unit, enabling the processing unit to determine the usage status of the filter media bed 2 in the filter media tank 1 based on the received target gas concentration. In the above-mentioned waste gas dry adsorption device, the concentration of the target gas in the waste gas can be detected at multiple locations, such as the air inlet 11 of the filter media tank 1 and the preset detection positions on the filter media bed 2. Based on the concentration values ​​of the target gas at multiple locations in the filter media tank 1, the processing unit can more accurately predict the usage status of the filter media bed 2, which is beneficial to improving the operational efficiency of the normal production process and environmental protection.

[0025] Specifically, the target gas in the aforementioned exhaust gas can be arsine or phosphine, or other gases; there are no restrictions here, and it depends on the actual situation.

[0026] During operation, the above-mentioned dry adsorption device for waste gas allows waste gas to be input into the filter media tank 1 through the inlet 11. The filter media bed 2 in the filter media tank 1 adsorbs the target gas in the waste gas and purifies it. The treated waste gas can be discharged into the atmosphere through the outlet 12. Accurate detection of the usage status of the filter media bed 2 is beneficial to improving the operational efficiency of the normal production process and to environmental protection.

[0027] Specifically, there can be two or more preset detection locations, which is not limited here and depends on the actual situation. The exhaust gas detection unit 3 can detect the concentration of the target gas at each preset detection location.

[0028] In this embodiment of the invention, the waste gas dry adsorption device may include three gas detection sensors, which may include a first gas detection sensor 31 and two second gas detection sensors 32. The first gas detection sensor is located at the air inlet 11 and is used to detect the concentration of the target gas at the air inlet 11. The two second gas detection sensors 32 are respectively located at two preset detection positions and are used to detect the concentration of the target gas at their respective preset detection positions. The first gas detection sensor 31 and the second gas detection sensor 32 are connected to the transmission interface for signal connection.

[0029] The aforementioned dry adsorption device for exhaust gas, through the setting of a first gas detection sensor 31 and two second gas detection sensors 32, can detect the concentration of the target gas at the inlet 11 and the concentration of the target gas at the preset detection position in real time. It has a simple structure and is easy to set up.

[0030] In this embodiment of the utility model, the waste gas dry adsorption device may further include two breathable containers 4, which are located at two preset detection positions respectively, and the breathable containers 4 have air vents; two second gas detection sensors 32 are located in the two breathable containers 4 respectively.

[0031] In the above-mentioned dry adsorption device for waste gas, the permeable container 4 is set at the preset detection position. The waste gas that passes through the filter material around the permeable container 4 can enter the permeable container 4 through the vent holes. The second gas detection sensor 32 can detect the concentration of the target gas inside the permeable container 4. The permeable container 4 can provide space for the second gas detection sensor 32 to detect the concentration of the target gas, which is convenient for the detection of the concentration of the target gas.

[0032] In this embodiment of the present invention, the waste gas dry adsorption device may further include a first connecting channel 51 and two second connecting channels 52; wherein, the first end of the first connecting channel 51 is located at the air inlet 11, and the second end of the first connecting channel 51 extends out of the filter media barrel 1; the two second connecting channels 52 correspond one-to-one with two permeable containers 4, the first end of the second connecting channel 52 is connected to the corresponding permeable container 4, and the second end of the second connecting channel 52 extends out of the filter media barrel 1.

[0033] Specifically, the second ends of the first connecting channel 51 and the second connecting channel 52 can extend out of the filter media 1 through the side wall of the filter media 1.

[0034] Specifically, the first gas detection sensor 31 is connected to a first connecting line, which is connected to the transmission interface by passing through the first connecting channel 51; the second gas detection sensor 32 is connected to a second connecting line, which is connected to the transmission interface by passing through the second connecting channel 52.

[0035] The above-mentioned dry adsorption device for waste gas has a first connecting line on the first gas detection sensor 31 connected to the transmission interface through the first connecting channel 51, and a second connecting line on the second gas detection sensor 32 connected to the transmission interface through the second connecting channel 52. This enables the first gas detection sensor 31 and the second gas detection sensor 32 inside the filter media tank 1 to connect to the transmission interface outside the filter media tank 1. The device has a simple structure and is easy to manufacture.

[0036] Specifically, the aforementioned breathable container 4, the first connecting channel 51, and the second connecting channel 52 can be made of quartz glass.

[0037] In this embodiment of the present invention, the exhaust gas detection unit 3 may also include only one gas detection sensor; the exhaust gas dry adsorption device may also include three external sampling chambers located outside the filter media barrel 1, one external sampling chamber being connected to the air inlet 11, and the other two external sampling chambers being connected to two preset detection positions respectively, and the gas detection sensor being used to detect the concentration of the target gas in the three external sampling chambers respectively.

