A target material cleaning tool applied to automatic production

Abstract

The utility model discloses a target material cleaning frock applied to automatic production belongs to target material cleaning equipment technical field, including frame structure and automatic cleaning fixture, automatic cleaning fixture sets up multiple, multiple automatic cleaning fixture is arranged on frame structure, and multiple automatic cleaning fixture fixes target material, and automatic cleaning fixture includes support plate, support station, guide plate, clamping block, fixed top pin, trigger spring, trigger lever support plate and support station fixed setting on frame structure, and guide plate fixed mounting is on support plate, and clamping block slidingly sets up on guide plate, and the lower part of clamping block is equipped with pin hole, and pin hole installs top pin spring and fixed top pin, and top pin spring promotes fixed top pin and moves to guide plate direction, and the through hole of being provided with on guide plate, and trigger lever and the through hole coaxial arrangement on guide plate, and trigger spring promotes trigger lever and moves down, and the scheme simple structure can satisfy the cleaning operation of target material.

Description

Technical Field

[0001] This utility model belongs to the technical field of target cleaning equipment, specifically a target cleaning fixture applied to automated production. Background Technology

[0002] Sputtering targets are core materials used in processes such as physical vapor deposition (PVD) and sputtering coating, and are widely used in semiconductors, display panels, photovoltaics, and other fields. These high-end fields have extremely stringent requirements for raw materials, which leads to extremely high requirements for precision, surface cleanliness, and consistency in the production process of sputtering targets.

[0003] In the semiconductor industry, cleanliness is paramount, reducing contamination from manual operations and improving production efficiency while lowering labor costs. Traditional cleaning methods, such as manual cleaning, suffer from high labor intensity, slow speed, low efficiency, and waste of cleaning agents. With the development of automation technology, automatic cleaning machines have emerged, significantly improving the cleaning efficiency of targets. However, in actual cleaning processes, the cleaning basket is prone to tipping over while waiting to be placed into the cleaning machine, damaging the target. Furthermore, while existing cleaning methods can achieve visually acceptable surface conditions, professional dust particle detection can still detect dust particles and impurities on the target surface, significantly impacting customer use. Therefore, researching and developing new cleaning technologies and equipment to improve the cleaning quality and efficiency of targets and reduce damage is of significant practical importance.

[0004] After processing, the target material needs to be thoroughly cleaned to remove oil, dust, and metal shavings. The cleaning fixtures must meet the following requirements:

[0005] 1. Compatibility and stability: The target material should be kept in a stable position during ultrasonic cleaning, spraying, soaking, and agitation to prevent collision damage during cleaning.

[0006] 2. Ensure cleanliness; the materials used for the tools must be corrosion-resistant and non-shedding to avoid secondary contamination.

[0007] 3. The structural design must avoid dead corners to ensure that the cleaning solution fully contacts the target surface, i.e., complete immersion. Secondly, to ensure the effectiveness of ultrasonic waves and spraying, most cleaning fixtures are designed with a support structure.

[0008] 4. The orientation of the workpiece: The orientation of the workpiece during cleaning also determines the cleaning effect. For example, products with grooves or small holes are usually placed at an angle so that contaminants can be removed easily.

[0009] In addition, for automated production of target materials, the cleaning fixtures need to be coordinated with the automated transmission system to achieve seamless connection between target material processing and cleaning. Utility Model Content

[0010] To address the problems existing in the background technology, this utility model provides a target cleaning fixture for automated production, including a frame structure and multiple automatic cleaning fixtures arranged on the frame structure to fix the target material. Each automatic cleaning fixture includes a support plate, a support platform, a guide plate, a locking block, a fixing pin, a trigger spring, and a trigger rod. The support plate and support platform are fixedly mounted on the frame structure. The guide plate is fixedly mounted on the support plate. The locking block is slidably mounted on the guide plate. A pin hole is provided at the lower part of the locking block, and a pin spring and a fixing pin are installed in the pin hole. The pin spring pushes the fixing pin to move towards the guide plate. A second through hole is provided on the guide plate, and a trigger rod that slides vertically is provided on the guide plate. The trigger rod is coaxial with the second through hole on the guide plate, and a trigger spring is sleeved on the trigger rod. The trigger spring pushes the trigger rod downward. The locking block slides to directly above the support platform to fix the target material. At this time, the fixing pin and the second through hole of the guide plate are on the same axis.

