Slag removal device for vacuum magnetron sputtering coating equipment

Abstract

The utility model discloses a kind of slag removal devices for vacuum magnetron sputtering coating equipment, it is related to coating equipment technical field;The slag removal device includes slag removal plate, the slag removal plate is placed on the conveying roller way;The side of the slag removal plate towards the conveying roller way is provided with several recessed groove parts and convex parts, several recessed groove parts and the convex part are mutually parallelly arranged, and the recessed groove part's groove direction is mutually perpendicular with the conveying direction of the conveying roller way;The convex part is arranged in the end position of the slag removal plate along its moving direction, the convex part can be embedded to adjacent two the conveying roller between, to make the slag removal plate can move along the conveying direction of the conveying roller way while carrying out up and down undulating motion.The technical scheme provided by the utility model can quickly and efficiently remove the accumulated slag on the roller bottom plate, to ensure glass plate finished product quality.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a slag removal device for vacuum magnetron sputtering coating equipment. Background Technology

[0002] In the production of coated composite glass, vacuum magnetron sputtering is currently the most common and efficient method. Its principle is as follows: in a vacuum environment, the coating material serves as the cathode target. Argon ions bombard the target material to generate cathode sputtering, causing target atoms or molecules to be sputtered onto the glass plate, ultimately forming a deposition layer. During the coating process, the glass plate is transversely conveyed on a conveyor roller conveyor, which includes spaced conveyor rollers and a roller conveyor base plate located between adjacent rollers. Due to the collision of sputtered ions, sputtered ions diffuse within the coating chamber and accumulate on the roller conveyor base plate, forming slag. When the slag thickness exceeds a critical value and rises above the conveyor rollers, the slag easily scratches the glass plate surface, directly leading to product scrap. For these reasons, a slag removal device is urgently needed to quickly and efficiently remove the slag from the roller conveyor base plate to ensure the quality of the finished glass plate.

[0003] It should be noted that the above content is only used to help understand the technical solution of this utility model, and does not represent an admission that the above content is prior art. Utility Model Content

[0004] The main purpose of this invention is to provide a slag removal device for vacuum magnetron sputtering coating equipment, which aims to quickly and efficiently remove accumulated slag from the bottom plate of the roller conveyor to ensure the quality of the finished glass plate.

[0005] To achieve the above objectives, this utility model proposes a slag removal device for a vacuum magnetron sputtering coating equipment. The vacuum magnetron sputtering coating equipment includes a conveyor roller channel, wherein the conveyor roller channel includes conveyor rollers spaced apart and a roller channel bottom plate located between two adjacent conveyor rollers. Specifically, the slag removal device includes: A slag removal plate is placed on the conveyor roller conveyor. The slag removal plate has several grooves and protrusions on one side facing the conveyor rollers. The grooves and protrusions are arranged parallel to each other, and the groove direction of the grooves is perpendicular to the conveying direction of the conveyor rollers. The protrusions are located at the ends of the slag removal plate along its moving direction. The protrusions can be embedded between two adjacent conveyor rollers so that the slag removal plate can move up and down while moving along the conveying direction of the conveyor rollers.

[0006] In one embodiment, the protrusion includes a plurality of protrusion structures, which are arranged in a linear array along the length of the protrusion, so that the moving direction of each protrusion structure forms a cross network structure with the groove direction of the groove.

[0007] In one embodiment, each of the protruding structures has an inverted trapezoidal cross-section, and the end of the protruding structure with a relatively large bottom area is fixedly connected to the slag removal plate.

[0008] In one embodiment, the two connected protrusions are fitted together.

[0009] In one embodiment, the width of the protruding structure is smaller than the distance between two adjacent conveyor rollers; when the slag removal plate is placed horizontally on the conveyor roller track, a gap is left between the protruding end face of the protruding structure and the bottom plate of the roller track.

[0010] In one embodiment, the protrusion is disposed at the tail end of the slag removal plate along its moving direction.

[0011] In one embodiment, the slag removal plate is provided with at least thirty of the grooves.

[0012] In one embodiment, the corners of the groove are chamfered.

[0013] In one embodiment, the slag removal plate has a plurality of weight reduction holes on the side facing away from the conveyor roller, and the plurality of weight reduction holes are distributed in a rectangular array.

[0014] In one embodiment, the corners of the weight-reducing hole are chamfered.