[0038] In the aforementioned dry adsorption device for waste gas, a portion of the waste gas at the inlet and two preset detection positions can be led to external sampling chambers to sample the waste gas at the inlet and the two preset detection positions. A single gas detection sensor can be used to detect the gas in the three external sampling chambers sequentially, thereby detecting the concentration of the target gas at the inlet and the concentration of the target gas at the two preset detection positions. This enables time-division multiplexing of the gas detection sensor, reducing the number of gas detection sensors used and saving costs.

[0039] In this embodiment of the invention, the gas detection sensor can be a photoionization sensor (PID) or other gas detection sensors. There are no restrictions here, and the choice depends on the actual situation.

[0040] In this embodiment of the utility model, the processing unit can be used for: The processing efficiency of the target gas at the preset detection position at the previous moment is determined based on the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the previous moment. The processing efficiency of the target gas at the current preset detection position is determined based on the concentration of the target gas at the air inlet and the concentration of the target gas at the current preset detection position. Based on the processing efficiency of target gas at different preset detection locations at the same time and the processing efficiency of target gas at the same preset detection location at different times, determine the ratio of the current usage time of the filter media bed to the total usage time of the filter media bed.

[0041] In the aforementioned dry adsorption device for waste gas, the processing unit determines the ratio of the current usage time of the filter media bed to the total usage time of the filter media bed based on the processing efficiency of the target gas at different preset detection locations at the same time and the processing efficiency of the target gas at the same preset detection location at different times. This allows for real-time monitoring of the usage status of the filter media bed. When the ratio of the current usage time of the filter media bed to the total usage time of the filter media bed is 1, the filter media bed can be replaced. This enables accurate monitoring of the service life of the filter media bed, which is beneficial for improving the operational efficiency of the normal production process and for comparing the performance of the filter media, thereby achieving optimized selection of the filter media.

[0042] Specifically, the exhaust gas detection unit can detect the concentration of the target gas at the air inlet and the preset detection position at regular intervals, enabling real-time monitoring of the usage status of the filter media bed.

[0043] In this embodiment of the utility model, the processing unit can be used for: The processing efficiency of the target gas at the preset detection location is determined according to the following formula; ; in, This represents the concentration of the target gas at the air inlet, in mg / L. This refers to the concentration of the target gas at any location in the filter media packed bed, expressed in mg / L. This refers to the processing efficiency at this location in the filter media packed bed.

[0044] Specifically, the two preset detection positions may include a first detection position and a second detection position. (Based on the formula) If the concentration of the target gas in the exhaust gas at the inlet remains constant, then the processing efficiency of the target gas at the first detection position at the current moment is... , The concentration of the target gas at the first detection position at the current moment, and the processing efficiency of the target gas at the second detection position at the current moment. , The concentration of the target gas at the second detection position at the current moment, and the processing efficiency of the target gas at the first detection position at the previous moment. , The current concentration of the target gas at the first detection position, and the processing efficiency of the target gas at the second detection position at the previous time. , This represents the concentration of the target gas at the second detection position at the previous moment.

[0045] In this embodiment of the invention, the process of adsorbing the target gas by the filter media bed can conform to the Bohart-Adams model.

[0046] The Bohart-Adams model is primarily used to describe breakthrough behavior in the adsorption process of packed filter beds, especially for irreversible rectangular isothermal adsorption processes. Rectangular isothermal adsorption typically occurs when there are numerous active sites on the adsorbent (filter media) surface. When the adsorbate (target gas) comes into contact with these active sites, it is rapidly adsorbed until all active sites are occupied. The Bohart-Adams model assumes that the adsorption process is a first-order reaction, and the adsorption isotherm is a rectangular (irreversible) isotherm. This means that the adsorption process is irreversible, and the adsorption capacity of the adsorbent will not increase further after reaching saturation. Chemisorption typically involves the formation of chemical bonds, and the adsorption process has high selectivity and irreversibility; therefore, chemisorption is often described using the Bohart-Adams model. The adsorption of arsine or phosphine gases with the adsorbent is an irreversible chemisorption, and there are numerous active sites on the adsorbent surface. When the adsorbate (arsenine or phosphine) comes into contact with these active sites, it is rapidly adsorbed until all active sites are occupied. Therefore, the Bohart-Adams model can be used to describe the dry adsorption of arsine or phosphine gases in the embodiments of this invention.

[0047] Specifically, the core formula of the Bohart-Adams model is an exponential equation, which can be simplified as follows: (1); in, The concentration of the target gas at the air inlet is expressed in mg / L. Let t be the concentration of the target gas at any location in the filter media bed at time t, in mg / L; L The thickness of the filter media at this location and between this location and the first end of the filter media bed, in cm; These are the lumped parameters of the Bohart-Adams model, in L / (mg·min); This represents the maximum adsorption capacity of the adsorbent per unit volume in the filter media packed bed, expressed in mg / L. u The velocity of the exhaust gas at the air inlet is expressed in cm / min.

