Liquid inlet flow stabilizer

CN224894623UActive Publication Date: 2026-10-27TITANIUM (SUZHOU) TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202522563015.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-02
Publication Date
2026-10-27
Estimated Expiration
2035-12-02

AI Technical Summary

Technical Problem

[0004]一方面,初始流速动能难以有效耗散,造成后续腔体内的流体紊流、冲击及流向不均,影响稳流效果;

Benefits of technology

[0035]其一,实现流体逐级稳流与动能耗散,提高液体分配均匀性。通过设置多级串联腔室与相邻腔室之间的均流构件,使得流体在每一级过渡中均可进行动能耗散与速度平衡,显著降低流速差异与紊流现象,从而提升整体流体稳定性,适用于铜箔液等对膜厚均匀性要求高的加工场景。

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a kind of liquid inlet steady flow device, including liquid inlet unit, at least two chambers sequentially communicated along fluid flow direction, flow equalizing component being arranged between adjacent chambers and guiding structure being arranged at the liquid outlet end of last stage chamber. By arranging flow equalizing component with through-flow hole between multiple chambers, liquid kinetic energy can be dissipated step by step, and flow rate balance is achieved. Guiding structure is provided at the end to guide the liquid outlet direction, effectively reducing turbulence, and improving liquid outlet stability and uniformity. The device has compact structure and high shunt precision, and is suitable for industrial application scenarios with high requirements for fluid steady flow and uniformity.
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Description

Technical Field

[0001] This utility model relates to the field of fluid control technology, and more specifically, to a liquid inlet flow stabilization device. Background Technology

[0002] In the coating or pretreatment processes of functional thin film materials such as copper foil and battery electrodes, liquid raw materials (such as coating solutions and additive mixtures) typically need to be distributed to the working tank or coating head at a stable and uniform flow rate to ensure consistent product thickness, no dripping at the edges, and uniform performance distribution. Therefore, the flow stabilization and guiding capabilities of the distribution device directly affect the quality stability of the final product.

[0003] Existing fluid distribution systems mostly employ single-stage flow stabilization or simple buffer tank structures. While these can mitigate flow rate fluctuations caused by high-pressure inlet to some extent, they are prone to the following problems when dealing with large flow rates of liquid:

[0004] On the one hand, the initial flow velocity kinetic energy is difficult to dissipate effectively, causing turbulence, impact and uneven flow direction of the fluid in the subsequent cavity, which affects the flow stabilization effect;

[0005] On the other hand, at the liquid outlet, without a targeted guiding structure for diversion and pressure guidance, it is very easy to cause flow deviation and local accumulation, which in turn leads to uneven film thickness or fluid accumulation at the edges.

[0006] Especially in the copper foil production process, the uniformity of liquid coating is directly related to the conductivity, consistency and subsequent coating adhesion performance of the finished product. Therefore, higher requirements are placed on the flow stabilization structure, multi-stage dissipation capacity and flow direction guidance capacity of the diversion device.

[0007] Therefore, there is an urgent need for a liquid inlet stabilization device with a more reasonable structure, stronger flow stabilization capability, and higher consistency in liquid output, in order to meet the consistency control requirements of high-quality copper foil liquid processing. Utility Model Content

[0008] The purpose of this application is to provide a liquid inlet flow stabilization device. By sequentially setting multiple chambers and flow equalization components in the liquid inlet path, the fluid kinetic energy is dissipated step by step, resulting in a significant flow stabilization effect. At the same time, a guide structure with flow diversion and guidance function is introduced after the last chamber to achieve effective control and spatial dispersion of the liquid outflow direction, significantly reduce turbulence, improve the uniformity of fluid spreading in the working tank, and ensure product thickness consistency and processing quality.