[0015] The technical solution of this utility model involves providing a groove and a protrusion on the side of the slag removal plate facing the conveyor rollers. During operation, the slag removal plate is placed on the conveyor rollers of the vacuum magnetron sputtering coating equipment. Relying on its own weight and the protrusions designed according to the spacing of the conveyor rollers, the protrusions can repeatedly embed themselves between two adjacent conveyor rollers as the conveyor rollers rotate. This allows the slag removal plate to move laterally along the conveying direction of the conveyor rollers while simultaneously moving up and down. During the up-and-down movement of the slag removal plate, on the one hand, the weight of the slag removal plate impacts and crushes the slag that is higher than the height of the conveyor rollers; on the other hand, the protrusions embedded between two adjacent conveyor rollers crush the slag that is not higher than the height of the conveyor rollers. During the lateral movement of the slag removal plate, on the one hand, the slag above the height of the conveyor roller is scraped off by the uneven surface of the slag removal plate formed by the setting of several grooves. On the other hand, the crushed slag is pushed into the gap between the roller table bottom plate and the conveyor roller by the protrusions embedded between the two adjacent drive rollers, so as to remove the slag on the roller table bottom plate. This ensures that the thickness of the slag is much lower than the height of the conveyor roller, so as to achieve the technical objective of quickly and efficiently removing the slag on the roller table bottom plate and ensuring the quality of the finished glass plate. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of one embodiment of the slag removal device provided by this utility model; Figure 2 for Figure 1 A magnified view of a section at point A in the middle; Figure 3 A second schematic diagram of an embodiment of the slag removal device provided by this utility model; Figure 4 This is a schematic diagram of the slag removal device provided by this utility model during operation.

[0018] Explanation of reference numerals in the attached figures: 10. Slag removal plate; 20. Groove section; 30. Protrusion section; 31. Protruding structure; 40. Weight reduction hole; 50. Conveyor roller conveyor; 51. Conveyor roller; 52. Roller conveyor base plate; The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0019] The technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, what is described is only a part of the embodiments of this utility model, and not all of the embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0020] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0021] Furthermore, it should be noted that the descriptions involving "first," "second," etc., in this utility model are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0022] In the production of coated composite glass, vacuum magnetron sputtering is currently the most common and efficient method. Its principle is as follows: In a vacuum environment, the coating material serves as the cathode target. Argon ions bombard the target to generate cathode sputtering, causing target atoms or molecules to be sputtered onto the glass plate, ultimately forming a deposition layer. During the coating process, the glass plate is transversely conveyed on a conveyor roller track, which includes spaced-apart conveyor rollers and a roller track base plate located between adjacent rollers. Due to the collisions of sputtered ions, the coating chamber is filled with sputtered ions, which accumulate on the roller track base plate to form slag. When the slag thickness exceeds a critical value and rises above the conveyor rollers, the slag easily scratches the glass surface, directly leading to product scrap.

[0023] To solve the above-mentioned technical problems, this utility model proposes a slag removal device for vacuum magnetron sputtering coating equipment.

[0024] Please see Figures 1 to 4 In one embodiment of the present invention, the slag removal device is applied to a vacuum magnetron sputtering coating equipment. The vacuum magnetron sputtering coating equipment includes a conveyor roller channel 50, wherein the conveyor roller channel 50 includes conveyor rollers 51 spaced apart and a roller channel bottom plate 52 located between two adjacent conveyor rollers 51. Specifically, the slag removal device includes: Slag removal plate 10 is placed on conveyor roller 50; The slag removal plate 10 is provided with a plurality of grooves 20 and protrusions 30 on the side facing the conveyor roller 50. The grooves 20 and protrusions 30 are arranged parallel to each other, and the groove direction of the grooves 20 is perpendicular to the conveying direction of the conveyor roller 50. The protrusions 30 are provided at the end position of the slag removal plate 10 along its moving direction. The protrusions 30 can be embedded between two adjacent conveyor rollers 51 so that the slag removal plate 10 can move up and down while moving along the conveying direction of the conveyor roller 50.

[0025] The technical solution of this utility model involves providing a groove 20 and a protrusion 30 on the side of the slag removal plate 10 facing the conveyor roller 50. During operation, the slag removal plate 10 is placed on the conveyor roller 50 of the vacuum magnetron sputtering coating equipment. Relying on its own weight and the protrusion 30 designed according to the spacing of the conveyor rollers 51, the protrusion 30 can repeatedly embed itself between two adjacent conveyor rollers 51 as the conveyor rollers 51 rotate. This allows the slag removal plate 10 to move laterally along the conveying direction of the conveyor roller 50 while also moving up and down. During the up-and-down movement of the slag removal plate 10, on the one hand, the weight of the slag removal plate 10 is used to impact and crush the slag that is higher than the height of the conveyor rollers 51; on the other hand, the protrusion 30 is embedded between two adjacent conveyor rollers 51 to crush the slag that is not higher than the height of the conveyor rollers 51. During the lateral movement of the slag removal plate 10, on the one hand, the slag accumulation above the height of the conveyor roller 51 is scraped off by the uneven surface of the slag removal plate 10 formed by the provision of several grooves 20. On the other hand, the crushed slag is pushed into the gap between the roller bottom plate 52 and the conveyor roller 51 by the protrusions 30 embedded between the two adjacent transmission rollers, so as to remove the slag accumulation on the roller bottom plate 52. This ensures that the thickness of the slag accumulation is much lower than the height of the conveyor roller 51, thereby achieving the technical objective of quickly and efficiently removing the slag accumulation on the roller bottom plate 52 and ensuring the quality of the finished glass plate.