[0048] In this embodiment of the invention, the two preset detection positions include a first detection position and a second detection position. The thickness of the filter media bed between the first detection position and the first end of the filter media bed is the first bed thickness, and the thickness of the filter media bed between the second detection position and the first end of the filter media bed is the second bed thickness. The first end of the filter media bed is adjacent to the air inlet. Specifically, the first bed thickness can be greater than the second bed thickness; or the first bed thickness can be greater than the second bed thickness. Less than the thickness of the second bed ,like Figure 2 As shown, no restrictions are imposed here; the specific dimensions will depend on the actual situation. The first bed thickness... The second thick bed and the bed thickness of the filter media packed bed It can be a known value.

[0049] Based on formula , in formula (1) It can be represented as Substituting this relationship into formula (1) and rearranging it, we can express it as: (2).

[0050] Based on the above formula (2), in this embodiment of the present invention, the processing unit is further used for: The current usage time and total usage time of the filter media bed are determined using the following formulas; (3); (4); (5); (6); (7); in, For the parameters in the Bohart-Adams model set, This represents the maximum adsorption capacity of adsorbent per unit volume in a filter media packed bed. The velocity of the exhaust gas at the air inlet. The first bed is the thickest. For the second thickest bed, For the thickness of the filter media bed, This represents the processing efficiency of the target gas at the first detection location at the current moment. This represents the processing efficiency of the target gas at the second detection position at the current moment. This represents the processing efficiency of the target gas at the first detection position at the previous moment. To achieve the minimum processing efficiency of the filter media packed bed, This represents the current usage time of the filter media bed. This represents the usage time of the filter media bed at the previous moment. The time difference between the current moment and the previous moment. This refers to the total service life of the filter media packed bed.

[0051] for and The processing efficiency of the target gas at the same preset detection location at different times is given by the time difference between the two values. , Given that, substituting into formula (2), we obtain formulas (3) and (5) above. Substituting formulas (3) and (5) into formula (6), we get: (8); Rearranging formula (8), we get: (9).

[0052] for and To determine the processing efficiency of the target gas at the same time at different preset detection locations, we can substitute the two into formula (2) to obtain formulas (3) and (4). From formulas (3) and (4), we can obtain: (10); Rearranging formula (10), we get: (11); In formula (11), ln( ln( ) are abbreviated as a and b respectively. for ,Will Treat as a variable to be determined x and y .

[0053] Formulas (9) and (11) can form a system of equations: (12); Solving the system of equations (12) yields: (13); Calculations can yield x and y The specific value.

[0054] The calculation in formula (13) x and y Substituting the specific values ​​into formula (3), we can obtain the usage time of the filter media bed at the current moment. The specific values ​​and usage duration for: (14); Assuming the maximum allowable concentration of the target gas at the outlet of the filter media packed bed is... Then the concentration of the target gas at the air inlet is Under these conditions, the minimum treatment efficiency of the filter media packed bed is: , ,Will The numerical values ​​and formula (13) obtainedx and y Substituting the values ​​into Formula 7, we can obtain the total service life of the filter media bed. Specific values, total usage time : (14); The ratio of the current usage time of the filter media bed to the total usage time of the filter media bed is: This can reflect the ratio of the service life of the filter media bed. By calculating this ratio in real time, the service status of the filter media bed can be monitored in real time. When the ratio of the service life of the filter media bed to the total service life of the filter media bed at the current moment is 1, the filter media bed can be replaced. This enables accurate monitoring of the service life of the filter media bed, which is beneficial to improving the operational efficiency of the normal production process and also facilitates the comparison of filter media performance, thereby enabling the optimal selection of filter media.

[0055] Specifically, the aforementioned transmission interface and processing unit can be devices on a computer or devices on another processor; there are no restrictions here, and it depends on the actual situation.

[0056] This utility model embodiment also provides a method for monitoring filter media lifespan, applying any of the waste gas dry adsorption devices provided in the above technical solutions, such as... Figure 3 As shown, the methods for monitoring filter media lifespan include: S301: Obtain the concentration of the target gas at the air inlet and the concentration of the target gas at two preset detection positions; S302: Determine the usage status of the filter media packing bed in the filter media tank based on the concentration of the target gas at the air inlet and the concentration of the target gas at the two preset detection positions.

[0057] The filter media life monitoring method provided in this embodiment of the utility model can more accurately predict the usage status of the filter media packing bed by measuring the concentration values ​​of target gases at multiple locations, such as the air inlet in the filter media tank and two preset detection positions on the filter media packing bed. This is beneficial for improving the operational efficiency of the normal production process and for environmental protection.

