An automatic solid wax coating device

Abstract

The utility model relates to a kind of solid wax automatic coating device, including heating device and mechanical arm;Heating device includes tool base and heating disc, tool base is detachably set on heating disc, for carrying to be bonded crystal ingot, heating disc is used to heat tool base, so that solid wax is melted to form bonding layer;Mechanical arm includes lifting assembly, linkage rotating multistage swing arm and clamping assembly, lifting assembly is connected with first swing arm, first swing arm is hinged with second swing arm, clamping assembly is set in second swing arm terminal, for clamping and guiding solid wax stick movement;Mechanical arm is configured as the end of solid wax stick in tool base surface forms plane in helical trajectory, and realize the continuous contact and heating of solid wax stick to tool base surface under the synchronous drive of lifting assembly, realize even, controllable wax layer coating.The device solves the problem of uneven wax coating, overflow, inclusion bubble and other problems in the existing silicon carbide crystal ingot bonding process, improves the consistency of coating quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to an automatic solid wax coating device. Background Technology

[0002] In current laser processing and lift-off techniques for silicon carbide ingots, the ingot needs to be effectively bonded to the fixture base to ensure the stability and quality of the processing. In existing technologies, this bonding process is mainly done manually, where operators manually apply adhesive wax to the surface of the fixture base and then press the silicon carbide ingot onto it. However, this manual waxing method has significant limitations.

[0003] First, manual operation suffers from poor stability, making precise control of the bonding wax difficult. The application area is often uncontrollable, causing the wax to overflow onto the sides of the ingot. Once the wax solidifies, it is difficult to remove, severely affecting the cleanliness of the ingot's sides and potentially interfering with subsequent processes. Second, uneven wax thickness can lead to gaps or excessively thick areas on the bonding surface, easily generating air bubbles during bonding and reducing the adhesion strength between the ingot and the fixture base. Furthermore, the presence of air bubbles can also cause uneven heating during laser processing, thus affecting the processing results.

[0004] In summary, existing silicon carbide ingot bonding processes lack automated control methods, and operational quality heavily relies on manual experience. This not only reduces production efficiency but also introduces significant quality fluctuations, limiting the overall performance and capacity of silicon carbide ingot laser processing and peeling processes. Therefore, there is an urgent need for a new process or device capable of automatically and accurately applying bonding wax to improve the consistency of bonding quality and the degree of process automation. Utility Model Content

[0005] In order to overcome the shortcomings of the existing technology, the purpose of this utility model is to provide an automatic solid wax coating device with automatic heating, precise control and programmable path execution capabilities.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: An automatic solid wax coating device includes a heating device and a robotic arm. The heating device includes a fixture base and a heating plate, the fixture base being detachably mounted on the heating plate for heating the fixture base. The robotic arm includes a lifting assembly, a multi-stage swing arm rotating in conjunction with the lifting assembly, and a clamping assembly. The lifting assembly is connected to the multi-stage swing arm and drives it to move vertically. The multi-stage swing arm includes a first swing arm and a second swing arm pivotally connected in sequence. One end of the first swing arm is connected to the lifting assembly, and one end of the second swing arm is connected to the first swing arm. The clamping assembly is located at the other end of the second swing arm and clamps a solid wax rod. The robotic arm is configured to drive the solid wax rod, causing its end to form a spiral trajectory in a plane on the surface of the fixture base. Under the synchronous drive of the lifting assembly, the solid wax rod continuously contacts the surface of the fixture base during the spiral motion, thereby achieving uniform coating of the solid wax.

[0007] Furthermore, the top surface of the heating plate is provided with an adsorption structure for fixing the tooling base by vacuum adsorption.

[0008] Furthermore, the adsorption structure includes multiple annular grooves and multiple mutually perpendicular straight grooves, with the annular grooves and straight grooves intersecting each other. The grooves have an inverted triangular cross section, and the adsorption interface is located at the center of the heating plate.

[0009] Furthermore, the heating device is equipped with a through-beam positioning sensor. The receiving end and the transmitting end of the positioning sensor are respectively installed on both sides of the top of the heating plate and are arranged opposite each other along its radial direction. It is used to send a detection signal when the tooling base is placed in place, so as to control the heating plate to start the adsorption function.

[0010] Furthermore, the heating device includes a temperature sensor mounted on the heating plate to detect the temperature of the heating plate.