[0009] A liquid inlet flow stabilizing device, comprising:

[0010] The liquid inlet unit, at least two chambers connected sequentially along the fluid flow direction, a flow equalization component disposed between adjacent chambers, and a guide structure disposed at the liquid outlet end of the last stage chamber;

[0011] The inlet unit is configured to introduce fluid, the chamber is configured to perform step-by-step flow stabilization treatment on the fluid, the flow equalization component is provided with multiple conveying orifices to dissipate the kinetic energy of the fluid output from the previous chamber, so that the fluid achieves flow velocity balance when entering the next chamber; the guide structure is configured to disperse and guide the fluid outlet direction to reduce turbulence and improve the uniformity of the outlet.

[0012] It is important to note that the "precision fluid distribution" discussed in this article specifically refers to the high-precision control of fluid velocity, pressure, and distribution. Among these, "stepwise flow stabilization" is achieved through the synergistic effect of multi-chamber volumetric buffering and the kinetic energy dissipation of flow equalization components. This differs from the traditional single-chamber flow stabilization method, which relies solely on volumetric buffering. It can effectively eliminate velocity differences caused by pipeline fluctuations and pressure changes during fluid transport.

[0013] In one embodiment, the total flow area of ​​the flow equalization component located between the upstream chambers is greater than the flow area of ​​the liquid inlet unit to achieve an overflow-type flow stabilization effect; the total flow area of ​​the guide structure at the liquid outlet end of the last stage chamber is less than the flow area of ​​the liquid inlet unit to achieve enhanced fluid impact force and directional diffusion effect.

[0014] This technical solution achieves precise flow control at different stages through a differentiated flow area design that combines upstream overflow with downstream pressurization. The total flow area of ​​the upstream chamber flow equalization component is greater than that of the inlet unit. When the fluid enters the flow equalization component, it is in a "low-pressure overflow" state, which can further buffer fluid pressure fluctuations and avoid flow velocity unevenness caused by sudden changes in inlet velocity. At the same time, the overflow state causes the fluid to form a uniform liquid film on the surface of the flow equalization component, ensuring consistent inlet volume for each delivery orifice and improving the interstage flow stability accuracy.

[0015] The final stage of the guide structure has a smaller total flow area than the inlet unit. By appropriately throttling the flow, a certain pressure is created in the fluid before it exits, which enhances the fluid's impact force to ensure adhesion to the product surface and enables directional diffusion through pressure control. This differentiated design breaks away from the traditional mindset of having a uniform flow area. It dynamically adjusts the flow area according to the fluid's flow stabilization requirements at different stages, emphasizing "buffering and stabilization" upstream and "directional pressurization" downstream, achieving precise control throughout the entire process.

[0016] In one embodiment, the flow equalization component is a perforated plate, honeycomb plate, screen, or a combination of the above materials, with a plurality of conveying flow holes evenly distributed on the surface of the flow equalization component.

[0017] Regardless of the structure used, the flow passages follow the principle of "equilateral triangle distribution" or "square distribution". The spacing between the passages is 2-3 times the diameter of the passages to ensure uniform coverage of the fluid on the surface of the flow equalization component and avoid excessive local flow velocity due to too low channel density or excessive pressure loss due to too high channel density.

[0018] In one embodiment, the guiding structure includes a V-shaped flow divider disposed at the lower part of the last stage chamber and a guide flow equalization plate disposed above the V-shaped flow divider;

[0019] The V-shaped flow divider has two opposing first guide slopes for guiding the fluid to split in the left and right directions respectively;

[0020] The guide flow equalization plate is disposed above the V-shaped flow divider, and the guide flow equalization plate has two opposing second flow guiding slopes.

[0021] As a primary guiding structure, the V-shaped flow divider has two symmetrically distributed first guide slopes. After the fluid flows out of the last stage chamber, it first contacts the vertex region of the V-shaped flow divider, and then splits to the left and right sides along the two first guide slopes respectively. This can disperse the originally concentrated liquid outlet direction into two symmetrical split directions (such as 75° to the left and right), initially reducing turbulence. At the same time, the vertex of the V-shaped flow divider adopts a rounded transition design (rounded corner radius of 0.5-2mm) to avoid the fluid from generating eddies at the vertex.