[0058] In this embodiment of the utility model, the filter media life monitoring method may specifically include: The processing efficiency of the target gas at the preset detection position at the previous moment is determined based on the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the previous moment. The processing efficiency of the target gas at the current preset detection position is determined based on the concentration of the target gas at the air inlet and the concentration of the target gas at the current preset detection position. Based on the processing efficiency of target gas at different preset detection locations at the same time and the processing efficiency of target gas at the same preset detection location at different times, determine the ratio of the current usage time of the filter media bed to the total usage time of the filter media bed.

[0059] In this embodiment of the utility model, the filter media life monitoring method may specifically include: The processing efficiency of the target gas at the preset detection location is determined according to the following formula; ; in, The processing efficiency of the target gas at the preset detection location. The concentration of the target gas at the air inlet. The concentration of the target gas at the preset detection location.

[0060] In this embodiment of the present invention, the two preset detection positions include a first detection position and a second detection position. The thickness of the filter bed between the first detection position and the first end of the filter bed is the first bed thickness, and the thickness of the filter bed between the second detection position and the first end of the filter bed is the second bed thickness. The first end of the filter bed is adjacent to the air inlet. Specific methods for monitoring filter media life include: The current usage time and total usage time of the filter media bed are determined using the following formulas;

[0061] in, For the parameters in the Bohart-Adams model set, This represents the maximum adsorption capacity of adsorbent per unit volume in a filter media packed bed. The velocity of the exhaust gas at the air inlet. The first bed is the thickest. For the second thickest bed, For the thickness of the filter media bed, This represents the processing efficiency of the target gas at the first detection location at the current moment. This represents the processing efficiency of the target gas at the second detection position at the current moment. This represents the processing efficiency of the target gas at the first detection position at the previous moment. To achieve the minimum processing efficiency of the filter media packed bed, This represents the current usage time of the filter media bed. This represents the usage time of the filter media bed at the previous moment. The time difference between the current moment and the previous moment. This refers to the total service life of the filter media packed bed.

[0062] Obviously, those skilled in the art can make various modifications and variations to the embodiments of this utility model without departing from the spirit and scope of this utility model. Therefore, if these modifications and variations of this utility model fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A dry adsorption device for waste gas, characterized in that, include: A filter media container, wherein the filter media container has an air inlet and an air outlet at both ends; A filter media packed bed is disposed inside the filter media tank and located between the air inlet and the air outlet. The filter media packed bed is used to adsorb the target gas in the waste gas. An exhaust gas detection unit is used to detect the concentration of the target gas at the air inlet and the concentration of the target gas at two preset detection positions on the filter media bed. The two preset detection positions are at different distances from the air inlet. A transmission interface is located outside the filter media tank. The transmission interface is signal-connected to the exhaust gas detection unit. The transmission interface is used to output the concentration of the target gas detected by the exhaust gas detection unit to the processing unit, so that the processing unit can determine the usage status of the filter media packing bed in the filter media tank based on the received concentration of the target gas.

2. The waste gas dry adsorption device as described in claim 1, characterized in that, It includes three gas detection sensors, namely a first gas detection sensor and two second gas detection sensors; The first gas detection sensor is located at the air inlet and is used to detect the concentration of the target gas at the air inlet; The two second gas detection sensors are respectively located at the two preset detection positions, and the second gas detection sensors are used to detect the concentration of the target gas at the preset detection position where they are located; The first gas detection sensor and the second gas detection sensor are signal connected to the transmission interface.

3. The waste gas dry adsorption device as described in claim 2, characterized in that, It includes two breathable containers, which are respectively located at two preset detection positions, and each breathable container has a vent. The two second gas detection sensors are located inside the two permeable containers, respectively.

4. The waste gas dry adsorption device as described in claim 3, characterized in that, It also includes a first connection channel and two second connection channels; The first end of the first connecting channel is located at the air inlet, and the second end of the first connecting channel extends out of the filter media barrel; The two second connecting channels correspond one-to-one with the two breathable containers. The first end of the second connecting channel is connected to the corresponding breathable container, and the second end of the second connecting channel extends out of the filter media barrel. The first gas detection sensor is connected to a first connecting line, which is connected to the transmission interface by passing through the first connecting line channel. The second gas detection sensor is connected to a second connecting line, which is connected to the transmission interface by passing through the second connecting channel.

5. The waste gas dry adsorption device as described in claim 1, characterized in that, The exhaust gas detection unit includes a gas detection sensor; It also includes three external sampling chambers located outside the filter media tank. One of the external sampling chambers is connected to the air inlet, and the other two external sampling chambers are respectively connected to two preset detection positions. The gas detection sensor is used to detect the concentration of the target gas in the three external sampling chambers respectively.

6. The waste gas dry adsorption device as described in claim 2 or 5, characterized in that, The gas detection sensor is a photoionization sensor.

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