[0011] Furthermore, the lifting assembly includes a mounting base plate, an electric lead screw, two guide shafts, and a lifting base plate; the fixed end of the electric lead screw is installed at the bottom of the mounting base plate, and the actuating end passes through the mounting base plate and is connected to the lifting base plate; the mounting base plate is provided with two guide bearings, the two guide shafts pass through the guide bearings, and are connected to the lifting base plate through guide shaft supports set at the bottom of the lifting base plate; the first swing arm is installed on the lifting base plate.

[0012] Furthermore, the first swing arm is connected to the lifting base plate via the first hollow rotating platform. The first hollow rotating platform is installed on the lifting base plate, and a first rotating motor is installed on its rear side. The first swing arm is connected to the first hollow rotating platform. The first rotating motor is connected to the first swing arm.

[0013] Furthermore, a second rotary motor and a second hollow rotary platform are provided at the end of the first swing arm away from the lifting assembly, and the second swing arm is connected to the second hollow rotary platform; the second rotary motor is used to drive the second swing arm to rotate relative to the first swing arm.

[0014] Furthermore, the bottom surface of the second swing arm is provided with a proximity sensor at the end near the clamping assembly, which is used to issue a warning signal when the solid wax rod descends to a predetermined lowest position.

[0015] The aforementioned automatic solid wax coating device, through the linkage mechanism of lifting components, multi-stage swing arms, and clamping components, enables the solid wax rod to form a uniform spiral coating trajectory on the surface of the tooling base, and maintains continuous contact with the heated base surface during the coating process. This achieves automated and precise coating of solid wax, solving the problems of uncontrollable coating range, uneven thickness, wax overflow, and poor adhesion caused by manual wax coating in the prior art. It effectively improves the bonding quality and efficiency of laser processing and peeling of silicon carbide ingots. Attached Figure Description

[0016] Figure 1 This is a structural schematic diagram of the automatic solid wax coating device provided by this utility model; Figure 2 This is a schematic diagram of the heating plate provided by this utility model; Figure 3 This is a left view of the automatic solid wax coating device provided by this utility model; Figure 4 This is a schematic diagram of the wax coating trajectory provided by this utility model. Detailed Implementation

[0017] The technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0018] like Figures 1 to 4 As shown, this application provides an automatic solid wax coating device, the mounting base of which includes a heating device 1 and a robotic arm 2.

[0019] Specifically, the heating device 1 includes a tooling base 11 and a heating plate 12. The tooling base 11 is detachably mounted on the heating plate 12, and the heating plate 12 is used to heat the tooling base 11. The robotic arm 2 includes a lifting assembly 21, a multi-stage swing arm 22 that rotates in conjunction with the lifting assembly 21, and a clamping assembly 23. The lifting assembly 21 is connected to the multi-stage swing arm 22 and is used to drive the multi-stage swing arm 22 to move in the vertical direction. The multi-stage swing arm 22 includes a first swing arm 221 and a second swing arm 222 that are pivotally connected in sequence. One end of the first swing arm 221 is connected to the lifting assembly 21, and one end of the second swing arm 222 is connected to the first swing arm 221. The clamping assembly 23 is located at the other end of the second swing arm 222 and is used to clamp the solid wax rod 4. The robotic arm 2 is configured to drive the solid wax rod 4 so that its end forms a spiral trajectory in the plane on the surface of the tooling base 11, and under the synchronous drive of the lifting assembly 21, the solid wax rod 4 continuously contacts the surface of the tooling base 11 during the spiral motion to achieve uniform coating of solid wax.

[0020] The above setup significantly improves the coating consistency and quality of solid wax. The robotic arm 2 controls the solid wax rod 4 to move uniformly in a spiral motion, maintaining constant contact with the fixture base 11, effectively avoiding common problems in manual operation such as uneven wax thickness, overflow, or air bubbles. Continuous heating from the heating device 1 ensures the wax fully melts upon contact and quickly forms a uniform adhesion, effectively improving the density and adhesion of the bonding layer, which is beneficial for enhancing the processing stability of subsequent silicon carbide ingots. Furthermore, automated operation significantly reduces reliance on manual labor, minimizes human error, and improves production efficiency and process consistency.