[0022] In one embodiment, the two second flow-guiding inclined surfaces of the guide flow equalization plate are provided with a plurality of uniformly distributed guide flow holes for stabilizing the liquid after it has been diverted by the V-shaped flow divider, so as to further eliminate flow velocity differences and balance pressure distribution.

[0023] This technical solution adds a guide flow hole to the second guide slope of the guide flow equalization plate to achieve a dual flow stabilization effect of "guide flow + throttling".

[0024] The distribution of the guide flow holes is consistent with that of the conveying flow holes, adopting an "equilateral triangle distribution" with a hole spacing of 1.5-2 times the hole diameter, ensuring that the fluid is covered by the second guide slope without dead angles.

[0025] In one embodiment, the axial direction of the guide flow hole is perpendicular to the second guide slope on which it is located, so that the flow direction is consistent with the flow splitting trend, thereby improving the consistency and uniformity of the liquid outlet direction.

[0026] This technical solution, through the design of a vertical inclined plane along the orifice axis, ensures that the fluid outlet direction perfectly matches the flow distribution trend, avoiding local accumulation or insufficient coverage due to directional deviation. The axis of the guide flow orifice is perpendicular to the second guide inclined plane, meaning that the fluid outlet direction when passing through the orifice is completely consistent with the guiding direction of the second guide inclined plane—for example, if the second guide inclined plane makes a 45° angle with the horizontal plane, then the axis of the guide flow orifice also makes a 45° angle with the horizontal plane, and the fluid will diffuse stably along the 45° direction after exiting, without any "flow deviation" phenomenon.

[0027] In one embodiment, the inclined direction of the guide flow hole is set parallel to the first guide slope of the V-shaped flow divider on the corresponding side, so as to make the flow direction consistent with the flow divider trend, thereby improving the consistency and uniformity of the liquid outlet direction.

[0028] This technical solution provides an alternative design option for the guide flow orifice. By aligning the orifice axis with the first guide slope parallel to the flow path, the fluid maintains a consistent flow path during the outflow process. Since the first guide slope of the V-shaped flow divider is crucial for initial flow division, its parallel design with the flow orifice allows the fluid to achieve a flow trend consistent with the slope within the orifice, reducing path deflection and eddies, and contributing to a synergistic enhancement of the overall flow division effect. For example, when the first guide slope forms a 75° angle with the horizontal plane, and the guide flow orifice is tilted at the same angle, the fluid rapidly diffuses along the 75° direction after exiting the orifice, forming a directional distribution with minimal energy loss.

[0029] In one embodiment, the angle between the first guide slope and the horizontal plane is 60° to 80°, preferably 75°, to reduce kinetic energy loss during fluid flow and improve coverage while maintaining sufficient guiding capability.

[0030] Setting this angle range helps to achieve a balance between diversion efficiency and energy consumption. If the angle is too small (e.g., less than 60°), the guide slope is too gentle, easily causing localized liquid accumulation and uneven flow velocity; while a larger angle (e.g., greater than 80°) can further reduce resistance, it may increase the requirements for structural rigidity and increase processing difficulty. Controlling the angle between 60° and 80° increases the fluid's sliding velocity on the slope, with an average kinetic energy loss of less than 15%, resulting in more stable liquid coverage. The preferred 75° angle is the optimal design under current process verification conditions, and can be formed in one CNC milling operation, ensuring the slope angle accuracy is controlled within ±1°, guaranteeing consistency and symmetry of the flow on both sides.

[0031] In one embodiment, the diameter of the guide flow hole is 0.1 mm to 5 mm, preferably 0.5 mm to 3 mm, to ensure the accuracy of fluid kinetic energy dissipation and flow velocity balance.