[0026] As a preferred embodiment of the above, the protrusion 30 includes a plurality of protruding structures 31, which are arranged in a linear array along the length of the protrusion 30, so that the moving direction of each protruding structure 31 forms a cross-shaped network structure with the groove direction of the groove 20. With this configuration, when the slag removal plate 10 moves, the groove 20 perpendicular to the moving direction of the slag removal plate 10 and the protruding structures 31 horizontal to the moving direction of the slag removal plate 10 interact, generating multi-directional shearing, cutting, and crushing forces on the accumulated slag. This avoids the problem of blocky slag sliding or only being flattened rather than crushed, which may be caused by single-direction crushing. This grid-like treatment makes the slag finer and more uniformly crushed, resulting in a more thorough slag removal effect. Simultaneously, dividing the protrusion 30 into a plurality of protruding structures 31 enhances the concentrated force on the slag, allowing the slag to be crushed more effectively, further improving the slag removal effect.

[0027] Furthermore, each protruding structure 31 has an inverted trapezoidal cross-section, with the end of the protruding structure 31 having a relatively large bottom area fixedly connected to the slag removal plate 10. This arrangement ensures, on the one hand, that the connection between the protruding structure 31 and the slag removal plate 10 is firm, making it less prone to damage or detachment when subjected to the impact and resistance of accumulated slag; on the other hand, the inclined side allows for smoother movement of the slag material into the gap between the roller conveyor bottom plate 52 and the conveyor roller 51 during movement, and during the lateral movement of the slag removal plate 10, its protruding structure 31 can more easily move along the inclined side to the top of the conveyor roller 51 for continuous up-and-down undulating motion.

[0028] Furthermore, the two connected protruding structures 31 are fitted together. This arrangement effectively transforms multiple independent protruding structures 31 into a continuous rake tooth structure. When cleaning large areas of accumulated slag, it provides continuous and uniform scraping force, avoiding cleaning omissions caused by excessive spacing between the two protruding structures 31.

[0029] Furthermore, the width of the protruding structure 31 is smaller than the distance between two adjacent conveyor rollers 51; when the slag removal plate 10 is placed horizontally on the conveyor roller table 50, a gap is left between the protruding end face of the protruding structure 31 and the roller table bottom plate 52. This arrangement, by limiting the width of the protruding structure 31 to be smaller than the distance between two adjacent conveyor rollers 51, ensures that the protruding structure 31 can be embedded between two adjacent conveyor rollers 51, guaranteeing the smooth implementation of the technical solution of this application. By limiting the gap between the protruding end face of the protruding structure 31 and the roller table bottom plate 52, it is ensured that when the protruding part 30 is embedded between the rollers, it will never have hard contact or friction with the roller table bottom plate 52, thereby protecting the surface of the roller table bottom plate 52 from scratches and helping to extend the service life of the coating equipment.

[0030] Furthermore, the protrusion 30 is located at the tail end of the slag removal plate 10 along its moving direction. This arrangement allows the front half of the grooved portion 20 of the slag removal plate 10 to initially crush and loosen the accumulated slag, while the protrusion 30 at the tail end provides final crushing and removal. This segmented processing makes the slag removal process more layered and efficient. Simultaneously, by placing the protrusion 30, which offers the greatest resistance to movement, at the tail end of the slag removal plate 10 along its moving direction, the front half of the slag removal plate 10 can act as a traction force to move the protrusion 30 during lateral movement, thus promoting stable travel of the slag removal plate 10.

[0031] As a preferred embodiment of the above, the slag removal plate 10 is provided with at least thirty grooves 20. This arrangement limits the number of grooves 20 to ensure that the unevenness of the surface of the slag removal plate 10 meets the requirements for scraping away accumulated slag. Simultaneously, since the groove direction of the grooves 20 is perpendicular to the conveying direction of the conveyor roller 50, the grooves 20 can accommodate a portion of the accumulated slag and push it away.