[0011] In some embodiments, a spring guide rod assembly is horizontally arranged on the guide plate along the sliding direction of the block, the right-angle plate is fixedly installed on the block, the block and the spring guide rod assembly are engaged with each other, and the spring guide rod assembly pushes the block to move away from the support platform.

[0012] In some embodiments, the guide plate has a concave cross-section, the card block has a convex cross-section, and the guide plate and the card block fit together.

[0013] In some embodiments, the frame structure includes a base plate, crossbeams, and columns, with the crossbeams and columns fixedly installed around the perimeter of the base plate to form a rectangular frame, and a plurality of the automatic cleaning fixtures fixedly installed on the base plate.

[0014] In some embodiments, an opening is provided on one side of the frame structure.

[0015] In some embodiments, one side of the card block has an angled structure.

[0016] In some embodiments, a support column is mounted on the upper part of the support platform.

[0017] In some embodiments, the card block is made of resin.

[0018] In some embodiments, the support column is made of resin.

[0019] A method for cleaning target assembly in automated production, wherein the target cleaning fixture includes the following steps:

[0020] S1: After machining, the target material is picked up by a robotic arm and placed on top of the support column. The frame structure with the target material is transported to the clamping station by a material conveying machine. The clamping station uses a proximity sensor to position the outer frame structure of the cleaning fixture.

[0021] S2: Push the locking block along the groove of the guide plate. When the pin hole on the fixed top pin and the locking block are concentric with the trigger rod, the fixed top pin extends into the second through hole of the guide plate by the pressure of the top pin spring, and the automatic cleaning fixture of the target material completes the locking action.

[0022] S3: After the four automated fixtures confirm that the tooling is in the clamping state through sensors, the cleaning tooling performs a flipping action to make the cleaning tooling stand upright, and then sends it into the cleaning machine.

[0023] S4: After cleaning, the cleaning fixture with the target material enters the flipping platform, is positioned by the proximity sensor, and is flipped again to rotate the cleaning fixture 90° so that the target material sputtering surface is facing upward.

[0024] S5: The cleaning fixture is positioned by the sensor. The unloading station lifts the trigger rod, which pushes the fixing pin above the pin hole of the guide plate. Under the action of the spring guide rod assembly, the block is pushed out along the groove of the guide plate away from the target material. The cleaning fixture is in a relaxed state. Then the mechanical structure removes the target material and enters the next process.

[0025] S6: The cleaning basket is now in a relaxed state. The cleaning equipment can be transferred to the machining unloading position using a transfer machine, and this process can be repeated.

[0026] The beneficial effects of this utility model are as follows:

[0027] This solution incorporates an automatic cleaning fixture. After the cleaning fixture is conveyed to the clamping station and positioned by a sensor, the target material needs to be clamped. The cylinder structure at the clamping station pushes the clamping block to move along the concave groove of the guide plate towards the target material. The convex structure at the bottom of the clamping block engages with the concave groove of the guide plate to ensure stable linear movement of the clamping block. The inclined surface of the clamping block contacts and gradually adheres to the flange of the target material. When the clamping block moves to the preset position, the top pin at the bottom of the clamping block, under the action of the top pin spring, extends into the second through hole of the guide plate to complete radial positioning and achieve secure clamping of the target material.