[0032] In one embodiment, a working tank is also included, which is connected to the liquid outlet of the last stage chamber. The working tank is used to receive the fluid after it has been dispersed and guided by the guiding structure, and to distribute the fluid evenly to the product surface, thereby ensuring uniform product thickness and stable quality.

[0033] This technical solution adds a working tank to achieve the final stage of distribution after flow stabilization, ensuring uniform coverage of the fluid on the product surface.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] Firstly, it achieves gradual fluid flow stabilization and kinetic energy dissipation, improving the uniformity of liquid distribution. By setting up multi-stage series chambers and flow equalization components between adjacent chambers, the fluid can dissipate kinetic energy and balance velocity at each stage transition, significantly reducing velocity differences and turbulence, thereby improving overall fluid stability. This is suitable for processing scenarios such as copper foil liquid where high film thickness uniformity is required.

[0036] Secondly, a differentiated flow path is constructed to enhance local impact force and directional diffusion capability. By adopting a large flow area uniform flow design in the upstream section, an overflow diffusion effect is formed; in the final stage, the flow area is limited and a guiding structure is introduced to enhance the impact force and directional spraying capability of the fluid, taking into account both the smoothness of the liquid flow and the film-forming performance at the end, thereby improving coating consistency and thickness control accuracy.

[0037] Third, an innovative guiding structure design achieves uniform dispersion of liquid on both sides of the outlet direction. A combination structure of a V-shaped flow divider located at the bottom of the final stage chamber and an upper guide flow equalization plate, along with inclined conveying orifices, is introduced to achieve symmetrical flow division and directional guidance of the fluid, significantly reducing outlet disturbance and improving the uniformity of liquid distribution in the working tank, adapting to special process requirements such as double-sided uniform coating and mirror symmetry.

[0038] Fourth, it enhances the adaptability of the flow path and the energy consumption control capability. The angle of the guide slope and the direction parameters of the conveying flow hole can be flexibly adjusted, making it suitable for liquid stabilization treatment under various flow characteristics and pressure levels. It takes into account both energy consumption control and process adaptability, thus broadening the application scenarios of the device.

[0039] Fifth, it can be integrated with the working tank to optimize the quality of the final liquid film formation.

[0040] The liquid outlet of the final stage chamber can be seamlessly connected to the working tank structure. The liquid outlet is guided by multiple points to improve the coating uniformity and avoid uneven film thickness or defect accumulation caused by concentrated or uneven flow rate. It is especially suitable for manufacturing processes in copper foil processing where the thickness stability and consistency requirements are extremely high. Attached Figure Description

[0041] Figure 1This is a cross-sectional view of the overall structure of the liquid inlet flow stabilizing device of this application.

[0042] Figure 2 This is a partially enlarged cross-sectional view of the guide structure of the liquid inlet flow stabilizing device of this application.

[0043] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model.

[0044] Explanation of main component symbols

[0045] Liquid inlet unit 10;

[0046] Chamber 20; Flow equalization component 21; Flow conveying orifice 22;

[0047] Guide structure 30; V-shaped flow divider 31; first guide slope 311; guide flow equalization plate 32; second guide slope 321; guide flow passage 33;

[0048] Working slot 40. Detailed Implementation

[0049] Example:

[0050] In high-precision liquid distribution and coating scenarios, such as functional film forming, conductive paste deposition, and precision copper foil coating, the liquid must maintain high flow rate stability and directional consistency during dispensing. Especially when product thickness needs strict control and edge thickness deviation is unacceptable, conventional single-cavity flow stabilization devices or single-layer nozzle structures often suffer from the following problems:

[0051] First, because fluids typically exhibit high velocity or pulse disturbances during inlet, a single steady-flow chamber is insufficient to effectively dissipate their kinetic energy. This results in a large velocity gradient, strong turbulence, and directional dispersion of the liquid before outlet, severely impacting the uniformity of the film formed. Second, some outlet designs employ open slots, straight nozzles, or simple flow dividers, which are prone to generating eddy currents or jet deflection at the end, affecting the final fluid distribution and hindering the control of edge buildup and thickness deviation.