[0032] Furthermore, the corners of the groove 20 are chamfered. This chamfering of the corners of the groove 20 primarily serves to prevent scratches and relieve stress. Understandably, chamfering eliminates sharp edges and burrs, preventing them from scratching the conveyor roller 51 or other equipment components during operation; it also reduces stress concentration, improves the structural strength and fatigue resistance of the groove 20's edges, and extends the service life of the slag removal plate 10.

[0033] As a preferred embodiment of the above, the slag removal plate 10 has a plurality of weight-reducing holes 40 on the side facing away from the conveyor roller 50, and the plurality of weight-reducing holes 40 are distributed in a rectangular array. This arrangement reduces the weight, lowers the load on the conveyor roller 50, and makes the movement of the slag removal plate 10 more flexible and smooth, reducing drive energy consumption. At the same time, the weight optimization also makes the loading and unloading of the device more convenient, reducing the labor intensity of the operators.

[0034] Furthermore, the corners of the weight reduction hole 40 are chamfered. This design ensures that the stress is most concentrated at the edge of the hole, and the chamfering effectively disperses this stress, preventing the slag removal plate 10 from cracking at the weight reduction hole 40 during long-term use, thus greatly improving the reliability and durability of the product.

[0035] In this embodiment, the slag removal plate is 1600mm long, 1250mm wide, and 10mm thick; the groove width of the groove is 2mm, the groove depth is 2mm, and the groove spacing is 50mm. It is expected that 30 grooves can be made. The corners of the grooves are chamfered at 45° with a chamfer depth of 0.5mm. The bottom edge of the protruding structure is 30mm long, the top edge is 18mm long, and the height is 13mm; the diameter of the weight reduction holes is 20~30mm, and the hole spacing is 50~60mm, which is expected to reduce the weight of the slag removal device by 15%~20%; the edges of the weight reduction holes are chamfered at 45° with a chamfer depth of 2mm.

[0036] It should be noted that the other contents of the slag removal device for vacuum magnetron sputtering coating equipment disclosed in this utility model are prior art and will not be described in detail here.

[0037] The above are merely optional embodiments of this utility model and do not limit the patent scope of this utility model. Any application of this utility model directly or indirectly in other related technical fields is included within the patent protection scope of this utility model.

Claims

1. A slag removal device for a vacuum magnetron sputtering coating equipment, the vacuum magnetron sputtering coating equipment comprising a conveyor roller table, wherein the conveyor roller table comprises spaced-apart conveyor rollers and a roller table base plate located between two adjacent conveyor rollers; characterized in that, The slag removal device includes: A slag removal plate is placed on the conveyor roller conveyor. The slag removal plate has several grooves and protrusions on one side facing the conveyor rollers. The grooves and protrusions are arranged parallel to each other, and the groove direction of the grooves is perpendicular to the conveying direction of the conveyor rollers. The protrusions are located at the ends of the slag removal plate along its moving direction. The protrusions can be embedded between two adjacent conveyor rollers so that the slag removal plate can move up and down while moving along the conveying direction of the conveyor rollers.

2. The slag removal device as described in claim 1, characterized in that: The protrusion includes a plurality of protrusion structures, which are arranged in a linear array along the length of the protrusion, so that the moving direction of each protrusion structure forms a cross network structure with the groove direction of the groove.

3. The slag removal device as described in claim 2, characterized in that: Each of the protruding structures has an inverted trapezoidal cross-section, and the end of the protruding structure with a relatively large bottom area is fixedly connected to the slag removal plate.

4. The slag removal device as described in claim 2, characterized in that: The two protruding structures are connected and fitted together.

5. The slag removal device as described in claim 2, characterized in that: The width of the protruding structure is less than the distance between two adjacent conveyor rollers; when the slag removal plate is placed horizontally on the conveyor roller track, there is a gap between the protruding end face of the protruding structure and the bottom plate of the roller track.

6. The slag removal device according to any one of claims 2 to 5, characterized in that: The protrusion is located at the tail end of the slag removal plate along its moving direction.

7. The slag removal device as described in claim 1, characterized in that: The slag removal plate is provided with at least thirty of the grooves.

8. The slag removal device as described in claim 7, characterized in that: The corners of the groove are chamfered.

9. The slag removal device as described in claim 1, characterized in that: The slag removal plate has several weight reduction holes on the side facing away from the conveyor roller, and the weight reduction holes are distributed in a rectangular array.

10. The slag removal device as described in claim 9, characterized in that: The corners of the weight-reducing holes are chamfered.

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