Multi-degree of freedom shower device

Abstract

The utility model relates to the field of semiconductor manufacturing equipment especially, and it is a kind of multi-degree-of-freedom spraying device, it includes support rod, sliding frame and nozzle, nozzle is connected on sliding frame by first nozzle adjusting mechanism and / or second nozzle adjusting mechanism, and sliding frame is slidingly connected on support rod;First nozzle adjusting mechanism includes spherical joint, and nozzle is fixedly connected on spherical joint;Second nozzle adjusting mechanism includes horizontal adjusting rod and pitch adjusting rod, horizontal adjusting rod is rotatably connected on sliding frame, and rotates in horizontal direction, and pitch adjusting rod is rotatably connected on horizontal adjusting rod, and the rotation axis of pitch adjusting rod is arranged along horizontal direction, and nozzle is fixedly connected on pitch adjusting rod.The utility model is by setting height and angle adjustable sliding frame, and with nozzle adjusting mechanism for adjusting nozzle angle, realize the multi-degree-of-freedom angle adjustment of nozzle in three-dimensional space, effectively improve the adaptability and spraying efficiency of spraying device.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment, and in particular to a multi-degree-of-freedom spraying device. Background Technology

[0002] In the manufacturing process of semiconductor wafers, the spraying device is one of the core equipment for key processes such as cleaning, etching, and developing. Its spraying accuracy, range, and adaptability directly affect the wafer surface treatment effect, processing yield, and equipment versatility.

[0003] In existing technologies, the nozzles of spray devices are typically mounted via fixed brackets or a single drive mechanism, limiting the degree of freedom in adjusting their position, spray angle, and movement trajectory. Specifically, most spray devices can only achieve translation in a single direction (such as along the wafer's radial direction) or rotation at a fixed angle, making it difficult to flexibly adjust the relative position and spray posture of the nozzles to the wafer surface according to the needs of different wafer sizes and different processing steps. For example, when removing residual contaminants from wafer edges, nozzles with a fixed angle are difficult to precisely align with the edge area; when processing wafer surfaces with high aspect ratios, it is impossible to ensure that the liquid fully wets deep holes or trenches by adjusting the spray angle; and when adapting to different wafer sizes, it is often necessary to replace the entire spray assembly, which not only increases equipment maintenance costs but also reduces production efficiency.

[0004] In addition, when multiple nozzles of the existing spraying device work together, the independent adjustment capability of each nozzle is insufficient. It is difficult to achieve personalized spray control according to the processing needs of different areas of the wafer surface and wafer clamping device (such as the differentiated spray intensity between the center and the edge), resulting in poor spray uniformity and easy occurrence of local over-processing or under-processing problems, which in turn affects the wafer processing quality. Utility Model Content

[0005] This utility model aims to solve the above problems and provides a multi-degree-of-freedom spraying device, the technical solution of which is as follows: A multi-degree-of-freedom spraying device includes a support rod, a sliding frame, and nozzles. The number of nozzles is multiple, and they are connected to the sliding frame via a first nozzle adjustment mechanism and / or a second nozzle adjustment mechanism. The support rod extends vertically, and the sliding frame is slidably connected to the support rod. The first nozzle adjustment mechanism includes a ball joint, and the ball joint rotates in three-dimensional space relative to the sliding frame, with the nozzle fixedly connected to the ball joint; The second nozzle adjustment mechanism includes a lateral adjustment rod and a pitch adjustment rod. The lateral adjustment rod is rotatably connected to the sliding frame and rotates in the horizontal direction. The pitch adjustment rod is rotatably connected to the lateral adjustment rod, and the rotation axis of the pitch adjustment rod is set in the horizontal direction. The nozzle is fixedly connected to the pitch adjustment rod.

[0006] Based on the above scheme, the first nozzle adjustment mechanism further includes a ball joint mounting seat and a ball joint locking block. The ball joint mounting seat is fixedly connected to the sliding frame, and the ball joint locking block is detachably connected to the ball joint mounting seat. The ball joint is arranged in the space enclosed between the ball joint mounting seat and the ball joint locking block.