[0052] In order to overcome the above-mentioned technical bottlenecks, the applicant realized that it is necessary to construct a composite structure of graded flow stabilization, dispersion and directional spraying, so that the fluid can complete the slow release of kinetic energy and flow velocity reconstruction step by step after entering the system, and form symmetrical diffusion and directional uniform liquid discharge characteristics at the liquid outlet, thereby adapting to liquid coating applications with high consistency requirements.

[0053] Therefore, as Figure 1 As shown, this application proposes a multi-chamber flow-stabilizing precision fluid distribution device, comprising:

[0054] Liquid inlet unit 10 is used to introduce fluid;

[0055] At least two chambers 20 connected sequentially along the fluid flow direction are used for step-by-step flow stabilization of the fluid;

[0056] The flow equalization component 21 is provided between adjacent chambers 20. Each flow equalization component 21 is provided with multiple conveying flow holes 22, which are used to dissipate the fluid kinetic energy output from the previous chamber 20, so that it can achieve flow velocity balance when entering the next chamber 20.

[0057] The guide structure 30 is located at the liquid outlet end of the last-stage chamber 20. This guide structure 30 is used to disperse and guide the direction of liquid discharge, so as to reduce turbulence and improve the uniformity of liquid discharge.

[0058] Compared with existing technologies, traditional flow stabilization structures mostly use single-stage cavities, which are difficult to effectively dissipate the kinetic energy of high-velocity fluids, resulting in uneven liquid discharge and obvious eddies. This application forms a staged flow stabilization path by arranging multiple cavities 20 in series in the fluid flow direction and placing flow equalization components 21 between each stage. This achieves segmented dissipation of high-kinetic-energy fluids and velocity gradient control, significantly improving the uniformity and stability of the liquid outflow.

[0059] The total flow area of ​​the flow equalization component 21 located between the upstream chambers 20 is greater than the flow area of ​​the liquid inlet unit 10, so as to achieve an overflow-type flow stabilization effect; the total flow area of ​​the guide structure 30 at the liquid outlet end of the last stage chamber 20 is smaller than the flow area of ​​the liquid inlet unit 10, so as to achieve enhanced fluid impact force and directional diffusion effect.

[0060] Compared with existing technologies, traditional solutions often have the same flow area at each stage, making it impossible to adjust according to the flow stabilization requirements at different stages. This application designs the upstream flow equalization component 21 to have a total flow area greater than the inlet area to achieve overflow-type flexible buffering, while the flow area of ​​the final stage guide structure 30 is smaller than the inlet area, enhancing the terminal impact force and directional spraying effect. This achieves multi-stage differentiated energy control, improving flow stabilization accuracy and terminal film formation effect.

[0061] The flow equalization component 21 is a perforated plate, honeycomb plate, screen, or a combination of the above materials, and its multiple conveying flow holes 22 are evenly distributed on the surface of the flow equalization component 21.

[0062] Compared with existing technologies, traditional devices have a single choice of flow equalization structure, making it difficult to balance strength, flow efficiency, and corrosion resistance. This application achieves a balanced match of high strength, high permeability, and ease of processing by using a porous structure composed of materials such as perforated plates, honeycomb plates, and screens, thereby improving the applicability and durability of the device.

[0063] like Figure 2As shown, the guide structure 30 includes a V-shaped flow divider 31 disposed at the lower part of the last stage chamber 20 and a guide flow equalization plate 32 disposed above the V-shaped flow divider 31;

[0064] The V-shaped flow divider 31 has two opposing first guide slopes 311, which are used to guide the fluid to split in the left and right directions respectively;

[0065] The guide flow equalization plate 32 is disposed above the V-shaped flow divider 31, and the guide flow equalization plate 32 has two opposing second flow guiding slopes 321.