[0021] like Figure 2 As shown, the top surface of the heating plate 12 is equipped with an adsorption structure for fixing the fixture base 11 by vacuum adsorption. This adsorption structure replaces the traditional mechanical buckles or limiting methods, simplifying the clamping process, enabling quick loading and unloading and precise positioning, and improving operational efficiency. At the same time, the vacuum adsorption method does not interfere with the heat conduction path on the bottom surface of the fixture base 11, ensuring heating efficiency and temperature control accuracy, and further improving the uniformity of wax coating.

[0022] The adsorption structure includes multiple annular grooves 121 and multiple mutually perpendicular straight grooves 122. The annular grooves 121 and straight grooves 122 are arranged intersectingly, and the grooves have an inverted triangular cross-section. The adsorption interface is located at the center of the heating plate 12. The combined layout of the annular grooves 121 and straight grooves 122 ensures comprehensive and thorough adsorption coverage, improving adsorption stability. The inverted triangular cross-section enhances the grooves' ability to seal the edges of the tooling base, reducing the probability of leakage and effectively improving vacuum holding power. The central adsorption interface has a simple layout and is easy to maintain, contributing to maximizing the efficiency of the vacuum system.

[0023] The heating device 1 is equipped with a through-beam positioning sensor 13. The receiving end and the transmitting end of the positioning sensor 13 are respectively installed on both sides of the top of the heating plate 12, arranged radially opposite each other. It is used to send a detection signal when the tooling base 11 is in place, so as to control the heating plate 12 to start the adsorption function. This structure can greatly improve the degree of automation and safety of operation; it can prevent adsorption when the tooling base 11 is not fully in place, prevent adsorption failure or workpiece slippage caused by position deviation, and ensure the accuracy and consistency of the subsequent wax coating process.

[0024] The heating device 1 includes a temperature sensor 14, which is installed on the heating plate 12 to detect the temperature of the heating plate 12. This effectively avoids the problem of wax carbonization due to overheating or insufficient melting of wax due to insufficient heating, thereby improving the uniformity and adhesion of the coating.

[0025] like Figure 1 and Figure 3 As shown, the lifting assembly 21 includes a mounting base 211, an electric lead screw 212, two guide shafts 213, and a lifting base plate 214. The fixed end of the electric lead screw 212 is mounted on the bottom of the mounting base 211, and the actuating end passes through the mounting base 211 and is connected to the lifting base plate 214. Two guide bearings 215 are provided on the mounting base 211, and the two guide shafts 213 pass through the guide bearings 215 and are connected to the lifting base plate 214 via guide shaft supports 216 located at the bottom of the lifting base plate 214. A first swing arm 221 is mounted on the lifting base plate 214. This structural design provides high stability and high precision lifting control capabilities, ensuring that the solid wax rod 4 maintains constant contact with the surface of the tooling base 11 during movement, thereby achieving continuous uniform wax film coverage. The total stroke of the guide shaft 213 is greater than the total stroke of the electric lead screw 212, with a difference of 10-50 mm, to prevent damage to the guide structure.

[0026] The first swing arm 221 is connected to the lifting base plate 214 via the first hollow rotating platform 51. The first hollow rotating platform 51 is mounted on the lifting base plate 214, and the first rotary motor 52 is mounted on its rear side. The first swing arm 221 is connected to the first hollow rotating platform 51, and the first rotary motor 52 is connected to the first swing arm 221. The structure of the first hollow rotating platform 51 enables stable rotation of the first swing arm 221, improving the overall integration and reliability of the mechanism. The first rotary motor 52 has a large output torque and high positioning accuracy, making it suitable for precise position control of the solid wax rod 4, improving the controllability and consistency of the coating path.

[0027] The first swing arm 221, at its end furthest from the lifting assembly 21, is equipped with a second rotary motor 223 and a second hollow rotary platform 224. The second swing arm 222 is connected to the second hollow rotary platform 224. The second rotary motor 223 drives the second swing arm 222 to rotate relative to the first swing arm 221. Compared to a single swing arm structure, the double swing arm configuration not only expands the range of motion but also improves path programmability and controllability, enabling it to adapt to tooling bases 11 of different sizes and shapes. This structure effectively avoids uneven coating of the wax rod 4 due to insufficient trajectory coverage, while allowing for optimized motion paths to reduce repeated coverage and processing time, thus improving efficiency.

[0028] The bottom surface of the second swing arm 222 is provided with a proximity sensor 225 at one end near the clamping assembly 23. This sensor is used to issue a warning signal when the solid wax rod 4 descends to the predetermined lowest position, which can effectively prevent mechanical overshoot and equipment damage caused by program errors or operational mistakes.

