Centrifugal type rotating cleaning device for liquid crystal panel mask

Abstract

The utility model discloses a kind of liquid crystal panel mask centrifugal type rotary cleaning devices, comprising: mask cleaning machine, the upper surface of the mask cleaning machine is fixedly connected with filter box, the left surface of the filter box is fixedly connected with air inlet pipe, the right surface of the filter box is fixedly connected with first connecting pipe, the right surface of the first connecting pipe is fixedly connected with heating box, the front surface of the heating box is fixedly connected with second connecting pipe, the front surface of the second connecting pipe is fixedly connected with pump body, the left surface of the pump body is fixedly connected with third connecting pipe, the side surface of the third connecting pipe is fixedly connected with mask cleaning machine, the device can make hot air contact to liquid crystal panel mask surface after liquid crystal panel mask centrifugal cleaning, accelerate mask surface moisture evaporation speed, effectively reduce moisture residue, to improve drying speed, and can realize the recycling of gas, avoid energy waste and environmental impact caused by direct discharge.

Description

Technical Field

[0001] This utility model relates to the field of liquid crystal panel photomask cleaning technology, and in particular to a centrifugal rotary cleaning device for liquid crystal panel photomasks. Background Technology

[0002] LCD panel photomasks typically use transparent glass substrates, such as synthetic quartz, borosilicate glass, and soda glass. Among them, synthetic quartz has advantages such as high hardness, low coefficient of expansion, strong light transmittance, and good chemical stability, making it suitable for the production of products with high precision requirements. It is widely used in the manufacture of photomasks for large-scale integrated circuits and large masks for flat panel displays.

[0003] The substrate material of the photomask of the LCD panel usually has a certain degree of hydrophilicity. Water molecules are easily adsorbed on its surface and form a thin water film. Even after centrifugal rotation cleaning, some moisture will still remain due to the affinity between the material and water, and the surface moisture dries slowly. Utility Model Content

[0004] The purpose of this invention is to provide a centrifugal rotary cleaning device for liquid crystal panel photomasks. After centrifugal cleaning of the liquid crystal panel photomask, hot air can come into contact with the surface of the liquid crystal panel photomask, accelerating the evaporation rate of moisture on the photomask surface, effectively reducing moisture residue, and thus improving the drying speed.

[0005] To achieve the above objectives, a centrifugal rotary cleaning device for liquid crystal panel photomasks is provided, comprising: a photomask cleaning machine; a filter box fixedly connected to the upper surface of the photomask cleaning machine; an air inlet pipe fixedly connected to the left surface of the filter box; a first connecting pipe fixedly connected to the right surface of the filter box; a heating box fixedly connected to the right surface of the first connecting pipe; a second connecting pipe fixedly connected to the front surface of the heating box; a pump body fixedly connected to the front surface of the second connecting pipe; a third connecting pipe fixedly connected to the left surface of the pump body; a side surface of the third connecting pipe fixedly connected to the photomask cleaning machine; a metal wire mesh filter plate, a synthetic fiber non-woven fabric filter plate, and an activated carbon adsorption plate on the inner surface of the filter box; a dehumidification box fixedly connected to the upper surface of the photomask cleaning machine; a return pipe fixedly connected to the right surface of the dehumidification box; a side surface of the return pipe fixedly connected to the photomask cleaning machine; a dehumidification bag on the inner surface of the dehumidification box; and a fourth connecting pipe fixedly connected to the upper surface of the dehumidification box.

[0006] According to the aforementioned centrifugal rotary cleaning device for liquid crystal panel photomasks, the lower surface of the heating box is fixedly connected to the photomask cleaning machine, and the lower surface of the pump body is fixedly connected to the photomask cleaning machine, thereby increasing the stability of the structural connection.

[0007] According to the aforementioned centrifugal rotary cleaning device for liquid crystal panel photomasks, a first valve is provided inside the third connecting pipe, and a second valve is provided inside the air inlet pipe.

[0008] According to the aforementioned centrifugal rotary cleaning device for liquid crystal panel photomasks, the end of the fourth connecting pipe furthest from the dehumidification box is fixedly connected to the heating box.

[0009] According to the aforementioned centrifugal rotary cleaning device for liquid crystal panel photomasks, a heating component is provided inside the heating chamber to heat the gas inside the heating chamber.

[0010] According to the aforementioned centrifugal rotary cleaning device for liquid crystal panel photomasks, the inside of the photomask cleaning machine is provided with a support column, and a water spray plate is fixedly connected to the upper surface of the support column.

[0011] According to the centrifugal rotary cleaning device for liquid crystal panel photomasks, a nozzle is fixedly connected to the lower surface of the spray plate, and the number of nozzles is multiple, through which water is sprayed onto the material.