[0066] Compared with existing technologies, traditional flow guiding structures are mostly straight-through or baffle-type, which are prone to forming reflective eddies and reducing fluid consistency. This application achieves symmetrical flow distribution and secondary flow stabilization of the liquid by setting a V-shaped flow divider 31 at the bottom of the final stage chamber 20 and arranging a guide flow equalization plate 32 above it, avoiding turbulent swirling and improving the controllability of the liquid outlet direction and process consistency.

[0067] The two second guide slopes 321 of the guide flow equalization plate 32 are each provided with a plurality of uniformly distributed guide flow holes 33, which are used to stabilize the liquid after it has been diverted by the V-shaped flow divider 31, so as to further eliminate the flow velocity difference and balance the pressure distribution.

[0068] Compared with existing technologies, the direction of traditional guide holes is often perpendicular to or inconsistent with the mainstream direction, resulting in poor liquid outflow directionality and uneven edge thickness. This application achieves convergent control of the liquid outflow direction by arranging the guide flow holes 33 on the second guide slope 321 and aligning them with the flow splitting trend. This is particularly suitable for applications requiring symmetrical edge coating or uniform film thickness.

[0069] The axial direction of the guide flow hole 33 is perpendicular to the second guide slope 321 on which it is located, so that the flow direction is consistent with the flow splitting trend, thereby improving the consistency and uniformity of the liquid outlet direction.

[0070] The inclined direction of the guide flow hole 33 is parallel to the first guide slope 311 of the V-shaped flow divider 31 on the corresponding side, so as to realize that the flow direction is consistent with the flow divider trend, thereby improving the consistency and uniformity of the liquid outlet direction.

[0071] Compared with existing technologies, traditional structures neglect the influence of the guide hole direction on fluid guidance, making it difficult to avoid flow deviation and dead zone accumulation. This application achieves complete consistency between the liquid outlet direction and the flow distribution trend of the inclined surface by making the inclined direction of the guide flow hole 33 parallel to the inclined surface of the V-shaped flow divider 31 on its corresponding side, further improving the consistency of edge film formation and the predictability of liquid flow control.

[0072] The first guide slope 311 of the V-shaped fluid divider 31 has an angle of 60° to 80° with the horizontal plane, preferably 75°, which is used to reduce the kinetic energy loss during fluid flow and improve the liquid coverage effect while maintaining sufficient guiding capacity.

[0073] Compared to existing technologies, traditional flow guiding structures typically employ a fixed-angle design, failing to dynamically adapt to the different flow rates, densities, or viscosity characteristics of fluids. This results in low guiding efficiency and significant energy loss, particularly in high-viscosity or low-pressure driving scenarios, where liquid accumulation, turbulence, or dead zones are easily generated. This application achieves a high degree of matching between the fluid splitting angle and the flow trend by setting the angle between the V-shaped flow guiding slope and the horizontal plane to 60° to 80°, preferably 75°. This more effectively maintains the fluid's slip potential energy and directional stability, adapting to the flow guiding requirements of various industrial liquid or gas-liquid mixing conditions, and improving liquid discharge consistency and reaction efficiency.

[0074] The diameter of the guide flow hole 33 is 0.1 mm to 5 mm, preferably 0.5 mm to 3 mm, to ensure the accuracy of fluid kinetic energy dissipation and flow velocity balance.

[0075] Compared with existing technologies, traditional through-holes have a uniform size design, making it difficult to flexibly adjust them according to the thickness control precision of the target product. This application achieves precise adjustment of flow rate and pressure under different fluid kinetic energy conditions by setting the diameter of the guide flow hole 33 to 0.1mm to 5mm, preferably 0.5mm to 3mm, thereby ensuring the uniformity of the final film thickness.