[0028] After the target material is cleaned, the fixture enters the unloading station and is positioned by a sensor. The cylinder at the unloading station lifts the trigger rod: the trigger rod moves upward, compressing the trigger spring, and at the same time, pushes the top pin out of the second through hole of the guide plate, releasing the radial positioning; under the rebound force of the spring guide rod assembly, the clamping block moves along the groove of the guide plate in the direction away from the target material, loosening the clamping of the target material; the mechanical claw can then remove the target material, completing the unloading, and the fixture returns to a relaxed state, waiting for the next cycle. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of the target cleaning fixture in this application;

[0030] Figure 2 This is a three-dimensional structural diagram of the frame structure in this application;

[0031] Figure 3 This is a three-dimensional structural diagram of the automatic cleaning fixture in this application;

[0032] Figure 4 This is a cross-sectional view of the automatic cleaning fixture in its working state in this application.

[0033] Figure 5 This is a cross-sectional view of the automatic cleaning fixture in its second working state in this application;

[0034] Figure 6 This is a side view of the automatic cleaning fixture in operation according to this application;

[0035] Figure 7 This is a schematic diagram of the target material in this application.

[0036] Structural diagram

[0037] in,

[0038] Frame structure 100, base plate 101, crossbeam 102, column 103, opening 104, automatic cleaning fixture 200, support plate 201, support platform 202, support column 203, locking block 204, spring guide rod assembly 205, right angle plate 206, guide plate 207, movable cover 2071, support rib plate 208, top pin spring 209, fixed top pin 210, trigger spring 211, trigger rod 212, limiting part 2121, target material 300, sputtering surface 301, back plate 302. Detailed Implementation

[0039] The present invention will be further described in detail below with reference to the accompanying drawings.

[0040] like Figure 1 The embodiment of this utility model shown provides a target cleaning fixture for automated production, comprising a frame structure 100 and automatic cleaning fixtures 200. The frame structure 100 is a cubic structure composed of a base plate 101, crossbeams 102, and columns 103. The positions and lengths of the columns 103 and crossbeams 102 can be designed according to the positioning requirements of the cleaning machine. Four automatic cleaning fixtures 200 are arranged circumferentially on the upper part of the base plate 101.

[0041] Furthermore, the base plate 101 of the frame structure 100 is hollowed out, which ensures that the target material exposes the area to be cleaned to the maximum extent during the cleaning process. The column 103 and the crossbeam 102 together form the outer contour of the frame structure 100. The length of the crossbeam 102 is used as the positioning direction one when the cleaning fixture is transported, and the length of the column 103 is used as the positioning direction two when the cleaning fixture is transported. It is cylindrical, which can reduce the friction caused by the movement of the cleaning fixture in direction one, and the cylindrical structure can ensure that there is not too much liquid residue on the cleaning fixture when it is immersed in the cleaning machine.

[0042] Furthermore, an opening 104 is provided on the top of the frame structure 100 to ensure that the path of the automated robotic arm is not obstructed when loading the target material.