[0012] The above-mentioned solution has the following beneficial effects:

[0013] 1. By setting up an air inlet pipe, filter box, first connecting pipe, heating box, second connecting pipe, pump body, third connecting pipe, metal wire mesh filter plate, synthetic fiber non-woven filter plate, and activated carbon adsorption plate, after centrifugal cleaning of the LCD panel photomask, hot air can come into contact with the surface of the LCD panel photomask, accelerating the evaporation rate of moisture on the photomask surface, effectively reducing moisture residue, and thus improving the drying speed.

[0014] 2. By setting up a return pipe, dehumidification box, dehumidification bag, and fourth connecting pipe, the gas can be recycled, avoiding energy waste and environmental impact caused by direct emissions.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0017] Figure 1 This is a schematic diagram of the overall structure of a centrifugal rotary cleaning device for a liquid crystal panel photomask according to the present invention.

[0018] Figure 2 This is a schematic diagram of the internal structure of a centrifugal rotary cleaning device for a liquid crystal panel photomask according to the present invention.

[0019] Figure 3This is a top view of a centrifugal rotary cleaning device for a liquid crystal panel photomask according to the present invention.

[0020] Figure 4 for Figure 3 Sectional view at point AA.

[0021] Legend:

[0022] 1. Photomask cleaning machine; 2. Filter box; 3. Air inlet pipe; 4. First connecting pipe; 5. Heating box; 6. Second connecting pipe; 7. Pump body; 8. Third connecting pipe; 9. First valve; 10. Metal wire mesh filter plate; 11. Synthetic fiber non-woven filter plate; 12. Activated carbon adsorption plate; 13. Return pipe; 14. Dehumidification box; 15. Dehumidification bag; 16. Fourth connecting pipe; 17. Second valve; 18. Support column; 19. Water spray plate; 20. Nozzle. Detailed Implementation

[0023] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0024] Reference Figure 1-4This utility model discloses a centrifugal rotary cleaning device for liquid crystal panel photomasks, comprising: a photomask cleaning machine 1, a filter box 2 fixedly connected to the upper surface of the photomask cleaning machine 1, a metal wire mesh filter plate 10 disposed on the inner surface of the filter box 2, the metal wire mesh filter plate 10 can intercept larger dust and impurities in the air, performing preliminary filtration of the gas, and a synthetic fiber non-woven fabric filter plate 11 disposed on the inner surface of the filter box 2, the synthetic fiber non-woven fabric filter plate 11 can further filter out small dust particles, providing cleaner gas for subsequent high-efficiency filtration and adsorption treatment. To reduce the burden on the activated carbon adsorption plate 12, the inner surface of the filter box 2 is provided with an activated carbon adsorption plate 12. The activated carbon adsorption plate 12 can adsorb organic pollutants, odors, and some residual fine dust particles in the gas. An air inlet pipe 3 is fixedly connected to the left surface of the filter box 2, and a second valve 17 is installed inside the air inlet pipe 3. A first connecting pipe 4 is fixedly connected to the right surface of the filter box 2, and a heating box 5 is fixedly connected to the right surface of the first connecting pipe 4. A heating component is installed inside the heating box 5. When the second valve 17 is opened, the gas passes through the air inlet pipe 3 and the metal wire mesh filter plate. 10. Synthetic fiber nonwoven filter plate, 11. Activated carbon adsorption plate, 12. First connecting pipe 4 enter the heating box 5. The heating component inside the heating box 5 is turned on to heat and dry the gas entering the heating box 5. The lower surface of the heating box 5 is fixedly connected to the photomask cleaning machine 1, increasing the stability of the structural connection. The front surface of the heating box 5 is fixedly connected to the second connecting pipe 6. The front surface of the second connecting pipe 6 is fixedly connected to the pump body 7. The lower surface of the pump body 7 is fixedly connected to the photomask cleaning machine 1. The left surface of the pump body 7 is fixedly connected to the third connecting pipe 8. The inside of the connector 8 is equipped with a first valve 9, and the side surface of the third connecting pipe 8 is fixedly connected to the photomask cleaning machine 1. After the centrifugal cleaning of the LCD panel photomask is completed, the nozzle 20 is closed. The LCD panel photomask continues to rotate under the action of the rotating unit. The first valve 9 is opened and the pump body 7 is started. The heated and dried gas in the heating box 5 enters the photomask cleaning machine 1 through the second connecting pipe 6, the pump body 7, and the third connecting pipe 8. This allows the hot air to come into contact with the surface of the LCD panel photomask, accelerates the evaporation rate of moisture on the photomask surface, effectively reduces moisture residue, and thus improves the drying speed.