[0007] Preferably, the lateral adjustment rod is mounted on the sliding frame by a lateral adjustment fastening bolt, and the lateral adjustment fastening bolt is arranged in the vertical direction; the lateral adjustment rod is provided with an adjustment rod opening slot, and the pitch adjustment rod is engaged in the adjustment rod opening slot; a pitch adjustment fastening bolt is provided on one side of the lateral adjustment rod in the horizontal direction, and the pitch adjustment fastening bolt is located at the adjustment rod opening slot and is threadedly connected to the side extension of the pitch adjustment rod.

[0008] Preferably, the support rod is cylindrical, and the sliding frame is provided with a sliding frame opening slot. The support rod is engaged in the sliding frame opening slot and rotates relative to the sliding frame. A sliding frame fastening bolt is provided through the sliding frame opening slot, and the sliding frame fastening bolt is threadedly connected to the sliding frame.

[0009] Preferably, a first connecting arm and / or a second connecting arm are fixedly provided on the sliding frame, and the first nozzle adjustment mechanism and the second nozzle adjustment mechanism are respectively connected to the first connecting arm and the second connecting arm.

[0010] Based on the above scheme, a first connecting arm and a second connecting arm are fixedly connected to the sliding frame. A first nozzle adjustment mechanism and a first nozzle are provided on the first connecting arm, and a second nozzle adjustment mechanism and a second nozzle are provided on the second connecting arm. The inner diameter of the first nozzle is smaller than the inner diameter of the second nozzle.

[0011] The beneficial effects of this utility model are as follows: By setting up a sliding frame with adjustable height and angle, and a nozzle adjustment mechanism for adjusting the nozzle angle, the nozzle can be adjusted in three-dimensional space with multiple degrees of freedom. The orientation and posture of the nozzle can be flexibly adjusted according to the requirements of wafer size, processing steps, spraying materials, etc., which can effectively improve the adaptability and spraying efficiency of the spraying device. An outwardly extending connecting arm is installed on the sliding frame, which effectively reduces the size of the device while ensuring the spray range and spray distance, making the device easy to install and leaving room for the operation of other process equipment. The nozzle diameter is differentiated to meet the needs of large-area, high-flow spraying and local, low-flow spraying and cleaning, and to flexibly adapt to different working conditions. Multiple nozzles are installed, and the angle of each nozzle can be adjusted independently to simultaneously complete multi-position and multi-angle spraying. Attached Figure Description

[0012] Figure 1 : A schematic diagram of the structure of this utility model; Figure 2 : Another structural schematic diagram of this utility model; Figure 3 : Schematic diagram of the first nozzle adjustment mechanism of this utility model; Figure 4 : Schematic diagram of the second nozzle adjustment mechanism of this utility model.

[0013] Explanation of reference numerals in the attached figures: 1-Support rod, 2-Sliding frame, 21-Sliding frame opening slot, 22-Sliding frame fastening bolt, 23-First connecting arm, 24-Second connecting arm, 31-Spherical joint mounting seat, 32-Spherical joint locking block, 33-Spherical joint, 34-First nozzle, 41-Horizontal adjustment rod, 42-Horizontal adjustment fastening bolt, 43-Adjustment rod opening slot, 44-Pitch adjustment rod, 45-Pitch adjustment fastening bolt, 46-Second nozzle. Detailed Implementation

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments: In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0015] In the description of this utility model, it should be understood that the terms "center," "length," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," and "inner," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0016] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0017] like Figures 1 to 4 As shown, a multi-degree-of-freedom spraying device includes a support rod 1, a sliding frame 2, and nozzles. The number of nozzles is multiple, and they are connected to the sliding frame 2 through a first nozzle adjustment mechanism and / or a second nozzle adjustment mechanism.

[0018] The support rod 1 extends vertically, and the sliding frame 2 is slidably connected to the support rod 1 vertically, thereby allowing adjustment of the height and position of the sliding frame 2 and each nozzle. After adjustment, it is fixed relative to the support rod 1 to fix the height of each nozzle. Specifically, as shown... Figure 1 and Figure 2 As shown, the support rod 1 is cylindrical, and the sliding frame 2 is provided with a sliding frame opening slot 21. The support rod 1 is engaged in the sliding frame opening slot 21 and rotates and moves relative to the sliding frame 2, thereby realizing the adjustment of the height and horizontal angle of the sliding frame 2.