[0029] The above description of embodiments of the present invention, through which those skilled in the art are able to implement or use the present invention, will be readily apparent to those skilled in the art. Various modifications to these embodiments will be readily apparent to those skilled in the art. The general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novelty disclosed herein.

Claims

1. An automatic solid wax coating device, comprising a heating device (1) and a robotic arm (2), characterized in that: The heating device (1) includes a tooling base (11) and a heating plate (12). The tooling base (11) is detachably mounted on the heating plate (12), and the heating plate (12) is used to heat the tooling base (11). The robotic arm (2) includes a lifting assembly (21), a multi-stage swing arm (22) that rotates in conjunction with the lifting assembly (23). The lifting assembly (21) is connected to the multi-stage swing arm (22) and is used to drive the multi-stage swing arm (22) to move in the vertical direction; The multi-stage swing arm (22) includes a first swing arm (221) and a second swing arm (222) pivotally connected in sequence. One end of the first swing arm (221) is connected to the lifting assembly (21), and one end of the second swing arm (222) is connected to the first swing arm (221). The clamping assembly (23) is located at the other end of the second swing arm (222) and is used to clamp the solid wax rod (4). The robotic arm (2) is configured to drive the solid wax rod (4) so ​​that its end forms a spiral trajectory in the plane on the surface of the tooling base (11), and under the synchronous drive of the lifting component (21), the solid wax rod (4) continuously contacts the surface of the tooling base (11) during the spiral motion, so as to achieve uniform coating of solid wax.

2. The automatic solid wax coating device as described in claim 1, characterized in that, The heating plate (12) has an adsorption structure on its top surface, which is used to fix the tooling base (11) by vacuum adsorption.

3. The automatic solid wax coating device as described in claim 2, characterized in that, The adsorption structure includes multiple annular grooves (121) and multiple mutually perpendicular straight grooves (122). The annular grooves (121) and the straight grooves (122) are arranged intersectingly. The grooves have an inverted triangular cross section, and the adsorption interface is located at the center of the heating plate (12).

4. The automatic solid wax coating device as described in claim 1, characterized in that, The heating device (1) is equipped with a through-beam positioning sensor (13). The receiving end and the transmitting end of the positioning sensor (13) are respectively installed on the top two sides of the heating plate (12) and are arranged opposite each other along its radial direction. It is used to send a detection signal when the tooling base (11) is placed in place, so as to control the heating plate (12) to start the adsorption function.

5. The automatic solid wax coating device as described in claim 1, characterized in that, The heating device (1) includes a temperature sensor (14), which is installed on the heating plate (12) and is used to detect the temperature of the heating plate (12).

6. The automatic solid wax coating device as described in claim 1, characterized in that, The lifting assembly (21) includes a mounting base plate (211), an electric lead screw (212), two guide shafts (213), and a lifting base plate (214). The fixed end of the electric lead screw (212) is installed at the bottom of the mounting base plate (211), and the actuating end passes through the mounting base plate (211) and is connected to the lifting base plate (214). The mounting base plate (211) is provided with two guide bearings (215), and the two guide shafts (213) pass through the guide bearings (215) and are connected to the lifting base plate (214) through the guide shaft mounting base plate (216) provided at the bottom of the lifting base plate (214). The first swing arm (221) is mounted on the lifting base plate (214).

7. The automatic solid wax coating device as described in claim 6, characterized in that, The first swing arm (221) is connected to the lifting base plate (214) via the first hollow rotating platform (51). The first hollow rotating platform (51) is installed on the lifting base plate (214), and a first rotating motor (52) is installed on its rear side. The first swing arm (221) is connected to the first hollow rotating platform (51). The first rotating motor (52) is connected to the first swing arm (221).

8. The automatic solid wax coating device as described in claim 1, characterized in that, The first swing arm (221) is provided with a second rotary motor (223) and a second hollow rotary platform (224) at one end away from the lifting assembly (21), and the second swing arm (222) is connected to the second hollow rotary platform (224); the second rotary motor (223) is used to drive the second swing arm (222) to rotate relative to the first swing arm (221).

9. The automatic solid wax coating device as described in claim 1, characterized in that, The bottom surface of the second swing arm (222) is provided with a proximity sensor (225) at one end near the clamping assembly (23) for issuing a warning signal when the solid wax rod (4) descends to a predetermined lowest position.

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