[0025] A dehumidification chamber 14 is fixedly connected to the upper surface of the photomask cleaning machine 1. A return pipe 13 is fixedly connected to the right surface of the dehumidification chamber 14. The side surface of the return pipe 13 is fixedly connected to the photomask cleaning machine 1. A dehumidification bag 15 is provided on the inner surface of the dehumidification chamber 14. A fourth connecting pipe 16 is fixedly connected to the upper surface of the dehumidification chamber 14. The end of the fourth connecting pipe 16 away from the dehumidification chamber 14 is fixedly connected to the heating box 5. After use, the gas in the photomask cleaning machine 1 is discharged through the return pipe 13 and enters the dehumidification chamber 14. The dehumidification bag 15 in the dehumidification chamber 14 removes moisture from the gas. The adsorbed gas is re-entered into the heating box 5 for continued use, realizing gas recycling and avoiding energy waste and environmental impact caused by direct emission. It also ensures the relative stability of the gas volume in the device, which helps maintain the pressure balance of the entire system. The photomask cleaning machine 1 is equipped with a support column 18. A water spray plate 19 is fixedly connected to the upper surface of the support column 18, and a nozzle 20 is fixedly connected to the lower surface of the water spray plate 19. There are multiple nozzles 20, which spray water onto the LCD panel photomask.

[0026] Working principle: Open the second valve 17, and the gas passes through the inlet pipe 3, metal wire mesh filter plate 10, synthetic fiber non-woven fabric filter plate 11, activated carbon adsorption plate 12, and the first connecting pipe 4 before entering the heating chamber 5. Turn on the heating component inside the heating chamber 5 to heat the gas. After the centrifugal cleaning of the LCD panel photomask is completed, close the nozzle 20. The LCD panel photomask continues to rotate under the action of the rotating unit. Open the first valve 9 and start the pump body 7. The heated and dried gas in the heating chamber 5 enters the photomask cleaning machine 1 through the second connecting pipe 6, the pump body 7, and the third connecting pipe 8, which allows the gas to... Hot air comes into contact with the surface of the LCD panel photomask, accelerating the evaporation of moisture on the photomask surface. After use, the gas in the photomask cleaning machine 1 is discharged through the return pipe 13 into the dehumidification chamber 14. The dehumidification pack 15 in the dehumidification chamber 14 adsorbs the moisture in the gas. The adsorbed gas re-enters the heating chamber 5 for continued use. After centrifugal cleaning of the LCD panel photomask, this device allows hot air to come into contact with the surface of the LCD panel photomask, accelerating the evaporation of moisture on the photomask surface, effectively reducing moisture residue, thereby improving the drying speed. It also enables the recycling of gas, avoiding energy waste and environmental impact caused by direct emissions.

[0027] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A centrifugal rotary cleaning device for liquid crystal panel photomasks, comprising: A photomask cleaning machine (1) is characterized in that a filter box (2) is fixedly connected to the upper surface of the photomask cleaning machine (1), an air inlet pipe (3) is fixedly connected to the left surface of the filter box (2), a first connecting pipe (4) is fixedly connected to the right surface of the filter box (2), a heating box (5) is fixedly connected to the right surface of the first connecting pipe (4), a second connecting pipe (6) is fixedly connected to the front surface of the heating box (5), a pump body (7) is fixedly connected to the front surface of the second connecting pipe (6), a third connecting pipe (8) is fixedly connected to the left surface of the pump body (7), and the side surface of the third connecting pipe (8) is fixed to the photomask cleaning machine (1). The filter box (2) is provided with a metal wire mesh filter plate (10) on its inner surface, a synthetic fiber non-woven fabric filter plate (11) on its inner surface, an activated carbon adsorption plate (12) on its inner surface, a dehumidification box (14) fixedly connected to the upper surface of the photomask cleaning machine (1), a return pipe (13) fixedly connected to the right surface of the dehumidification box (14), a side surface of the return pipe (13) fixedly connected to the photomask cleaning machine (1), a dehumidification bag (15) on the inner surface of the dehumidification box (14), and a fourth connecting pipe (16) fixedly connected to the upper surface of the dehumidification box (14).

2. The centrifugal rotary cleaning device for liquid crystal panel photomasks according to claim 1, characterized in that, The lower surface of the heating box (5) is fixedly connected to the photomask cleaning machine (1), and the lower surface of the pump body (7) is fixedly connected to the photomask cleaning machine (1).

3. The centrifugal rotary cleaning device for liquid crystal panel photomasks according to claim 1, characterized in that, The third connecting pipe (8) is provided with a first valve (9), and the air inlet pipe (3) is provided with a second valve (17).

4. The centrifugal rotary cleaning device for liquid crystal panel photomasks according to claim 1, characterized in that, The end of the fourth connecting pipe (16) away from the dehumidification box (14) is fixedly connected to the heating box (5).

5. The centrifugal rotary cleaning device for liquid crystal panel photomasks according to claim 1, characterized in that, The heating box (5) is equipped with a heating component inside.

6. The centrifugal rotary cleaning device for liquid crystal panel photomasks according to claim 1, characterized in that, The photomask cleaning machine (1) is equipped with a support column (18) inside, and a water spray plate (19) is fixedly connected to the upper surface of the support column (18).

7. A centrifugal rotary cleaning device for liquid crystal panel photomasks according to claim 6, characterized in that, The lower surface of the water spray plate (19) is fixedly connected with a nozzle (20), and there are multiple nozzles (20).

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