[0019] To achieve relative fixation between the support rod 1 and the sliding frame 2, a sliding frame fastening bolt 22 is installed through the sliding frame opening slot 21. The sliding frame fastening bolt 22 is threadedly connected to the sliding frame 2. Specifically, the sliding frame fastening bolt 22 is connected to the outer side of the connection position between the sliding frame opening slot 21 and the support rod 1. By tightening the sliding frame fastening bolt 22, the opening size of the sliding frame opening slot 21 is reduced until the support rod 1 is locked in the sliding frame opening slot 21, thus completing the relative fixation.

[0020] Preferably, a first connecting arm 23 and / or a second connecting arm 24 are fixedly mounted on the sliding frame 2, and the first nozzle adjustment mechanism and the second nozzle adjustment mechanism are respectively connected to the first connecting arm 23 and the second connecting arm 24. On the one hand, by extending the size of the sliding frame 2 through the first connecting arm 23 and the second connecting arm 24, the spray distance and spray range of the nozzles are expanded, while the volume of the support rod 1 is not increased, thereby reducing the space occupied by the spraying device; on the other hand, the spraying direction of multiple nozzles on the sliding frame 2 can be adjusted simultaneously, improving spraying and adjustment efficiency. The first connecting arm 23 and the second connecting arm 24 can extend in the horizontal direction or other directions, and the first connecting arm 23 and the second connecting arm 24 can be arranged parallel or non-parallel, and can be adjusted as needed. It should be noted that the number of connecting arms can be more, depending on the actual working conditions, and the scheme with multiple connecting arms is also within the protection scope of this scheme. The fixed connection between the connecting arm and the sliding frame 2 can be integrally formed or detachable.

[0021] The first nozzle adjustment mechanism includes a ball joint 33, which rotates relative to the sliding frame 2 in three-dimensional space. The nozzle is fixedly connected to the ball joint 33, thereby adjusting the nozzle's direction through the rotation of the ball joint 33. Specifically, the first nozzle adjustment mechanism also includes a ball joint mounting base 31 and a ball joint locking block 32. The ball joint mounting base 31 is fixedly connected to the sliding frame 2, and the ball joint locking block 32 is detachably connected to the ball joint mounting base 31. The ball joint 33 is positioned within the space enclosed by the ball joint mounting base 31 and the ball joint locking block 32. This enclosed space can be spherical or partially spherical, facilitating the rotation of the ball joint 33. By adjusting the relative distance between the ball joint locking block 32 and the ball joint mounting base 31, the size of the space is adjusted, thereby changing the flexibility of the ball joint 33's adjustment and its tightness in a fixed position. Preferably, as shown... Figure 3 As shown, the ball joint locking block 32 is connected to the ball joint mounting base 31 by bolts or other connectors, and the positional relationship between the ball joint locking block 32 and the ball joint mounting base 31 can be adjusted by rotating the bolts or other connectors.

[0022] The second nozzle adjustment mechanism includes a lateral adjustment rod 41 and a pitch adjustment rod 44. The lateral adjustment rod 41 is rotatably connected to the sliding frame 2 and rotates in the horizontal direction. The pitch adjustment rod 44 is rotatably connected to the lateral adjustment rod 41, and the rotation axis of the pitch adjustment rod 44 is set in the horizontal direction. The nozzle is fixedly connected to the pitch adjustment rod 44. Specifically, as shown... Figure 4As shown, the lateral adjustment rod 41 is mounted on the sliding frame 2 via a lateral adjustment fastening bolt 42, which is arranged vertically. The lateral adjustment rod 41 has an adjustment rod opening slot 43, into which the pitch adjustment rod 44 is engaged. A pitch adjustment fastening bolt 45 is arranged horizontally on one side of the lateral adjustment rod 41, located at the adjustment rod opening slot 43 and threadedly connected to the side extension of the pitch adjustment rod 44. With this structure, tightening the lateral adjustment fastening bolt 42 and the pitch adjustment fastening bolt 45 can fix or adjust the angles of the lateral adjustment rod 41 and the pitch adjustment rod 44, thereby fixing or adjusting the nozzle angle.