[0043] Furthermore, the automatic cleaning fixture 200 comprises a support plate 201, a support platform 202, a support rib plate 208, a support column 203, a trigger spring 211, a trigger rod 212, a guide plate 207, a spring guide rod assembly 205, a right-angle plate 206, a locking block 204, a fixing pin 210, and a pin spring 209. The support plate 201 has mounting holes for fixing the automatic cleaning fixture 200 as a whole to the base plate 101 of the frame structure 100, and a second through hole in the middle for radial positioning of the trigger rod 212. The support platform 202 is mounted on the upper part of the support plate 201, and the support column 203 is mounted on the upper part of the support platform 202. The support column 203 is used for positioning the target material in direction two, and is made of resin to prevent scratching the target material. The support platform 202 is made of corrosion-resistant alloy material and is used to fix the support column 203, meeting certain mechanical strength requirements. Supporting ribs 208 are provided on both sides of the supporting plate 201. A guide plate 207 is installed on the upper part of the supporting ribs 208. The guide plate 207 has a U-shaped groove in the front-back direction for radial positioning of the locking block 204. The guide plate 207 has a second through hole in the vertical direction for radial positioning of the trigger rod 212. The spring guide rod assembly 205 is fixed to the two layers of the guide plate 207 by a right angle plate 206. The spring guide rod assemblies 205 on both sides are fixed to the top of the locking block 204 by the right angle plate 206 in the middle. One side of the locking block 204 has an angled structure, such as... Figure 5As shown, the beveled edge can fix the upper part of the target flange when clamped. The lower part of the clamping block 204 has a convex structure that fits into the groove of the guide plate 207, and the clamping block 204 can slide linearly along the groove direction of the guide plate 207. The lower part of the clamping block 204 has a pin hole, in which a top pin spring 209 and a fixing top pin 210 are installed. The clamping block 204 is made of resin to avoid scratching the target material due to the high hardness of the material. A trigger rod 212 is installed below the fixing top pin 210, and a trigger spring 211 is sleeved on the shoulder of the trigger rod 212. The trigger rod 212 has a shoulder designed in the middle, and the diameter of the shoulder is larger than the diameter of the trigger spring 211 and larger than the diameter of the first through hole of the base plate 101. The diameter of the trigger spring 211 is larger than the diameter of the pin hole of the clamping block 204. Furthermore, in order to protect the safety of the fixture, the length of the trigger rod 212 should not exceed the lower surface of the base plate 101.

[0044] In the above embodiment, a movable cover 2071 is provided at the lower end of the guide plate 207. The movable cover 2071 and the guide plate 207 form a movable cavity that can limit and accommodate the trigger rod 212. A limiting part 2121 is provided in the middle of the trigger rod 212. The limiting part 2121 is slidably disposed in the movable cavity. The upper side of the limiting part 2121 of the trigger rod 212 is embedded in the second through hole, and the lower side of the trigger rod 212 extends out of the movable cavity. When it is necessary to adjust the automatic cleaning clamp... When the fixture 200 is unlocked, the external drive component pushes the trigger rod 212 upward, and the trigger rod 212 pushes the fixed top pin 210 to slide upward and disengage from the second through hole on the guide plate 207. Then, the spring guide rod assembly 205 resets the locking block 204. The top pin spring 209 is set in the movable cavity. When the drive component completes the contact with the trigger rod 212 and retracts, the top pin spring 209 resets and pushes the trigger rod 212 downward to facilitate its use when the automatic cleaning fixture 200 is locked.

[0045] In the above embodiment, the spring guide rod assembly 205 includes a screw member and a spring member. The screw member is fixedly installed on the guide plate 207 and is horizontal to the guide plate 207. The right-angle plate 206 is slidably sleeved on the screw member. The spring member is sleeved on the screw member. One side of the spring member abuts against the right-angle plate 206, pushing the right-angle plate 206 to move away from the support column 203.

[0046] A method for assembling and cleaning a target cleaning fixture, comprising an outer frame structure 100 with four automatic clamps 200 installed inside. The fixture allows for automated connection between the machining and cleaning processes of the target material through simple mechanical actions. This process effectively protects the target material 300, preventing scratches during reuse. The target material consists of a sputtering surface 301 and a lower back plate 302, the diameter of which is larger than the diameter of the sputtering surface. The production steps are as follows:

[0047] S1: After machining, the target material 300 is picked up by the robotic arm and placed above the support column 203 of the cleaning basket. The basket with the target material is transported to the clamping station by the material conveying machinery. The clamping station uses a proximity sensor to position the outer frame structure 100 of the cleaning fixture.

[0048] S2: As Figure 5 As shown, the push block 204 is pushed along the groove of the guide plate 207. When the pin hole on the fixed top pin 210 and the pin hole on the block 204 are concentric with the trigger rod 212, the fixed top pin 210 is pushed into the second through hole of the guide plate 207 by the pressure of the top pin spring 209, and the target cleaning fixture completes the locking action.