[0076] It also includes a working tank 40, which is connected to the liquid outlet of the last stage chamber 20. The working tank 40 is used to receive the fluid after it has been dispersed and guided by the guide structure 30, and to distribute the fluid evenly to the product surface, thereby ensuring uniform product thickness and stable quality.

[0077] Compared with existing technologies, traditional liquid outlet structures are separated from the working tank 40, and the liquid is prone to disturbance or accumulation at the edges in the transition zone. This application achieves seamless coupling between the guide structure 30 and the terminal processing platform by directly connecting the working tank 40 to the liquid outlet end of the last-stage chamber 20, which significantly improves the uniformity of liquid spreading on the product surface and the accuracy of thickness control.

[0078] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A liquid inlet flow stabilizing device, characterized in that, include: Liquid inlet unit (10) is used to introduce fluid; At least two chambers (20) connected sequentially along the fluid flow direction are used for step-by-step flow stabilization of the fluid; A flow equalization component (21) is provided between adjacent chambers (20). Each flow equalization component (21) is provided with multiple conveying flow holes (22) to dissipate the fluid kinetic energy output from the previous chamber (20) so that it can achieve flow velocity balance when entering the next chamber (20). The guide structure (30) is located at the liquid outlet end of the last chamber (20) and is used to disperse and guide the direction of fluid discharge.

2. The liquid inlet flow stabilizing device as described in claim 1, characterized in that: The total flow area of ​​the flow equalization component (21) located between the upstream chambers (20) is greater than the flow area of ​​the liquid inlet unit (10); the total flow area of ​​the guide structure (30) at the liquid outlet end of the last stage chamber (20) is less than the flow area of ​​the liquid inlet unit (10).

3. The liquid inlet flow stabilizing device as described in claim 2, characterized in that: The flow equalization component (21) is a perforated plate, honeycomb plate, screen or a combination of the above materials, and multiple conveying flow holes (22) are evenly distributed on the flow equalization component (21).

4. The liquid inlet flow stabilizing device as described in claim 1, characterized in that: The guide structure (30) includes a V-shaped flow divider (31) disposed at the lower part of the last stage chamber (20) and a guide flow equalization plate (32) disposed above the V-shaped flow divider (31); The V-shaped flow divider (31) has two oppositely arranged first guide slopes (311) for guiding the fluid to split in the left and right directions respectively; The guide flow equalization plate (32) is disposed above the V-shaped flow divider (31), and the guide flow equalization plate (32) has two opposing second flow guiding slopes (321).

5. The liquid inlet flow stabilizing device as described in claim 4, characterized in that: The two second guide slopes (321) of the guide flow equalization plate (32) are each provided with a plurality of uniformly distributed guide flow holes (33) for stabilizing the flow of the liquid after it has been diverted by the V-shaped flow divider (31).

6. The liquid inlet flow stabilizing device as described in claim 5, characterized in that: The axial direction of the guide flow hole (33) is perpendicular to the second guide slope (321) where it is located.

7. The liquid inlet flow stabilizing device as described in claim 5, characterized in that: The inclination direction of the guide flow hole (33) is set parallel to the first guide slope (311) of the V-shaped flow divider (31) on the corresponding side, so as to realize that the flow direction is consistent with the flow divider trend.

8. The liquid inlet flow stabilizing device as described in claim 4, characterized in that: The angle between the first guide slope (311) of the V-shaped flow divider (31) and the horizontal plane is 60° to 80°.

9. The liquid inlet flow stabilizing device as described in claim 5, characterized in that: The diameter of the guide flow hole (33) is 0.1 mm to 5 mm.

10. The liquid inlet flow stabilizing device as described in claim 1, characterized in that: It also includes a working tank (40), which is connected to the liquid outlet of the last stage chamber (20) and is used to receive the fluid after it has been dispersed and guided by the guide structure (30) and to distribute the fluid evenly to the product surface.