[0023] In a preferred embodiment, a first connecting arm 23 and a second connecting arm 24 are fixedly connected to the sliding frame 2. The first connecting arm 23 is provided with a first nozzle adjustment mechanism and a first nozzle 34, and the second connecting arm 24 is provided with a second nozzle adjustment mechanism and a second nozzle 46. This allows the position of the first nozzle 34 to be adjusted according to the height and angle of the sliding frame 2, and the position of the second nozzle 46, based on the adjustment of the sliding frame 2, can be further adjusted in height, angle, and direction over a wider range through the second nozzle adjustment mechanism.

[0024] Based on the above scheme, the inner diameter of the first nozzle 34 is smaller than the inner diameter of the second nozzle 46, so that the second nozzle 46 can complete large-area, high-flow-rate spraying, and the spraying target can be the wafer center, part or all of a large area, etc.; while the first nozzle 34 can complete small-area spraying of local areas, and the spraying target can be local areas such as wafer edge, wafer gripper, wafer and gripper contact position, etc., which can complete local targeted cleaning.

[0025] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A multi-degree-of-freedom spraying device, characterized in that, It includes a support rod (1), a sliding frame (2) and nozzles, wherein there are multiple nozzles and they are connected to the sliding frame (2) through a first nozzle adjustment mechanism and / or a second nozzle adjustment mechanism; the support rod (1) extends in the vertical direction and the sliding frame (2) is slidably connected to the support rod (1); The first nozzle adjustment mechanism includes a ball joint (33), and the ball joint (33) rotates relative to the sliding frame (2) in three-dimensional space, and the nozzle is fixedly connected to the ball joint (33); The second nozzle adjustment mechanism includes a horizontal adjustment rod (41) and a pitch adjustment rod (44). The horizontal adjustment rod (41) is rotatably connected to the sliding frame (2) and rotates in the horizontal direction. The pitch adjustment rod (44) is rotatably connected to the horizontal adjustment rod (41), and the rotation axis of the pitch adjustment rod (44) is set in the horizontal direction. The nozzle is fixedly connected to the pitch adjustment rod (44).

2. The multi-degree-of-freedom spraying device according to claim 1, characterized in that, The first nozzle adjustment mechanism further includes a ball joint mounting base (31) and a ball joint locking block (32). The ball joint mounting base (31) is fixedly connected to the sliding frame (2), and the ball joint locking block (32) is detachably connected to the ball joint mounting base (31). The ball joint (33) is arranged in the space formed by the ball joint mounting base (31) and the ball joint locking block (32).

3. The multi-degree-of-freedom spraying device according to claim 1, characterized in that, The lateral adjustment rod (41) is mounted on the sliding frame (2) by a lateral adjustment fastening bolt (42), and the lateral adjustment fastening bolt (42) is set in the vertical direction; the lateral adjustment rod (41) is provided with an adjustment rod opening slot (43), and the pitch adjustment rod (44) is snapped into the adjustment rod opening slot (43); a pitch adjustment fastening bolt (45) is set on one side of the lateral adjustment rod (41) in the horizontal direction, and the pitch adjustment fastening bolt (45) is set at the adjustment rod opening slot (43) and threadedly connected to the side extension of the pitch adjustment rod (44).

4. A multi-degree-of-freedom spraying device according to claim 1, characterized in that, The support rod (1) is cylindrical. The sliding frame (2) is provided with a sliding frame opening slot (21). The support rod (1) is engaged in the sliding frame opening slot (21) and rotates relative to the sliding frame (2). A sliding frame fastening bolt (22) is provided through the sliding frame opening slot (21). The sliding frame fastening bolt (22) is threadedly connected to the sliding frame (2).

5. A multi-degree-of-freedom spraying device according to claim 1, characterized in that, The sliding frame (2) is fixedly provided with a first connecting arm (23) and / or a second connecting arm (24), and the first nozzle adjustment mechanism and the second nozzle adjustment mechanism are respectively connected to the first connecting arm (23) and the second connecting arm (24).

6. A multi-degree-of-freedom spraying device according to claim 5, characterized in that, The sliding frame (2) is fixedly connected to a first connecting arm (23) and a second connecting arm (24). The first connecting arm (23) is provided with a first nozzle adjustment mechanism and a first nozzle (34). The second connecting arm (24) is provided with a second nozzle adjustment mechanism and a second nozzle (46). The inner diameter of the first nozzle (34) is smaller than the inner diameter of the second nozzle (46).

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