[0049] S3: After the four automated clamps 200 confirm that the fixture is in the clamping state through sensors, the cleaning fixture performs a flipping action to make the cleaning fixture stand upright, and then sends it into the cleaning machine.

[0050] S4: After cleaning, the cleaning fixture with the target material enters the flipping platform, is positioned by the proximity sensor, and is flipped again to rotate the cleaning fixture 90° so that the target material sputtering surface 301 faces upward.

[0051] S5: The cleaning fixture is positioned by the sensor. The unloading station lifts the trigger rod 212. The trigger rod 212 pushes the fixing pin 210 above the pin hole of the guide plate 207. Under the action of the spring guide rod assembly 205, the locking block 204 is pushed out along the groove of the guide plate 207 away from the target material. The cleaning fixture is in a relaxed state. Then the mechanical structure removes the target material and enters the next process.

[0052] S6: The cleaning basket is now in a relaxed state. The cleaning equipment can be transferred to the machining unloading position using a transfer machine, and this process can be repeated.

Claims

1. A target cleaning fixture for automated production, comprising a frame structure (100) and multiple automatic cleaning fixtures (200), wherein the multiple automatic cleaning fixtures (200) are arranged on the frame structure (100) and the multiple automatic cleaning fixtures (200) fix the target material (300), characterized in that, The automatic cleaning fixture (200) includes a support plate (201), a support platform (202), a guide plate (207), a locking block (204), a fixing pin (210), a trigger spring (211), and a trigger rod (212). The support plate (201) and the support platform (202) are fixedly mounted on the frame structure (100). The guide plate (207) is fixedly mounted on the support plate (201). The locking block (204) is slidably mounted on the guide plate (207). A pin hole is provided at the lower part of the locking block (204), and a top pin spring (209) and a fixing pin (210) are installed in the pin hole. 10), the top pin spring (209) pushes the fixed top pin (210) to move toward the guide plate (207). The guide plate (207) is provided with a through first hole. The guide plate (207) is provided with a vertically sliding trigger rod (212). The trigger rod (212) is coaxially arranged with the first through hole on the guide plate (207). The trigger rod (212) is sleeved with a trigger spring (211). The trigger spring (211) pushes the trigger rod (212) to move downward. The locking block (204) slides to the top of the support platform (202) to fix the target material (300).

2. The target cleaning fixture for automated production according to claim 1, characterized in that, A spring guide rod assembly (205) is horizontally arranged on the guide plate (207) along the sliding direction of the locking block (204). A right-angle plate (206) is fixedly installed on the locking block (204). The locking block (204) and the spring guide rod assembly (205) fit together. The spring guide rod assembly (205) pushes the locking block (204) to move away from the support platform (202).

3. The target cleaning fixture for automated production according to claim 1, characterized in that, The guide plate (207) has a concave cross-section, and the locking block (204) has a convex cross-section. The guide plate (207) and the locking block (204) fit together.

4. The target cleaning fixture for automated production according to claim 1, characterized in that, The frame structure (100) includes a base plate (101), a crossbeam (102) and a column (103). The crossbeam (102) and the column (103) are fixedly installed around the base plate (101) to form a rectangular frame. A plurality of automatic cleaning fixtures (200) are fixedly installed on the base plate (101).

5. The target cleaning fixture for automated production according to claim 1, characterized in that, An opening (104) is provided on one side of the frame structure (100).

6. The target cleaning fixture for automated production according to claim 1, characterized in that, The card block (204) has an angled structure on one side.

7. The target cleaning fixture for automated production according to claim 1, characterized in that, A support column (203) is installed on the upper part of the support platform (202).

8. The target cleaning fixture for automated production according to claim 1, characterized in that, The card block (204) and the support column (203) are made of resin.

9. The target cleaning fixture for automated production according to claim 4, characterized in that, The base plate (101) has a second through hole in the middle.

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